• Proceedings of the Korean Vacuum Society Conference
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• 2015.08a
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• pp.136.2-136.2
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• 2015

반도체 제조는 chip의 성능 향상 및 단가 하락을 위해 지속적으로 pattern size가 nano size로 감소해 왔고, capacitor 용량은 증가해 왔다. 이러한 현상은 contact hole의 aspect ratio를 지속적으로 증가시킨바, 그에 따라 최적의 HARC (high aspect ratio contact)을 확보하는 적합한 dry etch process가 필수적이다. 그러나 HARC dry etch process는 많은 critical plasma properties 에 의존하는 매우 복잡한 공정이다. 따라서, critical plasma properties를 적절히 조절하여 higher aspect ratio, higher etch selectivity, tighter critical dimension control, lower P2ID과 같은 plasma characteristics을 확보하는 것이 요구된다. 현재 critical plasma properties를 제어하기 위해 다양한 plasma etching 방법이 연구 되어왔다. 이 중 plasma를 낮은 kHz의 frequency에서 on/off 하는 pulsed plasma etching technique은 nanoscale semiconductor material의 etch 특성을 효과적으로 향상 시킬 수 있다. 따라서 본 실험에서는 dual-frequency capacitive coupled plasma (DF-CCP)을 사용하여 plasma operation 동안 duty ratio와 pulse frequency와 같은 pulse parameters를 적용하여 plasma의 특성을 각각 제어함으로써 etch selectivity와 uniformity를 향상 시키고자 하였다. Selective SiO2 contact etching을 위해 top electrode에는 60 MHz pulsed RF source power를, bottom electrode에는 2MHz pulse plasma를 인가하여 synchronously pulsed dual-frequency capacitive coupled plasma (DF-CCP)에서의 plasma 특성과 dual pulsed plasma의 sync. pulsing duty ratio의 영향에 따른 etching 특성 등을 연구 진행하였다. 또한 emissive probe를 통해 전자온도, OES를 통한 radical 분석으로 critical Plasma properties를 분석하였고 SEM을 통한 etch 특성분석과 XPS를 통한 표면분석도 함께 진행하였다. 그 결과 60%의 source duty percentage와 50%의 bias duty percentage에서 가장 향상된 etch 특성을 얻을 수 있었다.

• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2017.05a
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• pp.107-107
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• 2017

전자제품의 성능이 향상됨에 따라서 전자제품에 사용되는 부품의 고집적화가 필연적으로 요구되고 있으며, 고집적화 된 전자제품의 방열(heat dissipation)에 관한 문제점이 대두되고 있다. 방열은 전자기기의 성능과 수명을 유지하는데 있어서 중요한 문제 중 하나로서 방열 효과를 높이기 위해 다양한 연구 개발이 진행 중이다. 방열에 사용되는 소재로는 Cu가 있으며, 저렴한 가격과 상대적으로 높은 방열 효율을 가지는 장점이 있다. Cu는 전기 도금 증착 방법을 사용하여왔으나, 전기도금 방식으로 증착된 Cu 방열판은 제품에 열이 축적될 경우 Cu와 substrate 사이의 residual stress로 인해 박리나 뒤틀림 현상 등이 발생하여 high power를 사용하는 device의 방열 소재로 사용하기에는 개선해야 할 문제점이 있다. 이러한 문제점을 극복하기 위한 방법으로 magnetron sputter 증착 방법이 있으며, magnetron sputter은 대면적화가 용이하고, 다양한 물질의 증착이 가능한 장점으로 인해 hard coating 또는 thin film 증착과 같은 공정에 사용되고 있다. 특히 증착된 film의 특성을 조절하기 위해서 magnetron sputter에 pulse 또는 ICP (inductively coupled plasma) assisted 등을 적용하여 plasma 특성을 조절하는 방법 등에 관한 연구가 보고되고 있다. 본 연구에서는 pulsed magnetron sputtering 방식을 이용하여 증착된 Cu film 특성 변화를 확인하였다. 다양한 pulsing frequency와 pulsing duty ratio 조건에서, Si substrate 위에 증착된 Cu film과의 residual stress 변화를 측정하였다. Pulse duty ratio가 90% 에서 60%로 감소함에 따라서 Cu film의 residual stress가 감소하였고, pulsing frequency가 증가함에 따라 Cu film의 residual stress가 감소하는 것을 확인하였다. 증착 조건에 따른 plasma의 특성 분석을 위하여 oscilloscope를 이용하여 voltage와 current를 측정하였고, Plasma Sampling Mass spectrometer 를 이용하여 ion energy의 변화를 측정하였다. 이를 통해 plasma 특성 변화가 증착된 Cu film에 미치는 영향과 residual stress의 변화에 대한 연관성에 대하여 확인할 수 있었다.

