• International Journal of Air-Conditioning and Refrigeration
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• v.10 no.4
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• pp.177-183
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• 2002

A pulsed tracer gas technique is applied to measure the distributions of local mean age and local mean residual-life-time of air in a half-scale experimental chamber, The airflow patterns in the chamber are visualized by a Helium bubble generator for three different exhaust locations. A supply slot is located at the top of a right wall, and an exhaust slot is at either bottom-left (Case 1), bottom-right (Case 2), or top-left (Case 3) location. Results show that the distributions of local mean age and local mean residual-life-time are different from each other, but both of them are closely related to the airflow pattern in the space. Included are discussions on explaining the variations of overall room ventilation effectiveness depending upon airflow rates for three different supply-exhaust configurations.

• Proceedings of the KIEE Conference
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• 2006.07c
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• pp.1554-1555
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• 2006

We have studied the backward wave oscillator, a power pulsed generator oscillator at 20 GHz has higher frequency then current one. An absolute instability linear analysis was used for the purpose of designing the slow wave structure. A large diameter of the slow wave structure was adopted to prevent the breakdown brought about by the increase of power density.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.22 no.10
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• pp.897-903
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• 2009

We have designed the backward wave oscillator. A power-pulsed generator oscillated at 24 GHz has higher frequency than current one. It is very inportant to prevent microwave from going into the beam diode, since intence microwave will harmfully affect beam generation. Due to the axial mode operation, there exist a critial value of beam energy for the oscillation. By changing the condition at the SWS end, an enhanced performance of the K-band oversized BWO is observed in a low magnetic field region about 0.8T.

• Proceedings of the Korean Vacuum Society Conference
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• 2012.02a
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• pp.96-97
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• 2012

In nitride and oxide film deposition, sputtered metals react with nitrogen or oxygen gas in a vacuum chamber to form metal nitride or oxide films on a substrate. The physical properties of sputtered films (metals, oxides, and nitrides) are strongly influenced by magnetron plasma density during the deposition process. Typical target power densities on the magnetron during the deposition process are ~ (5-30) W/cm2, which gives a relatively low plasma density. The main challenge in reactive sputtering is the ability to generate a stable, arc free discharge at high plasma densities. Arcs occur due to formation of an insulating layer on the target surface caused by the re-deposition effect. One current method of generating an arc free discharge is to use the commercially available Pinnacle Plus+ Pulsed DC plasma generator manufactured by Advanced Energy Inc. This plasma generator uses a positive voltage pulse between negative pulses to attract electrons and discharge the target surface, thus preventing arc formation. However, this method can only generate low density plasma and therefore cannot allow full control of film properties. Also, after long runs ~ (1-3) hours, depends on duty cycle the stability of the reactive process is reduced due to increased probability of arc formation. Between 1995 and 1999, a new way of magnetron sputtering called HIPIMS (highly ionized pulse impulse magnetron sputtering) was developed. The main idea of this approach is to apply short ${\sim}(50-100){\mu}s$ high power pulses with a target power densities during the pulse between ~ (1-3) kW/cm2. These high power pulses generate high-density magnetron plasma that can significantly improve and control film properties. From the beginning, HIPIMS method has been applied to reactive sputtering processes for deposition of conductive and nonconductive films. However, commercially available HIPIMS plasma generators have not been able to create a stable, arc-free discharge in most reactive magnetron sputtering processes. HIPIMS plasma generators have been successfully used in reactive sputtering of nitrides for hard coating applications and for Al2O3 films. But until now there has been no HIPIMS data presented on reactive sputtering in cluster tools for semiconductors and MEMs applications. In this presentation, a new method of generating an arc free discharge for reactive HIPIMS using the new Cyprium plasma generator from Zpulser LLC will be introduced. Data (or evidence) will be presented showing that arc formation in reactive HIPIMS can be controlled without applying a positive voltage pulse between high power pulses. Arc-free reactive HIPIMS processes for sputtering AlN, TiO2, TiN and Si3N4 on the Applied Materials ENDURA 200 mm cluster tool will be presented. A direct comparison of the properties of films sputtered with the Advanced Energy Pinnacle Plus + plasma generator and the Zpulser Cyprium plasma generator will be presented.

• Proceedings of the Korean Vacuum Society Conference
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• 2011.02a
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• pp.185-185
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• 2011

ZnTe semiconductor is very attractive materials for optoelectronic devices in the visible green spectral region because of it has direct bandgap of 2.26 eV. The prototypes of ZnTe light emitting diodes (LEDs) have been reported [1], showing that their green emission peak closely matches the most sensitive region of the human eye. Another application to photovoltaics proved that ZnTe is useful for the production of high-efficiency multi-junction solar cells [2,3]. By using the pulse laser deposition system, ZnTe thin films were deposited on ZnO thin layer, which is grown on (0001) Al2O3substrates. To produce the plasma plume from an ablated ZnO and ZnTe target, a pulsed (10 Hz) YGA:Nd laser with energy density of 95 mJ/$cm^2$ and wavelength of 266 nm by a nonlinear fourth harmonic generator was used. The laser spot focused on the surface of the ZnO and ZnTe target by using an optical lens was approximately 1 mm2. The base pressure of the chamber was kept at a pressure around $10^{-6}$ Torr by using a turbo molecular pump. The oxygen gas flow was controlled around 3 sccm by using a mass flow controller system. During the ZnTe deposition, the substrate temperature was $400^{\circ}C$ and the ambient gas pressure was $10^{-2}$ Torr. The structural properties of the samples were analyzed by XRD measurement. The optical properties were investigated by using the photoluminescence spectra obtained with a 325 nm wavelength He-Cd laser. The film surface and carrier concentration were analyzed by an atomic force microscope and Hall measurement system.

