• Prospectives of Industrial Chemistry
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• v.22 no.6
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• pp.41-58
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• 2019

다공성 실리콘 나노 입자는 약물 전달과 바이오이미징 등 의생명공학 분야에 다양하게 활용할 수 있는 가능성을 지닌 소재이다. 실리콘 원소 특유의 생분해성, 발광 효과, 다공성 구조 형성을 통한 약물 전달 기능에 이르는 다양한 특성으로 인해 미래 중개의학 플랫폼으로 각광 받고 있으며, 특히 바이오이미징 분야에서의 활용성이 매우 주목 받고 있다. 이에 대한 최신 연구 동향을 보고하고자, 다공성 실리콘 나노 입자의 제작 및 바이오이미징 응용 연구에 대한 성과를 소개한다. 바이오이미징을 위한 핵심 요소인 발광 특성(근적외선 방출, 마이크로 초 단위의 감쇄 시간 등)에 대한 논의를 바탕으로 최근 연구 성과 및 약물 전달 과정 모니터링 기능 등 다방면의 응용 가능성에 대한 방향을 소개한다. 실리콘 나노 입자의 제작 및 표면 화학 반응을 통한 기능성 제어, 이를 활용한 바이오이미징 연구 동향에 대한 전략도 광범위하게 제시하고자 한다.

• Journal of Electrochemical Science and Technology
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• v.11 no.4
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• pp.330-335
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• 2020

Silicon surface nanostructures, which can be easily prepared by electrochemical etching, have attracted considerable attention because of its useful physical properties that facilitate application in diverse fields. In this work, electrochemical and electrochemical-scanning tunneling microscopic (EC-STM) techniques were employed to study the evolution of surface morphology during the electrochemical etching of Si(111)-H in a fluoride solution. The results exhibited that silicon oxide of the Si(111) surface was entirely stripped and then the surface became hydrogen terminated, atomically flat, and anisotropic in the fluoride solution during chemical etching. At the potential more negative than the flat band one, the surface had a tendency to be eroded very slowly, whereas the steps of the terrace were not only etched quickly but the triangular pits also deepened on anodic potentials. These results provided information on the conditions required for the preparation of porous nanostructures on the Si(111) surface, which may be applicable for sensor (or device) preparation (Nanotechnology and Functional Materials for Engineers, Elsevier 2017, pp. 67-91).

• Journal of the Korean Institute of Telematics and Electronics D
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• v.35D no.2
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• pp.33-39
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• 1998

A six-beam accelerometer with self-compensated off-axis sensitivity was fabricated onthe selectively diffused (111)-oriented n/n$^{+}$/n silicon substrates by a unique porous silicon micromachining technique, which has self-stip characteristics and highly seletive formation of porous silicon layer during anodic reaction. Also, the characteristics of the fabricated accelerometer were investigated. The sensitivity of the acceleormeter added up outputs of three bridges through a summing circuit was 0.68 mV/g and the nonlinearity was less than 2% of the full scale output. The measured first resonant frequency was 4.236 kHz. When the outputs of three bridges were compared to summing output of bridges obtained through summing circuit, the normal output for Z-axis acceleration exhibited the same value s summing outputs of three bridges without reduction of sensitivity and thus the sensitivity decrease due to additional beam was compensated. Although a maximum off-axis sensitivity in one bridge of the accelerometer showed 17% of normal sensitivity, the off axis sensitivity obtained from summing output of three bridges decreased to 1.0%. Therefore, the self-elimination of off-axis sensitivity can be simply realized by obtaining the output of the sensor through summing circuit.t.

• 한국정보디스플레이학회:학술대회논문집
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• 2002.08a
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• pp.1035-1038
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• 2002

The electrical properties of Porous polycrystalline silicon Nano-Structure (PNS) as a cold cathode were investigated as a function of anodizing condition, the thickness of Au film as a top electrode and the substrate temperature. Non-doped 2${\mu}m$-polycrystalline silicon was electrochemically anodized in HF: ethanol (=1:1) mixture as a function of the anodizing condition including a current density and anodizing time. After anodizing, the PNS was thermally oxidized for 1 hr at 900 $^{\circ}C$. Then, 20nm, 30nm, 45nm thickness of Au films as a top electrode were deposited by E-beam evaporator. Among the PNSs fabricated under the various kinds of anodizing conditions, the PNS anodized at a current density of 10mA/$cm^2$ for 20 sec has the lowest turn-on voltage and the highest emission current than those of others. Also, the electron emission properties were investigated as functions of measuring temperature and the different thickness of Au film as a top-electrode.

