• 제목/요약/키워드: polycrystalline

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다결정 산화갈륨/다이아몬드 이종 박막 성장 및 열처리 효과 연구 (Growth and thermal annealing of polycrystalline Ga2O3/diamond thin films on Si substrates)

  • 서지연;김태규;신윤지;정성민;배시영
    • 한국결정성장학회지
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    • 제31권6호
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    • pp.233-239
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    • 2021
  • 본 연구에서는 산화갈륨의 방열 특성 향상을 위해 산화갈륨/다이아몬드 이종 박막 성장을 진행하였다. 먼저, 핫필라멘트 화학기상증착법을 이용하여 다결정 다이아몬드를 증착시킨 후, 미스트 화학기상증착법을 통해 450~600℃ 사이의 온도구간에서 산화갈륨 박막을 성장시켰다. 열처리 전후 비교를 통해 500℃에서 산화갈륨/다이아몬드 계면 분리 현상이 발생함을 확인하였다. 이는 비정질과 결정질이 혼재된 산화갈륨 박막이 성장된 후, 냉각 과정에서 열팽창계수의 차이로 인해 계면이 분리된 것으로 판단하였다. 따라서, 본 연구를 통한 산화갈륨/다이아몬드 계면의 물리적 안정성을 통해 산화갈륨의 열물성 보완및 고전력 반도체로의 활용이 기대된다.

ANALYSIS OF THIN FILM POLYSILICON ON GLASS SYNTHESIZED BY MAGNETRON SPUTTERING

  • Min J. Jung;Yun M. Chung;Lee, Yong J.;Jeon G. Han
    • 한국표면공학회:학술대회논문집
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    • 한국표면공학회 2001년도 추계학술발표회 초록집
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    • pp.68-68
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    • 2001
  • Thin films of polycrystalline silicon (poly-Si) is a promising material for use in large-area electronic devices. Especially, the poly-Si can be used in high resolution and integrated active-matrix liquid-crystal displays (AMLCDs) and active matrix organic light-emitting diodes (AMOLEDs) because of its high mobility compared to hydrogenated _amorphous silicon (a-Si:H). A number of techniques have been proposed during the past several years to achieve poly-Si on large-area glass substrate. However, the conventional method for fabrication of poly-Si could not apply for glass instead of wafer or quartz substrate. Because the conventional method, low pressure chemical vapor deposition (LPCVD) has a high deposition temperature ($600^{\circ}C-1000^{\circ}C$) and solid phase crystallization (SPC) has a high annealing temperature ($600^{\circ}C-700^{\circ}C$). And also these are required time-consuming processes, which are too long to prevent the thermal damage of corning glass such as bending and fracture. The deposition of silicon thin films on low-cost foreign substrates has recently become a major objective in the search for processes having energy consumption and reaching a better cost evaluation. Hence, combining inexpensive deposition techniques with the growth of crystalline silicon seems to be a straightforward way of ensuring reduced production costs of large-area electronic devices. We have deposited crystalline poly-Si thin films on soda -lime glass and SiOz glass substrate as deposited by PVD at low substrate temperature using high power, magnetron sputtering method. The epitaxial orientation, microstructual characteristics and surface properties of the films were analyzed by TEM, XRD, and AFM. For the electrical characterization of these films, its properties were obtained from the Hall effect measurement by the Van der Pauw measurement.

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A Brief Review of Some Challenging Issues in Textured Piezoceramics via Templated Grain Growth Method