• Horticultural Science & Technology
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• v.31 no.3
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• pp.317-321
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• 2013

This study was conducted to investigate the antimicrobial effect of freely available chlorine (FAC) on the vase life of cut rose 'Brut' (Rosa hybrida L.). Postharvest treatments to extend the vase life of cut roses were divided into holding solution treatment and pulsing solution treatment. In holding solution treatment, the cut roses were treated with the preservative solutions containing FAC (0, 10, 20, and $40mg{\cdot}L^{-1}$) and sucrose (0 and 2%, w/v). In pulsing solution treatment, cut roses were dipped into the FAC solutions of 100, 200, and $400mg{\cdot}L^{-1}$ for 10 seconds. The longest vase life of cut roses was observed in the holding solution with FAC $20mg{\cdot}L^{-1}$ as 12 days, followed by pulsing with $400mg{\cdot}L^{-1}$ as 11 days, which were four or five days longer than the control. In addition, relative fresh weight and water uptake were the highest in the holding solutions with FAC 20 and $40mg{\cdot}L^{-1}$. The antimicrobial effect of FAC in vase solution was lasted for eight days after treatment, which was offset by sucrose addition. FAC contents in the FAC holding solution mixed with sucrose were exhausted by 88% two days after treatment, whereas only 15% of FAC was reduced in the holding solution without sucrose. This study indicated that FAC can be applied to extension of the postharvest life of cut roses by antimicrobial activity.

• Journal of information and communication convergence engineering
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• v.7 no.3
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• pp.275-280
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• 2009

While database(DB) and information retrieval(IR) have been developed independently, there have been emerging requirements that both data management and efficient text retrieval should be supported simultaneously in an information system such as health care, customer support, XML data management, and digital libraries. The great divide between DB and IR has caused different manners in index maintenance for newly arriving documents. While DB has extended its SQL layer to cope with text fields due to lack of intact mechanism to build IR-like index, IR usually treats a block of new documents as a logical unit of index maintenance since it has no concept of integrity constraint. However, In the DB-IR integrations, a transaction on adding or updating a document should include maintenance of the posting lists accompanied by the document. Although DB-IR integration has been budded in the research filed, the issue will remain difficult and rewarding areas for a while. One of the primary reasons is lack of efficient online transactional index maintenance. In this paper, performance of a few strategies for per-document basis transactional index maintenance - direct index update, pulsing auxiliary index and posting segmentation index - will be evaluated. The result shows that the pulsing auxiliary strategy and posting segmentation indexing scheme, can be a challenging candidates for text field indexing in DB-IR integration.

