• Title/Summary/Keyword: plasma reactor

Search Result 482, Processing Time 0.029 seconds

The Characteristics of Dust Removal in Flue Gas by the Plasma of Impulse Streamer Corona (충격식 코로나 방전 플라즈마를 이용한 배연가스로부터 먼지제거에 대한 특성)

  • 김은호
    • Journal of Environmental Science International
    • /
    • v.12 no.12
    • /
    • pp.1261-1267
    • /
    • 2003
  • On the basis of the distribution of particle size measured by laser diffraction spectrometers, this research was carried out to investigate the characteristics of mist removal with the change of operating condition in the plasma reactor of impulse streamer corona. The operating parameters in this experiment were power of impulse streamer corona, gas velocity, impulse generation time, gas temperature, and SOx/NOx concentration. The collection efficiency T(d) was estimated by the distribution of particle size in the collection zone through the advanced model.

The Technology of Mist Removal in Flue Gas by the Plasma of Impulse Streamer Corona (저온플라즈마에 의한 배연 가스내의 미스트 처리기술)

  • 하상안;김일배;강신묵
    • Journal of environmental and Sanitary engineering
    • /
    • v.14 no.4
    • /
    • pp.69-76
    • /
    • 1999
  • This research was carried but to investigate the characteristics of mist removal with the change of operating conditions in the plasma reactor of impulse streamer corona based on the distribution of particle size measured by laser diffraction spectrometers. The operating conditions in this experiment were power of impulse streamer corona, gas velocity, collection time, and SOx/NOx concentration. The collection efficiency T(d) was estimated by distribution of particle size in the collection zone through the advanced model.

  • PDF

Manufacturing and testing of flat-type divertor mockup with advanced materials

  • Nanyu Mou;Xiyang Zhang;Qianqian Lin;Xianke Yang;Le Han;Lei Cao;Damao Yao
    • Nuclear Engineering and Technology
    • /
    • v.55 no.6
    • /
    • pp.2139-2146
    • /
    • 2023
  • During reactor operation, the divertor must withstand unprecedented simultaneous high heat fluxes and high-energy neutron irradiation. The extremely severe service environment of the divertor imposes a huge challenge to the bonding quality of divertor joints, i.e., the joints must withstand thermal, mechanical and neutron loads, as well as cyclic mode of operation. In this paper, potassium-doped tungsten (KW) is selected as the plasma facing material (PFM), oxygen-free copper (OFC) as the interlayer, oxide dispersion strengthened copper (ODS-Cu) alloy as the heat sink material, and reduced activation ferritic/martensitic (RAFM) steel as the structural material. In this study, a vacuum brazing technology is proposed and optimized to bond Cu and ODS-Cu alloy with the silver-free brazing material CuSnTi. The most appropriate brazing parameters are a brazing temperature of 940 ℃ and a holding time of 15 min. High-quality bonding interfaces have been successfully obtained by vacuum brazing technology, and the average shear strength of the as-obtained KW/Cu and ODS-Cu alloy joints is ~268 MPa. And a fabrication route for manufacturing the flat-type divertor target based on brazing technology is set. For evaluating the reliability of the fabrication technologies under the reactor relevant condition, the high heat flux test at 20 MW/m2 for the as-manufactured flat-type KW/Cu/ODS-Cu/RAFM mockup is carried out by using the Electron-beam Material testing Scenario (EMS-60) with water cooling. This paper reports the improved vacuum brazing technology to connect Cu to ODS-Cu alloy and summarizes the production route, high heat flux (HHF) test, the pre and post non-destructive examination, and the surface results of the flat-type KW/Cu/ODS-Cu/RAFM mockup after the HHF test. The test results demonstrate that the mockup manufactured according to the fabrication route still have structural and interfacial integrity under cyclic high heat loads.

Simulation of a Dually Excited Capacitively Coupled RF Plasma

  • Kim, Heon-Chang;Sul, Yong-Tae;Park, Sung-Jin
    • 한국정보디스플레이학회:학술대회논문집
    • /
    • 2005.07a
    • /
    • pp.513-514
    • /
    • 2005
  • In plasma processing reactors, it is common practice to control plasma density and ion bombardment energy by manipulating excitation voltage and frequency. In this paper, a dually excited capacitively coupled rf plasma reactor is self-consistently simulated with a three moment model. Effects of phase differences between primary and secondary voltage waves, simultaneously modulated at various combination of commensurate frequencies, on plasma properties are investigated. The simulation results show that plasma potential and density as well as primary self-dc bias are nearly unaffected by the phase lag between the primary and the secondary voltage waves. The results also show that, with the secondary frequency substantially lower than the primary frequency, secondary self-dc bias remains constant regardless of the phase lag. As the secondary frequency approaches to the primary frequency, however, the secondary self-dc bias becomes greatly altered by the phase lag, and so does the ion bombardment energy at the secondary electrode. These results demonstrate that ion bombardment energy can be more carefully controlled through plasma simulation.

