• 한국진공학회:학술대회논문집
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• 한국진공학회 2014년도 제46회 동계 정기학술대회 초록집
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• pp.218.1-218.1
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• 2014

In order to measure the absolute plasma density, various probes are proposed and investigated and microwave probes are widely used for its advantages (Insensitivity to thin non-conducting material deposited by processing plasmas, High reliability, Simple process for determination of plasma density, no complicate assumptions and so forth). There are representative microwave probes such as the cutoff probe, the hairpin probe, the impedance probe, the absorption probe and the plasma transmission probe. These probes utilize the microwave interactions with the plasma-sheath and inserted structure (probe), but frequency range used by each probe and specific mechanisms for determining the plasma density for each probe are different. In the recent studies, behaviors of each microwave probe with respect to the plasma parameters of the plasma density, the pressure (the collision frequency), and the sheath width is abundant and reasonably investigated, whereas relative diagnostic characteristics of the probes by a comparative study is insufficient in spite of importance for comprehensive applications of the probes. However, experimental comparative study suffers from spatially different plasma characteristics in the same discharge chamber, a low-reproducibility of ignited plasma for an uncertainty in external discharge parameters (the power, the pressure, the flow rate and so forth), impossibility of independently control of the density, the pressure, and the sheath width as well as expensive and complicate experimental setup. In this paper, various microwave probes are simulated by finite-different time-domain simulation and the error between the input plasma density in FDTD simulations and the measured that by the unique microwave spectrums of each probe is obtained under possible conditions of plasma density, pressure, and sheath width for general low-temperature plasmas. This result shows that the each probe has an optimum applicable plasma condition and reliability of plasma density measurement using the microwave probes can be improved by the complementary use of each probe.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2012년도 제43회 하계 정기 학술대회 초록집
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• pp.148-148
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• 2012

A cutoff probe is the novel diagnostic method to get the absolute plasma density with simple system and less assumption. However, high density of ion flux from plasma on probe tip can make the error of plasma density measurement because the dielectric material of probe tip can be damaged by ion flux. We proposed a shielded cutoff probe using the ceramic tube for protection from ion flux. The ceramic tube on probe tip can intercept the ion flux from plasma. The transmitted spectrum using the shielded cutoff probe is good agreement with E/M wave simulation result (CST Microwave Studio) and previous circuit simulation of cutoff probe [1]. From the analysis of the measured transmitted spectrum base on the circuit modeling, the parallel resonance frequency is same as the unshielded cutoff probe case. The obtained results of electron density is presented and discussed in wide range of experimental conditions, together with comparison result with previous cutoff method.

• 한국전기전자재료학회논문지
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• 제19권9호
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• pp.825-831
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• 2006

As an increase of chip complexity and level of chip integration, chip input/output (I/O) pad pitches are also drastically reduced. With arrival of high complexity SoC (System on Chip) and SiP (System in Package) products, conventional horizontal type probe card showed its limitation on probing density for wafer level test. To enhance probing density, we proposed new vertical type probe card that has the $70{\mu}m$ probe needle with tungsten wire in $80{\mu}m$ micro-drilled hole in ceramic board. To minimize alignment error, micro-drilling conditions are optimized and epoxy-hardening conditions are also optimized to minimize planarity changes. To apply wafer level test for target devices (T5365 256M SDRAM), designed probe card was characterized by probe needle tension for test, contact resistance measurement, leakage current measurement and the planarity test. Compare to conventional probe card with minimum pitch of $50{\sim}125{\mu}m\;and\;2\;{\Omega}$ of average contact resistance, designed probe card showed only $22{\mu}$ of minimum pitch and $1.5{\Omega}$ of average contact resistance. And also, with the nature of vertical probing style, it showed comparably small contact scratch and it can be applied to bumping type chip test.

• Journal of Electrical Engineering and Technology
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• 제13권1호
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• pp.406-412
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• 2018

In this paper, we propose a narrow resonant waveguide probe that can improve the measurement sensitivity in near-field scanning microwave microscopy. The probe consists of a metal waveguide incorporating the following two sections: a straight section at the tip of the probe whose cross-section is a double-ridged rectangle, and whose height is much smaller than the waveguide width; and a standard waveguide section. The advantage of the narrow waveguide is the same as that of the quarter-wave transformer section i.e., it achieves impedance-matching between the sample under test (SUT) and the standard waveguide. The design procedure used for the probe is presented in detail and the performance of the designed resonant probe is evaluated theoretically by using an equivalent circuit. The calculated results are compared with those obtained using the finite element method (Ansoft HFSS), and consistency between the results is demonstrated. Furthermore, the performance of the fabricated resonant probe is evaluated experimentally. At X-band frequencies, we have measured the one-dimensional scanning reflection coefficient of the SUT using the probe. The sensitivity of the proposed resonant probe is improved by more than two times as compared to a conventional waveguide cavity type probe.