  • Hye-Lim Yu;Nu-Ri Ko;Woo-Jin Choi;Temesgen Tadeyos Zate;Wook Jo
    • 센서학회지
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    • 제32권1호
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    • pp.10-15
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    • 2023
  • It is well known that polycrystalline ceramics fabricated via the templated grain growth method along a desired crystallographic direction, generally along [001], exhibits enhanced piezoelectric response. Generally, the piezoelectric properties of textured ceramics depend on the degree of texture, as piezoelectric properties peak in single crystals. Therefore, understanding the relationship between the degree of texture and piezoelectric properties is fundamental. Here, we present state-of-the-art textured piezoceramics by focusing on critical issues such as the quality of templates used for texturing and proper evaluation of the degree of texture analysis. The relationship between the degree of texture and its impact on the properties of textured materials is exclusively defined by the Lotgering factor (L.F.) calculated from the X-ray diffraction profiles. Additionally, we show that L.F. is not a suitable indicator of the degree of texture, contrary to previous interpretations. This statement was further supported by the fact that the true degree of texture can be better quantified by the multiples of random distribution. This argument was justified by comparing the quantitative values of the degree of texture obtained from both methods to those of the piezoelectric charge coefficient of textured and random ceramics.

다이아몬드 피복공구에 의한 SiC 강화 복합재료의 절삭특성 (Machining Characteristics of SiC reinforced Composite by multiple diamond-coated drills)

  • M. Chen;Lee, Y. M.;S. H. Yang;S. I. Jang
    • 한국정밀공학회:학술대회논문집
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    • 한국정밀공학회 2003년도 춘계학술대회 논문집
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    • pp.533-537
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    • 2003
  • Compared to sintered polycrystalline diamond (PCD), the deposited thin film diamond has a great advantage on the fabrication of cutting tools with complex geometries such as drills. Because of high performance in high speed machining non-ferrous difficult-to-cut materials in the field of automobiles industry, aeronautics and astronautics industry, diamond-coated drills find large potentialities in commercial applications. However, the poor adhesion of the diamond film on the substrate and high surface roughness of the drill flute adversely affect the tool lift and machining quality and they become the main technical barriers for the successful development and commercialization of diamond-coated drills. In this paper, diamond thin films were deposited on the commercial WC-Co based drills by the electron aided hot filament chemical vapor deposition (EACVD). A new multiple coating technology based on changing gas pressure in different process stages was developed. The large triangular faceted diamond grains may have great contribution to the adhesive strength between the film and the substrate, and the overlapping ball like blocks consisted of nanometer sized diamond crystals may contribute much to the very low roughness of diamond film. Adhesive strength and quality of diamond film were evaluated by scanning electron microscope (SEM), atomic force microscope (AFM), Raman spectrum and drilling experiments. The ring-block tribological experiments were also conducted and the results revealed that the friction coefficient increased with the surface roughness of the diamond film. From a practical viewpoint, the cutting performances of diamond-coated drills were studied by drilling the SiC particles reinforced aluminum-matrix composite. The good adhesive strength and low surface roughness of flute were proved to be beneficial to the good chip evacuation and the decrease of thrust and consequently led to a prolonged tool lift and an improved machining quality. The wear mechanism of diamond-coated drills is the abrasive mechanical attrition.

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스퍼터법으로 제조한 이온 치환 Ba 훼라이트 박막의 구조 및 자기적, 자기광학적 성질 (Structural, Magnetic and Magneto-Optical Properties of Substituted Ba Ferrite Films Grown by RF Sputtering)

  • 조재경
    • 한국자기학회지
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    • 제2권1호
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    • pp.61-68
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    • 1992
  • 전이 금속(Ni, Co), 희토류(Ce, Pr, Eu) 및 Al이온 치환 Ba 훼라이트박막을 스퍼터법으로 제조하여, 그 구조, 자기적 및 자기광학적 성질(1.0eV~3.2eV)을 조사하였다. 막 제작시의 투입 rf 전역 밀도를 조절하는 것에의해, 막 중의 결정립의 크기를 수 100 nm-수 nm로 제어하는데 성공했다. Fe를 Al으로 치환하는 것에의해 각형 히스테리시스 루우프를 얻는데 성공했다. Ni이온이 가시역에서 페러데이 회전을 크게 증가시키는 것을 발견했다. Co이온이 근적외선 영역에서 페러데이 회전을 크게 증가시키는것을 확인했다. Ce, Pr, Eu이온데 의한 페러데이 회전의 증가는 관찰되지 않았다. 이들 이온 치환 막의 자기적 및 자기광학적 성질의 기원에 대해 고찰했다.

