• Title/Summary/Keyword: reused material

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Characteristics of 2-Step CMP (Chemical Mechanical Polishing) Process using Reused Slurry (재활용 슬러리를 사용한 2단계 CMP 특성)

  • Lee, Kyoung-Jin;Seo, Yong-Jin;Choi, Woon-Shik;Kim, Ki-Wook;Kim, Sang-Yong;Lee, Woo-Sun
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2002.11a
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    • pp.39-42
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    • 2002
  • Recently, CMP (chemical mechanical polishing) technology has been widely used for global planarization of multi-level interconnection for ULSI applications. However, COO (cost of ownership) and COC (cost of consumables) were relatively increased because of expensive slurry. In this paper, we have studied the possibility of recycle of reused silica slurry in order to reduce the costs of CMP slurry. The post-CMP thickness and within-wafer non-uniformity(WIWNU) were measured as a function of different slurry composition. As a experimental result, the performance of reused slurry with annealed silica abrasive of 2 wt% contents was showed high removal rate and low non-uniformity. Therefore, we propose two-step CMP process as follows In the first-step CMP, we can polish the thick and rough film surface using remaked slurry, and then, in the second-step CMP, we can polish the thin film and fine pattern using original slurry. In summary, we can expect the saving of high costs of slurry.

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Case Study on Sustainable office space of the LEED Green Building in the United States - Focused on the Materials and Resources of Indoor Evaluation Factors - (미국 내 LEED 그린빌딩의 지속가능한 업무공간 사례 연구 - 실내 평가요소 중 재료 및 자원을 중심으로 -)

  • Ha, Sook-Nyung;Han, Young-Ho
    • Korean Institute of Interior Design Journal
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    • v.22 no.2
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    • pp.176-185
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    • 2013
  • (Background)In modern industrial society, the design industry failed to observe the law of nature, destructing it. Regardless its intention, the design industry destructed the environment so that it can't maintain the future life because of waste and disaster. For the purpose, it is important to adopt the technology to reuse the waste resource generated by building or minimize the damage to environment for the resource that can't be recycled. (Methods)On the assumption that the material and resource can be an alternative plan for the design that can make environment be sustained, the study analyzed materials and resources out of superior office space of USA, which were selected by LEED Green Building Rating System. (Results)The analysis result revealed that all cases reused main structural part of existing building and indoor and various materials were reused or recycled. Especially, the materials without or with low amount of VOCs and formaldehyde were used. In order to reduce construction waste, the finish of existing building was exposed as it was, 50% of reused materials were used or disassemblable materials were used. When regional materials are used, there is an advantage to reduce transportation cost and recycle the materials rapidly. Lastly, the environment-friendly certified by FSC was used in all cases. (Conclusion)After all, the material is one of the space design strategies sensitive to environment so it is important to select good material. Harmless, environment-friendly materials applied to sustainable office space contribute to the creation of healthy environment. In addition, the use of recycled materials and reused materials to minimize waste is also essential factor for creating sustainable space.

Characteristics of 2-Step CMP (Chemical Mechanical Polishing) Process using Reused Slurry by Adding of Silica Abrasives (실리카 연마제가 첨가된 재활용 슬러리를 사용한 2단계 CMP 특성)

  • 서용진;이경진;최운식;김상용;박진성;이우선
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.16 no.9
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    • pp.759-764
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    • 2003
  • Recently, CMP (chemical mechanical polishing) technology has been widely used for global planarization of multi-level interconnection for ULSI applications. However, COO (cost of ownership) and COC (cost of consumables) were relatively increased because of expensive slurry. In this paper, we have studied the possibility of recycle of roused silica slurry in order to reduce the costs of CMP slurry. The post-CMP thickness and within-wafer non-uniformity (WIWNU) wore measured as a function of different slurry composition. As an experimental result, the performance of reused slurry with annealed silica abrasive of 2 wt% contents was showed high removal rate and low non-uniformity. Therefore, we propose two-step CMP process as follows , In tile first-step CMP, we can polish the thick and rough film surface using remaked slurry, and then, in the second-step CMP, we can polish the thin film and fine pattern using original slurry. In summary, we can expect the saying of high costs of slurry.

