• 제목/요약/키워드: precise deposition

검색결과 91건 처리시간 0.032초

Patterning of CVD Diamond Films For MEMS Application

  • Wang, Xiaodong;Yang, Yirong;Ren, Congxin;Mao, Minyao;Wang, Weiyuan
    • 한국진공학회지
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    • 제7권s1호
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    • pp.167-170
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    • 1998
  • To apply diamond films in microelectromechanical systems(MEMS), it is necessary to develop the patterning technologies of diamond films in the micrometer scale. In this paper, three different kinds of technologies for patterning CVD diamond films carried out by us were demonstrated: selective growth by improved diamond nucleation in DC bias-enhanced microwave plasma chemical vapor deposition (MPCVD) system, selective growth of seeding using diamond-particle-mixed photoresist, and selective etching of oxygen ion beam using Al as the mask. It was show that high selectivity and precise patterns had been achieved, and all the processes were compatible with IC process.

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처짐저감을 위한 OLED 증착 마스크-프레임 구조체

  • 문병민;정남희;조창상;김국원
    • 한국반도체및디스플레이장비학회:학술대회논문집
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    • 한국반도체및디스플레이장비학회 2007년도 춘계학술대회
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    • pp.164-168
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    • 2007
  • Deformation of a shadow mask is one of the problems encountered during the deposition of organic materials for manufacturing large size OLED. The larger the glass substrate, the larger the shadow mask becomes. But as the size of the shadow mask increases, its deformation becomes more severe, thereby making it difficult to deposit organic materials in a precise pattern on a substrate. In this paper, a new type mask-frame structure is proposed. The proposed mask-frame structure making a curved mask has the ability of reducing drooping of mask. The test frame is fabricated and evaluation experiments are performed.

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Real-time Spectroscopic Ellipsometry studies of the Effect of Preparation Parameters on the Coalescence Characteristics of Microwave-PECVD Diamond Films

  • Hong, Byungyou
    • 한국결정성장학회:학술대회논문집
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    • 한국결정성장학회 1998년도 PROCEEDINGS OF THE 14TH KACG TECHNICAL MEETING AND THE 5TH KOREA-JAPAN EMGS (ELECTRONIC MATERIALS GROWTH SYMPOSIUM)
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    • pp.49-54
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    • 1998
  • The growth of diamond films in plasma enhanced chemical vapor deposition(PECVD) processes requires high substrate temperatures and gas pressures, as well as high-power excitation of the gas source. Thus determining the substrate temperature in this severe environment is a challenge. The issue is a critical one since substrate temperature is a key parameter for understanding and optimizing diamond film growth. The precise Si substrate temperature calibration based on rapid-scanning spectroscopic ellipsometry have been developed and utilized. Using the true temperature of the top 200 ${\AA}$ of the Si substrate under diamond growth conditions, real time spectroellipsometry (RTSE) has been performed during the nucleation and growth of nanocrystallind thin films prepared by PECVD. RTSE shows that a significant volume fraction of nondiamond(or{{{{ {sp }^{2 } -bonded}}}}) carbon forms during thin film coalescence and is trapped near the substrate interface between ∼300 ${\AA}$ diamond nuclei.

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초음파 금속 용착기를 이용한 Cu 박판의 용착성 실험 (The Establishment of Bonding Conditions of Cu Using an Ultrasonic Metal Welder)

  • 장호수;박우열;박동삼
    • 한국생산제조학회지
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    • 제20권5호
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    • pp.570-575
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    • 2011
  • Ultrasonic metal welder is consisted of power supply, transducer, booster, and horn. Precise designing is required since each parts' shape, length and mass can affect driving frequency and vibration mode. This paper analyzed Cu sheet deposition characteristics using ultrasonic metal welder and tension tester. A horn suitable for 40,000Hz was attached to the ultrasonic metal welder in order to weld Cu plates. The Cu sheet welding was done with different amplitude, pressure, and welding time, and its maximum tension was measured with tension tester. Maximum tension of 153.87N was obtained when the pressure was 2.0bar, amplitude was 80%, and welding time was 0.30s. Therefore, excessive welding condition negatively influences maximum tension measurement result.

High Aspect Single Crystalline Au Nanowire Electrode with an Atomically Smooth (111) Surface

  • 강미정;강호석;곽주현;김봉수
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2011년도 제41회 하계 정기 학술대회 초록집
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    • pp.210-210
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    • 2011
  • Ultrasmall electodes are of great importance for basic electrochemical study and applications. We fabricated single crystal (111) Au nanowire (NW) by growth mechanism on substrate without any catalyst. Consequently, these high aspect NW combined with tungsten microwire and the electrodes having NW tip on their end were obtained. These single crystal Au (111) NWs were characterized by electron microscope and electrochemical analysis. We show that precise electrochemical measurement could be possible on these NW electrode by obtaining underpotential deposition (UPD) and ferricyanide CV profiles on the electrode. The immersed depth of electrode into solution was controlled in micrometer scale by piezo-driven manipulator.

