• Proceedings of the Korean Vacuum Society Conference
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• 2010.02a
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• pp.464-464
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• 2010

A few years ago, for maintaining high stability and production yield of production equipment in a semiconductor fab, on-line monitoring of wafers is required, so that semiconductor manufacturers are investigating a software based process controlling scheme known as virtual metrology (VM). As semiconductor technology develops, the cost of fabrication tool/facility has reached its budget limit, and reducing metrology cost can obviously help to keep semiconductor manufacturing cost. By virtue of prediction, VM enables wafer-level control (or even down to site level), reduces within-lot variability, and increases process capability, $C_{pk}$. In this research, we have practiced VM on $SiO_2$ etch rate with optical emission spectroscopy(OES) data acquired in-situ while the process parameters are simultaneously correlated. To build process model of $SiO_2$ via, we first performed a series of etch runs according to the statistically designed experiment, called design of experiments (DOE). OES data are automatically logged with etch rate, and some OES spectra that correlated with $SiO_2$ etch rate is selected. Once the feature of OES data is selected, the preprocessed OES spectra is then used for in-situ sensor based VM modeling. ICP-RIE using 葰.56MHz, manufactured by Plasmart, Ltd. is employed in this experiment, and single fiber-optic attached for in-situ OES data acquisition. Before applying statistical feature selection, empirical feature selection of OES data is initially performed in order not to fall in a statistical misleading, which causes from random noise or large variation of insignificantly correlated responses with process itself. The accuracy of the proposed VM is still need to be developed in order to successfully replace the existing metrology, but it is no doubt that VM can support engineering decision of "go or not go" in the consecutive processing step.

• Journal of the Korean Association of Geographic Information Studies
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• v.12 no.2
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• pp.120-131
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• 2009

This study measured the centripetal force and effective scope of the population spread from urban center and subcenters in order to diagnose the urban spatial structure of the formation of a multicentric city structure in Busan. The study analyzed the variability of the determination coefficient value (R square) with a negative exponential function derived from the population density model by extending the circular region into 5-km units. The aim of this study was to measure changes in the effective scope of the population centripetal force of the urban center and subcenter in 5-year intervals from 1995 to 2005 using census data. The explanatory adequacy of the population density function was examined with the bias of the function to calculate the distance error between the real location of the urban center and the optimal location, according to the population density function. To summarize the results, the value for the area of Jungangdong showed a continuous reduction, whereas Seomyeon (Bujeondong) maintained explanatory adequacy without a large change. As a whole, Busan was in the process of continuous diversification, in spite of its reduced population. Therefore, it appears necessary to strengthen the function of the urban center and subcenter and to supply adequate dwelling zones close to downtown to form a more efficient urban spatial structure. The results of the present study will be utilized as basic data for the formulation of a political approach to the efficient reorganization of spatial structure by correlating concrete spatial information with the population variability of Busan's urban center and subcenter.

• Korean Journal of Remote Sensing
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• v.36 no.5_1
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• pp.707-723
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• 2020

In this study, a decision tree type of quality control (QC) method was developed to improve the temporal-spatial representation and accuracy of the visibility data being operated by the Korea Meteorological Administration (KMA). The quality of the developed QC method was evaluated through the application to the 3 years (2016.03-2019.02) of 290 stations visibility data. For qualitative and quantitative verification of the developed QC method, visibility and naked-eye data provided by the KMA and QC method of the Norwegian Meteorological Institute (NMI) were used. Firstly, if the sum of missing and abnormal data exceeds 10% of the total data, the corresponding point was removed. In the 2nd step, a temporal continuity test was performed under the assumption that the visibility changes continuously in time. In this process, the threshold was dynamically set considering the different temporal variability depending on the visibility. In the 3rd step, the spatial continuity test was performed under the assumption of spatial continuity for visibility. Finally, the 10-minute visibility data was calculated using weighted average method, considering that the accuracy of the visibility meter was inversely proportional to the visibility. As results, about 10% of the data were removed in the first step due to the large temporal-spatial variability of visibility. In addition, because the spatial variability was significant, especially around the fog area, the 3rd step was not applied. Through the quantitative verification results, it suggested that the QC method developed in this study can be used as a QC tool for visibility data.

• Science of Emotion and Sensibility
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• v.21 no.1
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• pp.71-82
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• 2018

Stress involves changes in behavior, autonomic function and the secretion of hormones. Autonomic nervous system (ANS) contributes to physiological adaptive process in short durations. In particular, heart rate variability (HRV) analysis is commonly used as a quantitative marker depicting the ANS activity related to mental stress. The aim of this study is to investigate correlations between psychological responses to stress and HRV indices induced by the cognitive stressor. Thirty-three participants rated their mental and physical symptoms occurred during the past two weeks on Stress Response Inventory (SRI), which is composed of seven stress factors that may influence the status of mental stress levels. Then, they underwent the psychophysiological procedures, which are collected electrocardiogram (ECG) signals during a cognitive stress task. HRV indices, the standard deviation of R-R interval (SDNN), root mean square of successive R-R interval difference (RMSSD) and low frequency (LF)/high frequency (HF) ratio were extracted from ECG signals. Physiological responses were calculated stress responses by subtracting mean of the baseline from the mean of recovery. Stress factors such as tension, aggression, depression, fatigue, and frustration were positively correlated to HRV indices. In particular, aggression had significant positive correlations to SDNN, RMSSD and LF/HF ratio. Increased aggressive responses to stress correlated with the increases of all HRV indices. This means the increased autonomic coactivation. Additionally, tension, depression, fatigue, and frustration were positively associated with RMSSD reflecting increases in parasympathetic activation. The autonomic coactivation may represent an integrated response to specific cognitive reactions such as the orienting response.

