• 제목/요약/키워드: required coefficient of friction

검색결과 78건 처리시간 0.03초

CMP 패드 컨디셔너의 제조공법에 따른 패드 컨디셔닝 특성 (The properties of pad conditioning according to manufacturing methods of CMP pad conditioner)

  • 강승구;송민석;지원호
    • 한국정밀공학회:학술대회논문집
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    • 한국정밀공학회 2005년도 추계학술대회 논문집
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    • pp.362-365
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    • 2005
  • Currently Chemical Mechanical Planarization (CMP) has become an essential step in the overall semiconductor wafer fabrication technology. Especially the CMP pad conditioner, one of the diamond tools, is required to have strong diamond retention. Strong cohesion between diamond grits and metal matrix prevents macro scratch on the wafer. If diamond retention is weak, the diamond will be pulled out of metal matrix. The pulled diamond grits are causative of macro scratch on wafer during CMP process. Firstly, some results will be reported of cohesion between diamond grits and metal matrix on the diamond tools prepared by three different manufacturing methods. A measuring instrument with sharp cemented carbide connected with a push-pull gauge was manufactured to measure the cohesion between diamond grits and metal matrix. The retention force of brazed diamond tool was stronger than the others. The retention force was also increased in proportion to the contact area of diamond grits and metal matrix. The brazed diamond tool has a strong chemical combination of the interlayer composed of chrome in metal matrix and carbon which enhance the interfacial cohesion strength between diamond grits and metal matrix. Secondly, we measured real-time data of the coefficient of friction and the pad wear rate by using CMP tester (CETR, CP-4). CMP pad conditioner samples were manufactured by brazed, electro-plated and sintered methods. The coefficient of friction and the pad wear rate were shown differently according to the arranged diamond patterns. Consequently, the coefficient of friction is increased according as the space between diamonds is increased or the concentration of diamonds is decreased. The pad wear rate is increased according as the degree of diamond protrusion is increased.

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노면 포장별 차량의 제동경과시간 및 마찰계수에 관한 실험적 연구 (The Experimental Study on the Transient Brake Time of Vehicles by Road Pavement and Friction Coefficient)

  • 임창식;최양원
    • 대한토목학회논문집
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    • 제30권6D호
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    • pp.587-597
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    • 2010
  • 교통사고가 발생하면 사고 당사자들은 민 형사적인 문제에서 자유롭지 못하기 때문에, 교통사고 조사자는 사고 상황을 정확하게 재현 또는 분석을 하여야 한다. 또한, 이러한 교통사고 발생과 관련한 요인에 대한 분석을 통해 얻어진 자료를 활용하여 교통사고 다발지역의 개선 및 보완작업을 시행하게 된다. 현재까지 알려진 바로는 수많은 교통사고, 교통시설물, 도로설계 등과 관련하여 가장 많은 영향을 미치는 요인은 차량의 속도와 가속능력, 제동능력 등이다. 이는 자동차의 성능과 노면의 마찰계수가 가장 밀접한 영향을 미치는 부분이다. 특히, 사고 순간의 속도의 추정은 교통사고처리특례법의 11개 주요항목인 과속과 관련하여 매우 중요한 사항이기에 정확성이 요구되는 부분이다. 하지만, 국내에서는 아직 이러한 부분에 대한 심도 있는 연구가 많이 진행되지 못하는 것이 현실이다. 이러한 현실을 반영하여 본 연구에서는 차량의 급제동에서 제동흔적이 발생되기 시작할 때까지의 시간인 제동경과시간을 정밀가속도계(Vericom VC2000PC)로 측정하여 제동경과시간과 노면의 마찰계수를 정확히 추정하였다. 실험결과를 분석하여, 여러 가지 특수 아스팔트 포장 및 미끄럼방지포장 종류에 따른 제동경과시간과 마찰계수를 계산하여 연구의 목적에 맞도록 기초자료를 제공하고자 하였다.

디더운동이 캡슐형 내시경의 마찰계수 감소에 미치는 영향 (Influence of Dither Motion on the Friction Coefficient of a Capsule-type Endoscope)

  • 홍예선;최일수;김병규
    • 한국정밀공학회지
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    • 제22권8호
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    • pp.57-63
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    • 2005
  • Development of a locomotive mechanism fer the capsule type endoscopes will largely enhance the ability to diagnose disease of digestive organs. In connection with it, most of researches have focused on an installable locomotive mechanism in the capsule. In this paper, it is introduced that the movement of a capsule type endoscope in digestive organ can be manipulated by magnetic force produced outside human body. Since the magnetic force is provided by permanent magnets, no additional power supply to the capsule is required. Using a robotic manipulator for locating the external magnet, the capsule motion control system can cover the whole human digestive organs. This study is particularly concentrated on dither motion effect to improve the mobility of capsule type endoscope. It was experimentally found out that the friction coefficient between the capsule and digestive organ can be remarkably reduced by superposing yawing or rolling dither motion on the translatory motion. In this paper, the experimental results obtained with the direction, amplitude and frequency of sinusoidal dither motion changed is reported.

