• Tribology and Lubricants
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• v.22 no.2
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• pp.93-98
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• 2006

The numerical analysis of the negative pressure porous gas bearings is presented. The pressure distribution is calculated using the finite difference method. The Reynolds equation and Darcy's equation are solved simultaneously. The air bearing stiffness and damping are evaluated using the perturbation method. Rectangular uniform grid is employed to model the bearing. The vacuum preloading is considered. The pressure in the vacuum pocket is assumed to be a constant negative pressure. The total load, stiffness, damping and flow rate are calculated fur several geometrical configurations and several values of negative pressure. It is found that too large vacuum pocket can result in negative total force.

• Journal of the Korean Society for Precision Engineering
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• v.25 no.6
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• pp.134-142
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• 2008

In this paper, we propose a precise linear motion stage supported by magnetically preloaded air bearings. The eight aerostatic bearings with rectangular carbon porous pads were located only one side of vertical direction under the platen where four bearings are in both sides of horizontal direction as wrap-around-design, and this gives simpler configuration than which constrained by air bearings for all direction. Each of the magnetic actuators has a permanent magnet generating static magnetic flux far required preload and a coil to perturb the magnetic farce resulting adjustment of air- bearing clearance. The characteristics of porous aerostatic bearing are analyzed by numerical analysis, and analytic magnetic circuit model is driven for magnetic actuator to calculate preload and variation of force due to current. A 1-axis linear stage motorized with a coreless linear motor and a linear encoder was designed and built to verify this design concept. The load capacity, stiffness and preload force were examined and compared with analysis. With the active magnetic preloading actuators controlled with DSP board and PWM power amplifiers, the active on-line adjusting tests about the vertical, pitching and rolling motion were performed. It was shown that motion control far three DOF motions were linear and independent after calibration of the control gains.

• The Transactions of the Korean Institute of Electrical Engineers P
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• v.60 no.2
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• pp.91-93
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• 2011

This paper is presented for the performance of the Fluid Dynamic Bearing(FDB) by the groove design and the tooling condition. Recently, spindle motors which require smaller size, lower sound noise, lower vibration, and higher speed of the rotation have been placed in high value-added products including Digital Lightening Processors(DLP), Hard Disk Drives(HDD), and ODDs. The spindle motors using the sintered porous metal bearing have higher vibration and acoustic noise by dry contact and large tolerance of the bearing parts. The Fluid Dynamic Bearing (FDB) with grooves is appropriate for spindle motors adequate in regards to mechanical vibration and acoustic noise. The paper shows the performance comparisons of between sintered porous metal bearing and FDB, and each FDBs according to the tooling deviations of grooves by the Finite Element Analysis(FEA) of the mechanical field. This paper shows the methods to make the grooves, the groove's depth, and the prototype of the motor with the fluid dynamic bearing. The performance characteristics of the grooves with the FDB are verified by the experimental results.

• Proceedings of the KSME Conference
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• 2005.11a
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• pp.157.1-157.1
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• 2005

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2007.06a
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• pp.201-202
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• 2007

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2008.11a
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• pp.467-468
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• 2008

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2006.05a
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• pp.135-136
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• 2006

A precise linear motion stage supported by magnetically preloaded air bearings is introduced where preloading magnetic actuators are combined with permanent magnets and coils to adjust air bearing clearance by controlling magnetic force actively. Each of the magnetic actuators has a permanent magnet generating nominal magnetic flux for required preload and a coil to perturb the magnetic force resulting adjustment of air-bearing clearance. The characteristics of porous aerostatic bearing are analyzed by numerical analysis, and analytic magnetic circuit model is driven for magnetic actuator to calculate nominal preload and variation of force due to current. A 1-axis linear stage motorized with a coreless linear motor and a linear encoder is built for verifying this design concept. With the active magnetic preloading actuators controlled with DSP board and PWM power amplifiers, the active on-line adjusting tests about the vertical, pitching and rolling motion were performed, and the result shows very good linearity.

• Journal of the Korean Society for Precision Engineering
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• v.30 no.12
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• pp.1327-1333
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• 2013

Air bearings are widely used in precision stages because of low friction and high motion accuracy, however, they suffer from low stiffness in comparison with rolling bearings or hydrostatic bearings. So, several preloading methods using weight, magnet and vacuum force, and opposing pads have been used to increase the stiffness of the air bearings. In this paper, pressure distributions of the vacuum preloaded porous air bearings are calculated using the proposed method. And then, the load capacity and stiffness are analyzed. For the vacuum preloaded air bearings, the stiffness is increased owing to reduced bearing clearance by vacuum force. The simulation results indicate that variation of vacuum pressure with clearance in the vacuum pocket gives rise to low stiffness, so the vacuum pocket should be designed for pressure to be constantly maintained regardless of the bearing clearance by means of large effective pumping speed.

• Journal of the Korean Society for Precision Engineering
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• v.23 no.10
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• pp.103-112
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• 2006

This paper describes a theoretical analysis and experimental verification on the performances of a vacuum-compatible air bearing, which is designed with a cascaded exhaust scheme to minimize the air leakage in a vacuum environment. The design of the vacuum-compatible air bearing equipped with the differential exhaust system requires great care because several design parameters, such as the number of exhaust stages, diameter of exhaust tube, pumping speed of a vacuum pump, and bearing clearance greatly influence the air leakage and thus degree of vacuum. In this study, a performance analysis method was proposed to estimate the performances of the air bearing, such as load capacity, stiffness, and air leakage. Results indicate that the load capacity and stiffness of the air bearing was improved as its boundary pressure, which was determined by the $1^{st}$ exhaust method, was lowered, and the dominant factors on the chamber's degree of vacuum were the number of exhaust stages, exhaust tube diameter and bearing clearance. A vacuum chamber and air bearing stage using porous pad were fabricated to verify the theoretical analysis. The results demonstrate that chamber pressure up to an order of $10^{-3}$ Pa was achieved with the air bearing stage operating inside the chamber, and this analysis method was valid by comparing predicted values with experimental data, for the mass flow rates from the porous pad, and pressures at each exhaust port and chamber, respectively.

• Transactions of the Korean Society of Mechanical Engineers
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• v.12 no.4
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• pp.721-729
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• 1988

Recently, the precision required by precision manufacturing and machinery related to electronics is within the domain of submicron that it is difficult to evaluate them by traditional measuring equipments and methods. Accordingly, precision of sub 0.1.mu.m super precise position-decision-apparatus and straight-guide air bearing have been researched and they are almost ready to be used. In utilizing straight-guide-table for super-precision-measurement which used externally pressurized porous air bearing as a way of externally pressurized air bearing, the high-precision-straight movement is the most crucial. In this study, the researcher conducted the experimental study with trial manufacture to see how the surrounding temperature and support condition influenced the selection and allocation of the machine composing element which is important to the high-precision-straight movement. The researcher finding showed that when the property of the rail part and support part of the semi-closed slider form is different, the heat generation of the working motor and surrounding temperature influence the high-precision-straight movement significantly and the researcher showed the influence of the condition of central load and eccentric load to the straight movement precision when the support stand of the straight-table was supported by numerical values.