• Proceedings of the Korean Vacuum Society Conference
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• 2014.02a
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• pp.363-363
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• 2014

Ruthenium (Ru) has attractive material properties due to its promising characteristics such as a low resistivity ($7.1{\mu}{\Omega}{\cdot}cm$ in the bulk), a high work function of 4.7 eV, and feasibility for the dry etch process. These properties make Ru films appropriate for various applications in the state-of-art semiconductor device technologies. Thus, it has been widely investigated as an electrode for capacitor in the dynamic random access memory (DRAM), a metal gate for metal-oxide semiconductor field effect transistor (MOSFET), and a seed layer for Cu metallization. Due to the continuous shrinkage of microelectronic devices, better deposition processes for Ru thin films are critically required with excellent step coverages in high aspect ratio (AR) structures. In these respects, atomic layer deposition (ALD) is a viable solution for preparing Ru thin films because it enables atomic-scale control of the film thickness with excellent conformality. A recent investigation reported that the nucleation of ALD-Ru film was enhanced considerably by using a zero-valent metallorganic precursor, compared to the utilization of precursors with higher metal valences. In this study, we will present our research results on the synthesis and characterization of novel ruthenium complexes. The ruthenium compounds were easy synthesized by the reaction of ruthenium halide with appropriate organic ligands in protic solvent, and characterized by NMR, elemental analysis and thermogravimetric analysis. The molecular structures of the complexes were studied by single crystal diffraction. ALD of Ru film was demonstrated using the new Ru metallorganic precursor and O2 as the Ru source and reactant, respectively, at the deposition temperatures of $300-350^{\circ}C$. Self-limited reaction behavior was observed as increasing Ru precursor and O2 pulse time, suggesting that newly developed Ru precursor is applicable for ALD process. Detailed discussions on the chemical and structural properties of Ru thin films as well as its growth behavior using new Ru precursor will be also presented.

• Analytical Science and Technology
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• v.23 no.5
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• pp.498-504
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• 2010

It is very difficult to get stable ion peak intensity of ruthenium by thermal ionization mass spectrometry because of its high ionization potential and high volatility of its oxides which causes to lose much of ruthenium ions, so the intensity of the signal decrease quickly. Accordingly, a study was performed in oder to increase the ionization efficiency and to prevent sample losses due to volatilization and to check with isobaric effect by impurities in filament for the measurement of ruthenium isotopes. Both single filament and double filament were tested. The former was proved to be more efficient for the stable and strong intensity of signal and revealed less isobaric effect from the molybdenum (Mo) as a filament impurity. Also, when the temperature of filament increased too high, the isobaric effect from Mo greatly appeared. That is, Mo impurity from filament gave a serious effect for measuring the ruthenium isotopes. It was proved to be of importance that filament current should be slowly increased with time interval. Finally, ruthenium isotopes were accurately measured by correction with measuring $^{94}Mo/^{99}Ru$.

• Journal of the Korean Chemical Society
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• v.44 no.6
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• pp.526-532
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• 2000

Cation exchange separation and inductively coupled plasma atomic emission spectrometric(ICP-AES) determination of ruthenium in HCl solutions were studied to quantitatively determine ruthenium in spent nuclear fuels. Ruthenium-bearing samples were dissolved with the mixed acid solution(9 : 1 mole ratio, HCl-HNO$_3$) using an acid digestion bomb. Based on the absorption spectra and ion exchange behaviour of ruthenium in hydrochloric acid media, its possible chemical species were discussed. On a cation exchange column (0.7 ${\times}$ 8.0 cm) packed with AG 50W ${\times}$ 8(100~200 mesh) and equilibrated with 0.5 M HCl, ruthenium was eluated with 0.5 M HCl while uranium was retained on the column. The established separation method was applied to a simulated spent nuclear fuel and resulted in the recovery of 98.5% with a relative standard deviation of 0.7%.

• Bulletin of the Korean Chemical Society
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• v.31 no.3
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• pp.697-699
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• 2010

• Bulletin of the Korean Chemical Society
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• v.27 no.10
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• pp.1521-1522
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• 2006

• Proceedings of the Korean Vacuum Society Conference
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• 2012.02a
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• pp.269-269
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• 2012

수산화인회석(Hydroxyapatite)는 뼈와 이빨의 무기물 주성분으로서, 칼슘과 인산염으로 구성된다. 우리는 수산화인회석의 합성에 용융열 합성법(molten salt method), 수열 합성법(hydrothermal method), 용매열 합성법(solvothermal method)을 사용하였으며, pH 조절과 각기 다른 용매를 사용하여 다양한 형태의 수산화인회석을 합성하였다. TEM과 SEM을 이용하여 크기와 모양이 제어된 수산화인회석임을 확인할 수 있었다. 합성된 수산화인회석을 이용하여, 전이금속 Ruthenium cation을 Hydroxyapatite 표면에 ion-exchange 반응을 통하여 도입하였으며, ICP를 통하여 Ru 함양을 정량하였다. 합성된 Ruthenium Hydroxyapatite (Ru-HAP)를 이용하여 dimethylamine borane를 통한 수소 발생을 확인하였다.

• Bulletin of the Korean Chemical Society
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• v.25 no.3
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• pp.423-425
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• 2004

• Bulletin of the Korean Chemical Society
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• v.24 no.7
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• pp.1026-1028
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• 2003

• Bulletin of the Korean Chemical Society
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• v.25 no.10
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• pp.1471-1473
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• 2004

An efficient dynamic kinetic resolution of racemic ${\beta}$-hydroxyalkylferrocene and 1,1'-bis( ${\beta}$-hydroxyalkyl)-ferrocene derivatives was achieved using lipase/ruthenium-catalyzed transesterification in the presence of an acyl donor. The racemic ${\beta}$-hydroxyalkylferrocene derivatives were successfully transformed to the corresponding chiral acetates of high optical purities in high yields.

• Bulletin of the Korean Chemical Society
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• v.25 no.6
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• pp.931-933
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• 2004