• Proceedings of the Korean Vacuum Society Conference
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• 2014.02a
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• pp.219.1-219.1
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• 2014

전자소자 산업의 미세화 및 대형화에 따라 플라즈마 밀도, 전위, 온도, 균일도 등 과 같은 플라즈마 특성을 제어하는 것은 차세대 플라즈마 장치 개발에 있어 매우 중요한 요소라고 할 수 있다. 특히, 급격한 소자의 미세화에 따라 플라즈마 공정을 통해 발생할 수 있는 damage는 큰 issue가 되어 왔고, 많은 연구자들은 이를 해결하기 위해서 다각적인 노력을 진행해 왔다. 그중 높은 전자 온도는 높은 전자 에너지에 의해 공정 중 소자를 손상 시키는 주된 원인이라고 보고되고 있으며, 이에 대한 제어기술은 매우 중요하다고 할 수 있다. 본 연구에서는 서로 다른 두 개의 내/외측으로 나뉘어진 나선형 모양의 ICP 안테나를 이용 하여 연구를 진행하였다. 내측의 안테나에는 2 MHz를 연결 하였으며, 외측의 안테나에는 13.56 MHz를 연결 하였으며, 내/외측 안테나에 각각 pulse mode로 입력전력을 인가해 줌으로써 플라즈마의 특성을 관찰하였다. Pulse / CW (Continuous Wave) mode에 있어서 전자온도의 측정을 위해 emissive probe 를 이용하여 plasma potential과 floating potential을 측정하였으며, 이를 통하여 전자온도를 계산하여 구할 수 있었다. Duty ratio 및 pulsing frequency의 변화에 따른 전자온도의 변화를 확인 할 수 있었으며, 그에 따른 플라즈마 균일도를 ion saturation current를 측정함으로써 관찰할 수 있었다. 실제 식각 공정에 있어서 Pulsing 조건에 따른 식각 특성을 관찰하기 위해, SiO2, ACL (Amorphous Carbon Layer)에 대해 식각을 진행하였으며, 식각 메커니즘 분석을 위해 이온에너지 분포의 변화를 PSM (Plasma Sampling Mass-spectroscopy)을 이용하여 측정하였다.

• Proceedings of the KOSOMBE Conference
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• v.1997 no.11
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• pp.550-554
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• 1997

Acoustic or sound noise due to gradient pulsing has been one of the problems in MRI, both in patient scanning as well as in many areas of psychiatric and neuroscience research, such as unctional MRI (fMRI). Our recent observations in MRI or the visual and motor cortex show very different results with sound noise in comparison with the results obtained without sound noise. Although a number of ideas has been suggested in the literature about the possible elimination or reduction of sound noise, progress has been slow due to the basic role of gradient pulsing in MR imaging. Therefore, we report on some typical behavior of sound noise observed from MRI scanners and the analyses of their characteristics. Data are obtained both from a commercial MRI scanner (GE Signa 1.5-T EPI system).

• The Journal of Korean Institute of Electromagnetic Engineering and Science
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• v.10 no.6
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• pp.889-899
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• 1999

A technique to obtain an exact frequency characteristics of desired targets in radar measurements is presented. The pulsing network composed of two RF switches was installed between the Network Analyzer and the antenna, and the backscattering from a metal sphere was measured at X-band. It is shown that the pulsing effectively eliminated undesired returns from antenna and other circuitry of the systems. The antenna return was suppressed by more than 60 dB, and the signal-to-noise ratio was improved drastically. The pulsed frequency data were processed to extract the responses of the desired target. The result agrees well with the theoretical backscattering characteristics of the sphere. The methods presented here are applicable to RCS measurements in compact ranges, and also to the backscattering measurements of distributed targets outdoors.

