• Transactions of the Korean Society for Noise and Vibration Engineering
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• v.21 no.8
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• pp.752-760
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• 2011

In tilting pad bearing design process, the selection of the proper configuration type of either a load-between-pad(LBP) or load-on-pad(LOP) as well as preload and pivot offset conditions is to be carefully considered. Also the bearing needs to be designed in order to be suited for the rotor-bearing system and operating condition. In this paper, it is observed that the dynamic characteristics in a five pad tilting pad bearing for the LBP and the LOP configurations are influenced by the variation of preload and pivot offset. In this context, rotor dynamic analysis of the 5 MW industrial gas turbine supported by the tilting pad bearing at the front and roller bearing at the rear is carried out based on the dynamic coefficients of the tilting pad bearing investigated. The result shows that two rigid body critical modes experience various changes according to the influence of the tilting pad bearing uniquely applied to one side of this machine. Mainly, the second critical speed, the rigid body mode of conical shape with high whirling in the tilting pad bearing, is significantly changed by preload and pivot offset regardless of the LBP and LOP configurations. And, the first critical mode, the rigid body mode of conical shape with high whirling in the roller bearing, is sensitively affected by preload applied to the LOP configuration and by its asymmetric dynamic properties.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2011.04a
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• pp.425-432
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• 2011

In tilting pad bearing design process, the selection of the proper configuration type of either a Load-Between-Pad (LBP) or Load-On-Pad (LOP) as well as preload and pivot offset conditions is to be carefully considered. Also the bearing needs to be designed in order to be suited for the rotor-bearing system and operating condition. In this paper, it is observed that the dynamic characteristics in a 5 pad tilting pad bearing for the LBP and the LOP configurations are influenced by the variation of preload and pivot offset. In this context, rotor dynamic analysis of the 5MW industrial gas turbine supported by the tilting pad bearing at the front and roller bearing at the rear is carried out based on the dynamic coefficients of the tilting pad bearing investigated. The result shows that two rigid body critical modes experience various changes according to the influence of the tilting pad bearing uniquely applied to one side of this machine. Mainly, the second critical speed, the rigid body mode of conical shape with high whirling in the tilting pad bearing, is significantly changed by preload and pivot offset regardless of the LBP and LOP configurations. And, the first critical mode, the rigid body mode of conical shape with high whirling in the roller bearing, is sensitively affected by preload applied to the LOP configuration and by the its asymmetric dynamic properties.

• Tribology and Lubricants
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• v.27 no.1
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• pp.19-24
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• 2011

Metallic sintered brake pads are often applied to mid/high speed train due to their high strength and thermal characteristics. Imbalance contact between discs and pads can greatly influence the life span, one sided wear, discs attack/crack and threat the safety of the train during operation. In this research, we analyzed pressure/temperature distribution between brake pads and disks. Analyzed data had been verified and modified to conduct further tests of flexible brake pads with small/full-scale dynamo test. Flexible brake pads were installed to high speed train to conduct further tests to identify the differences between rigid brake pads and flexible brake pads. In result, Flexible brake pads showed outstanding disk thermal stability, one sided wear, noise and wear rate than rigid brake pad.

• Proceedings of the KSR Conference
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• 2010.06a
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• pp.597-603
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• 2010

Metallic sintered brake pads are often applied to Mid/High Speed Train due to its high strength and thermal characteristics. Because of its imbalance contact between discs and pads can greatly influence the life span, one sided wear, discs attack/crack and threat the safety of the train during operation. In this research, we analyzed pressure/temperature distribution between brake pads and disks. Analyzed data had been verified and modified to conduct further tests of Flexible brake pads with small/full-scale dynamo test. Flexible brake pads were installed to TTX train to conduct further tests to identify the differences between Rigid brake pads and Flexible brake pads. In result, Flexible brake pads showed outstanding disk thermal stability, one sided wear, noise and life of pad than rigid brake pad.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2001.11b
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• pp.1026-1031
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• 2001

In this paper. the dynamic characteristics of a super high-speed tilting-pad air bearing(TPGB) used in a turbo expander with high expansion ratio are analyzed. The dynamic behavior and stability of a rotary system supported by two journal air bearings are investigated numerically. The transient response of the shaft is obtained by simultaneously solving the equation of motion of the shaft and the dynamic Reynolds equation. The stiffness and damping coefficients of the bearing are calculated from the loading coefficients of the bearing are calculated from the loading capacity. shaft velocity and displacement by using a curve fitting method. The natural frequencies of the 1st and 2nd rigid modes can be calculated from these coefficients. The theoretical method of a rigid rotor system is verified by experimentsut.

