• 한국공작기계학회:학술대회논문집
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• 한국공작기계학회 1997년도 추계학술대회 논문집
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• pp.31-36
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• 1997

Thermal expansion of the ball screw in semi-closed loop type CNC Lathe directly affects the position precision along the travel axis. In this paper, the thermal displacement of the ball screw is estimated by using macro variables. The estimated displacements of the ball screw are managed by calculating the interval of pitch error rate in the NC. The thermal behaviour of the ball screw of the CNC Lathe, under the constant operating conditions, was measured to examine the effectiveness of this compensation method. The results showed that thermal displacement of the ball screw could be maintained its accuracy better than 6${\mu}{\textrm}{m}$ while applying this method.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2002년도 춘계학술대회 논문집
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• pp.195-198
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• 2002

Demand for high precision measurement of large area is increasing in many industrial fields. White-light Scanning Interferometer(WSI) is a well-known method for 3D profile measurement. However WSI has some limitations in a measurement range because of the sensing mechanism. Therefore, in this paper we use a heterodyne laser interferometer to get over the limitations of a short measurement range in WSI, We suggest a new WSI system combined with heterodyne laser interferometer. This system is aimed at eliminating Abbe error with measuring the focus point directly. With the use of triggering functionality of WSI, we can use this system as a probe of a precision stage such as a probe of CMM. The suggested system gives a repeatability of 87 nm in the absolute distance measurement test under the laboratory environment.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2002년도 춘계학술대회 논문집
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• pp.424-427
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• 2002

Pneumatic control systems have the potential to provide high output power to weight and size ratios at a relatively low cost. However, they are mainly employed in open-loop control applications where positioning repeatability is not of great importance. This paper presents precision positioning control of pneumatic servo cylinder with on-off valve, Pneumatic low-friction cylinder with servo valve and DC servo motor under parameter variations. Basically positioning control uses PID controller, where needs a linearized model. A neural network is added to a PID controller to compensator nonlinearity of the system and an influence of friction force is consider as disturbance. The performances of the proposed algorithms were compared by experiments with them of PID controller. From those experiments is was shown that the proposed algorithms are more efficient about settling time, steady 7tate error and overshoot than PID control algorithm.

• 대한산업공학회지
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• 제24권2호
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• pp.211-221
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• 1998

It is very important to have a satisfactory measurement system, since it is useless to try to improve the manufacturing process without an adequate measurement system. Therefore, evaluation of the measurement system is the first step for the quality improvement of the manufacturing process. To estimate the measurement error we must conduct a controlled gage repeatability and reproducibility(gage R&R) study. Many manufacturers use a gage or instrument to measure multiple dimensions for the overall quality of the manufactured parts. In this case, it is necessary to estimate the gage R&R for multiple dimensions. When a gage measures a large number of dimensions of a part, it is very time-consuming and costly to measure all the dimensions. In this paper we propose the use of the principal component analysis method to identify a few principal components out of the original multivariate measurement capability to explain most of the measurement system variation pattern.

• Current Optics and Photonics
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• 제2권1호
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• pp.69-78
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• 2018

This paper presents a precise edge detection algorithm for the critical dimension (CD) measurement of a Thin-Film Transistor Liquid-Crystal Display (TFT-LCD) pattern. The sigmoid surface function is proposed to model the blurred step edge. This model can simultaneously find the position and geometry of the edge precisely. The nonlinear least squares fitting method (Levenberg-Marquardt method) is used to model the image intensity distribution into the proposed sigmoid blurred edge model. The suggested algorithm is verified by comparing the CD measurement repeatability from high-magnified blurry and noisy TFT-LCD images with those from the previous Laplacian of Gaussian (LoG) based sub-pixel edge detection algorithm and error function fitting method. The proposed fitting-based edge detection algorithm produces more precise results than the previous method. The suggested algorithm can be applied to in-line precision CD measurement for high-resolution display devices.

• 한국공작기계학회:학술대회논문집
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• 한국공작기계학회 2001년도 춘계학술대회 논문집(한국공작기계학회)
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• pp.263-268
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• 2001

The needs for precision machining of micro to milli parts have been increased as the industry require high quality products, especially for the micro-machining of IT products. The ultra-precision machining system is essential for the micro machining of fine structures, which insures machining accuracy, low systematic and random error and repeatability. In this study, we developed micro machining system, which is equipped with air bearing stage for ultra precision machining and also we present the results of V-grooving experiments, conducted by the developed system, to verify the performance of system. The results show that the machined V-grooving had good accuracy with repeatable stability.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 1997년도 춘계학술대회 논문집
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• pp.68-72
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• 1997

This paper presents the design and the evaluation of the 6-component force/moment calibration machine which h a s t h e maximum capacities of 500 N in forces and 50 Nm in moments. This calibration machine consists of body. fixture. force generating system, moment generating system. The expanded uncertainty of the calibration machine is evaluated by calculating the A type uncertainty. $U_A$ and B type uncertainty, $U_B$. The evaluation results. this system has the expanded uncertainty of less than $2{\times}10^[-2]$ in respective force and moment components.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2003년도 춘계학술대회 논문집
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• pp.644-647
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• 2003

Resulting from reproducibility and possibility of mass production. many researches to fabricate micro lens array using lithography have been developed. However, it still remains the level of fabricating compensation lens. Therefore, to realize the fabrication of lens having high numerical aperture can be the key technology of ultra slim optical system. Reflow phenomenon have been researched to make lens having high refractive power. And through those researches, the possibility to fabrication of high refractive power lens has been investigated. In this paper, we analyze the effect of many parameters in reflow process to get an aspheric shape with high repeatability. And we make possible to estimate shape error, through we give direct information about decrease in volume of photoresist.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2000년도 춘계학술대회 논문집
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• pp.668-671
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• 2000

An aerostatic stage has frictionless behavior, so it has a advantage of investigation into driven mechanism such as ballscrew. In this paper, fur investigating positioning characteristic of ballscrew and feedback device in aerostatic stage, we compare the positioning characteristic between full-closed(laser scale) and semi-closed(encoder) system. Experimental results show that the aerostatic stage has a 10nm micro step response and repeatability is improved up to 1.00${\mu}{\textrm}{m}$ using laser scale. We confirm the laser scale compensate error motion of ballscrew, so acquire 1.12${\mu}{\textrm}{m}$ positioning accuracy.

• 천문학논총
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• 제8권1호
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• pp.47-66
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• 1993

The Automated Eichner Iris Photometer(AEIP) at the Korea Basic Science Center was tested for its function and the proper procedure for photographic photometry. The AEIP requires about three hours for reaching the electrical stability. When the iris is controlled automatically, the repeatability of density unit (DU) is accurate in the uncertainty of ($0.0028{\sim}0.0048$)DU. The iris reading is found to be accurate within the mean error of $0.^{m}05$, which could be reduced to $0.^{m}02$ by the manual control. To check the applicability of the AEIP. each two photographic plates for UBV colors which were taken by Dupuy and Zukauskas(l976) for the open cluster Byur 2, were measured by using the AEIP. and the photographic magnitudes and colors of the stars in Byur 2 were determined. discussing the previous results.