• Horticultural Science & Technology
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• v.32 no.1
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• pp.60-65
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• 2014

This study was conducted to investigate the antimicrobial effect of chlorine dioxide ($ClO_2$) on the vase life of cut rose 'Beast' (Rosa hybrida L.). Postharvest treatments to extend the vase life of cut roses were divided into two: holding solution treatment and pulsing solution treatment. In holding solution treatment, the cut roses were treated with preservative solutions containing tap water (TW, control), distilled water (DW), $ClO_2$ 2, 4, 6, and $8{\mu}L{\cdot}L^{-1}$, and compared with a commercialized antimicrobial compound of 8-HQS $200{\mu}L{\cdot}L^{-1}$. In pulsing solution treatment, cut roses were dipped into the $ClO_2$ solutions of 50, 100, 150, 200, and $250{\mu}L{\cdot}L^{-1}$ for 60 seconds and were placed in DW. The air temperature was $18.4^{\circ}C$, RH 51.5%, and light (photosynthetically active radiation, PAR) $3.6{\mu}mol{\cdot}m^{-2}{\cdot}s^{-1}$ with 12 hour day length. The longest vase life of cut roses was observed in the holding solution with $ClO_2$ $4{\mu}L{\cdot}L^{-1}$ as 13.8 days and pulsing with $200-250{\mu}L{\cdot}L^{-1}$ as 13.5-13.7 days, where vase life were extended four days longer than TW. Whereas, the inclusion of 8-HQS $200{\mu}L{\cdot}L^{-1}$ in vase solution resulted in phytotoxicity. The relative fresh weight and water uptake have similar tendencies. Bacteria inhibition by $ClO_2$ and 8-HQS were very effective. But bacteria at TW and DW treatments on cut flower with stem were detected in $3.7{\times}10^5CFU{\cdot}L^{-1}$ and $6.3{\times}10^5CFU{\cdot}L^{-1}$, respectively (without stem in DW $1.4{\times}10^4CFU{\cdot}L^{-1}$). The $ClO_2$ contents in holding solution of all treatments were scavenged in two-four days after treatment. This study indicated that $ClO_2$ $4{\mu}L{\cdot}L^{-1}$ holding solution treatment and $200-250{\mu}L{\cdot}L^{-1}$ pulsing solution treatment can be applied to extend the postharvest life of cut roses.

• Journal of Korean Society of Forest Science
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• v.82 no.3
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• pp.221-226
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• 1993

Methods for shoot proliferation via pulse treatment onto the microshoots of Quercus acutissima, and ex vitro root induction using peat plug systems of the microshoots of 4 oak trees were described. Pulsing solution was prepared by the addition of BA and/or BA plus zeatin onto the aqueous WPM and sterilized distilled water. Using the solution, pulsing time was adjusted at different levels(0. 1, 2, 5. 9, and 24 hours). Although the effect of pulsing solution prepared by the addition of cytokinins onto the sterilized distilled water was slightly lower in shoot proliferation rate, a little higher in shoot elongation was observed compared with that of aqueous WPM. One hour of pulse treatment revealed best in shoot proliferation and its elongation, whereas the increment of pulsing time slightly suppressed the response. In addition, prolonged pulse time resulted high frequency of hyperhydric shoot appearance. Single treatment of BA was better in shoot proliferation than that of BA combination with zeatin, whereas the latter treatment usually showed rapid and healthy shoot growth. For ex vitro root induction using peat plug systems, black oaks(Q. acutissima and Q. variabilis) revealed excellent rootability compared with white oaks(Q. serrata and Q. mongolica). Shoot-tip necrosis of white oaks eras one of the big problems for survival. In this study, we discribed the effect of pulse treatment, successful ex vitro rooting system by the incorporation of peat plug, and the possibilities for the overcoming the obstacles on micropropagation of oaks.

• Proceedings of the Korean Vacuum Society Conference
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• 2012.08a
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• pp.373-373
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• 2012

We fabricated conductive zinc oxide (ZnO) thin film at low temperature by UV-enhanced atomic layer deposition. The atomic layer deposition relies on alternate pulsing of the precursor gases onto the substrate surface and subsequent chemisorption of the precursors. In this experiment, diethylzinc (DEZ) and $H_2O$ were used as precursors with UV light. The UV light was very effective to improve the conductivity of the ZnO thin film. The thickness, transparency and resistivity were investigated by ellisometry, UV-visible spectroscopy and Four-point probe.