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DC/RF Magnetron Sputtering deposition법에 의한 $TiSi_2$ 박막의 특성연구

  • Lee, Se-Jun;Kim, Du-Soo;Sung, Gyu-Seok;Jung, Woong;Kim, Deuk-Young;Hong, Jong-Sung
    • Proceedings of the Korean Vacuum Society Conference
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    • 1999.07a
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    • pp.163-163
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    • 1999
  • MOSFET, MESFET 그리고 MODFET는 Logic ULSIs, high speed ICs, RF MMICs 등에서 중요한 역할을 하고 있으며, 그것의 gate electrode, contact, interconnect 등의 물질로는 refractory metal을 이용한 CoSi2, MoSi2, TaSi2, PtSi2, TiSi2 등의 효과를 얻어내고 있다. 그중 TiSi2는 비저항이 가장 낮고, 열적 안정도가 좋으며 SAG process가 가능하므로 simpler alignment process, higher transconductance, lower source resistance 등의 장점을 동시에 만족시키고 있다. 최근 소자차원이 scale down 됨에 따라 TiSi2의 silicidation 과정에서 C49 TiSi2 phase(high resistivity, thermally unstable phase, larger grain size, base centered orthorhombic structure)의 출현과 그것을 제거하기 위한 노력이 큰 issue로 떠오르고 있다. 여러 연구 결과에 따르면 PAI(Pre-amorphization zimplantation), HTS(High Temperature Sputtering) process, Mo(Molybedenum) implasntation 등이 C49를 bypass시키고 C54 TiSi2 phase(lowest resistivity, thermally stable phase, smaller grain size, face centered orthorhombic structure)로의 transformation temperature를 줄일 수 있는 가장 효과적인 방법으로 제안되고 있지만, 아직 그 문제가 완전히 해결되지 않은 상태이며 C54 nucleation에 대한 physical mechanism을 밝히진 못하고 있다. 본 연구에서는 증착 시 기판온도의 변화(400~75$0^{\circ}C$)에 따라 silicon 위에 DC/RF magnetron sputtering 방식으로 Ti/Si film을 각각 제작하였다. 제작된 시료는 N2 분위기에서 30~120초 동안 500~85$0^{\circ}C$의 온도변화에 따라 RTA법으로 각각 one step annealing 하였다. 또한 Al을 cosputtering함으로써 Al impurity의 존재에 따른 영향을 동시에 고려해 보았다. 제작된 시료의 분석을 위해 phase transformation을 XRD로, microstructure를 TEM으로, surface topography는 SEM으로, surface microroughness는 AFM으로 측정하였으며 sheet resistance는 4-point probe로 측정하였다. 분석된 결과를 보면, 고온에서 제작된 박막에서의 C54 phase transformation temperature가 감소하는 것이 관측되었으며, Al impuritydmlwhswork 낮은온도에서의 C54 TiSi2 형성을 돕는다는 것을 알 수 있었다. 본 연구에서는 결론적으로, 고온에서 증착된 박막으로부터 열적으로 안정된 phase의 낮은 resistivity를 갖는 C54 TiSi2 형성을 보다 낮은 온도에서 one-step RTA를 통해 얻을 수 있다는 결과와 Al impurity가 존재함으로써 얻어지는 thermal budget의 효과, 그리고 그로부터 기대할 수 있는 여러 장점들을 보고하고자 한다.

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Model test to understand shape change of BRD (Bycatch Reduction Device) for demersal trawl of Argentina (유속에 따른 아르헨티나 저층트롤어구 혼획저감장치의 형상변화 모형실험)

  • CHA, Bong-Jin;ROTH, Ricardo;CHO, Sam-Kang
    • Journal of the Korean Society of Fisheries and Ocean Technology
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    • v.51 no.3
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    • pp.312-320
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    • 2015
  • The 1/5 scale-down model of the Bycatch Reduction Device (BRD) from an Argentinean demersal trawl was tested in a circulating water channel. The BRD is designed to help small Hake (merluza, merluccius hubbsi) to escape from a trawl. It is settled in front of a trawl codend, and is equipped with selection grids that help small fish to escape from the gear and guiding panels that help fish to meet with the grids. Bars of the grids are wires covered by the PVC and other parts of the BRD are made of net. When the velocity was less than 0.65 m/sec (2.81 Kont when translated to real towing speed) which is slow speed compared with real towing speed, position between an upper guiding panel and an upper selection grid were good to help small fish to escape. When the velocity was more than 0.8 m/sec (3.41 Knot when translated to real towing speed) which is similar to and faster than real towing speed, it was considered that small fish may have difficulties in escaping because the gap was not enough between an upper guiding panel and an upper selection grid. The lower selection grid was sat on the bottom of the tank without an angle due to the weight that it carries. Improvements were proposed to position the panels and the grids better.

