• Journal of Institute of Control, Robotics and Systems
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• v.6 no.4
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• pp.254-260
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• 2000

This paper deals with the development of fault tolerant control for a nonlinear boiler system with noise and disturbance. The MCMBPC(Multivariable Constrained Model Based Predictive Control) is adopted for the control of the specific boiler turbin model. The fault detection and diagnosis are accomplished with the Kalman filter and two bias estimators. Once a fault is detected, two Bias estimators are driven to estimate the fault and to discriminate Process fault and sensor fault. In this paper, a fault tolerant control scheme combining MCMBPC with a fault compensation method based on the bias estimator is proposed. The proposed scheme has been applied to the nonlinear boiler system and shown a satisfactory performance through some simulations.

• Journal of Institute of Control, Robotics and Systems
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• v.4 no.1
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• pp.123-133
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• 1998

In this paper, an algorithm of fault detection and diagnosis during operation of induction motors under the condition of various loads and rates is investigated. For this purpose, the spectrum pattern of input currents is used in monitoring the state of induction motors, and by clustering the spectrum pattern of input currents, the newly occurrence of spectrum patterns caused by faults are detected. For the diagnosis of the fault detected, a fuzzy fault tree is designed, and the fuzzy relation equation representing the relation between an induction motor fault and each fault type, is solved. The solution of the fuzzy relation equation shows the possibility of occurence of each fault. The results obtained are summarized as follows : (1) Using clustering algorithm by unsupervised learning, an on-line fault detection method unaffected by the characteristics of loads and rates is implemented, and the degree of dependency for experts during fault detection is reduced. (2) With the fuzzy fault tree, the fault diagnosis process become systematic and expandable to the whole system, and the diagnosis for sub-systems can be made as an object-oriented module.

• The Transactions of the Korean Institute of Electrical Engineers A
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• v.48 no.1
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• pp.52-60
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• 1999

This paper deals with a fault detection and isolation scheme for a DC motor driven centrifugal pump system. The emphasis is placed on the design and implementation of the residual generatorm, based on parity relation, that provides decision logic unit with residuals that will be further processed to detect and isolate three important faults in the system;brush fault, impeller fault, and the speed sensor fault. Two process faults are modelled as multiplicative type faults, while the sensor fault as an additive one. With multiplicative fault, the implementation of the residual generator needs the time varying transformation matrix that must be computed on-line. Typical implementation methods lack in generality because only a numerical approximation around the assumed fault levels is employed. In this paper, a new implementation method using well tranined neural network is proposed to improve the generality of the residual generator. Application results show that the fault detection and isolation scheme with the proposed residual generator effectively isolates three major faults in the centrifugal pump system even with a wide range of fault magnitude.

• Journal of Institute of Control, Robotics and Systems
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• v.22 no.4
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• pp.276-280
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• 2016

Due to the increasing interest in safety and consistent product quality over a past few decades, demand for effective quality monitoring and safe operation in the modern industry has propelled research into statistical based fault detection and diagnosis methods. This paper describes the application of Hotelling $T^2$ index based Principal Component Analysis (PCA) method for fault detection and diagnosis in industrial processes. Multivariate statistical process control techniques are now widely used for performance monitoring and fault detection. Conventional methods such as PCA are suitable only for steady state processes. These conventional projection methods causes false alarms or missing data for the systems with transient values of processes. These issues significantly compromise the reliability of the monitoring systems. In this paper, a reliable method is used to overcome false alarms occur due to varying process conditions and missing data problems in transient states. This monitoring method is implemented and validated experimentally along with matlab. Experimental results proved the credibility of this fault detection method for both the steady state and transient operations.

• Journal of the Semiconductor & Display Technology
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• v.12 no.2
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• pp.67-72
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• 2013

Temperature is a critical parameter in yield improvement for wafer manufacturing. In chemical vapor deposition (CVD) equipment, crack defect in ceramic heater leads to yield reduction, however, there is no suitable ceramic heater fault detection system for conventional CVD equipment. This paper proposes a short-time zero-crossing rate based fault detection method for the ceramic heater in CVD equipment. The proposed method measures the output signal ($V_{pp}$) of RF filter and extracts the zero-crossing rate (ZCR) as feature vector. The extracted feature vectors have a discriminant power and Gaussian mixture model (GMM) based fault detection method can detect fault in ceramic heater. Experimental results, carried out by measured signals provided by a CVD equipment manufacturer, indicate that the proposed method detects effectively faults in various process conditions.

