• Proceedings of the Korean Vacuum Society Conference
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• 2011.02a
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• pp.472-472
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• 2011

The capacitive coupled plasma (CCP) has been extensively used in the semiconductor industry because it has not only good uniformity, but also low electron temperature. But CCP source has some problems, such as difficulty in varying the ion bombardment energy separately, low plasma density, and high processing pressure, etc. In this reason, dual frequency CCP has been investigated with a separate substrate biasing to control the plasma parameters and to obtain high etch rate with high etch selectivity. Especially, in this study, we studied on the etching of $SiO_2$ by using the pulse-time modulation in the dual-frequency CCP source composed of 60 MHz/ 2 MHz rf power. By using the combination of high /low rf powers, the differences in the gas dissociation, plasma density, and etch characteristics were investigated. Also, as the size of the semiconductor device is decreased to nano-scale, the etching of contact hole which has nano-scale higher aspect ratio is required. For the nano-scale contact hole etching by using continuous plasma, several etch problems such as bowing, sidewall taper, twist, mask faceting, erosion, distortions etc. occurs. To resolve these problems, etching in low process pressure, more sidewall passivation by using fluorocarbon-based plasma with high carbon ratio, low temperature processing, charge effect breaking, power modulation are needed. Therefore, in this study, to resolve these problems, we used the pulse-time modulated dual-frequency CCP system. Pulse plasma is generated by periodical turning the RF power On and Off state. We measured the etch rate, etch selectivity and etch profile by using a step profilometer and SEM. Also the X-ray photoelectron spectroscopic analysis on the surfaces etched by different duty ratio conditions correlate with the results above.

• Proceedings of the KIEE Conference
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• 2004.07c
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• pp.1817-1819
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• 2004

From the plasma application point of view, electron temperature and density are one of the most important parameters for plasma process. But it is only available to control plasma by adjusting external factors like gas pressure and input power. In this paper, pulse-modulated plasma is generated by modulating 13.56GHz RF power with 1, 5, 10kHz pulse. And Langmuir probe technique is used to study the distribution of electron temperature and density. When modulated pulse is off, electron temperature decreases gradually in form of exponential decay. The value t of exponential decay slope is 33.619, 13.834, 10.803 in 1kHz. 5kHz. 10kHz. This implies that this method can be used to control electron temperature and density.

• The Journal of Korean Medicine Ophthalmology and Otolaryngology and Dermatology
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• v.19 no.1
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• pp.135-144
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• 2006

Objective : The purpose of this study was to know the clinical effects of hydrotherapy based Ultrasonic spa using SoPung-Tang on pulse wave velocity in patients with sequelae of CVA. Methods : PWV(Pulse wave velocity), Bio Chemistry, Hematology, Blood Pressure were investigated in 20 patients(Experimental group 13, Control group 7) who have been in Semyung Oriental medicine hospital from December 2005 to February 2006. Results : 1. In experimental group, Rt PWV diminished 4.8%, Lt PWV 5.1%. 2. In control group, Rt PWV diminished 3.3%, Lt PWV 1.8%. Conclusion : Hydrotherapy based Ultrasonic spa using SoPung-Tang showed useful effects in patients with sequelae of CVA.

• Journal of Ocean Engineering and Technology
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• v.1 no.1
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• pp.138-143
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• 1987

Friction welding has emerged as a reliable process for high-production commercial applications with significant economic and technical advantages. But nondestructive test in friction weld was not clearly developed. Therefore the experimental verification is necessary in order to understand the characteristcs of the pulse echo effects according to various change in welding conditions. This paper presents an attempt to determine the relationship between the varios welding conditions and the coefficients of reflection using the ultrasonic pulse echo method in dissibilar metals friction weld. The new approach of calculating the coefficients of reflection based on measured amplitudes of the echoes is applied in this paper. These coefficients provides a single quantitative measurement which involves both acoustic energy reflected at the welded interface as well as transmitted across the interface. As a result, it was known that the quantitave relationship between welding conditions and the coefficients of reflection using the ultrasonic pulse echo exists in dissimilar metals friction weld.

• Journal of the Korean Society for Heat Treatment
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• v.8 no.4
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• pp.255-265
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• 1995

Stainless steel type 304L has been nitrided in the low pressure (600Pa) and high nitrogen (80% $N_2$+20% $H_2$) environment for 5 hours by the square-wave-pulsed-d.c. plasma as a function of temperature $400{\sim}550^{\circ}C$ and pulsation. At the lower temperature range of $400{\sim}500^{\circ}C$ and at the relatively high ratio of pulse duration to pulse period. "S-phase" has been developed in the form of thin nitrided surface layer which has many cracks, leading to be nearly impossible for the industrial anti-wear and anti-corrosion applications. At the higher temperature up to $550^{\circ}C$ with the increasing ratio of the pulse duration to pulse period up to $50{\mu}s/100{\mu}s$, the nitrided layer, whose growth rate has increased also, has been composed mainly of CrN and $Fe_4N$ phases and has become thick, uniform and nearly crack-free.