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엑시머 레이저 증착기술에 의한 $Y_{3}Fe_{5}O_{12}$ 다결정 박막 제조 (Polycrystalline $Y_{3}Fe_{5}O_{12}$ Garnet Films Grown by a Pulsed Laser Ablation Technique)

  • 양충진;김상원
    • 한국자기학회지
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    • 제4권3호
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    • pp.214-218
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    • 1994
  • 페리마그넷(Ferrimagnetic) $Y_{3}Fe_{5}O_{12}$(Garnet) 박막 또는 후막은 초고주파 대역에서 사용하는 통신부품의 소자로서 핵심 역할을 하고 있다. 본 연구에서는 요즘 신기술로 소개된 펄스 레이저 증착기술(Laser Ablation Technique)에 의하여 가넷의 표준조성인 $Y_{3}Fe_{5}O_{12}$ 후막을 에피성장 시키는데 성공하였다. KrF 가스를 사용한 Eximer 레이저를 10 Hz의 펄스주파수로 $Al_{2}O_{3}$(1102) 면에서 거의 집합조직의 에피후막을 성장시켰다. 후막의 자기특성 및 성장 양상은 사용한 기판 및 기판온도와 산소분압에 따라 결정되지만 본 연구에서 얻어진 최적의 자기특성은 가넷두께 $4.1\;\mu\textrm{m}$에서 $4{\pi}M_{s}=1300$ Gauss, $H_{c}=37.5$ Oe 의 값을 산소분압 100 mTorr 및 기판온도 $600^{\circ}C$에서 증착한 후 $700^{\circ}C$에서 2시간 소둔처리하여 최적값을 얻을 수가 있었다. 이러한 가넷후막은 협대역 주파수 범위에서 Magnetostatic Spin Wave 원리를 이용한 Filter로 사용 가능하다.

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확률 분포 함수의 지수 곡선 접합을 이용한 RVE 적합성 평가 (Evaluation of RVE Suitability Based on Exponential Curve Fitting of a Probability Distribution Function)

  • 정상엽;윤태섭;한동석
    • 대한토목학회논문집
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    • 제30권5A호
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    • pp.425-431
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    • 2010
  • 2가지 이상의 재료로 구성된 다상(multi-phase) 재료는 상 분포에 따라 재료 특성이 다르기 때문에, 상 분포를 묘사할 수 있는 적절한 방법이 필요하다. 본 연구에서는 확률 분포 함수 two-point correlation function과 lineal-path function을 사용하여 재료 내부의 상 분포 상태를 확률적으로 묘사하였다. 수치 계산 방법으로 계산되는 확률 분포 함수를 3개의 매개 변수를 사용한 곡선 접합(curve fitting)을 이용하여 수식으로 표현하고, 적용성을 살펴보기 위하여 2상 합금 미세구조 가상 시편과 지반 모델 시편을 사용하였다. 이를 통해, 확률 분포 함수는 곡선 접합을 이용하여 지수 형태의 수식으로 표현이 가능하며, 이는 시편의 RVE로서의 활용 가능성을 판단하는데 사용될 수 있음을 확인하였다.

가압소결된 다결정 $Bi_2Te_3-Bi_2Se_3$ 열전재료의 열전특성 (Thermoelectric properties of hot pressed polycrystalline $Bi_2Te_3-Bi_2Se_3$)