• Tribology and Lubricants
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• v.10 no.1
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• pp.35-45
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• 1994

The thermohydrodynamic analysis of tilting pad thrust bearing is studied with the consideration of elastic effect of pad. Reynolds equation, deflection equation and energy equation are solved simultaneously with the boundary conditions. Reynolds equation is modified as the approximate form. Pads are supported by the line pivot and the point pivot respectively. Pads are considered as the flat planes. Effects of pad thickness on the performance of thrust bearing are emphasized and the performances of rigid pad and elastic pad are compared. Effects of inlet temperature on performances of the bearing are compared. Dynamic characteristics of both pad supported by line and point pivot are compared.

• International Journal of Precision Engineering and Manufacturing
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• v.3 no.2
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• pp.87-94
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• 2002

This paper presents the synchronous vibration control of a rotor system using an Active Air Bearing(AAB). In order to suppress the synchronous vibration, it is necessary to actively control the air film pressure or the air film thickness. In this study, active pads are used to control the air film thickness. Active pads are supported by the pivots containing piezoelectric actuators and their radial positions can be actively controlled by applying voltage to the actuators. Disturbances and various kinds of external forces can cause the shaft vibration as well as the change of the air film thickness. The dynamic behaviors of a rotary system supported by two tilting-pad gas bearings and its active stabilization using the tilting-pads as actuators are investigated numerically. The PID controller is applied to the tilting-pad gas bearing system with three pads, two of which contain piezoelectric actuators. To test the validity of the theoretical method, the performance of this control method is evaluated through experiments. The experimental results show the effectiveness of the control system for suppressing the unbalanced response of the rigid modes.

• Transactions of the Korean Society for Noise and Vibration Engineering
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• v.23 no.8
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• pp.717-724
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• 2013

The present study provides the numerical results in association with caliper stiffness and friction curve. From the numerical results, it is concluded that the pad vibration modes with dominant displacement in rotation direction is sensitive in the flutter instability. Particularly, the pad rigid mode is shown to become the squeal mode when the caliper stiffness is introduced in brake squeal model. Therefore, the caliper contact stiffness between the pad and caliper is expected to contribute to the squeal modes of the brake pad.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2001.04a
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• pp.1117-1120
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• 2001

Chemical mechanical planarization(CMP) has emerged as the planarization technique of choice in both front-end and back-end integrated circuit manufacturing. Conventional CMP process utilize a polyurethane polishing pad and liquid chemical slurry containing abrasive particles. There have been serious problems in CMP in terms of repeatability and defects in patterned wafers. Since IBM's official announcement on Copper Dual Damascene(Cu2D) technology, the semiconductor world has been engaged in a Cu2D race. Today, even after~3years of extensive R&D work, the End-of-Line(EOL) yields are still too low to allow the transition of technology to manufacturing. One of the reasons behind this is the myriad of defects associated with Cu technology. Especially, dishing and erosion defects increase the resistance because they decrease the interconnection section area, and ultimately reduce the lifetime of the semiconductor. Methods to reduce dishing & erosion have recently been interface hardness of the pad, optimization of the pattern structure as dummy patterns. Dishing & erosion are initially generated an uneven pressure distribution in the materials. These defects are accelerated by free abrasive and chemical etching. Therefore, it is known that dishing & erosion can be reduced by minimizing the abrasive concentration. Minimizing the abrasive concentration by using Ce$O_2$ is the best solution for reducing dishing & erosion and for removal rate. This paper introduce dishing & erosion generating mechanism and a method for developing a semi-rigid abrasive pad to minimize dishing & erosion during CMP.

• Journal of the Korean Society for Precision Engineering
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• v.18 no.12
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• pp.192-199
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• 2001

Chemical mechanical planarization (CMP) has emerged as the planarization technique of choice in both front-end and back-end integrated circuit manufacturing. Conventional CMP process utilize a polyurethane polishing pad and liquid chemical slurry containing abrasive particles. There hale been serious problems in CMP in terms of repeatability and deflects in patterned wafers. Especial1y, dishing and erosion defects increase the resistance because they decrease the interconnection section area, and ultimately reduce the lifetime of the semiconductor. Methods to reduce dishing & erosion have recently been interface hardness of the pad, optimization of the pattern structure as dummy patterns. Dishing & erosion are initially generated an uneven pressure distribution in the materials. These defects are accelerated by free abrasives and chemical etching. Therefore, it is known that dishing & erosion can be reduced by minimizing the abrasive concentration. Minimizing the abrasive concentration by using CeO$_2$is the best solution for reducing dishing & erosion and for removal rate. This paper introduce dishing & erosion generating mechanism and a method fur developing a semi-rigid abrasive pad to minimize dishing & erosion during CMP.