• Proceedings of the Korean Vacuum Society Conference
• /
• 2015.08a
• /
• pp.142.2-142.2
• /
• 2015

Plasma etch endpoint detection (EPD) of SiO2 and PR layer is demonstrated by plasma impedance monitoring in this work. Plasma etching process is the core process for making fine pattern devices in semiconductor fabrication, and the etching endpoint detection is one of the essential FDC (Fault Detection and Classification) for yield management and mass production. In general, Optical emission spectrocopy (OES) has been used to detect endpoint because OES can be a simple, non-invasive and real-time plasma monitoring tool. In OES, the trend of a few sensitive wavelengths is traced. However, in case of small-open area etch endpoint detection (ex. contact etch), it is at the boundary of the detection limit because of weak signal intensities of reaction reactants and products. Furthemore, the various materials covering the wafer such as photoresist (PR), dielectric materials, and metals make the analysis of OES signals complicated. In this study, full spectra of optical emission signals were collected and the data were analyzed by a data-mining approach, modified K-means cluster analysis. The K-means cluster analysis is modified suitably to analyze a thousand of wavelength variables from OES. This technique can improve the sensitivity of EPD for small area oxide layer etching processes: about 1.0 % oxide area. This technique is expected to be applied to various plasma monitoring applications including fault detections as well as EPD.

• Journal of the Korean Society for Aeronautical & Space Sciences
• /
• v.34 no.12
• /
• pp.59-66
• /
• 2006

To understand the role of helical geometry on the regression rate enhancement, two competing underlying mechanisms such as turbulence enhancement and swirling motion production were studied by numerical calculations. Experimental results showed that the enhancement of heat transfer rate has the very close relation to the increase in regression rate even though the percentage of increase in heat transfer rate is different from that in regression rate. This discrepancy is presumably due to the change of turbulent flow feature caused by so-called "blowing mass flux" from the fuel surface. In this regard, the results of RANS calculation show that the blowing velocity is responsible for the reduction of the swirl generation and the increase in the turbulent kinetic energy. And the dominancy of one of the mechanisms causes the increase in the regression rate. Meanwhile, the increase in turbulent kinetic energy due to the mixing of blowing flow and free stream flow does not contribute for the enhancement of the heat transfer rate to the surface because the blowing flow pushes boundary layer away from the solid surface.

• Journal of the Korean Society for Precision Engineering
• /
• v.17 no.12
• /
• pp.209-216
• /
• 2000

The lateral behavior of the moving web is critical to the quality of the web products. The alignment of the rollers carrying the web is found to be one of important factors to the lateral behavior of the moving web. But, the study on the effect of the tilting roller in the direction of the normal to the moving web on the lateral behavior has not been reported in the literature yet. For example, the contact roller often contacts the winding roll in a tilted fashion and causes the lateral motion of the winding web, which induces the offset on the wound roll. The lateral dynamics of the moving web induced by a tilted roller in normal direction of a web is investigated in this paper. The two-dimensional dynamic model developed by Shelton is extended to investigate the effect of a titled roller in a normal direction of the moving web on the lateral motion of the moving web. New boundary conditions are developed to solve the extended model. Computer simulation study proved that the model developed can be used to predict the lateral motion of the moving web ？ to a tilted roller in normal direction of the moving web. The lateral deflection is increased exponentially a the tilting angle is increased. As the length of web span is increased, the amount of lateral deflection was increased almost linearly for the same tilting angle. The lateral dynamics turned out to be almost independent to the operating tension. The model developed can be used to solve the offset problem of the staggered winding and also to design a new web guiding mechanism.