• Geophysics and Geophysical Exploration
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• v.18 no.3
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• pp.154-161
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• 2015

For efficiently designing neutron induced gamma spectroscopy sonde, Monte Carlo simulation is employed to understand a dominant location of thermal neutron and classify the formation elements from the energy peak of capture gamma spectrum. A pulsed neutron generator emitting 14 MeV neutron particles was used as a source, and flux of thermal neutron was calculated from the twelve detectors arranged at each 10 cm intervals from the source. Design for reducing borehole effects using shielding materials was also applied to numerical sonde model. Moreover, principal elements and quantities of numerical earth models were verified through the energy spectrum analysis of capture gamma detected from a gamma detector. These results can help to enhance the signal-to-noise ratio, and determine an optimal placement of capture gamma detectors of neutron induced gamma spectroscopy sonde.

• Journal of the Korea Institute of Information and Communication Engineering
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• v.14 no.9
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• pp.2164-2170
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• 2010

Digital Radio Frequency Memory, ( as DRFM ), is a device with the ability to restore output to the input RF signal in the required time after storing the incoming RF signals. Therefore DRFM is widely used in Jammer, EW Simulator, Target Echo Generator, and so on. This paper proposes its hardware implementation composed with the high frequency part and the digital processing part consisting of RF input/output module and local oscillator module. It is also proposed the replicated signal generation method which is consisted of the Analog-Digital conversion in the form of pulsed RF signal quantization, and FPGA to save and produce the playback signal, and RF signals to produce a Digital-Analog Conversion in the digital processing unit. This proposed scheme applied to test board and confirmed the validity of the proposed scheme through the test results obtained by the simulated input signals.

• Proceedings of the Korean Vacuum Society Conference
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• 2011.08a
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• pp.333-333
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• 2011

We have investigated the breakdown properties in liquids by high voltage pulse system. High voltage pulse power system is consisted of the Marx-generator with two capacitors (0.5 ${\mu}F$, withstanding voltage is 40 kV), to which the charging voltage can be applied to maximum 30 kV DC, spark gap switch and charging resistor of 20 $M{\Omega}$. We have made use of tungsten pin electrodes of anode-cathode (A-K), which are immersed into the liquids. The breakdown voltage and current signals are measured by high voltage probe (Tektronix P6015A) and current monitor (IPC CM-1.S). Especially the high speed breakdown or plasma propagation characteristics in the pulsed A-K gap have been investigated by using the high speed ICCD camera. We have measured the electron temperature through the Boltzmann plot method from the breakdown spectrums. Here the A-K gap has been changed by 1 mm, 2 mm, and 3 mm. The used liquids are distilled water and solution of salt (0.9 %). The output voltage and current signals at breakdown in distilled water are shown to be bigger than those in saline solution. The breakdown voltage and current characteristics in liquids will be discussed in accordance with A-K gap distances. It is also found that the electron temperatures and plasma densities in liquids are decreased in conformity with A-K gap.

• The Transactions of the Korean Institute of Electrical Engineers C
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• v.52 no.4
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• pp.179-184
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• 2003

The pulsed power system is widely used for many industries and environments. Generally, we call the "RUST", the reddish brown surface, that was made on iron surface or some other metals, when they are contacted by water and air the main substance of rust is oxide-ionization. In other words, the chemical symbol of rust on iron surface is iron oxide(III) hydrate Fe203.nH2O. In this study, we have designed and fabricated our system which has a compact pulse generator with switching MOSFET. Also we have studied the metal-oxide removing characteristics using in the atmospheric arc discharge. It has been investigated their removing characteristics by the change of charging voltage and pulse repetition rates. From this result, we can find out that the removal area Is increased from 3.80 to 8.04[$\textrm{cm}^2$], when pulse duration is increased from 100[pps] to 400[pps]. 400[pps].

• Journal of the Korean Institute of Illuminating and Electrical Installation Engineers
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• v.13 no.3
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• pp.40-47
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• 1999

We have established a pulsed low-energy large-aIXTture electron beam(LELAEB) generation system with an energy of 2OO[keV], current of 1[A], pulse repetition rate of 200[Hz], and several tens of ${\mu}s$ pulse width. The system is characterized by a cold cathode that is simpler than the hot cathode. Electron beam does not need to be scanned over target objects because of large beam aIXTture of $300[\textrm{cm}^2]$. Electron source is secondary electrons that are generated when the ions from the glow discharge collide on the cathode surface. In this paper, We report about the design and manufacture of LELAEB generation system based on the theoretical analysis in order to study lXlssibility of increasing the efficiency of IELAEB accelerator. We also report on the possibility of large aperture beam current generation and the current density uniformity based on the experiIrental results.esults.