• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.11 no.11
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• pp.1043-1048
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• 1998

The decomposition performance of the Surface induced Plasma Chemical Processing(SPCP) for benzene, toluene, xylene and $NO_2$ were experimentally examined. Discharge exciting frequency range was 5kHz and 10kHz, and low frequency discharge requires high voltage to inject high electric power in gas and to decompose contaminants. The decomposition rate of dioxide nitrogen for 5kHz power in gas and to decompose contaminants. The decomposition rate of dioxide nitrogen for 5kHz power supply is only 85%, but it’s rate for 10kHz power supply is very high, more than 96% when peak voltage is 12kv. Aromatic hydrocarbon vapor of up to 1000ppm is almost throughly decomposed at the flow rate of 1000$\ell$/min or lower rate under the discharge with electric power of several hundred watts. High decomposition rate is shown in every case, that is, for SPCP reactor is necessary to obtain the decomposition rate of more than 80~98%. The decomposition rate of benzene, toluene and xylene were 90~98% and dioxide nitrogen was 45~96%.

• Journal of the Korean Vacuum Society
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• v.10 no.4
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• pp.440-448
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• 2001

The operation properties of DBD plasma reactors were observed by using 20 kV square pulse at the cylindrical and planar type of reactors in the condition of air pressure. The optimum operation frequency $f_0$ which optimizes the efficiency of operation was found as such $f_0\proptoexp(-C)$ when the current-voltage curve and charge-voltage curve were observed. Using these properties the dissipated power was evaluated. The dissipated power at the optimum frequency of operation was varied as the value of capacitance which is dependent on the structure and the dielectric material of the reactor, and had the maximum value at the specific value of capacitance. With these value of capacitance, DBD reactors which has a high level of efficiency can be formed.

• The Transactions of the Korean Institute of Electrical Engineers C
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• v.51 no.1
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• pp.15-21
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• 2002

We investigated effects of electrical, physical, and chemical parameters on energy transfer, NO conversion, and light emission in the dielectric barrier discharge (DBD) process. As gap distance between electrodes increased, discharge onset voltage increased. However, as gap distance between electrodes increased, electric field which initiates discharge showed approximately the same value, 30kV/cm. The discharge onset voltage of the coarse surface electrode was lower than that of the smooth surface electrode. And, energy transfer was slightly enhanced in the coarse electrode condition. However, NO conversion rate decreased with the coarse surface electrode because more uniform discharge can be obtained on the smooth surface electrode. The NO conversion rate increased with decreasing the initial concentration, so the DBD process is more feasible in the lower concentration condition. The variation of gas residence time tested at the same energy density in the experiment did not affect on the NO conversion. The result shows that the NO conversion rate mainly depends on the energy density. The DBD process is able to adjust on plasma-photocatalyst process because it emits the short wavelength light in the range of ultraviolet. The intensity of light emission increased with the increase of the energy transfer to the reactor and the gas flow rate.

• Journal of the Korean Crystal Growth and Crystal Technology
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• v.6 no.2
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• pp.229-237
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• 1996

The superconducting phase, $YBa_{2}Cu_{3}O_{x}$ (YBCO), was in-situ deposited on the single crystal MgO substrates, using an aerosol decomposition process in a cold plasma reactor. The solubility and decomposition temperature of the chemical precursors, and the vapor pressures of the solvents, were determined to be the factors crucial to achieving a stoichiometric, crystalline YBCO phase. The deposition parameters for the YBCO phase were 0.3 to 2.7 kPa for the oxygen partial pressure and $800^{\circ}C$ to $940^{\circ}C$ for the substrate temperature. The optimum deposition conditions for the YBCO phase were observed along the CuO decomposition line.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.18 no.7
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• pp.662-666
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• 2005

Silicon nitride $(SiN_x)$ film is a promising material for anti-reflection coating and passivation of multicrystalline silicon (me-Si) solar cells. In this work, a plasma-enhanced chemical vapor deposition (PECVD) system with batch-type reactor tube was used to prepare highly robust $SiN_x$ films for screen-printed mc-Si solar cells. The Gas flow ratio, $R=[SiH_4]/[NH_3]$, in a mixture of silane and ammonia was varied in the range of 0.0910.235 while maintaining the total flow rate of the process gases to 4,200 sccm. The refractive index of the $SiN_x$ film deposited with a gas flow ratio of 0.091 was measured to be 2.03 and increased to 2.37 as the gas flow ratio increased to 0.235. The highest efficiency of the cell was $14.99\%$ when the flow rate of $SiH_4$ was 350 sccm (R=0.091). Generally, we observed that the efficiency of the mc-Si solar cell decreased with increasing R. From the analysis of the reflectance and the quantum efficiency of the cell, the decrease in the efficiency was shown to originate mainly from an increase in the surface reflectance for a high flow rate of $SiH_4$ during the deposition of $SiN_x$ films.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.18 no.12
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• pp.1069-1074
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• 2005