• 한국연소학회:학술대회논문집
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• 2003.12a
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• pp.153-157
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• 2003

Supersonic and hypersonic aircrafts must pass wide range of speed to reach high speed region. But for existing engines the most efficient operating speed ranges are decided according to their flying speed, so an engine which mixes several engines like TRJ (Turbo Ramjet) and ARJ (Air Turbo Ramjet) has been planed. This mixed type engine has inefficiency that more than two engines must be installed simultaneously, but the pulse detonation engine (PDE) that uses detonation wave has a strong point that it can operate in all speed range with single engine. This paper deals with the simulation of the pulse detonation engine which uses hydrogen peroxide $(H_2O_2)$ mono propellant. Hydrogen peroxide is low-cost propellant, and it is reacted without oxidizer. Comparison between $H_2-O_2$ mixture with $H_2O_2$ mono propellant about thrust, pressure, temperature and velocity shows that $H_2O_2$ is a very useful propellant.

• Proceedings of the Korea Institute of Applied Superconductivity and Cryogenics Conference
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• 2003.10a
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• pp.159-162
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• 2003

Cooling with easy, reliable cryocooler is highly desirable for the commercial and military application The pulse tube refrigerator has no moving parts at the cold end, so that the mechanical vibration and magnetic noise can be reduced to the low level with higher relaibility and longer lifetime than the Stilting cryocooler. The inertance tube improve the performance of pulse tube refrigerator by providing optimal phase shift between pressure and amss flow rate, and it is easiest to implement at large cooling capacity and high operating frequency. In this study, the performance of the inertance pulse tube refrigerator was investigated by analysis. The results show the influence of the diameter and length of the inertance tube on the performance of the refrigerator.

• The Transactions of the Korean Institute of Electrical Engineers C
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• v.55 no.12
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• pp.606-610
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• 2006

We investigated the output characteristics of Nd:YAG lasers at wavelength of 1444 nm, which were pumped by 450 Xe-flashlamp, 700 torr Xe-flashlamp and 700 torr Kr-flashlamp. With a Xe-flashlamp of 700 torr of gas pressure, the pulse energy of 0.738 J was obtained with repetition rate of 9.16 Hz and pumping pulse width of 400 ms. In case pumping pulse width of 5 ms and repetition rate of 1 Hz, 700 torr Kr-flashlamp showed the highest pulse energy of 1.44 J.

• The Transactions of the Korean Institute of Electrical Engineers C
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• v.49 no.9
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• pp.541-545
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• 2000

We propose a pulsed $CO_2$laser below 30W by the AC(60Hz) switching control of leakage transformer primary which has some advantages of cost and size compared to a typical pulsed power supply. Pulse repetition rate is adjusted from 5 Hz to 60 to Hz control laser output. In this laser a low voltage open loop control for high voltage pulse discharge circuit is employed to aviod the Hv sampling or switching and high voltage leakage transformer is used to convert low voltage pulse rectified from AC to high voltage one. A ZCS(Zero Crossing Switch) circuit and a PIC(programble one-chip microprocessor are used to control gate signal of SCR precisely. The pulse repetition rate is limited by 60Hz due to the frequency of AC line and a high leadkage inductance. The maximum laser output was about 23 W at pulse repetition rate of 60Hz total gas mixture of $CO_2$ : $N_2$ : He=1: 9: 15 and total pressure of 18 Torr

• Journal of the Institute of Electronics Engineers of Korea SC
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• v.45 no.5
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• pp.21-27
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• 2008

Despite recent studies on development of pulse diagnosis systems and needs for commercializing them, the reproducibility is one of the most controversial issues as ever. Because the pulse pressure value, which is one of the important parameters to evaluate reproducibility, is very vulnerable to moving artifacts, the reproducibility can not be obtained easily. In this paper, we suggested a moving artefacts detection system for a pulse diagnosis system so that a pulse diagnosis system can be robust to theses kinds of artefacts by excluding the contaminated parts from the pulse wave signal to be analyzed. This moving artifacts detection system was designed to consist of a three-axis accelerometer, an electromyography amplifier and a two-axis tilt sensor. To assess the suitability of the system, we examined the characteristics of each sensor's output signals with regard to the three specific motions such as extension, flexion and rotation. And, we also examined the each sensor's response to the high-frequency and low-frequency moving artifacts while the pulse wave signal was acquired from a pressure sensor for the pulse diagnosis. From these results, we could find that the response to subject's motions would be reflected in electromyography signal first, in accelerometer signals and in tilt sensor sequently. And, the facts that a stable pulse wave can be acquired in two seconds after high frequency or low frequency motions ended, were also found. Consequently, based on these findings, we set up some rules on the moving artifacts detection and designed an algorithm which is fit for our moving artifacts detection system.