A SEARCH FOR AGN INTRA-DAY VARIABILITY WITH KVN

  • LEE, TAESEOK;TRIPPE, SASCHA;OH, JUNGHWAN;BYUN, DO-YOUNG;SOHN, BONG-WON;LEE, SANG-SUNG
    • Journal of The Korean Astronomical Society
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    • v.48 no.5
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    • pp.313-323
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    • 2015
  • Active galactic nuclei (AGN) are known for irregular variability on all time scales, down to intra-day variability with relative variations of a few percent within minutes to hours. On such short timescales, unexplored territory, such as the possible existence of a shortest characteristic time scale of activity and the shape of the high frequency end of AGN power spectra, still exists. We present the results of AGN single-dish fast photometry performed with the Korean VLBI Network (KVN). Observations were done in a “anti-correlated” mode using two antennas, with always at least one antenna pointing at the target. This results in an effective time resolution of less than three minutes. We used all four KVN frequencies, 22, 43, 86, and 129 GHz, in order to trace spectral variability, if any. We were able to derive high-quality light curves for 3C 111, 3C 454.3, and BL Lacertae at 22 and 43 GHz, and for 3C 279 at 86 GHz, between May 2012 and April 2013. We performed a detailed statistical analysis in order to assess the levels of variability and the corresponding upper limits. We found upper limits on flux variability ranging from ~1.6% to ~7.6%. The upper limits on the derived brightness temperatures exceed the inverse Compton limit by three to six orders of magnitude. From our results, plus comparison with data obtained by the University of Michigan Radio Astronomy Observatory, we conclude that we have not detected source-intrinsic variability which would have to occur at sub-per cent levels.

Evaluation of Structural Performance of RC Beams Retrofitted Steel Fiber consequential Replacement of Recycled Coarse Aggregate and Ground Granulated Blast Furnace Slag (순환골재와 고로슬래그 미분말을 치환한 강섬유 보강 RC보의 구조성능 평가)

  • Ha, Gee-Joo;Yi, Dong-Ryul;Ha, Jae-Hoon
    • Journal of the Korea Concrete Institute
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    • v.25 no.5
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    • pp.477-484
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    • 2013
  • In this study, eleven reinforced concrete beams, ground granulated blast furnace slag, replacing recycled coarse aggregate (BRS series) and recycled coarse aggregate with steel fiber (BSRS series), and standard specimen (BSS) were constructed and tested under monotonic loading. Experimental programs were carried out to improve and evaluate the shear performance of such test specimens, such as the load-displacement, the failure mode and the maximum load carrying capacity. All the specimens were modeled in 1/2 scale-down size. Test results showed that test specimens (BSRS Series) was increased the compressive strength by 9%, the maximum load carrying capacity by 1~6% and the ductility capacity by 1.02~1.13 times in comparison with the standard specimen (BSS). And the specimens (BSRS Series) showed enough ductile behavior and stable flexural failure.

Design and Fabrication of 40 ㎓ MMIC Double Balanced Star Mixer using Novel Balun (새로운 발룬 회로를 이용한 40 ㎓ 대역 MMIC 이중 평형 Star 혼합기의 설계 및 제작)

  • 김선숙;이종환;염경환
    • The Journal of Korean Institute of Electromagnetic Engineering and Science
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    • v.15 no.3
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    • pp.258-264
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    • 2004
  • In this paper, MMIC double balanced star mixer for 40 ㎓ was implemented on GaAs substrate with backside vias. In the design of the MMIC mixer, the design of balun and diode was required. A novel balun structure using microstrip to CPS was presented. The 40 ㎓ balun was designed based on the design experience of the scale-down balun by 2 ㎓. The balun may be suitable for fabrication in MMIC process with backside via and can easily be applied for DBM(Double Balanced Mixer). A Schottky diode was designed and implemented using p-HEMT process considering the compatability with other high frequency MMIC's fabricated on p-HEMT base process. Finally, the double balanced star mixer was fabricated using the balun and the p=HEMP Schottky diode. The measured performance of mixer shows 30 ㏈ conversion loss at 18 ㏈m LO power. This insufficient performance is caused by the unwanted diode at AlGaAs junction in vertical structure of p-HEMT. If the p-HEMT's gate is recessed to AlGaAs layer, and so the diode is eliminated, the mixer's performances will be improved.