• Smart Structures and Systems
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• v.14 no.3
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• pp.377-395
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• 2014

Vibration-based fault detection and condition monitoring of rotating machinery, using statistical process control (SPC) combined with statistical pattern recognition methodology, has been widely investigated by many researchers. In particular, the discrete wavelet transform (DWT) is considered as a powerful tool for feature extraction in detecting fault on rotating machinery. Although DWT significantly reduces the dimensionality of the data, the number of retained wavelet features can still be significantly large. Then, the use of standard multivariate SPC techniques is not advised, because the sample covariance matrix is likely to be singular, so that the common multivariate statistics cannot be calculated. Even though many feature-based SPC methods have been introduced to tackle this deficiency, most methods require a parametric distributional assumption that restricts their feasibility to specific problems of process control, and thus limit their application. This study proposes a nonparametric multivariate control chart method, based on multiscale wavelet scalogram (MWS) features, that overcomes the limitation posed by the parametric assumption in existing SPC methods. The presented approach takes advantage of multi-resolution analysis using DWT, and obtains MWS features with significantly low dimensionality. We calculate Hotelling's $T^2$-type monitoring statistic using MWS, which has enough damage-discrimination ability. A bootstrap approach is used to determine the upper control limit of the monitoring statistic, without any distributional assumption. Numerical simulations demonstrate the performance of the proposed control charting method, under various damage-level scenarios for a bearing system.

• IE interfaces
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• v.22 no.2
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• pp.126-134
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• 2009

As product quality and yield are essential factors in semiconductor manufacturing, monitoring the main manufacturing steps is a critical task. For the purpose, FDC(Fault detection and classification) is used for diagnosing fault states in the processes by monitoring data stream collected by equipment sensors. This paper proposes an FDC model based on decision tree which provides if-then classification rules for causal analysis of the processing results. Unlike previous decision tree approaches, we reflect the structural aspect of the data stream to FDC. For this, we segment the data stream into multiple subregions, define structural features for each subregion, and select the features which have high relevance to results of the process and low redundancy to other features. As the result, we can construct simple, but highly accurate FDC model. Experiments using the data stream collected from etching process show that the proposed method is able to classify normal/abnormal states with high accuracy.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2009.11a
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• pp.44-44
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• 2009

Fault detection is necessary for yield enhancement and cost reduction in semiconductor manufacturing. Sensory data acquired from the semiconductor processing tool is too large to analyze for the purpose of fault detection and classification(FDC). We studied the techniques of fault detection using statistical method. Multiple regression analysis smoothly detected faults and can be easy made a model. For real-time and fast computing time, the huge data was analyzed by each step. We also considered interaction and critical factors in tool parameters and process.

• 제어로봇시스템학회:학술대회논문집
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• 2002.10a
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• pp.32.2-32
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• 2002

In this paper, an efficient FFT-based fault detection algorithm is proposed. In our proposed method, fault detection is accomplished by process similar to the conventional FFT-based fault detection. However, the proposed technique adopts fast algorithms for preprocessing, where the conventional operation such as averaging is replaced with recursive average operation that outperforms the former in computational cost. And, the proposed approach utilizes the feature vector with the small dimension, which is extracted from spectral components of the lower and upper sidebands around the fundamental frequency. The mean absolute difference (MAD) criterion is used to finally determine whether motor...

• Journal of Korean Society for Quality Management
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• v.38 no.3
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• pp.354-362
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• 2010

This paper presents a non-linear control chart based on support vector machine regression (SVM-R) to improve the accuracy of fault detection of cyclic signals. The proposed algorithm consists of the following two steps. First, the center line of the control chart is constructed by using SVM-R. Second, we calculate control limits by variances that are estimated by perpendicular and normal line of the center line. For performance evaluation, we apply proposed algorithm to the industrial data of the chemical vapor deposition process which is one of the semiconductor processes. The proposed method has better fault detection performance than other existing method