• 한국원자력학회:학술대회논문집
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• 한국원자력학회 2005년도 춘계학술발표회
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• pp.1086-1087
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• 2005

• 센서학회지
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• 제13권5호
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• pp.335-341
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• 2004

A light collecting probe named Multi-colored Integrated Receiving Optics (MICRO) is experimentally examined to verify its performance. For these purposes, the time-series signals of MICRO probe is compared with those of electrostatic probe and light-guided probe by monitoring, for example, such as OH radical chemiluminescence, CH radical band and droplet Mie scattering. In addition, the experiment was conducted by using laminar premixed Bunsen flame, turbulent premixed Bunsen flame and premixed spray flame, respectively. It was confirmed that the performance of MICRO probe was very useful and convenient to obtain the chemiluminescence signals from local regions in turbulent premixed Bunsen flame and premixed spray flame.

• 한국정밀공학회지
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• 제20권8호
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• pp.101-107
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• 2003

A new mechanical probe for 3-D feature measurement on coordinate measuring machines (CMMs) is presented. The probe is composed of the contact stylus and the three-component force sensor. With the stylus mounted on the force sensor, the probe can not only measure 3-D features, but also detect contact force acting on the stylus tip. Furthermore, the probing direction and the actual contact position can be determined by the relationship among three components of contact force to be detected. In this paper, transformation matrix representing the relationship between the external force acting on the stylus tip and the output voltages of measurement gauges is derived and calibrated. The prototype of probe is developed and its availability is investigated through the experimental setup for calibration test of the probe. A series of experimental results show that the proposed probe can be an effective means of improving the accuracy of touch probing on CMM.

• 대한전기학회:학술대회논문집
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• 대한전기학회 1995년도 추계학술대회 논문집 학회본부
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• pp.555-557
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• 1995

In near field optics, optical fiber probe is smaller than the wavelength of light. This small probe makes it possible to overcome the diffraction limit due to wave property of light. In conventional optical systems, the image resolution is governed by wavelength. But in NSOM, it is determined by probe tip size and probe shape. Therefore probe tip size and shape are very important points in near field optics. In this paper, we will suggest the new fabrication methods of optical fiber probe and show that the probe tip size is sub-micrometer using SEM.

• 한국정보처리학회:학술대회논문집
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• 한국정보처리학회 2005년도 춘계학술발표대회
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• pp.1045-1048
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• 2005

유전자 칩의 정확성은 각 유전자들의 식별자로 활용되는 probe들에 의해 결정된다. 일반적으로 칩을 구성하는 probe들은 반응 오류를 예측하기 위해 이중구조와 녹는점과 같은 요소들을 고려한다. 또한 다른 유전자들과의 교차반응을 최소화하기 위해 각 probe들의 specificity도 고려되어야 한다. probe가 specificity를 보장하는지 검증하는 것은 전체 유전자들을 탐색해야 하므로 대규모 인간염색체에 대해서는 많은 시간이 소요된다. 본 논문에서는 specificity를 만족하는 probe들을 선택하는 효율적인 알고리즘을 제시한다. 제시한 알고리즘은 해시 테이블을 활용하여 probe가 specificity를 만족하지 못하게 하는 유전자 시퀀스들만을 탐색하여 비교한다. 제시한 알고리즘이 기존 알고리즘보다 효율적임을 실험결과를 통해 보인다.

• 미생물학회지
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• 제26권3호
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• pp.149-154
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• 1988

Japanese Encephalitis Virus(JEV) can be detected conveniently by the use of biotinylated cDNA probe. To prepare biotinylated probe aminoallyl dUTP was first synthesized chemically to reverse transcribe the virial RNA. The allylamine-labeled cDNA was then converted to the biotin-cDNA by the reaction with an activated biotin ester, NHS-ACA-biotin. The JEV genomic RNA was hybridized to the biotinylated cDNA probe on nitrocellulose filter and visualized colorimetrically by streptavidin complexes with alkaline phosphatase polymer. Sensitivity of the detection system was determined by estimating the amount of the JEV genomic RNA through comparison with signals generated from the biotinylated and $^{32/P}$ -labeled probes. It was found that the biotin probe was as sensitive as $^{32/P}$ -cDNA probe which can detect 50pgs of the target RNA.