The Scanning Electron Microscopic study on the effect during subgingival calculus removal using Nd:YAG laser (치은연하치석제거술시 Nd : YAG 레이저를 이용한 효과에 관한 주사전자현미경적 연구)

  • Jeon, Yong-Seon;Choi, Byung-Son;Lee, Seok-Cho;Kim, Hyung-Seop
    • Journal of Periodontal and Implant Science
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    • v.27 no.2
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    • pp.411-424
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    • 1997
  • The purpose of this study was to evaluate in vitro the effects during subgingival calculus removal using Nd:YAG laser. The study group was consisted of 30 teeth with advanced periodontal disease extracted before the start of periodontal therapy. The specimens were divided into 8 different groups : 1) untreated control 2) scaling and root planing only 3) laser treated using 150mJ/pulse, 1sec, 5sec, contact mode 4) laser treated using 200mJ/pulse, 5sec, contact mode 5) laser treated using 150mJ/pulse, 1sec, non-contact mode 6) laser treated using 200mJ/pulse, 5sec, non-contact mode 7) laser treated using l5OmJ/pulse, 1sec, contact mode with water irrigation 8) laser treated using 200mJ/pulse, 5sec, contact mode with water irrigation. All specimens were prepared for evaluation by scanning electron microscopy(SEM). Specimens from Group 2 exhibited a smear layer of scale like texture with parallel instrument tracks resulting from curet use. Specimens treated by contact mode, Group 3 and 4 featured surface changes not observed· in controls such as charring, randomly distributed pitting and crater formation, and melting down of the tooth material and calculus. Specimens treated by noncontact mode, Group 5 and 6 featured similar surface changes observed in contact mode. However, the differences between contact and non-contact groups not significant. Specimens treated by contact mode with water irrigation, Group 7 and 8 featured slight surface change compared to other groups. The results suggested that Nd: YAG laser did not completely remove the subgingival calculus but was possible the application as adjunctive method.

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Effect of plate properties on shear strength of bolt group in single plate connection

  • Ashakul, Aphinat;Khampa, Kriangkrai
    • Steel and Composite Structures
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    • v.16 no.6
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    • pp.611-637
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    • 2014
  • A single plate shear connection, or shear tab, is a very popular shear connection due to its merit in ease of construction and material economy. However, problems in understanding the connection behavior, both in terms of strength and ductility, have been well-documented. Suggestions or design model for single plate connections in AISC Design Manual have been altered several times, with the latest edition settling down to giving designers pre-calculated design strength tables if the connection details agree with given configurations. Results from many full-scale tests and finite element models in the past suggest that shear strength of a bolt group in single plate shear connections might be affected by yield strength of plate material; therefore, this research was aimed to investigate and clarify effects of plate yield strength and thickness on shear strength of the bolt group in the connections, including the validity of using a plate thickness/bolt diameter ratio ($t_p/d_b$) in design, by using finite element models. More than 20 models have been created by using ABAQUS program with 19.0- and 22.2-mm A325N bolts and A36 and Gr.50 plates with various thicknesses. Results demonstrated that increase of plate thickness or plate yield strength, with the $t_p/d_b$ ratio remained intact, could significantly reduce shear strength of the bolt group in the connection as much as 15 percent. Results also confirmed that the $t_p/d_b$ ratio is a valid indicator to be used for guaranteeing strength sufficiency. Because the actual ratio recommended by AISC Design Manual is $t_p/d_b$ + 1.6 (mm) for connections with a number of bolts less than six and plate yield strength in construction is normally higher than the nominal value used in design, it is proposed that shear strength of a bolt group in single plate connections with a number of bolts equal or greater than seven be reduced by 15 percent and the $t_p/d_b$ ratio be limited to 0.500.

Experimental investigation of force-distribution in high-strength bolts in extended end-plate connections

  • Abdalla, K.M.;Abu-Farsakh, G.A.R.;Barakat, S.A.
    • Steel and Composite Structures
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    • v.7 no.2
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    • pp.87-103
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    • 2007
  • This paper presents some of the results from an experimental research project on the behavior of extended end-plate connections subjected to moment conducted at the Structural Laboratory of Jordan University of Science and Technology. Since the connection behavior affects the structural frame response, it must be included in the global analysis and design. In this study, the behavior of six full-scale stiffened and unstiffened cantilever connections of HEA- and IPE-sections has been investigated. Eight high strength bolts were used to connect the extended end-plate to the column flange in each case. Strain gauges were installed inside each of the top six bolts in order to obtain experimentally the actual tension force induced within each bolt. Then the connection behavior is characterized by the tension force in the bolt, extended end-plate behavior, moment-rotation relation, and beam and column strains. Some or all of these characteristics are used by many Standards; therefore, it is essential to predict the global behavior of column-beam connections by their geometrical and mechanical properties. The experimental test results are compared with two theoretical (equal distribution and linear distribution) approaches in order to assess the capabilities and accuracy of the theoretical models. A simple model of the joint is established and the essential parameters to predict its strength and deformational behavior are determined. The equal distribution method reasonably determined the tension forces in the upper two bolts while the linear distribution method underestimated them. The deformation behavior of the tested connections was characterized by separation of the column-flange from the extended end-plate almost down to the level of the upper two bolts of the lower group and below this level the two parts remained in full contact. The neutral axis of the deformed joint is reasonably assumed to pass very close to the line joining the upper two bolts of the lower group. Smooth monotonic moment-rotation relations for the all tested frames were observed.

