• Proceedings of the Korean Society of Precision Engineering Conference
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• 2002.10a
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• pp.206-209
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• 2002

The fixed abrasive pad(FAP) has been introduced in chemical mechanical polishing(CMP) field recently. In comparison with the general CMP which uses the slurry including abrasives, FAP takes advantage of planarity. resulting from decreasing pattern selectivity and defects such as dishing due to the reduction of abrasive concentration especially. This paper introduces the manufacturing technique of $Al_2$O$_3$-FAP using hydrophilic polymers with swelling characteristic in water and explains the self.texturing phenomenon. It also focuses on the chemical effects on tungsten film and the FAP is evaluated on the removal rate as a function of chemicals such as oxidizer, catalyst, and acid. The removal rate is achieved up to 1000A1min as about 70 percents of the general one. In the future. the research has a plan of the advanced FAP and chemicals in tungsten CMP considering micro-scratch, life-time, and within wafer non-uniformity.

• Asian Journal of Atmospheric Environment
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• v.4 no.2
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• pp.63-71
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• 2010

The removal characteristics for aromatic and aliphatic VOCs by electron beam (EB) were discussed in terms of several removal variables such as initial VOC concentration, absorbed dose, background gas, moisture content, reactor material and inlet temperature. It was reviewed that only reactor material was an independent variable among the potential control factors concerned. It was also suggested that main mechanism by EB should be radical reaction for the VOC removal rather than that by primary electrons. It was discussed that the removal efficiency of benzene was lower than that of hexane due to a closed benzene ring. In the case of aromatic VOCs, it was observed that the decomposition of the VOCs with more functional groups attached on the benzene ring was much easier than those with less ones. As for aliphatic VOCs, it was also implied that the longer carbon chain was, the higher the removal efficiency became. An EB-catalyst hybrid system was discussed as an alternative way to remove VOCs more effectively than EB-only system due to much less by-products. This hybrid included supporting materials such as cordierite, Y-zeolite, and $\gamma$-alumina.

• Journal of the Korean Institute of Gas
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• v.20 no.2
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• pp.1-9
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• 2016

Combined removal of n-heptane and carbon monoxide (CO) using a plasma-catalytic process was investigated. The performance of the plasma-catalytic process was compared with that of the catalyst-alone process to characterize the decomposition of n-heptane and CO with the operation parameters such as the type of catalyst, reaction temperature, and discharge power. From several sets of experiments, it was found that the decomposition efficiency of n-heptane mainly depended on the specific input energy rather than the reactor temperature, whereas the oxidation of CO on both the energy density and the reaction temperature. The results conducted over several metal oxide catalysts exhibited that the decomposition efficiency of n-heptane was in the order: $Pd/{\gamma}-Al_2O_3$ > $Ru/{\gamma}-Al_2O_3{\approx}Ag/{\gamma}-Al_2O_3$. Especially, $Pd/{\gamma}-Al_2O_3$ catalyst did hardly generate CO as a byproduct during the decomposition of n-heptane under an appropriate condition, revealing $CO_2$ selectivity of nearly 100%. The CO oxidation efficiency was largely affected by the type of catalyst ($Pd/{\gamma}-Al_2O_3$ > $Ru/{\gamma}-Al_2O_3$ > $Ag/{\gamma}-Al_2O_3$). At temperatures below $180^{\circ}C$, the plasma-catalytic process was more effective in the oxidation of CO, while above $180^{\circ}C$, the catalytic process resulted in slightly higher CO oxidation efficiency.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.17 no.7
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• pp.713-719
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• 2016

The NOx conversion properties of Mn-Cu-$TiO_2$ and $V_2O_5$/$TiO_2$ catalysts were studied for the selective catalytic reduction (SCR) of NOx with ammonia. The performance of the catalysts was investigated in terms of their $NOx$ conversion activity as a function of the reaction temperature and space velocity. The activity of the Mn-Cu-$TiO_2$ catalyst decreased with increasing reaction temperature and space velocity. However, the activity of the $V_2O_5$/$TiO_2$ catalyst increased with increasing reaction temperature. High activity of the Mn-Cu-$TiO_2$ catalyst was observed at temperatures below $200^{\circ}C$. H2-TPR and XPS analyses were conducted to explain these results. It was found that the activity of the Mn-Cu-$TiO_2$ catalyst was influenced by the thermal shock caused by the change of the initial reaction temperature, whereas the $V_2O_5$/$TiO_2$ catalyst was not affected by the initial reaction temperature. In the case of catalyst C, the $NO_x$ conversion efficiency decreased with increasing space velocity. The decrease in the $NO_x$ conversion efficiency with increasing space velocity was much less for catalyst D than for catalyst C.

• Journal of Korean Society of Environmental Engineers
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• v.30 no.1
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• pp.54-60
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• 2008

Deactivation of SCR catalyst applied in Orimusion fuel power plant was investigated to develope the technique for the regeneration of deactivated SCR catalyst and optimize the operation of SCR facility. The characterization study of the catalysts was carried out using XRD, ICP-AES, SEM and EDS. The NO$_X$ removal activity and SO$_2$ oxidation activity of the catalysts were measured. The NO$_X$ conversion of the deactivated catalyst was 5$\sim$10% lower than that of the fresh catalyst and the value of SO$_2$conversion to SO$_3$ over the deactivated catalyst was about 0.59% higher than that of the fresh catalyst. Vanadium(V), Magnesium(Mg) and Sulfur(S) were largely accumulated in the deactivated catalyst. The accumulation of Vanadium(V) and Sulfur(S) is due to the components of the Orimulsion fuel and the accumulation of Magnesium(Mg) is due to MgO that is injected in the boiler to prevent the oxidation of SO$_2$ to SO$_3$. The diffraction line of the TiO$_2$ of the deactivated catalyst was identified as the crystalline peaks of anatase as the fresh catalyst.

