• Title/Summary/Keyword: pore 형성

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The Effect of Mask Patterns on Microwire Formation in p-type Silicon (P-형 실리콘에서 마이크로 와이어 형성에 미치는 마스크 패턴의 영향)

  • Kim, Jae-Hyun;Kim, Kang-Pil;Lyu, Hong-Kun;Woo, Sung-Ho;Seo, Hong-Seok;Lee, Jung-Ho
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2008.11a
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    • pp.418-418
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    • 2008
  • The electrochemical etching of silicon in HF-based solutions is known to form various types of porous structures. Porous structures are generally classified into three categories according to pore sizes: micropore (below 2 nm in size), mesopore (2 ~ 50 nm), and macropore (above 50 nm). Recently, the formation of macropores has attracted increasing interest because of their promising characteristics for an wide scope of applications such as microelectromechanical systems (MEMS), chemical sensors, biotechnology, photonic crystals, and photovoltaic application. One of the promising applications of macropores is in the field of MEMS. Anisotropic etching is essential step for fabrication of MEMS. Conventional wet etching has advantages such as low processing cost and high throughput, but it is unsuitable to fabricate high-aspect-ratio structures with vertical sidewalls due to its inherent etching characteristics along certain crystal orientations. Reactive ion dry etching is another technique of anisotropic etching. This has excellent ability to fabricate high-aspect-ratio structures with vertical sidewalls and high accuracy. However, its high processing cost is one of the bottlenecks for widely successful commercialization of MEMS. In contrast, by using electrochemical etching method together with pre-patterning by lithographic step, regular macropore arrays with very high-aspect-ratio up to 250 can be obtained. The formed macropores have very smooth surface and side, unlike deep reactive ion etching where surfaces are damaged and wavy. Especially, to make vertical microwire or nanowire arrays (aspect ratio = over 1:100) on silicon wafer with top-down photolithography, it is very difficult to fabricate them with conventional dry etching. The electrochemical etching is the most proper candidate to do it. The pillar structures are demonstrated for n-type silicon and the formation mechanism is well explained, while such a experimental results are few for p-type silicon. In this report, In order to understand the roles played by the kinds of etching solution and mask patterns in the formation of microwire arrays, we have undertaken a systematic study of the solvent effects in mixtures of HF, dimethyl sulfoxide (DMSO), iso-propanol, and mixtures of HF with water on the structure formation on monocrystalline p-type silicon with a resistivity with 10 ~ 20 $\Omega{\cdot}cm$. The different morphological results are presented according to mask patterns and etching solutions.

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Importance of Impregnation and Polishing for Backscattered Electron Image Analysis for Cementitious Self-Healing Specimen (시멘트계 자기치유 시편에 대한 반사전자현미경 이미지 분석을 위한 함침과 연마의 중요성)

  • Kim, Dong-Hyun;Kang, Kook-Hee;Bae, Seung-Muk;Lim, Young-Jin;Lee, Seung-Heun
    • Journal of the Korean Recycled Construction Resources Institute
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    • v.5 no.4
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    • pp.435-441
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    • 2017
  • Studies on self-healing have currently been diversified and the methods to evaluate the studies have become more diversified as well. Among them, the back-scattered electron (BSE) image acquired through the scanning electron microscope (SEM) is attempted as the means to evaluate the self-healing effect on cracks. In order evaluate by the BSE image, sophisticated pre-processing of specimen is critical and this injected inside the particle, pore and artificial crack of the hardener to stabilize the structure of the newly generated self-healing product and it enables to endure the stress on polishing without deformation. The impregnated specimen smoothen the surface to obtain the BSE image of high resolution that polishing is made for diamond suspension for wet polishing after dry polishing. As a result of evaluating the self-healing product on the impregnated and polished self-healing specimen, the generated product is formed from the surface of the artificial crack and the self-healing substances are confirmed as $Ca(OH)_2$ and C-S-H.

