• Title/Summary/Keyword: scanning microscopy

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Resolution in Carrier Profiling Semiconductors by Scanning Spreading Resistance Microscopy and Scanning Frequency Comb Microscopy

  • Hagmann, Mark J.;Mousa, Marwan S.;Yarotski, Dmitry A.
    • Applied Microscopy
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    • v.47 no.3
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    • pp.95-100
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    • 2017
  • High resolution measurements of the carrier profile in semiconductor devices is required as the semiconductor industry progresses from the 10-nm lithography node to 7-nm and beyond. We examine the factors which determine the resolution of the present method of scanning spreading resistance microscopy as well as such factors for the newer method of scanning frequency comb microscopy that is now under development. Also, for the first time, we consider the sensitivity of both methods to the location of heterogeneities in the semiconductor. In addition, mesoscopic effects on these measurements are considered for the first time. Two simple analytical models are extended to study the sensitivity to heterogeneities as well as mesoscopic effects.

Distribution Analysis of the Local Critical Temperature and Current Density in YBCO Coated Conductors using Low-temperature Scanning Laser and Hall Probe Microscopy (저온 주사 레이저 및 홀소자 현미경을 이용한 YBCO 초전도 선재의 국소적 임계 온도 및 전류 밀도 분포 분석)

  • Park, S.K.;Cho, B.R.;Park, H.Y.;Ri, H.C.
    • Progress in Superconductivity
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    • v.13 no.1
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    • pp.28-33
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    • 2011
  • Distribution of the local critical temperature and current density in YBCO coated conductors were analyzed using Low-temperature Scanning Laser and Hall Probe Microscopy (LTSLHPM). We prepared YBCO coated conductors of various bridge types to study the spatial distribution of the critical temperature and the current density in single and multi bridges. LTSLHPM system was modified for detailed linescan or two-dimensional scan both scanning laser and scanning Hall probe method simultaneously. We analyzed the local critical temperature of single and multi bridges from series of several linescans of scanning laser microscopy. We also investigated local current density and hysteresis curve of single bridge from experimental results of scanning Hall probe microscopy.

Applications of Scanning Electrochemical Microscopy

  • Bard, Allen J.;Fan, Fu-Ren F.
    • Analytical Science and Technology
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    • v.8 no.4
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    • pp.1069-1074
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    • 1995
  • The application of scanning electrochemical microscopy to the imaging of surfaces in water and air and to the study of the electrochemistry of single molecules is discussed.

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Analysis of the Local Properties in GdBCO and YBCO Coated Conductors using Low-temperature Scanning Laser and Hall Probe Microscopy (저온 주사 레이저 및 홀소자 현미경을 이용한 GdBCO와 YBCO 초전도 선재의 국소적 특성 분석)

  • Park, S.K.;Ri, H.C.
    • Progress in Superconductivity
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    • v.13 no.3
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    • pp.169-177
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    • 2012
  • Distribution of the local properties in GdBCO and YBCO coated conductors was investigated using Low-temperature Scanning Laser and Hall Probe Microscopy (LTSLHPM). We prepared GdBCO and YBCO coated conductors to study the spatial distribution of the current density in a single bridge. Inhomogeneity of the ${T_c}^{max}$ in the bridge was analyzed from experimental results of Scanning Laser Microscopy (SLM) near the superconducting transition. The local transport and screening current in the bridge were also investigated using Scanning Hall Probe Microscopy (SHPM). A series of line scans of SLM of the GdBCO and YBCO sample showed that lines with more inhomogeneous distributions of ${\delta}V$ had more inhomogeneous distributions of ${T_c}^{max}$. The defect of the superconducting layer of the GdBCO sample caused by damage to the substrate affected the current flow. And we could analyze the redistribution of the current density using SLM and SHPM.

High-speed Two-photon Laser Scanning Microscopy Imaging of in vivo Blood Cells in Rapid Circulation at Velocities of Up to 1.2 Millimeters per Second

  • Boutilier, Richard M.;Park, Jae Sung;Lee, Ho
    • Current Optics and Photonics
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    • v.2 no.6
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    • pp.595-605
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    • 2018
  • The two-photon process of microscopy provides good spatial resolution and optical sectioning ability when observing quasi-static endogenous fluorescent tissue within an in vivo animal model skin. In order to extend the use of such systems, we developed a two-photon laser scanning microscopy system capable of also capturing $512{\times}512$ pixel images at 90 frames per second. This was made possible by incorporating a 72 facet polygon mirror which was mounted on a 55 kRPM motor to enhance the fast-scan axis speed in the horizontal direction. Using the enhanced temporal resolution of our high-speed two-photon laser scanning microscope, we show that rapid processes, such as fluorescently labeled erythrocytes moving in mouse blood flow at up to 1.2 mm/s, can be achieved.