토사 절토사면 안정성 영향인자의 민감도 분석 (Sensitivity Analyses of Influencing Factors on Stability in Soil Cut Slope)

  • 유남재;박병수;전상현;조한기
    • 산업기술연구
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    • 제26권B호
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    • pp.73-81
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    • 2006
  • A sensitivity analysis about effects of influencing factors on the stability of Soil cut slope was performed. Slope stability analyses were carried out under dry, rainy and seismic conditions. Dominant factors controlling the slope stability were chosen such as cohesion and internal friction angle, unit weight of soil, water table and seismic horizontal coefficient used for the slope stability during earthquake. Parametric stability analysis with those factors was performed for sensitivity analysis. As results of analyzing the sensitivity of factors under dry and rainy conditions, effects of cohesion, internal friction angle and unit weight of soil on the stability of slope are more critical in the dry condition than in the rainy condition. Cohesion and internal friction angle are more dominant factors influencing the slope stability irrespective of dry or rainy conditions than unit weight of soil and the horizontal seismic coefficient. The unit weight and the horizontal seismic coefficient affects crucially the stability according to conditions of slope formation and dry or rainy seasons. For the effect of horizontal seismic coefficient on stability of slope, safety factor of slope is not affected significantly by dry or rainy conditions. However, increase of the horizontal seismic coefficient under the rainy condition floes reduce the safety factor significantly rather than the dry condition. Therefore, it is needed that the location of the water table is assigned appropriately to satisfy the required safety factor of stability in the case of checking slope stability for the rainy and seismic conditions.

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Pattern 형상이 적용된 베어링 강(STB2)의 트라이볼러지 특성 (Tribology Characteristics of Bearing Steel (STB2) with Pattern Shape)

  • 송석웅;장태환;배문기;김태규
    • 열처리공학회지
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    • 제34권3호
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    • pp.130-136
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    • 2021
  • With the development of the industry, bearings that require higher durability and efficiency are required, and various methods to reduce friction and wear of bearings are being studied. In this study, a wear test was conducted for STB2, a bearing steel material, by machining a micro-line pattern on the race surface of the bearing by machining. The pattern pitch of the specimens was processed to 40㎛, 80㎛, and 150㎛, and the coefficient of friction characteristics were investigated for the unpatterned specimen and the specimen with a DLC thin film deposited on the surface. As a result of the wear test, the pattern pitch showed the smallest coefficient of friction at 40㎛, and it was confirmed that the smaller the pattern pitch, the better the tribology characteristics.

디더 운동이 캡슐형 내시경의 마찰계수 감소에 미치는 영향 (Influence of Dither Motion on the Friction Coefficient of a Capsule-type Endoscope)

  • 홍예선;최민준
    • 한국정밀공학회:학술대회논문집
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    • 한국정밀공학회 2005년도 춘계학술대회 논문집
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    • pp.1068-1073
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    • 2005
  • Development of a locomotive mechanism for the capsule type endoscopes will largely enhance the ability to diagnose disease of digestive organs. In connection with it, most of the researches have focused on an installable locomotive mechanism in the capsule. In this paper, it is introduced that the movement of a capsule type endoscope in digestive organ can be manipulated by magnetic force produced outside human body. Since the magnetic force is provided by permanent magnets, no additional power supply to the capsule is required. Using a robotic manipulator for locating the external magnet, the capsule motion control system can cover the whole human digestive organs. This study is particularly concentrated on dither motion effect to improve the mobility of capsule type endoscope. It was experimentally found out that the friction coefficient between the capsule and digestive organ can be remarkably reduced by superposing yawing or rolling dither motion on the translatory motion. In this paper, the experimental results obtained while the direction, amplitude and frequency of sinusoidal dither motion were changed are reported.

