• Title/Summary/Keyword: pore 형성

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박막의 성장 및 특성과 공정변수와의 상관성 도출

  • Jeong, Jae-In;Yang, Ji-Hun
    • Proceedings of the Korean Vacuum Society Conference
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    • 2010.02a
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    • pp.264-264
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    • 2010
  • 물리증착이나 화학증착으로 제조되는 박막은 공정 조건에 따라 다양한 성장 양태를 보인다. 박막의 성장은 초기에 Seed가 형성되어 그 Seed를 바탕으로 성장하는 것으로 알려져 있으며 기판온도, 이온충돌, 박막의 두께 등에 따라 성장양태나 성장방위 등이 달라진다. 최근 나노에 대한 관심이 높아지면서 진공증착으로 제조한 박막에서도 조직의 나노화에 대한 관심이 높아지고 있으며 특히, Pore-free, Defect-free 박막의 형성을 통해 특성을 향상시키고자 하는 연구도 증가하고 있다. 본 연구에서는 Al과 Cu 같은 금속의 박막을 제조함에 있어서 공정변수가 박막의 조직이나 배향성 등에 미치는 영향을 조사하였다. 특히, 이러한 조직변화와 박막의 특성과의 상관성을 도출하고자 하였다. Al 박막에서는 이온빔의 효과와 함께 공정중에 산소 가스를 주입하거나 플라즈마 처리를 통해 성장조직의 변화를 유도하였고, Cu 박막에서는 고속 증착 조건이 피막의 조직에 미치는 영향을 조사하였다. 한편, TiN 박막의 형성에 미치는 이온빔의 효과를 조사하여 이온빔 조건과 TiN 박막의 형성과의 관계를 규명하였고 이로부터 Normalized Energy가 TiN 박막의 색상에 미치는 영향을 도출하여 Normalized Energy가 Fundamental Parameter가 될 수 있음을 확인하였다.

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Hydro-mechanical Behavior of a Circular Opening Excavated in Saturated Rockmass (포화된 암반에 굴착된 원형공동의 수리-역학적 거동)

  • Lee Youn-Kyou;Shin Hee-Soon
    • Explosives and Blasting
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    • v.23 no.2
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    • pp.23-35
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    • 2005
  • Excavation of an opening in a saturated porous rock may lead to the development of pore pressure around the opening due to the redistribution of initial rock stresses. The built-up of pore pressure, in turn, may affect the mechanical behavior of rock mass and give the different pattern of stress distribution around the opening from that of the case where the coupling is neglected. In this study, the short time response of an opening excavated in saturated ground under anisotropic initial stress conditions was investigated numerically. Not on the wall of opening but at a short distance from the wall, the tangential stresses were peak during the short period after excavation when the hydro-mechanical coupling is considered.

Preparation and Characterization of Sulfonated Poly (Arylene Ether Sulfone) Random Copolymer-Polyolefin Pore-filling Separators with Metal Ion Trap Capability for Li-ion Secondary Battery (리튬이온 이차전지용 금속이온 선택성 술폰화 폴리아릴렌에테르술폰 공중합체-폴리올레핀 함침격리막 제조 및 특성)

  • Jeong, Yeon Tae;Ahn, Juhee;Lee, Chang Hyun
    • Membrane Journal
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    • v.26 no.4
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    • pp.310-317
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    • 2016
  • Lithium ion secondary battery (LISB) is an energy conversion system operated via charging-discharging cycle based on Lithium ion migration. LISB has a lot of advantages such as high energy density, low self-discharge rate, and a relatively high lifetime. Recently, increasing demands of electric vehicles have been encouraging the development of LISB with high capacity. Unfortunately, it causes some critical safety issues. It includes dendrite formation on negative electrode, resulting in electric shortage problems and battery explosion. Also, the elevated temperatures occurred during the LISB operation induces thermal shrinkage of polyolefin (e.g., polyethylene and polypropylene) separators. Consequently, the low thermal stability leads to decay of LISB performances and the reduction of lifetime. In this study, sulfonated poly (arylene ether sulfone) (SPAES) random copolymers were used as key materials to prepare polyolefin pore-filling separator. The resulting separators were evaluated in the term of metal ion chelation capability associated with dendrite formation, $Li^+$ ion conductivity and thermal durability.

Thickness-dependent Film Resistance of Thin Porous Film (얇은 다공 구조 박막에서의 두께에 따른 박막 저항 변화)

  • Song, A-Ree;Kim, Chul-Sung;Kouh, Tae-Joon
    • Journal of the Korean Magnetics Society
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    • v.22 no.1
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    • pp.6-10
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    • 2012
  • We have observed the change in the film resistance of thin nickel film up to 13 nm, which is deposited on a porous anodic alumina substrate, prepared by two-step anodization technique under phosphoric acid. The resulting film grows as a porous film, following the pore structure on the surface of the alumina substrate, and the value of the resistance lies above $150k{\Omega}$ within the range of thickness studied here, decreasing very slowly with the film thickness. The observed resistance value is much higher than the reported value of a uniform film at the same thickness. Since the observed value of the surface coverage with the pores is smaller than the critical value, expected from the percolation theory, the pore structure limits the formation of conduction channel across the film. In addition, by comparing to the typical model of thickness-dependent resistivity, we expect that the scattering at the pore edge further increases the film resistance.