• Applied Chemistry for Engineering
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• v.7 no.2
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• pp.269-279
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• 1996

The porous armophous catalysts, composed of $SiO_2-TiO_2-V_2O_5$ were prepared through SOL-GEL process by differing the preparation parameters. Selected the optimum SOL-GEL catalyst which has the best NO removal activity through the screening test, and repeated coating it on the cordierite monolith which is the freely through and inert. And examined the NOx, SOx simultaneous removal effect under S. C. R. condition. In addition to its characterization performances by the DTA, TGA, BET, $NH_3$ and NO TPD, ESCA, XRD etc.

• Clean Technology
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• v.16 no.1
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• pp.1-11
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• 2010

As crude oil with heavier and/or highly oxidized components prevails, purification technologies such as desulfurization, denitrilization and demetalization have become important issues to control contents of sulfur and other impurities affecting the quality of petroleum. Also, the importance of catalyst technologies related with crude oil purification has been emphasized to control the production and yield of products. In this paper, technology trends of impurity removal such as sulfur, nitrogen and metal components from crude oil and catalysts related with purification of crude oil were studied through patent analysis. The patents published or registered in Korea, U. S. A., Japan, and Europe from mid 1970's to 2009 had been analyzed based on the application tendency, the distribution of major applicants, and their active indices, etc. The technology flow was figured out to see the technology trends.

• 한국신재생에너지학회:학술대회논문집
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• 2009.06a
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• pp.323-327
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• 2009

To extract hydrogen for stack, fuels such as LPG and LNG were reformed in the fuel processor, which is comprised of desulfurizer, reformer, shift converter, CO remover and steam generator. All elements of fuel processor are integrated in a single package. Highly active catalysts (desulfurizing adsorbent, reforming catalyst, CO shift catalyst, CO removal catalyst) and the various burners were developed and evaluated in this study. The performance of the developed catalysts and the commercial ones was similar. 1 kW, 5 kW class fuel processor systems using the developed catalyst and burner showed efficiency of 75 %(LHV, for LNG). The start-up time of the 1 kW class fuel processor was less than 50 minutes and its volume including insulation was about 30 l. The start-up time of 3 kW and 5 kW class fuel processors with the volume of 90 l and 150 l, respectively, was about 60 minutes. In the case of LPG fuel, efficiency, volume and start-up time of 1kW class fuel processor showed 73 %(LHV), < 60 l and < 60 min, respectively. Advanced fuel processor showed more highly efficiency and shorter start-up time due to the improvement of heat exchanger and operating method. 1 kW and 3 kW class fuel processors have been evaluated for reliability and durability including with on/off test of developed catalysts and burner.

• Journal of Korean Society for Atmospheric Environment
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• v.18 no.E1
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• pp.29-36
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• 2002

The selective catalytic reduction (SCR) reaction of promoter catalysts was investigated in this study. A pure anatase type of TiO$_2$ was used as support. Activation measurement of prepared catalysts was practiced on a fixed reactor packing by the glass bead after filling up catalysts in 1/4 inch stainless tube. The reaction temperature was measured by K-type thermocouple and catalyst was heated by electric furnace. The standard compositions of the simulated flue gas mixture in this study were as follows: NO 1,780ppm, NH$_3$1,780ppm, $O_2$1% and $N_2$ as balance gas. In this study, gas analyzer was used to measure the outgassing gas. Catalyst bed was handled for 1hr at 45$0^{\circ}C$, and the reactivity of the various catalyst was determined in a wide temperature range. Conversion of NH$_3$/NO ratio and of $O_2$ concentration was practiced at 1,1.5 and 2, respectively. The respective space velocity were as follows . 10,000, 15,000 and 17,000 hr-1. It was found that the maximum conversion temperature range was in a 5$0^{\circ}C$. It was also found toi be very sensitive at space velocity, $O_2$ concentration, and NH$_3$/NO ratio. We also noticed that the maximum conversion temperature of (W, Mo, Sn) -V$_2$O$_{5}$/TiO$_2$ catalysts was broad. Specially WO$_3$-V$_2$O$_{5}$TiO$_2$2 catalyst appeared nearly 100% conversion at not only above 30$0^{\circ}C$ ut also below 25$0^{\circ}C$. At over 30$0^{\circ}C$, NH$_3$ oxidation decreased with decrease of surface excess oxygen. In addition, WO$_3$-V$_2$O$_{5}$TiO$_2$ catalyst did not appear to affect space velocity, $O_2$ concentration, and NH$_3$/NO ratio.ratio.

• Korean Chemical Engineering Research
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• v.49 no.6
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• pp.739-744
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• 2011

Activated carbon SCR(CSCR) catalyst that is used to remove $NO_x$ in exhaust gas including boron discharged from the production process of liquid crystal display(LCD) shows deactivation when boron is deposited to block the pores within the catalyst or to cover its active sites. The spent carbon catalyst is regenerated by washing with various surfactants, drying and calcination. For comparison of the physical and chemical properties before and after the regeneration with the variables, type of surfactants and calcination condition, element analysis by ICP, $N_{2}$ adsorption were conducted. $DeNO_{x}$ in SCR with $NH_3$ was carried out in a fixed bed reactor at $120^{\circ}C$. The activated carbon catalyst regenerated through washing with a non-ionic surfactant in $H_{2}O$ at $90^{\circ}C$ and calcination under $N_{2}$ gas at $550^{\circ}C$ shows similar level of surface area and $NO_x$ removal efficiency with those of fresh catalyst.