• 한국섬유공학회:학술대회논문집
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• 한국섬유공학회 2002년도 봄 학술발표회 논문집
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• pp.5-8
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• 2002

Poly(p-xylylene) (PPX) is most easily prepared by a vapor deposition polymerization (VDP) of [2, 2]paracychophane, as described by Gorham.$^1$ Poly(tetrafluoro-p-xylylene) (F-PPX) is of interest in view of its potential applications as an interlayer dielectric material in high-speed integrated circuits, since it has an extremely low dielectric constant (〈2.35).$^2$ (omitted)

• Bulletin of the Korean Chemical Society
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• 제25권1호
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• pp.31-32
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• 2004

• 한국진공학회:학술대회논문집
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• 한국진공학회 2011년도 제40회 동계학술대회 초록집
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• pp.357-358
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• 2011

Dichloro-(2,2)-paracyclophane을 출발 물질로 하여 화학기상증착법(CVD)을 이용해 우수한 투명성과 수분 투과성을 갖는 poly(p-xylylene) 코팅 막을 얻었다. 상기 코팅 막을 얻기 위한 최적의 공정 조건은 Deposition Pressure 0.02~0.04Torr, Vaporization temperature $110{\sim}150^{\circ}C$으로 확인 되었다. 이러한 공정 조건으로 500 mm*500 mm size의 PET bare film을 코팅 기재로 사용하여 $10{\mu}m$, $20{\mu}m$의 parylene 코팅 막을 얻었고 이를 특성 분석해 보았다. 상기 코팅 막은 전체적으로 ${\pm}1{\mu}m$의 thickness uniformity가 관찰 되었고 투과율은 90% 이상을 보였으며 수분 투과율은 기재 대비 상대적으로 40%의 향상이 기대 되었다. 또한 우수한 내식성, 내염기성, 내용제성을 갖고 있었으며 PET 기재에 대해 우수한 부착력을 가지고 있었다. surface morphology는 AFM을 통해 분석하였으며 Ra가 15.123, Rq가 22.859로 측정 되었다.

• 멤브레인
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• 제23권4호
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• pp.312-318
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• 2013

Poly vinylidene fluoride (PVDF) 중공사막을 polyethylenimine (PEI)와 p-xylylene dichloride (XDC)를 이용해 친수화 시킨 후 poly(vinyl alcohol) (PVA)과 가교제인 poly(acrylic acid-co-maleic acid) (PAM) 혼합용액을 코팅하여 막을 제조하였다. 중공사막 표면의 코팅여부는 scanning electron microscope (SEM)을 통해 관찰하였으며, 막의 특성평가를 위해 물/에탄올 혼합액에 대한 투과증발 실험을 수행하였다. 공급액 조성은 90 wt% 에탄올 수용액을 사용하였으며, 가교제 농도, 공급액과 반응온도 변화에 따른 투과도 및 선택도를 측정하였다. 투과도는 반응온도 $100^{\circ}C$, PAM 농도 3 wt%, 공급액온도 $70^{\circ}C$에서 $1,480g/m^2hr$, 그리고 선택도는 반응온도 $100^{\circ}C$, PAM 농도 15 wt%, 공급액온도 $25^{\circ}C$에서 ${\alpha}_{W/E}=82$의 결과를 얻을 수 있었다.

• Transactions on Electrical and Electronic Materials
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• 제9권4호
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• pp.156-162
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• 2008

We report results on a study of inductively coupled plasma (ICP) etching of Parylene-C (poly-monochloro-para-xylylene) films using an $O_2$ gas. Effects of process parameters on etch rates were investigated and are discussed in this article from the standpoint of plasma parameter measurements, performed using a Langmuir probe and modeling calculation. Process parameters of interest include ICP source power and pressure. It was shown that major etching agent of polymer films was oxygen atoms O($^3P$). At the same time it was proposed that positive ions were not effective etchant, but ions played an important role as effective channel of energy transfer from plasma towards the polymer.

• Membrane and Water Treatment
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• 제6권3호
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• pp.173-187
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• 2015

The goal of present work is the preparation of a novel positively charged nanofiltration (NF) membrane and its development for the cation removal of aqueous solutions. This NF membrane was fabricated by the surface modification of polysulfone (PSf) ultrafiltration support. The active top-layer was formed by interfacial cross-linking polymerization of poly(ethyleneimine) (PEI) with p-xylylene dichloride (XDC) and then quaternized with methyl iodide to form a perpetually positively charged layer. In order to improve the efficiency of nanofiltration membrane, the concentration of PEI, XDC and methyl iodide solutions, PEI coating and cross-linking time have been optimized. As a result, a high water flux and high $CaCl_2$ rejection (1,000 ppm) was obtained for the composite membrane with values of $18.29L/m^2.h$ and 93.62% at 4 bar and $25^{\circ}C$, respectively. The rejections of NF membrane for different salt solutions followed the order of $Na_2SO_4$ < $MgSO_4$ < NaCl < $CaCl_2$. Molecular weight of cut off (MWCO) was calculated via retaining of PEG solutions with different molecular weights that finally, it revealed the Stokes and hydrodynamic radius of 1.457 and 2.507 nm on the membrane selective layer, respectively. The most efficient positively charged nanofiltration membrane exhibited a $Ni^{2+}$ rejection of 96.26% for industrial wastewater from Shamse Hadaf Co. (Kashan, Iran).