A Study on Reactivity of Zinc-Based Sorbents (아연계흡수제의 반응특성 규명연구)

  • 연장희;이영우;이창근
    • Journal of Energy Engineering
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    • v.7 no.1
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    • pp.24-34
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    • 1998
  • In this research, effects of the types and amounts of binders and additives on desulfurization and regeneration reactivities of zinc titanate were investigated. Bentonite and kaolinite were used as binders and Mo-based, Ni-based, and Cu-based compounds were used as additives. A thermogravimetric analyzer (TGA) was utilized to investigate reactivities of desulfurization and regeneration for each sorbent. Two-cycle reactions of desulfurization-regeneration were performed in the TGA reactor. Results of XRD analysis showed that all sorbents had the crystalline phases of $Zn_2TiO_2$ and $Zn_2Ti_3O_8$ irrespective of the type and amount of binder and additive. Kaolinite-bound sorbents gave higher surface areas than bentonite-bound ones and the surface areas and pore volumes of sorbents increased with amount of binder increased. It was found that the most suitable temperatures for desulfurization and regeneration were 680$^{\circ}$C and 730$^{\circ}$C, respectively, and the sorbent prepared by the addition of 3 mol% CuO showed the best performance in terms of desulfurization and regeneration. Nio-added sorbents had good regenerability whereas $MoO_3-based$ sorbents showed poor performance. In cycle experiments in a fixed bed reactor 3 mol% CuO-added sorbents showed high reactivity.

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Effect of Si sludge addition on the properties of lightweight geopolymers (Si 슬러지의 첨가가 경량지오폴리머 물성에 미치는 영향)

  • Kim, Minjeong;Kim, Yootaek
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.29 no.6
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    • pp.257-263
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    • 2019
  • Lightweight geopolymers were fabricated with non-milled IGCC slag and Si sludge as a bloating material. The relationship between addition amount of Si sludge and physical/chemical properties of lightweight geopolymers was investigated. When the geopolymers were made by mixing IGCC slag, alkali activator, and more than 10 wt.% Si sludge, the temperature of the geopolymer pastes reached higher than 130℃ in a few minutes. This exothermic reaction accelerated the geopolymer reaction; however, it was difficult to make geopolymer specimens because of a rapid bloating reaction. Both compressive strength and density of the specimens tend to decrease with an addition of Si sludge; however, there was little difference in both compressive strength and density with addition of Si sludge more than 10 wt.%. Because there was a limit to get low density geopolymers by simply increasing the addition of Si sludge, the control of pore size and distribution of geopolymer is more important by controlling flow rate of the paste through the control of W/S ratio. Therefore, it is important to control process conditions, appropriate W/S ratio for the bloating than the control of Si sludge. The optimum W/S ratio was 0.20 for the addition of Si sludge less than 30 wt.% and W/S ratio should be more than 0.28 for the addition of Si sludge more than 30 wt.%, although there was no practical application in fact.

Adequacy Evaluation of Stability Analyses Considering Rainfall Infiltration on Railroad Cut-off Soil Slopes (철도연변 절취 토사사면에 대한 강우에 의한 침투를 고려한 사면안정해석법의 적용성 평가)

  • Lee Su-Hyung;Hwang Seon-Keun;Sagong Myung;Kim Hyun-Ki
    • Journal of the Korean Geotechnical Society
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    • v.21 no.6
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    • pp.137-146
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    • 2005
  • 299 railroad slopes were investigated and the failure characteristics and reinforcement patterns were analyzed. Stability analyses on the 14 cut-off soil slopes were carried out. Surficial failures were predicted by infinite slope analyses assuming the temporarily perched ground water table at soil surface during rainfall period. Limit equilibrium analyses were also carried out and the influences of rainfall infiltration on the slope stabilities were taken Into account by seepage analyses using finite element method and by assuming ground water tables to be located adjacent to soil surface. The adequacy of those analyses was evaluated by comparing the slope failure characteristics between analysis results and the past failure records. From the comparison results, it was deduced that the limit equilibrium analyses were not appropriate to estimate the shallow failure that occurred at most of the railroad cut-off soil slopes. For the better estimation of the surficial failure, not only the increase of pore-water pressure (reduction of matric suction), but also the influence of water flows over slope surface which erode soil mass, should be evaluated and considered.