Reconstruction of Neural Circuits Using Serial Block-Face Scanning Electron Microscopy

  • Kim, Gyu Hyun;Lee, Sang-Hoon;Lee, Kea Joo
    • Applied Microscopy
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    • v.46 no.2
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    • pp.100-104
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    • 2016
  • Electron microscopy is currently the only available technique with a spatial resolution sufficient to identify fine neuronal processes and synaptic structures in densely packed neuropil. For large-scale volume reconstruction of neuronal connectivity, serial block-face scanning electron microscopy allows us to acquire thousands of serial images in an automated fashion and reconstruct neural circuits faster by reducing the alignment task. Here we introduce the whole reconstruction procedure of synaptic network in the rat hippocampal CA1 area and discuss technical issues to be resolved for improving image quality and segmentation. Compared to the serial section transmission electron microscopy, serial block-face scanning electron microscopy produced much reliable three-dimensional data sets and accelerated reconstruction by reducing the need of alignment and distortion adjustment. This approach will generate invaluable information on organizational features of our connectomes as well as diverse neurological disorders caused by synaptic impairments.

Scanning acoustic microscopy for material evaluation

  • Hyunung Yu
    • Applied Microscopy
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    • v.50
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    • pp.25.1-25.11
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    • 2020
  • Scanning acoustic microscopy (SAM) or Acoustic Micro Imaging (AMI) is a powerful, non-destructive technique that can detect hidden defects in elastic and biological samples as well as non-transparent hard materials. By monitoring the internal features of a sample in three-dimensional integration, this technique can efficiently find physical defects such as cracks, voids, and delamination with high sensitivity. In recent years, advanced techniques such as ultrasound impedance microscopy, ultrasound speed microscopy, and scanning acoustic gigahertz microscopy have been developed for applications in industries and in the medical field to provide additional information on the internal stress, viscoelastic, and anisotropic, or nonlinear properties. X-ray, magnetic resonance, and infrared techniques are the other competitive and widely used methods. However, they have their own advantages and limitations owing to their inherent properties such as different light sources and sensors. This paper provides an overview of the principle of SAM and presents a few results to demonstrate the applications of modern acoustic imaging technology. A variety of inspection modes, such as vertical, horizontal, and diagonal cross-sections have been presented by employing the focus pathway and image reconstruction algorithm. Images have been reconstructed from the reflected echoes resulting from the change in the acoustic impedance at the interface of the material layers or defects. The results described in this paper indicate that the novel acoustic technology can expand the scope of SAM as a versatile diagnostic tool requiring less time and having a high efficiency.

The development of scanning electron microscopy (전자현미경 개발)

  • Oh H. J.;Chang D. Y.;Yang H. N.;Kim D. H.;Park M, J.;Shim C. H.;Kim C. S.
    • Proceedings of the Korean Society of Machine Tool Engineers Conference
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    • 2005.05a
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    • pp.15-18
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    • 2005
  • We have designed and fabricated a thermal scanning electron microscopy. It includes an electron source, two condenser lenses, one objective lens, a scanning coil and a stigmator coil for focusing in column and also have a secondary electron detector for constructing the image in chamber with a high vacuum condition and control part for operating the SEM. Especially, in order for us to find out the optical characteristics, our attention and studies have been concentrated on the effects of two condenser lenses and one objective lens for high resolution with SEM. Finally, we developed a high resolution thermal scanning electron microscopy.

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Morphological Discretion of Basidiospores of the Puftball Mushroom Calostoma by Electron and Atomic Force Microscopy

  • Kim, Mi-Sun;Kim, Ki-Woo;Jung, Hack-Sung
    • Journal of Microbiology and Biotechnology
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    • v.17 no.10
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    • pp.1721-1726
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    • 2007
  • Comparative morphology among species of the genus Calostoma, including C. cinnabarina, C. ravenelii, and C. japonicum, was investigated by scanning electron microscopy and atomic force microscopy. Spore morphology of C. cinnabarina and C. ravenelii showed no dramatic differences by light microcopy and scanning electron microscopy. To differentiate these species, atomic force microscopy was employed. Quantitative analysis of the surface roughness of basidiospores revealed subtle differences in height fluctuation at the nanometer scale between the species of Calostoma. Basidiospores of C. cinnabarina had a relatively rougher surface than those of C. ravenelii at $2.0{\times}2.0\;{\mu}m^2$ scan areas.