Studies on the Modeling of the Preparation of the C/SiC Composite for catalyst support by CVI (화학증기침투에 의한 촉매지지체용 C/SiC 복합체 제조에 관한 수치모사 연구)

  • 이성주;김미현;정귀영
    • Composites Research
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    • v.13 no.4
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    • pp.33-41
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    • 2000
  • In this research, the mathematical modeling of the formation of SiC layer on the activated carbon was studied to improve the durability and the oxidation resistance of catalyst supports. SiC layer on the activated carbon was formed by permeating SiC from dichlorodimethylsilane(DDS) into pores and depositing while the porous structure was kept. The best conditions of manufacturing the support were found by studying the characteristics of SiC/C which was modelled under various deposition conditions. Changes of the amount of deposition, the pore diameter, the surface area with time were obtained by simulating convection, diffusion and reaction in an isothermal reactor at a steady state. The uniform deposition in the pores of samples was obtained at a lower concentration of the reactant and a lower pressure. Additionally, it was observed that the pore diameter and the surface area have points of inflection at certain times of deposition, because deposition occurred on the inside surface of the pore at first and then on the outside surface of the particle.

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Fabrication of Porous MoSi2 material for Heating Element through Self-propagating High Temperature Synthesis Process (연소합성법에 의한 발열성 다공질 MoSi2계 재료의 제조)

  • Song, In-Hyuck;Yun, Jung-Yeul;Kim, Hai-Doo
    • Journal of the Korean Ceramic Society
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    • v.41 no.1
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    • pp.62-68
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    • 2004
  • In this study, SHS process has been employed to fabricate porous $MoSi_2$ material with electric-resistive heating capability through the control of pore size. The preform for SHS reaction was consisted of molybdenum powder with different sizes and silicon powder with different contained quantity. The size of the $MoSi_2$ particles thus formed was determined by the generated heat of combustion, not by the size of molybdenum powder. However, the pore size of $MoSi_2$ composite was proportional to the particle size of molybdenum powder. that is the coarser the molybdenum powder used, the larget the formed pore size. Based on these results, the porous $MoSi_2$ composite could be fabricated with a desired pore size. By orienting the porous molybdenum disilicide-based material in the form of pore size gradient, porous materials used for filters with improved dirt-holding capacity can be manufactured.

A study on the structure of Si-O-C thin films with films size pore by ICPCVD (ICPCVD방법에 의한 나노기공을 갖는 Si-O-C 박막의 형성에 관한 연구)

  • Oh, Teresa
    • Proceedings of the Korean Institute of Information and Commucation Sciences Conference
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    • 2002.11a
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    • pp.477-480
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    • 2002
  • Si-O-C(-H) thin film with a tow dielectric constant were deposited on a P-type Si(100) substrate by an inductively coupled plasma chemical vapor deposition (ICPCVD). Bis-trimethylsilymethane (BTMSM, H$_{9}$C$_3$-Si-CH$_2$-Si-C$_3$H$_{9}$) and oxygen gas were used as Precursor. Hybrid type Si-O-C(-H) thin films with organic material have been generated many voids after annealing. Consequently, the Si-O-C(-H) films can be made a low dielectric material by the effect of void. The surface characterization of Si-O-C(-H) thin films were performed by SEM(scanning electron microscope). The characteristic analysis of Si-O-C(-H) thin films were performed by X-ray photoelectron spectroscopy (XPS).

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Preparation and Characterization of Porous CeO2 Using Ionic Liquids (이온성액체를 이용한 다공성 산화세륨 합성)

  • Yoo, Kye Sang;Lee, Bu Ho
    • Applied Chemistry for Engineering
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    • v.20 no.3
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    • pp.313-316
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    • 2009
  • Synthesis of porous $CeO_2$ particles was investigated using various ionic liquids (ILs) as an effective template. The pore structure and crystalline phase of $CeO_2$ particles was affected significantly by the composition of ionic liquids. The strength of the hydrogen bonds on the anion part of ionic liquid was an essential factor to form the pore architecture of $CeO_2$ particles. Moreover, the length of alkyl group on the cation part of ionic liquid determined the pore size and surface area of $CeO_2$ particles. Among the ionic liquids, it was found that 1-Buthyl-3-methylimidazolium hexafluorophosphate ([Bmim][PF6]) was the most effective ionic liquid to synthesize the porous $CeO_2$ particle.

Numerical Simulation of Bubble and Pore Generations by Molten Metal Flow in Laser-GMA Hybrid Welding (레이저-GMA 하이브리드 용접에서 유동에 의한 기포 및 기공 형성 해석)

  • Cho, Won-Ik;Cho, Jung-Ho;Cho, Min-Hyun;Lee, Jong-Bong;Na, Suck-Joo
    • Journal of Welding and Joining
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    • v.26 no.6
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    • pp.67-73
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    • 2008
  • Three-dimensional transient simulation of laser-GMA hybrid welding involving multiple physical phenomena is conducted neglecting the interaction effect of laser and arc heat sources. To reproduce the bubble and pore formations in welding process, a new bubble model is suggested and added to the established laser and arc welding models comprehending VOF, Gaussian laser and arc heat source, recoil pressure, arc pressure, electromagnetic force, surface tension, multiple reflection and Fresnel reflection models. Based on the models mentioned above, simulations of laser-GMA hybrid butt welding are carried out and besides the molten pool flow, top and back bead formations could be observed. In addition, the laser induced keyhole formation and bubble generation duo to keyhole collapse are investigated. The bubbles are ejected from the molten pool through its top and bottom regions. However, some of those are entrapped by solid-liquid interface and remained as pores. Those bubbles and pores are intensively generated when the absorption of laser power is largely reduced and consequently the full penetration changes to the partial penetration.