Adsorption of CO2 on Monoethanol Amine-Impregnated ZSM5 and MS13X (Monoethanolamine을 함침한 ZSM5와 MS13X의 CO2 흡착특성 비교)

  • Choi, Sung-Woo
    • Journal of Korean Society of Environmental Engineers
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    • v.39 no.6
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    • pp.325-331
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    • 2017
  • Adsorption experiments of carbon dioxide were performed on ZSM5 and Molecular Sieve 13X (MS13X) impregnated with Monoethanol Amine (MEA). Adsorption efficiency of $CO_2$ was investigated in a U type packed column with GC/TCD. The adsorption capacities of adsorbents are estimated in the temperature range of $30-80^{\circ}C$. The modified adsorbents was characterized by BET surface area, $N_2$ adsorption/desorption isotherms, X-ray diffraction and FT-IR. Surface analysis results showed that the impregnation method did not affect the crystallinity of any adsorbents. BET surface area of the MS13X impregnated amine decreased to $19.945m^2/g$ from $718.335m^2/g$. These reults showed that amine molecules were filled with the pore volume in MS13X, as a results restricting access of nitrogen into the pores. The MEA modified MS13X showed improvement in $CO_2$ adsorption capacity over the ZSM5 impregnated with MEA. The MS13X-MEA showed the highest adsorption capacity due to physical adsorption and chemical adsorption by amino-group content. This results also showed that adsorption capacity of MS13X-MEA increases with the temperature range of $60-80^{\circ}C$ compared with pristine MS13X.

Geochemical Characteristics of Devonian Cairn Formation in Alberta, Canada (캐나다 알버타 지역의 데본기 Cairn층의 지화학적 특성 연구)

  • Park, Myong-Ho;Kim, Ji-Hoon;Lee, Sung-Dong;Choi, Ji-Young;Kil, Yong-Woo
    • Economic and Environmental Geology
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    • v.43 no.2
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    • pp.85-100
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    • 2010
  • Devonian Cairn Formation is one of the important hydrocarbon reservoirs in Alberta, Canada. However, the Cairn Formation, outcropped in the study area, is not prospective reservoir with poor porosity and permeability by some late diagenetic processes. In this study, geochemical characteristics of the Cairn Formation were studied to use these preliminary results for advanced geological and geophysical petroleum explorations in the near future. Rock-Eval pyrolysis showed that total organic carbon content is less than 0.3 wt.%, indicating a minor amount of bitumen and/or other hydrocarbons. The carbonates in the Cairn Formation are mainly composed of subhedral and anhedral dolomites. Pore sizes in the carbonate are various, ranging from nanometer to micrometer. Clastic sediments increase in the upper and lower parts of the Cairn Formation, probably due to changing its depositional conditions. The Cairn Formation can also be divided into several intervals based on Ca/Mg ratio in dolomite and degree of amount of calcite. These could be formed by different sedimentary environment, degree of cementation and recrystallization, different saline/fresh water, etc.