In this work, nano-needle structures ate formed to solve problem, related to low density of quantum dots for nano floating gate memory. Such structures ate fabricated and electrical properties' of MIS devices fabricated on the nano-structures are studied. Nano floating gate memory based on quantum dot technologies Is a promising candidate for future non-volatile memory devices. Nano-structure is fabricated by reactive ion etching using $SF_6$ and $O_2$ gases in parallel RF plasma reactor. Surface morphology was investigated after etching using scanning electron microscopy Uniform and packed deep nano-needle structure is established under optimized condition. Photoluminescence and capacitance-voltage characteristics were measured in $Al/SiO_2/Si$ with nano-needle structure of silicon. we have demonstrated that the nano-needle structure can be applicable to non-volatile memory device with increased charge storage capacity over planar structures.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.38 no.5
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• pp.407-412
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• 2014

A new apparatus for seawater desalination, based on the principle of gas hydrates, is suggested. The equipment continuously produces and pelletizes gas hydrates by a squeezing operation in a dual cylinder unit, which is able to extract pure hydrate pellets from the seawater-containing reactor. Desalination efficiency for each dissolved ion from seawater samples was tested by inductively coupled plasma atomic emission spectroscopy (ICP-AES) and ion chromatography (IC) analysis. This study demonstrates that the suggested method and the stated apparatus may solve the difficulty of separating hydrate crystals from concentrated brine solutions, and therefore may be applied to improve the efficiency of existing desalination processes.

• Journal of Industrial Technology
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• v.26 no.A
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• pp.181-188
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• 2006

In this study, we analyzed the effects of several process variables on the removal efficiencies of NO and $SO_2$ by the dielectric barrier discharge process combined with photocatalysts. The $TiO_2$ photocatalysts were coated onto the spherical-shaped glass beads as dielectric materials by the dip-coating method to analyze the effects of photodegradation reaction on the NO and $SO_2$ removal. As the voltage applied to the plasma reactor increases, or as the pulse frequency of applied voltage increases, the NO and $SO_2$ removal efficiencies increase. Also as the residence time increases, or as the initial concentration of NO decreases, the NO and $SO_2$ removal efficiencies increase. The higher the amount of $TiO_2$ particles coated onto the glass bead is, the larger the surface area of $TiO_2$ particles for the photodegradation reaction is and the NO and $SO_2$ are removed more quickly by the faster photodegradation reactions.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2003.05b
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• pp.35-41
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• 2003

산업의 고도화 및 도시의 집중화로 오염물질의 종류가 다양화 되었으며 여러 가지 오염물질 중에서도 비산 분진, 황산화물(SOx) 등은 연료 중의 특정성분을 제거하거나 연료를 대체하여 그 배출량을 줄일 수 있다. 그러나 질소산화물(NOx)의 경우에는 연료의 문제가 아니라 연소과정에서 반드시 발생되는 특징을 가진 오염물질이다. 이와 같이 환경오염물질의 제거기술에 있어 가장 중요하게 고려되어야 할 사항은 오염가스 제거의 효율성과 경제성이다. 따라서 본 연구에서는 사무실, 가정 등 주로 실내공기정화를 위하여 NOx 제거를 위한 선 대 평판형 플라즈마 반응기에 자석의 개수에 의한 자계세기 및 자속밀도 시뮬레이션과 도출된 시뮬레이션 결과를 바탕으로 제작된 반응기에 자석을 부가한 NOx 제거에 대한 실험을 하였다. 그 결과 자석을 부가한 경우가 NOx 제거효과에 있어 효율이 좋음을 알 수 있었다.

• Journal of the Korea Safety Management & Science
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• v.1 no.1
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• pp.241-258
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• 1999

For hazardous air pollutants(HAP) such as NO and $NO_{2}$ decomposition efficiency, power consumption, and applied voltage were investigated by SPCP(surface induced discharge plasma chemical processing) reactor to obtain optimum process variables and maximum decomposition efficiencies. Decomposition efficiency of HAP with various electric frequencies(5~50 kHz), flow rates(100~1,000 mL/min), initial concentrations(100~1,000 ppm), electrode materials(W, Cu, Al), electrode thickness(1, 2, 3 mm) and number of electrode windings(7, 9, 11) were measured. Experimental results showed that for the frequency of 10 kHz, the highest decomposition efficiency of 94.3 % for NO and 84.7 % for $NO_{2}$ were observed at the power consumptions of 19.8 and 20W respectively and that decomposition efficiency decreased with increasing frequency above 20 kHz. Decomposition efficiency was increased with increasing residence times and with decreasing initial concentration of pollutants. Decomposition efficiency was increased with increasing thickness of discharge electrode and the highest decomposition efficiency was obtained for the electrode diameter of 3 mm in this experiment. As the electrode material, decomposition efficiency was in order : tungsten(W), copper(Cu), aluminum(Al).