• Journal of the Korean Society of Fisheries and Ocean Technology
• /
• v.53 no.1
• /
• pp.77-88
• /
• 2017

The concern on the greenhouse gas emissions is increasing globally. Especially, the greenhouse gas emission from fisheries is an important issue due to Cancun Agreements Mexico in 1992 and the Kyoto protocol in 2005. Furthermore, the Korean government has a plan to reduce the GHG emissions as 5.2% compared to the BAU in fisheries until 2020. However, the investigation on the GHG emissions from Korean fisheries has not been executed much. Therefore, the quantitative analysis of GHG emissions from Korean fishery industry is needed as the first step to find a relevant way to reduce GHG emissions from fisheries. The purpose of this research is to investigate which degree of GHG emitted from the major coastal fisheries such as coastal gillnet fishery, coastal dual purpose fishery, coastal pots fishery and coastal small scale stow net fishery. Here, we calculated the GHG emission from the fisheries using the LCA (Life Cycle Assessment) method. The system boundary and input parameters for each process level are defined for LCA analysis. The fuel use coefficients of the fisheries are also calculated according to the fuel type. The GHG emissions from sea activities by the fisheries will be dealt with. Furthermore, the GHG emissions for the unit weight of fishes are also calculated with consideration to the different consuming areas. The results will be helpful to understand the circumstances of GHG emissions from Korean fisheries.

• Journal of Biosystems Engineering
• /
• v.26 no.6
• /
• pp.571-578
• /
• 2001

Production of green pepper has increased for ten years in Korea, as customer's preference of a pepper tuned to fiesta one. This study was conducted to develop an on-line fading algorithm of green pepper using machine vision and aimed to develop the automatic on-line grading and sorting system. The machine vision system was composed of a professive scan R7B CCD camera, a frame grabber and sets of 3-wave fluorescent lamps. The length and curvature, which were main quality factors of a green pepper were measured while removing the stem region. The first derivative of the thickness profile was used to remove the stem area of the segmented image of the pepper. A new boundary was generated after the stem was removed and a baseline of a pepper which was used for the curvature determination was also generated. The developed algorithm showed that the accuracy of the size measurement was 86.6% and the accuracy of the bent was 91.9%. Processing time spent far grading was around 0.17 sec per pepper.

• Journal of the Korean Society of Propulsion Engineers
• /
• v.14 no.6
• /
• pp.38-44
• /
• 2010

The shock wave and boundary layer interaction patterns in an over-expanded rocket nozzle are associated with the production of undesirable side-forces during the start-up and shut-down processes of the engine. In the present work, a computational study is carried out to investigate the effect of the transient nozzle pressure ratio (NPR) on the flow fields inside the nozzle. The unsteady, compressible, axisymmetric, Navier-Stocks equations with SST k-${\omega}$ turbulence model are solved using a fully implicit finite volume scheme. NPR is varied from 2.0 to 10.0, in order to simulate the start-up and shut-down processes of the rocket engine. It is observed that the interaction patterns and the hysteresis phenomenon strongly depend on the time variation of NPR, leading to significantly different characteristics in the lateral forces.

• Journal of Powder Materials
• /
• v.21 no.5
• /
• pp.349-354
• /
• 2014

This study is a basic research for repair material production which manufactured a Cu repair coating layer on the base material of a Cu plate using kinetic spray process. Furthermore, the manufactured material underwent an annealing heat treatment, and the changes of microstructure and macroscopic properties in the Cu repair coating layer and base material were examined. The powder feedstocks were sphere-shaped pure Cu powders with an average size of $27.7{\mu}m$. The produced repair coating material featured $600{\mu}m$ thickness and 0.8% porosity, and it had an identical ${\alpha}$-Cu single phase as the early powder. The produced Cu repair coating material and base material displayed extremely high adhesion characteristics that produced a boundary difficult to identify. Composition analysis confirmed that the impurities in the base material and repair coating material had no significant differences. Microstructure observation after a $500^{\circ}C/1hr$. heat treatment (vacuum condition) identified recovery, recrystallization and grain growth in the repair coating material and featured a more homogeneous microstructure. The hardness difference (${\Delta}H_v$) between the repair coating material and base material significantly reduced from 87 to 34 after undergoing heat treatment.