FoxM1 as a Novel Therapeutic Target for Cancer Drug Therapy

  • Xu, Xin-Sen;Miao, Run-Chen;Wan, Yong;Zhang, Ling-Qiang;Qu, Kai;Liu, Chang
    • Asian Pacific Journal of Cancer Prevention
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    • v.16 no.1
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    • pp.23-29
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    • 2015
  • Background: Current cancer therapy mainly focuses on identifying novel targets crucial for tumorigenesis. The FoxM1 is of preference as an anticancer target, due to its significance in execution of mitosis, cell cycle progression, as well as other signal pathways leading to tumorigenesis. FoxM1 is partially regulated by oncoproteins or tumor suppressors, which are often mutated, lost, or overexpressed in human cancer. Since sustaining proliferating signaling is an important hallmark of cancer, FoxM1 is overexpressed in a series of human malignancies. Alarge-scale gene expression analysis also identified FoxM1 as a differentially-expressed gene in most solid tumors. Furthermore, overexpressed FoxM1 is correlated with the prognosis of cancer patients, as verified in a series of malignancies by Cox regression analysis. Thus, extensive studies have been conducted to explore the roles of FoxM1 in tumorigenesis, making it an attractive target for anticancer therapy. Several antitumor drugs have been reported to target or inhibit FoxM1 expression in different cancers, and down-regulation of FoxM1 also abrogates drug resistance in some cancer cell lines, highlighting a promising future for FoxM1 application in the clinic.

Clinical Review about Dysphagia associated with Acute Ischemic Stroke (급성 허혈성 뇌졸중에 수반된 연하장애에 관한 임상적 고찰)

  • 한명아;김동웅
    • The Journal of Korean Medicine
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    • v.22 no.3
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    • pp.42-50
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    • 2001
  • Objectives : Dysphagia is common and severe problems of acute stroke determining the prognosis of stroke only second to mental change, and results in secondary fatal complications such as aspiration pneumonia, malnutrition, dehydration, etc. Therefore, we were to investigate the clinical characteristics of dysphagia accompanied by acute ischemic stroke. Methods : We selected subjects through clinical notes retrospectively, whose main problems included dysphagia resulted from acute stroke within 72 hours from onset who were admitted to the Internal Medicine Department of Wonkwang Oriental Medicine Hospital from Jan. 2000 to Apr. 2001. We assessed the severity of dysphagia from admission to discharge using a staging method : stage 0 is normal without dysphagia, stage 1 is nearly normal except for intermittent dysphagia, stage 2 is compensated abnormal swallowing requiring adjusted diets or delayed feeding time, stage 3 is uncompensated abnormal swallowing resulted in weight loss down to 10% of initial and daily aspiration, coughing, and vomiting, stage 4 is uncompensated abnormal swallowing resulting in weight loss beyond 10% and recommended for non-oral feeding, and stage 5 is 100% non-oral feeding by L-tube, or gastrostomy or NPO state. Results : Dysphagia was improved statistically significantly from the mean stage of $3.6{\pm}0.29$ on admission to $1.88{\pm}0.32$ on discharge (P<0.05). On average $7.1{\pm}1.48$ days were required for improving more than one stage level. As patients were older and the stage of dysphagia was worse on admission, severity of dysphagia was more difficult to improve (correlation coefficiency was 0.55 and 0.77 respectively, P<0.05). Aspiration pneumonia was complicated in 13 patients of the total 25 at mean dysphagia stage of $3.36{\pm}0.37$. However, any specific values such as lesion size, lesion site, sex, age, past history and NIH Stroke Scale on admission did not affect it (P>0.05). Conclusion : Clinical course of dysphagia was determined about I week from the onset. Aspiration pneumonia was mainly complicated during oral feeding periods. If there were no improvement of dysphagia over 2-3 weeks, then non-oral feeding such as Levin tube or gastrostomy must be considered.

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