• Bulletin of the Korean Chemical Society
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• v.21 no.8
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• pp.769-773
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• 2000

The dependence of photoluminescence (PL) and photoluminescence itation (PLE) on preparation condi-tions and the aging of porous silicon carbide (PSC) have been investigatted. The fiber size of the material pre-pared under dark-current mode, labele d DCM, was larger than that of the photoassisted (PA)process.The intensity of the PL spectrum for the PA condition was higher than that of the DCM condition. The PA condition giving small fiber size exhibited amore prominent high-energy component but the emission bands of both con-ditionsobserved were rather similar. The origin of the PL may have played an importantrole in the surface defect center introduced by the reaction conditions ofHFatthe surface of the silicon carbide. Selective excita-tion of the PL bandsusingdifferent excitation wavelengths has been used to identify distinct componentswith-in the PL bandwidth. Two main PL bands with peak wavelength of494 and534 nm were clearly resolved. On the other hand, selectivc emission of the PLEbands using different emission wavelengths has been used to identify distinct components within the PLE bandwidth. The higher energy band with peak wavelength of 338 nm and the lower energy bands involving 390,451 and 500 nm were clearly resolved. According to the pro-ionged aging in air, PL spectra appearedasone band, This emission probably originated from states localized to the band-to-band recombination due to the oxidation on the crystallite surface.

• Proceedings of the Materials Research Society of Korea Conference
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• 2009.11a
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• pp.18.2-18.2
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• 2009

Ceramics have some properties that are unmatched by other kind of materials like metals or polymers. The ability of high thermal and chemical resistance and in case of being superior in specific mechanical properties makes the ceramic materials suitable for arange of applications. The microstructure and morphology of a material arguably permit the use of many advanced application otherwise difficult to achieve.Porous structures have some important applications in biomedical and environmental field. For human hard tissue reconstruction and augmentation procedure suitable biomaterials are used with a desirable porosity. A range of porous bioceramics were fabricated with tailored design to meet the demand of specific applications. Channeled and interconnected porosity was introduced in alumina, zirconia, and hydroxyapatite or tri calcium phosphate ceramics by different methods like multi-pass extrusion process, bubble formation in viscous slurry,slurry dripping in immiscible liquid, sponge replica method etc. The detailed microstructural and morphological investigations were carried out to establish the unique features of each method and the developed systems. For environmental filters the porous structures were also very important. We investigated a range of channeled and randomly porous silicon based ceramic composites to enhance the material stability and filtration efficiency by taking advantage of the material chemistry of the element. Detailed microstructural and mechanical characterizations were carried out for the fabricated porous filtration systems.

• Proceedings of the KIEE Conference
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• 1998.07d
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• pp.1558-1560
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• 1998

Macroporous silicon diaphragms 20 to $200{\mu}m$ thick have been formed on p-type silicon by anistropic etching in TMAH solution and then by electrochemical etching in HF-ethanol-water solution with an applied current. The pores have a pore diameter of $1.5{\sim}2{\mu}m$, with a depth of $20{\sim}30{\mu}m$ and are not interconnected, which are in sharp contrast to the porous silicon reported previouly for similarly doped p-Si. The fabrication of macroporous silicon and free-standing diaphragms is expected to offer new applications for microsensors, micro-machining, and separators.

• Proceedings of the Korean Ceranic Society Conference
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• 2004.04b
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• pp.42.3-42.3
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• 2004

• Proceedings of the Korean Ceranic Society Conference
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• 2003.04a
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• pp.145.2-145
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• 2003

• Proceedings of the Korean Ceranic Society Conference
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• 2003.04a
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• pp.147.2-147
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• 2003