• Korean Journal of Agricultural and Forest Meteorology
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• v.17 no.1
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• pp.45-57
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• 2015

Soil moisture is critical for understanding the spatial-temporal variability of hydrologic processes. The distributions of soil moisture have been explored along transect line in hillslope hydrology. In this study, we measured several soil moistures along transect lines during ten-month period at a hillslope located the Cheong-mi catchment. The soil moisture properties were expressed by simple statistical methods (average, standard deviation, and recession slope) and analyzed in terms of soil depths and transects from the seasonal context. Supplementary studies were also performed about the effect of location, topography and soil texture to the soil moisture responses. The spatial distributions of average soil moisture at deep soil layer were distinguished from those at near surface due to the possibility of expected factors such as subsurface lateral flow from upslope, preferential flow and existence of bedrock. The soil moistures in combined line affected from significant contribution of upper transect line were relatively higher(wetter), low variability compared to those in other transect lines and seemed to be under stabilization process. There are confirmed heterogeneity of soil moisture variation related with preferential flow and significant influence of soil texture for soil moisture properties in upslope.

• Journal of KIISE:Software and Applications
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• v.31 no.5
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• pp.677-696
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• 2004

Component-based software engineering (CBSE) composes reusable components and develops applications with the components. CBSE is admitted to be a new paradigm that reduces the costs and times to develop software systems. The high quality of component designs can be assured if the consistency and correctness among the elements of a component are verified with formal specifications. Current formal languages for components include only some parts of contracts between interfaces, structural aspects and behavioral aspects of component, component-based system, component composition and variability. Therefore, it is not adequate to use current formal languages in all steps of a component design process. In this paper, we suggest a formal language to specify component designs Component-Z. Component-Z extends Object-Z, adds new notations to specify components. It can be possible to specify interfaces, the inner structure of a component, inner workflows, and workflows among interfaces with Component-Z. In addition, Component-Z provides the notations and semantics to specify variability with variation points, variants and required interfaces. The relation between interfaces and components is defined with mapping schemas. Parallel operator is used to specify component composition. It can be possible to describe deployed components with the specifications of component-based systems. Therefore, the formal specification language proposed in this paper can represent all elements to design components. In the case study, we specify an account management system in a bank so that we show that Component-Z can be used in all steps of component design.

• Journal of Environmental Impact Assessment
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• v.4 no.3
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• pp.73-86
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• 1995

This paper demonstrates Environmental Impact Assessment (EIA) has to be applied for development projects with regard to the ecological, economical and social aspects before any decisions made in the project. Korea has confronted various environmental problems during the last fifteen years, even though EIA has been enacted since 1981. The role of impact assessment in planning and policy processes should be emphasized to investigate the magnitude and intensity of the adverse influences of economic development. In the Seoul Metropolitan Region, it is necessary to apply EIA all urban projects to reduce the adverse effects of urbanization. Special attention should be given to the climatological effects throughout the urbanization process in Korea to keep the urban area energy-efficient. This study intends not only to establish basic data for national-and regional-based land-use policy in the environmental aspects, but also to provide the basic data for the possible climate model (scenarios) that may provide spatial and temporal variability by analyzing the actual climatic record. There is a noticeable impact of urbanization on the atmospheric environment in the Seoul Metropolitan Region. In this sense, the climatic aspect must be taken into consideration in the process of EIA to mitigate the well-known climatic alterations of urbanization. Moreover, the techniques of assessment should be improved by developing geo-reference data sets to build models of the global climate in response to the man-made environmental change.

• Transactions of the Korean Society of Mechanical Engineers
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• v.17 no.5
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• pp.1193-1201
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• 1993

A new deformation resistance model for hot steel strip rolling process was formulated to improve the accuracy of roll force estimation. To improve the existing deformation resistance model more precisely, a modification function was introduced in this study. For the modification function, several factors considering material and operational conditions have been investigated and the optimal modification function was determined under the principle of minimum variability. The newly formulated modification function was applied to the deformation resistance model for ultra-low carbon steel and showed improved accuracy with about 30% decrease in terms of standard deviation of predicted roll force values against measured ones.

• Journal of the Korea Society for Simulation
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• v.25 no.2
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• pp.75-81
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• 2016

By using simulation, fixed location production method and flow production method have been compared to improve the productivity of deckhouse preceding outfitting process. In this paper, we analyze that the suggested flow production system instead of fixed location production can improve productivity. In current preceding outfit production system which adopts fixed location production, where a block occupies an area and does not move until the work finishes. On the other hand, in improved flow production system, the block moves instead of workers and equipment. Though the output of two systems are almost the same when we did not consider the moving time and waiting time of blocks, the flow production will be better when the variability of task time will be reduced.

• Journal of the Korean Society of Costume
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• v.67 no.4
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• pp.58-70
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• 2017

This study examined the characteristics of generative design methodology, and it selected and analyzed 11 sites that provide design development services using generative methodology, INPUT data were classified into design form factor based on the choices of each and the variable form associated with each participant's movement. In designing the algorithms, designers set the meth- od and range of participation according to the characteristics of the design, and linked them with design components. This provided the study with a discriminative design process. This resulted in a type with morphological characteristics and a type that emphasized epidermal formability. The generative design methodology has value as an alternative process in the field of fashion where the utilization of digital technology is becoming universal based on contingency and variability. The results of this study can be used as basic data for the study of personalized design through the extension of methodology of digital-based fashion design and generative methodology.