Mechanical Properties of Zirconia Reinforced Glass-Ceramic (지르코니아 강화형 Glass-Ceramic의 기계적 성질)

  • Park, Eun-Eui;Dong, Jin-Keun;Lee, Hae-Hyoung;Song, Ki-Chang;Oh, Sang-Chun
    • Journal of Dental Rehabilitation and Applied Science
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    • v.17 no.3
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    • pp.199-204
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    • 2001
  • This study was to investigate the reused possibility of zirconia reinforced glass-ceramic(IPS Empress Cosmo ceramic) with sprue button in the flexure strength and fracture toughness. 40 disk-shaped ceramic specimens (20 specimens: as-pressed material; 20 specimens: reused material) with approximately 1.7 mm thickness and 15 mm diameter were prepared by "lost wax" technique. The remnants(sprue buttons) were used for repressing. The surface treatments for the discs were gradually abraded with 320, 800, 1200, and 2000 grit SiC sandpaper. The specimens were evaluated their flexure strength with the biaxial flexure jig(ball-on-three balls) and their fracture toughness with Vickers Indentation-microfracture test. The Weibull moduli were calculated for biaxial flexural strength. The mean flexure strength and fracture toughness of each group were $122.2{\pm}18.3MPa$, $1.00{\pm}0.09MPa{\cdot}m^{0.5}$ (as-pressed ceramics), and $122.2{\pm}20.3MPa$, $1.01{\pm}0.10MPa{\cdot}m^{0.5}$ (reused ceramics). There were no significant differences in the strength and the fracture toughness between the as-pressed and the reused IPS Empress Cosmo ceramic (P>0.05). This implied zirconia reinforced glass-ceramic(IPS Empress Cosmo ceramic) could be used one more time by reusing of sprue button in the flexure strength and fracture toughness.

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A Study on the recycle of CMP Slurry Abrasives (CMP 슬러리 연마제의 재활용에 대한 연구)

  • Lee, Kyoung-Jin;Kim, Gi-Uk;Park, Sung-Woo;Choi, Woon-Shik;Seo, Yong-Jin
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2003.05d
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    • pp.109-112
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    • 2003
  • Recently, CMP (Chemical mechanical polishing) technology has been widely used for global planarization of multi-level interconnection for ULSI applications. However, COO (cost of ownership) and COC (cost of consumables) were relatively increased because of expensive slurry. In this paper, we have studied the possibility of recycle of reused silica slurry in order to reduce the costs of CMP slurry. Also, we have collected the silica abrasive powders by filtering after subsequent CMP process for the purpose of abrasive particle recycling. And then, we annealed the collected abrasive powders to promote the mechanical strength of reduced abrasion force. Finally, we compared the CMP characteristics between self-developed KOH-based silica abrasive slurry and original slurry. As our experimental results, we obtained the comparable removal rate and good planarity with commercial products. Consequently, we can expect the saving of high cost slurry.

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THE PHYSICAL PROPERTIES OF REUSED IPS EMPRESS CERAMIC PART IV : HARDNESS AND FRACTURE TOUGHNESS (반복 사용된 IPS Empress ceramic의 물리적 성질에 관한 연구 Part IV : 경도 및 파괴인성에 관한 연구)

  • Jin Tai-Ho
    • The Journal of Korean Academy of Prosthodontics
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    • v.41 no.4
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    • pp.532-537
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    • 2003
  • Statement of the problem : IPS Empress ceramic has been used as one of a esthetic restorative material since it's development, but the broad application of IPS Empress ceramic to clinical prosthodontic field has been limited by its high material cost. Purpose : This study was investigated to evaluate the hardness and fracture toughness after recycling of the IPS Empress ceramic. Material and methods : Reused specimens of IPS Empress were fabricated with repeated pressing. The hardness(Vickers hardness) and fracture toughness of 1st, 2nd and 3rd pressed specimens were measured with Digital Micro Hardness Tester(Model MXT70, Matsuzawa Seiki Co., Ltd, Tokyo, Japan). The obtained data were analyzed using SPSS(Ver 9.5). Result : The mean value of the hardness in the 1st, 2nd and 3rd pressed Empress were $6.23{\pm}0.48MPa,\;5.50{\pm}0.25MPa$, and $5.70{\pm}0.42MPa$. The hardness of the 1st pressing ceramic was higher than those or the 2nd and 3rd pressed ceramics(P<0.05). Hardness of the 3rd pressed ceramic was greater than that of the 2nd pressed ceramic. but there was no significant difference of hardness between those two(P>0.05). The mean value of the fracture toughness was $1.71{\pm}0.16MPam^{1/2}$ in 1st pressed ceramic, $1.78{\pm}0.10MPam^{1/2}$ in 2nd pressed and $1.73{\pm}0.14MPam^{1/2}$ in 3rd pressed IPS ceramic. Fracture toughness of the 2nd pressed ceramic was the highest and that of the 1st pressed ceramic was the lowest. There was no significant difference of fracture toughness among them(P>0.05). Conclusion : Hardness of the 2nd and 3rd pressed IPS Empress ceramics were lesser than that of 1st pressed IPS Empress ceramic(P<0.05), but there was no significant changes of fracture toughness among them(P>0.05).