  • 황창원;홍인근;백동규;최승철
    • 한국결정성장학회지
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    • 제4권4호
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    • pp.363-369
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    • 1994
  • $Bi_2Te_3$계 열전반도체에서 단결정재료는 성능이 우수한 반면에 그 제조에 있어서 긴 공정시간과 그에 따른 구성성분의 손실이 있다. 본 연구에서는 짧은 공정시간으로 단결정 $Bi_2Te_3$계 열전반도체 제조 공저으이 단점을 극복하기 위해서 $Bi_2Te_3$계 열전반도체 제조 공저의 단점을 극복하기 위해서 $Bi_2Te_3$계 열전반도체를 교류 통전 가압법으로 제작하였다. 이 소결 방법에서는 소결시간이 다른 방법과 비교하여 짧기 때문에 Te의 증발로 인한 결함의 발생을 줄일 수 있었으며 제조공정시 재료의 손실도 최소화할 수있었다. 가압 소결한 95 mol% $Bi_2Te_3-5 mol% Bi_2Se_3$ 다결정 열전반도체의 최적의 소결조건은 분말입도, 소결온도, 시간, 압력별로 각각 $125~250 {\mu}m, 400^{\circ}C$, 2분, $1500Kgf/cm^2$이고, 이조건에서 열전성능지수 $Z=2.2{\times}10^{-3}/K$이다.

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Effect of La0.7Sr0.3MnO3 addition on superconducting properties and local structure of (Bi, Pb)-2223 superconductor

  • M. A. Anugrah;R. P. Putra;J. Y. Oh;B. Kang
    • 한국초전도ㆍ저온공학회논문지
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    • 제25권2호
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    • pp.5-9
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    • 2023
  • The effect of La0.7Sr0.3MnO3 (LSMO) addition on the superconducting property of Bi1.6Pb0.4Sr2Ca2Cu3O10+δ ((Bi, Pb)-2223) polycrystalline samples was studied. LSMO (0.3 wt.% to 2.0 wt.%) added (Bi, Pb)-2223 samples were prepared by using a solid-state reaction method. The XRD analyses show that as the LSMO addition increases, the volume fraction of the Bi-2223 phase is gradually decreased. The critical temperature (Tc) exhibits a gradual decrease with a single transition as the LSMO amount increases up to 1.0 wt.%, but a further addition of LSMO induces an abrupt decrease of Tc with a dual transition. The analyses on the local structure of the CuO2 plane from the X-ray absorption fine structure (EXAFS) measurements showed that for the samples with low concentration of LSMO up to 1.0 wt.%, the Cu-O bond length and the CuO2 plane ordering do not degrade from the values of pure (Bi, Pb)-2223, while they get worsen with a further increase of LSMO addition. These results open up the possibility of LSMO as artificial pinning centers of the (Bi, Pb)-2223 system for power application.

Prospecting endophytic colonization in Waltheria indica for biosynthesis of silver nanoparticles and its antimicrobial activity

  • Nirmala, C.;Sridevi, M.
    • Advances in nano research
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    • 제13권4호
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    • pp.325-339
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    • 2022
  • Endophytes ascertain a symbiotic relationship with plants as promoters of growth, defense mechanism etc. This study is a first report to screen the endophytic population in Waltheria indica, a tropical medicinal plant. 5 bacterial and 3 fungal strains in leaves, 3 bacterial and 1 yeast species in stems were differentiated morphologically and identified by biochemical and molecular methods. The phylogenetic tree of the isolated endophytes was constructed using MEGA X. Silver nanoparticles were biosynthesized from a rare endophytic bacterium Cupriavidus metallidurans isolated from the leaf of W. indica. The formation of silver nanoparticles was confirmed by UV-Visible spectrophotometer that evidenced a strong absorption band at 408.5 nm of UV-Visible range with crystalline nature and average particle size of 16.4 nm by Particle size analyzer. The Fourier Transform Infra-Red spectrum displayed the presence of various functional groups that stabilized the nanoparticles. X-ray diffraction peaks were conferred to face centered cubic structure. Transmission Electron Microscope and Scanning Electron Microscope revealed the spherical-shaped, polycrystalline nature with the presence of elemental silver analyzed by Energy Dispersive of X-Ray spectrum. Selected area electron diffraction also confirmed the orientation of AgNPs at 111, 200, 220, 311 planes similar to X-ray diffraction analysis. The synthesized nanoparticles are evaluated for antimicrobial activity against 7 bacterial and 3 fungal pathogens. A good zone of inhibition was observed against pathogenic bacteria than fungal pathogens. Thus the study could hold a key aspect in drug discovery research and other pharmacological conducts of human clinical conditions.