• Asian Journal of Atmospheric Environment
• /
• v.9 no.4
• /
• pp.259-271
• /
• 2015

This study conducted analyses on biogenic volatile organic compounds (BVOC) emission sources contributing to urban ozone ($O_3$) concentration in Osaka Prefecture, Japan in summer 2010 by using the Weather Research and Forecasting model (WRF) version 3.5.1 and the Community Multiscale Air Quality model (CMAQ) version 5.0.1. This prefecture is characterized by highly urbanized area with small forest area. The contributions of source regions surrounding Osaka were estimated by comparing the baseline case and zero-out cases for BVOC emissions from each source region. The zero-out emission runs showed that the BVOC emissions substantially contributed to urban $O_3$ concentration in Osaka (10.3 ppb: 15.9% of mean daily maximum 1-h $O_3$ concentration) with day-by-day variations of contributing source regions, which were qualitatively explained by backward trajectory analyses. Although $O_3$ concentrations were especially high on 23 July and 2 August 2010, the contribution of BVOC on 23 July (35.4 ppb: 25.6% of daily maximum $O_3$) was much larger than that on 2 August (20.9 ppb: 14.2% of daily maximum $O_3$). To investigate this difference, additional zero-out cases for anthropogenic VOC (AVOC) emissions from Osaka and for VOC emissions on the target days were performed. On 23 July, the urban $O_3$ concentration in Osaka was dominantly increased by the transport from the northwestern region outside Osaka with large contribution of $O_3$ that was produced through BVOC reactions by the day before and was retained over the nocturnal boundary layer. On 2 August, the concentration was dominantly increased by the local photochemical production inside Osaka under weak wind condition with the particularly large contribution of AVOC emitted from Osaka on the day.

• Journal of the Korean Society of Groundwater Environment
• /
• v.1 no.1
• /
• pp.6-9
• /
• 1994

Previously reported Ar/N$_2$ratios in groundwater have been measured by single ion monitoring (Barnes et al., 1975; Vogel et al., 1981; Mariotti et al., 1988). The detector geometry and flared flight tube in VG Optima isotopic ratio mass spectrometer appeared to be fortuitously aligned for the simultaneous measurement of Ar/N$_2$ratios. Method development included mechanical adjustments to optimize the mass spectrometer for Ar/N$_2$ratio measurements followed by development of a preparation system for the extraction of air-saturated water samples. Samples containing known Ar/N$_2$ratios were used to assess accuracy and precision, and to test the applicability of methods for measurements of aqueous Ar/N$_2$ratios. The results indicated that the prepared air-saturated water samples were almost identical to the predicted Ar/N$_2$ratios (p ＜0.001). Groundwater samples were collected from on-going research sites, Shelton and Grand Island, Nebraska. Samples from the Grand Island sludge injection site form a lower boundary for worldwide reported Ar/N$_2$ratios. These lower Ar/N$_2$ratios can be explained by the production of nitrogen gas from this site, where denitrification was reported previously.

• Korean Journal of Computational Design and Engineering
• /
• v.1 no.2
• /
• pp.133-149
• /
• 1996

In order to reduce the trial-and-errors in design and production of injection molded plastic parts, there has been much research effort not only on CAE systems which simulate the injection molding process, but also on CAD systems which support initial design and re-design of plastic parts and their molds. The CAD systems and CAE systems have been developed independently with being built on different basis. That is, CAD systems manipulate the part shapes and the design features in a complete solid model, while CAE systems work on shell meshes generated on the abstract sheet model or medial surface of the part. Therefore, it is required to support the two types of geometric models and feature information in one environment to integrate CAD and CAE systems for accelerating the design speed. A feature-based non-manifold geometric modeling system has been developed to provide an integrated environment for design and analysis of injection molding products. In this system, the geometric models for CAD and CAE systems are represented by a non-manifold boundary representation and they are merged into a single geometric model. The suitable form of geometric model for any application can be extracted from this model. In addition, the feature deletion and interaction problem of the feature-based design system has been solved clearly by introducing the non-manifold Boolean operation based on 'merge and selection' algorithm. The sheet modeling capabilities were also developed for easy modeling of thin plastic parts.