A study on the recycle of reused slurry abrasives (CMP 폐슬러리내의 필터링된 연마 입자 재활용에 관한 연구)

  • Kim, Gi-Uk;Seo, Yong-Jin;Park, Sung-Woo;Jeong, So-Young;Kim, Chul-Bok
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2003.07a
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    • pp.50-53
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    • 2003
  • CMP (chemical mechanical polishing) process remained to solve several problems in deep sub-micron integrated circuit manufacturing process. especially consumables (polishing pad, backing film, slurry, pad conditioner), one of the most important components in the CMP system is the slurry. Among the composition of slurries (buffer solution, bulk solution, abrasive particle, oxidizer, inhibitor, suspension, antifoaming agent, dispersion agent), the abrasive particles are important in determining polish rate and planarization ability of a CMP process. However, the cost of abrasives is still very high. So, in order to reduce the high COO (cost of ownership) and COC (cost of consumables) in this paper, we have collected the silica abrasive powders by filtering after subsequent CMP process for the purpose of abrasive particle recycling. And then, we have studied the possibility of recycle of reused silica abrasive through the analysis of particle size and hardness. Also, we annealed the collected abrasive powders to promote the mechanical strength of reduced abrasion force. Finally, we compared the CMP characteristics between self-developed KOH-based silica abrasive slurry and original slurry. As our experimental results, we obtained the comparable removal rate and good planarity with commercial products. Consequently, we can expect the saving of high cost slurry.

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A study on the design of T-shirt with fiber product recycling for using as learning material (섬유제품 재활용을 이용한 교육용 티셔츠 디자인 연구)

  • Lee, Seung Hee;Ha, Seung Yeon
    • Journal of the Korea Fashion and Costume Design Association
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    • v.21 no.1
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    • pp.1-15
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    • 2019
  • The purpose of this study is to develop ICT utilization learning materials for a chapter titled 'Environment Friendly Clothing and Reform of Clothing' in technology and home economics textbooks for Year 2 students in middle school. The research methods were selected from ten types of junior high school technology textbooks, which were revised in 2009, and mainly focused on items such as jeans, shirts, shirts, cardigans, and skirts, Using selected textiles and basic design t-shirts, five works were made using structural and decorative details. The results of this study are as follows. First, textile products shown in the chapter 'Environment Friendly Clothing and Reform of Clothing' are most commonly worn and found in daily life. With regard to a reuse method, structural changes to clothing are proposed. For example, cases relating to the changing of a neckline or the use of a shirt or a sleeve are presented. There are some decoration methods adapted in reuse; using ornaments, such as spangles and emblems, patchwork, shirring and the constucting of collages. Second, following the plan, 5 items are designed with T-shirts, shirts, cardigans and skirts. For the T-shirt design, other fabrics including organza and neoplan are used from design point of view, in addition to reused textile products. Detailed structural changes of necklines, sleeves and collars and detailed and the ornamentation method including shirring, smoking, patchwork and collages are used. Third, this study proposes 6 categories (profile, design planning, diagram, reused textile product, production method and order and pictures of T-shirts developed) under the title of 'T-shirt Made Out of Disposed Clothing', selecting a blog as active teaching and learning material as a part of the ICT utilization in educational settings.

Properties of the material on stainless steel propeller shaft with the weld working (스테인리스강 프로펠러축의 가공에 따른 재질특성에 관한 연구)

  • Son, Yeong-Tae;Choung, Kwang-Gyo;Lee, Myeong-Hoon
    • Journal of Korea Ship Safrty Technology Authority
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    • s.24
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    • pp.4-20
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    • 2008
  • Stainless steel 304 or stainless steel 630 types using propeller shaft of a small ship or a FRP fishing boat generally restrain localization corrosion and abrasion damage occurrence to shaft bearing or grand packing contact. In general, the residual stress which remains after welding or heat treatment in material can cause the stress concentration or localization corrosion. In case of small ship, stainless steel such as STS304 has long been used for propeller shaft. Meanwhile, crew of small ship tend to reuse damaged propeller shaft after repair by welding and performing heat treatment to save cost. However, it was found that reused propeller shaft by repair often caused troubles in ship's operation. In this study, the basic guideline for maintenance and treatment of propeller shaft are investigated. From the results of investigation, remarkable deterioration of the material properties and corrosion resistance on the welded work part was observed.

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준설퇴적물 분류 및 오염물질의 물리화학적 전처리

  • 이성재;배범한;박규홍;강성원
    • Proceedings of the Korean Society of Soil and Groundwater Environment Conference
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    • 2002.04a
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    • pp.54-57
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    • 2002
  • Pretreatment technologies are defined as technologies that prepare or condition dredged material for subsequent, more rigorous treatment processes. The objectives of this study are to test the feasibility of treating dredged sediment using pretreatment process(hydrocyclone, sedimentation basin, and flotation), and to estimate design parameters for a pilot-plant design. The final goal of the project is to recycle the dredged sediment that is otherwise reused as construction materials.

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