• Journal of Periodontal and Implant Science
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• v.20 no.1
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• pp.150.1-150.1
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• 1990

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.20 no.9
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• pp.749-755
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• 2007

Recently, novel MEMS probe cards can support reliable wafer level chip test with high density probing capacity. However, manufacturing cost and process complexity are crucial weak points for low cost mass production. To overcome these limitations, we have developed micro spring structured MEMS probe card. For fabrication of micro spring module, a wire bonder and electrolytic polished gold wires are used. In this case, stringent tension force control is essential to guarantee the low level contact resistance of micro spring for reliable probing performance. For this, relation between tension force of fabricated probe card and contact resistance is characterized. Compare to conventional probe cards, developed MEMS probe card requires fewer fabrication steps and it can be manufactured with lower cost than other MEMS probe cards. Also, due to the small contact scratch patterns, we expect that it can be applied to bumping types chip test which require higher probing density.

• Journal of Advanced Marine Engineering and Technology
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• v.28 no.7
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• pp.1055-1062
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• 2004

As for the Production of internal combustion engines there has been further movement toward development of high Performance engines with improved fuel efficiency as well as a lightweight and a small size. These tendencies help to solve the problems in engines for example, such as thermal load. abnormal combustion and so on. In order to investigate these Problems, a thin film-type probe for measuring instantaneous temperature has been suggested. A method for manufacturing such a probe was established in this study The instantaneous surface temperature of a constant volume combustion chamber was measured by using this probe and the heat flux was obtained through Fourier analysis In order to thoroughly understand the characteristics of combustion. authors measured wall temperature of combustion chamber and calculated heat flux through a cylinder wall while varying the protrusion height of probe. For these Purposes, the instantaneous surface temperature probe was developed. thereby making possible the analysis of instantaneous temperature of wall surface and the detection of unsteady heat flux in the constant volume combustion chamber.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2000.06a
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• pp.1528-1532
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• 2000

The conventional optics and near field optics are compared numerically in the view points of the spot size and propagation characteristics. The decaying characteristics of near field light require the optics to access the object within several tens of nanometers. Therefore the gap control is one of the main issues in the near field optics area. In this paper the gap control is done by using the shear force of the NF(Near Field) probe and the characteristics are examined. The probe is modeled as a 2'nd order mass-spring-damper system driven by a harmonic force. The primary cause of the decrease in vibration amplitude is due to the damping force - shear force - between the surface and the probe. Using the model, damping constant and resonance frequency of the probe is calculated as a function of probe-sample distance. Detecting the amplitude and phase shift of the NF probe attached to the high Q-factor piezoelectric tuning fork, we can control the position of the NF probe about 0 to 50nm above the sample. The feedback signal to regulate the probe-sample distance can be used independently for surface topography imaging. 3-D view of the shear force image of a testing sample with the period of $1{\mu}m$ will be shown.

• Proceedings of the Korean Vacuum Society Conference
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• 2012.02a
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• pp.181-181
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• 2012

The microwave probe for measuring plasma density is widely used for its advantages: First, it is not affected by the reactive gas. Second, it can measure local plasma parameters such as plasma density, plasma potential and plasma temperature. Third, it is simple and robust. A cut-off probe is the one of the most promising microwave probe. Recently, Kim et al. reveals the physics of the cut-off probe but the effect of the sheath on the determination of the plasma density is not explained. In this presentation, for taking account of sheath effects on determination of plasma density from the cut-off peak, a simplified circuit modeling and an E/M simulation are conducted. The results show that occupation ratio of sheath volume between two tips of the cut-off probe and subsequence pressure condition mainly change position of the cut-off peak with respect to plasma frequency. Magnitude of relative voltage taken on the impedance of sheath and the impedance of bulk plasma can explain this effect. Furthermore, effects of gap size, tip radius, and tip length ware revealed based on above analysis.