Comparison of physical properties and air permeability in the sawdust during wetting and drying procedure (습윤 및 건조과정에서의 톱밥내 물리적 성상과 공기투과성의 변화)

  • Kim, Byung Tae
    • Journal of the Korea Organic Resources Recycling Association
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    • v.17 no.4
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    • pp.103-111
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    • 2009
  • Moisture is one of the important design factors that affects to the changes of physical properties and air permeability in the composting matrix. This study examines the effects of moisture during the wetting and drying procedure on physical properties like bulk density, particle size, free air space and air permeability in the sawdust used as the bulking agent in composting process. During both procedures of wetting and drying of the water, with increasing moisture content, bulk density and particle size increased, but FAS decreased. In the range of near 40 to 60% moisture content on a wet basis, particle size and FAS in wetting procedure were larger and higher than those in drying procedure. During wetting procedure, pressure drop continuously decreased ranging from near 20 to 60% moisture content, despite of decreasing FAS as a consequence of increasing moisture, and then over the range of 60% moisture content, pressure drop rapidly increased to the saturated moisture condition while the pore space was filled with the water. On the other hand, during drying procedure, pressure drop decreased from the saturated condition to 40% moisture content. In the recommended range of 50 to 60% moisture content for composting operation, pressure drop in wetting procedure were lower than in drying procedure. For the enhancement of the air permeability in the composting matrix, the wetting procedure was proper than the drying procedure, and the optimum moisture content for the efficient composting operation was appeared to be near 60%.

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Effects of sonication on physicochemical properties and pore formation of maize starch (초음파처리가 옥수수전분의 이화학특성과 기공 형성에 미치는 영향)

  • Choi, Eun-Hee;Lee, Jae-Kwon
    • Korean Journal of Food Science and Technology
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    • v.49 no.5
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    • pp.507-512
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    • 2017
  • The physicochemical properties of maize starch sonicated at various amplitudes (100, 200, and 300 W) and times (10, 30, and 50 min) were examined. The amount of enzyme-susceptible starch increased marginally after sonication. Sonication increased the amount of oil absorbed in the starch although the degree of oil absorption decreased with an extension of the sonication time, implied that different types and extent of damages occurred. Scanning electron microscopy revealed that ultrasound sonication did not form pores on the surfaces, but caused damages such as depression and erosion. Pasting viscosity of starch decreased with an increase in the severity of sonication conditions because of the weakened polymer network. X-ray diffraction suggested that the crystalline domains in starch were not susceptible to sonication and were more resistance to degradation. Sonicated starch formed more pin-holes on the surfaces in the initial glucoamylase reaction; subsequently, as the reaction proceeded, porous starch with enlarged pores was formed and finally, disrupted granular fragments were observed.

Synthesis of Chromium Nitride and Evaluation of its Catalytic Property (크롬 질화물(CrN)의 합성 및 촉매특성에 관한 연구)

  • Lee, Yong-Jin;Kwon, Heock-Hoi
    • Applied Chemistry for Engineering
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    • v.17 no.5
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    • pp.451-457
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    • 2006
  • We synthesized phase pure CrN having surface areas up to $47m^2/g$ starting from $CrCl_{3}$ with $NH_{3}$. Thermal Gravimetric Analysis coupled with X-ray diffraction was carried out to identify solid state transition temperatures and the phase after each transition. In addition, the BET surface areas, pore size distributions, and crystalline diameters for the synthesized materials were analyzed. Space velocity influenced a little to the surface areas of the prepared materials, while heating rate did not. We believe it is due to the fast removal of reaction by-products from the system. Temperature programmed reduction results revealed that the CrN was hardly passivated by 1% $O_{2}$. Molecular nitrogen was detected from CrN at 700 and $950^{\circ}C$, which may be from lattice nitrogen. In temperature programmed oxidation with heating rate of 10 K/min in flowing air, oxidation started at or higher than $300^{\circ}C$ and resulting $Cr_{2}O_{3}$ phase was observed with XRD at around $800^{\circ}C$. However the oxidation was not completed even at $900^{\circ}C$. CrN catalysts were highly active for n-butane dehydrogenation reaction. Their activity is even higher than that of a commercial $Pt-Sn/Al_{2}O_{3}$ dehydrogenation catalyst in terms of volumetric reaction rate. However, CrN was not active in pyridine hydrodenitrogenation.