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폴리우레탄 바닥재에서 방향 전환 각도에 따른 하지 관절의 움직임과 마찰력에 관한 연구 (The Study of Joint Motion and Friction on the Floor of Poly Urethane for the Cutting Movement of Various Angles)

  • 문곤성;최지영
    • 한국운동역학회지
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    • 제25권3호
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    • pp.363-370
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    • 2015
  • Objective : The purpose of this study was to give the basic data for the cutting movement with the various angels on the poly urethane. Method : Ten healthy men voluntarily participated in this study. A three-dimensional motion analysis system (VICON) and force plates were used to analyze the movements of the joints for the lower extremities. For the statistical analysis the IBM SPSS 21.0 was used to perform repeated measured ANOVA and post-hoc comparison result was used to perform the Scheffe and the level of significance was set up at ${\alpha}=.05$. Results : There were significant differences for the time required for the increasing angles of the cutting movement(p<.05). In addition, there were significant differences for the maximum dorsiflexion, plantarflexion of ankle joint, maximum flexion of knee joint and hip joint with the increasing the angles of cutting movement(p<.05). Also, there were significant differences for the maximum adduction and abduction angle of the hip joint with the increasing of the angles of cutting movement. There was signigicant difference for the resultant utilized coefficient of friction(RuCOF) for the increasing angles of cutting movement(p<.05). Conclusion : There was a pattern to increase the coefficient friction with the angle of cutting direction. Also, it would be possible to use the poly urethane for the outdoor floor with the results of this study.

SiC 보강 A16061 복합재료의 마멸 및 마찰특성에 관한 연구 (Wear and Friction Characteristics of SiC Reinforced Aluminium 6061 Alloy Composites)

  • 권재도;안정주
    • 대한기계학회논문집
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    • 제19권9호
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    • pp.2122-2132
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    • 1995
  • There are some cases which require to grasp the abrasion resistance property in the fields of the high-technology to be required the high specific strength and modulus. In this study, wear test with the various test temperature and velocity were performed in the SiCw/A16061 composite and A16061 matrix using the wear test machine of the ring-on-disc type. As the results, the friction and wear properties by various test temperature and velocity were examined. The worn surface has observed by scanning electron microscope in order to examine the wear mechanism.

온도 조건에 따른 폴리머 소재의 트라이볼로지 특성 연구 (Effects of Temperature on Tribological Properties of Polymer Material)

  • 안치윤;김대은
    • Tribology and Lubricants
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    • 제39권6호
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    • pp.262-267
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    • 2023
  • Research to replace metal mechanical elements with polymer materials has recently accelerated. However, polymers exhibit less favorable mechanical properties than metal materials, and are often easily worn-out owing to frictional heat when their mechanical elements contact while in relative motion. Therefore, research on the polymer tribological properties is required to employ polymer materials in mechanical elements operating under harsh conditions. In this study, we examine the effect of mechanical part operating temperatures on the material friction and wear characteristics of polymer materials. We conduct ball-on-disk friction tests under dry conditions at various temperatures, using a metal ball with high hardness and a polymer as the counter surface. Each test is repeated at least three times to ensure the reliability of the test results. Before the friction test, we analyze the surface hardness and roughness of each polymer specimen; after the friction test, we use a three-dimensional confocal microscope to compare and analyze the polymer specimen wear characteristics. Based on this study, we systematically elucidate the polymer material tribological characteristics. This information should be useful for selecting and utilizing polymer materials at various temperatures.

마찰재 물성변화에 따른 마찰진자시스템을 적용한 LNG 탱크의 지진취약도 분석 (Seismic Fragility Analysis of a LNG Tank with Friction Pendulum System of Various Friction Coefficient)

  • 문지훈;김지수;이태형;한동석
    • 한국전산구조공학회논문집
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    • 제30권2호
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    • pp.95-102
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    • 2017
  • 이 논문에서는 LNG 탱크를 지진으로부터 격리시키는 면진장치의 일종인 마찰진자시스템(FPS)의 성능변화에 따른 구조물 응답 및 지진취약도를 분석하였다. 마찰진자시스템(FPS)에 사용되는 마찰재 시편을 PVDF와 $TiO_2$의 배합비율에 따라 제작하였다. 제작한 마찰재 시편의 물성을 면진받침에 적용하여 구조물의 가속도 응답 및 외조 콘크리트의 하부 모멘트에 대하여 분석하고 각각의 한계상태에 대해 지진취약도를 분석하였다. 구조물의 지진취약도 분석을 통한 최적의 배합비를 가지는 마찰재 선정을 위해 각 한계상태에 따른 지진취약도 곡선의 가중치 설정 후 조합이 필요한 것을 확인하였다. 이를 통하여 다양한 구조물에 적용되는 마찰진자시스템의 요구 성능을 만족하는 최적의 마찰재 선정이 가능할 것으로 기대된다.