• Journal of the Korean Society for Precision Engineering
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• v.25 no.5
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• pp.140-147
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• 2008

In this study, a carbon nanotube probe (CNT probe) is proposed as a mechanical force transducer for the measurement of pico-Newton (pN) order force in biological applications. In order to measure nantube's displacement in the air or liquid environment, the fabrication of a CNT probe with tip-specific loading of fluorescent dyes is performed using tip- specific functionalization of the nanotube and chemical bonding between dyes and nanotube. Also, we experimentally investigated the mechanical properties of the CNT probe using electrostatic actuation and fluorescence microscope measurement. Using fluorescence measurement of the tip deflection according to the applied voltage, we optimized the bending stiffness of the CNT probe, therefore determined the spring constant of the CNT probe. The results show that the spring constant of CNT probes is as small as 1 pN/nm and CNT probes can be used to measure pN order force.

• Journal of Biomedical Engineering Research
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• v.27 no.5
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• pp.229-236
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• 2006

The acoustic field analysis method is the superior calibration method for rectifying the ultrasonic probe sensitivity. This method also can be applied to evaluate the probe performance in clinical fields without numerical analysis and precise measurements. In this paper, we propose the method of acoustic field pattern analysis with probe channel division for the evaluation of diagnostic ultrasound probe characterization. In order to verify our purpose, we performed a set of experiments. We measured the acoustic-field pattern of the three inferiority probes by channel division to evaluate an acoustic field distribution and impulse response characteristics. By comparing the results of acoustic field measurement method with that of conventional method such as impulse response and live image test for linear array probes, it is demonstrated that the ultrasound field measurement method is more effective then conventional method in detection of defective elements.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.20 no.7
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• pp.25-32
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• 2021

In the previous study, a study was conducted to improve the exhaust gas intake efficiency by improving the existing soot measurement probe in the shape and angle of the exhaust port. As a result, it can be seen that the smoke measurement performance according to the shape and angle is improved. In previous studies, the performance of the soot probe was not confirmed for the Korean KD 147 mode, which has a low suction flow rate and a long inspection time. So, we would like to confirm the improvement of the smoke probe performance of the Korean KD 147 mode, which is close to the actual driving conditions. The probe used in this study is another type of probe, and has a circular ring shape instead of a rib and variable center position unit, so the probe center hole is located close to the center of the exhaust pipe.

• Journal of Sensor Science and Technology
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• v.30 no.4
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• pp.236-242
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• 2021

In this paper, we report the fabrication of the tip-on-gate of a field-effect-transistor (ToGoFET) probe using a standard complementary metal-oxide-semiconductor (CMOS) process and the performance evaluation of the fabricated probe. After the CMOS process, I-V characteristic measurement was performed on the reference MOSFET. We confirmed that the ToGoFET probe could be operated at a gate voltage of 0 V due to channel ion implantation. The transconductance at the operating point (Vg = 0 V, Vd = 2 V) was 360 ㎂/V. After the fabrication process was completed, calibration was performed using a pure metal sample. For sensitivity calibration, the relationship between the input voltage of the sample and the output current of the probe was determined and the result was consistent with the measurement result of the reference MOSFET. An oxide sample measurement was performed as an example of an application of the new ToGoFET probe. According to the measurement, the ToGoFET probe could spatially resolve a hundred nanometers with a height of a few nanometers in both the topographic image and the ToGoFET image.

• Journal of Software Assessment and Valuation
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• v.15 no.1
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• pp.109-114
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• 2019

In this paper, simulations of S-parameter and characteristic impedance for the probe pin are performed and its high-frequency performance is analyzed. The probe pins are arranged with one signal pin in the center and four ground pins on the top, bottom, left and right sides. The insertion loss and return loss of the probe pin are calculated while increasing the separation between the probe pins to 0.35 mm, 0.40 mm, and 0.50 mm, respectively. It is confirmed that the probe pin has different features of the insertion loss due to its periodic resonance phenomenon. Effect of the characteristic impedance on pitch and assignment of the probe pin is also analyzed. It is verified that there are a number of ground pins whose characteristic impedance is close to 50 Ω.