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Innovations in Materials Deposition for Plastic Electronics

  • Creagh, Linda T.
    • 한국정보디스플레이학회:학술대회논문집
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    • 한국정보디스플레이학회 2005년도 International Meeting on Information Displayvol.I
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    • pp.673-675
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    • 2005
  • Ink jet printheads are now widely used in manufacturing processes that require precise dispensing of materials. Today, Dimatix manufactures a variety of drop-on-demand ink jet printheads for the industrial printing market, but emerging opportunities present fresh challenges to our technology. In response to requirements for digitally printing on flexible substrates and dispensing novel electronic fluids, we are developing next generation jetting technology based on our three-dimensional silicon MEMS technology with a piezo-driven pumping chamber integrated into the chip structure. This presentation will address the functional and physical design features and properties of Dimatix's MEMS process, its characteristics, reliability and usability. Examples of opportunities and applications for digitally printing electronic fluids on flexible substrates with MEMS-based ink jet technology will be presented.

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A Study on Heat Transfer and Film Growth Rate During the III-V MOCVD Processes

  • Ik Tae, Im;MASAKAZU, SUGIYAMA;VOSHIAKI, NAKANO;YUKIHIRO, SHIMOGAKI
    • 한국반도체및디스플레이장비학회:학술대회논문집
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    • 한국반도체및디스플레이장비학회 2003년도 추계학술대회 발표 논문집
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    • pp.192-199
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    • 2003
  • Film growth of InP and GaAs using TMIn, TMGa, TBAs and TBP is numerically predicted and compared to the experimental results. To obtain exact thermal boundary conditions at the reactor walls, the gas flow and heat transfer are analyzed for full three-dimensional reactor including outer tube as well as the inner reactor parts. The results indicate that the exact thermal boundary conditions are important to get precise film growth rate prediction since film deposition is mainly controlled by the temperature dependent diffusion. The results also show that thermal diffusion plays an important role in the upstream region.

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투명조각자기의 고속 FDM 3D 프린팅을 위한 가변 압출 기법 (An Adaptive Extrusion Control Technique for Faster FDM 3D Printing of Lithophanes)

  • 장승호;홍정모
    • 한국CDE학회논문집
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    • 제22권2호
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    • pp.190-201
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    • 2017
  • This paper proposes how to solve a problem of FDM 3D printer's irregular output when changing volume of extrusion, adjusting movement speed of the printer's head and a way to fill new inner part. Existing slicers adjust directly to change the rotation speed of the stepper. In this method, the change of the extrusion area is delayed due to the gap between the stepper and the nozzle, so that precise control is difficult. We control the extrusion area adjusting the moving speed of the print head and making constantly the rotation speed of the stepper. Thus, the output time can be shortened by generating an efficient path having a short travel distance. For evaluation, we applied our method to lithophanes with detailed variation. Comparing existing methods, our method reduced output time at least 30%.

Scanning Tunneling Microscopy Study of Alcohol Adsorption on NiAl(110) Deposited by Pulsed Injection

  • Choi, Eun-Yeoung;Lee, Youn-Joo;Lyo, In-Whan
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2009년도 제38회 동계학술대회 초록집
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    • pp.353-353
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    • 2010
  • Alcohol is a vesatile polar solvent for molecules. As a preparation to deposit large molecules, we studied interaction of solvent molecules on metallic surface. in this work, we report on methanol adsorption on NiAl(110) with scanning tunneling microscopy (STM). These alcohol solvent molecules were deposited by a pulse injection method suitable for deposition of thermally unstable molecules. The injection of liquid alcohol onto the substrate in UHV was performed by using a high-speed solenoid valve with the back-pressure reduced down to 100 Torr. This technique allowed precise control over the amount of dosing of molecules to less than 1 L. Alcohol-induced features, attributed to methoxy, were found on bare NiAl(110) surface.

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Beta-amyloid imaging in dementia

  • Chun, Kyung Ah
    • Journal of Yeungnam Medical Science
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    • 제35권1호
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    • pp.1-6
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    • 2018
  • Alzheimer's disease (AD) is a neurodegenerative disorder associated with extracellular plaques, composed of amyloid-beta ($A{\beta}$), in the brain. Although the precise mechanism underlying the neurotoxicity of $A{\beta}$ has not been established, $A{\beta}$ accumulation is the primary event in a cascade of events that lead to neurofibrillary degeneration and dementia. In particular, the $A{\beta}$ burden, as assessed by neuroimaging, has proved to be an excellent predictive biomarker. Positron emission tomography, using ligands such as $^{11}C$-labeled Pittsburgh Compound B or $^{18}F$-labeled tracers, such as $^{18}F$-florbetaben, $^{18}F$-florbetapir, and $^{18}F$-flutemetamol, which bind to $A{\beta}$ deposits in the brain, has been a valuable technique for visualizing and quantifying the deposition of $A{\beta}$ throughout the brain in living subjects. $A{\beta}$ imaging has very high sensitivity for detecting AD pathology. In addition, it can predict the progression from mild cognitive impairment to AD, and contribute to the development of disease-specific therapies.