  • PDF

Changes of Chemical Concentrations during Pulsed Plasma Process of Silane (실란 펄스 플라즈마 공정에서의 화학농도 변화)

  • Kim, Dong-Joo;Kim, Kyo-Seon
    • Journal of Industrial Technology
    • /
    • v.25 no.A
    • /
    • pp.141-149
    • /
    • 2005
  • We investigated numerically the evolutions of several chemical species which are important for film growth and particle generation in the pulsed $SiH_4$ plasmas. During the plasma-on, the $SiH_x$ concentration increases with time mainly by the generation reaction from $SiH_4$, but, during the plasma-off, decreases because of the hydrogen adsorption reaction. During the plasma-on, the concentrations of negative ions increase with time by the polymerization reactions of negative ions and those become almost zero in the sheath regions because of the electrostatic repulsion. During the plasma-off, the concentrations of negative ions decrease with time by the neutralization reactions with positive ions and some negative ions can diffuse toward the sheath regions because there is no electric field inside the reactor. The polymerized negative ions of higher mass can be reduced successfully by using the pulsed plasma process.

  • PDF

Resist characteristics and molecular structure control of polystyrene by plasma polymerization method (플라즈마중합법에 의한 폴리스티렌의 분자구조 제에 및 레지스트 특성 조사)

  • 박종관;김영봉;김보열;임응춘;이덕출
    • The Transactions of the Korean Institute of Electrical Engineers
    • /
    • v.45 no.3
    • /
    • pp.438-443
    • /
    • 1996
  • The effect of plasma polymerization conditions on the structure of the plasma polymerized styrene were investigated by using Fourier Transform Infrared Ray(FT-IR), Differential Scanning Calorimetry (DSC), Gel Permeation Chromatography(GPC). Plasma polymerized thin film was prepared using an interelectrode inductively coupled gas-flow-type reactor. We show that polymerization parameters of thin film affect sensitivity and etching resistance of plasma polymerized styrene is 1.41~3.93, and deposition rate of that are 32~383[.angs./min] with discharge power. Swelling and etching resistance becomes more improved with increasing discharge power during plasma polymerization. (author). 11 refs., 10 figs., 1 tab.

  • PDF

A study on the E-beam resist characteristics of plasma polymerized styrene (플라즈마중합 스티렌 박막의 e-beam 레지스트 특성에 관한 연구)

  • 이덕출;박종관
    • Electrical & Electronic Materials
    • /
    • v.7 no.5
    • /
    • pp.425-429
    • /
    • 1994
  • In this paper, we study on the plasma polymerized styrene as a negative electron-beam resist. Plasma polymerized thin film was prepared using an interelectrode inductively coupled gas-flow type reactor. We show that polymerization parameters of thin film affect sensitivity and etching resistance of the resist. Molecular weight distribution of plasma polymerized styrene is 1.41-3.93, and deposition rates of that are 32-383[.angs./min] with discharge power. Swelling and etching resistance becomes . more improved with increasing discharge power during plasma polymerization. Etch rate by RIE is higher than that by plasma etching.

  • PDF

Shield Material Consideration in the LAR Tokamak Reactor

  • Hong, B.G.
    • Proceedings of the Korean Vacuum Society Conference
    • /
    • 2010.08a
    • /
    • pp.314-314
    • /
    • 2010
  • For the optimal design of a tokamak-type reactor, self-consistent determination of a radial build of reactor systems is important and the radial build has to be determined by considering the plasma physics and engineering constraints which inter-relate various reactor systems. In a low aspect ratio (LAR) tokamak reactor with a superconducting toroidal field (TF) coil, the shield should provide sufficient protection for the superconducting TF coil and the shield plays a key role in determining the size of a reactor. To determine the radial build of a reactor, neutronic effects such as tritium breeding in the blanket, nuclear heating, and radiation damage to toroidal field (TF) coil has to be included in the systems analysis. In this work, the outboard blanket only is considered where tritium self-sufficiency is possible by using an inboard neutron reflector instead of breeding blanket. The reflecting shield should provide not only protection for the superconducting TF coil but also improved neutron economy for the tritium breeding in outboard blanket. Tungsten carbide, metal hydride such as titanium hydride and zirconium hydride can be used for improved shielding performance and thus smaller shield thickness. With the use of advanced technology in the shield, conceptual design of a compact superconducting LAR reactor with aspect ratio of less than 2 will be presented as a viable power plant.

  • PDF

Adhesion Enhancement of Polymer Material Using Atmospheric Plasma (III) (대기압 플라즈마를 이용한 고분자 소재의 접착력 향상 (III))

  • Sim, Dong Hyun;Seul, Soo Duk
    • Journal of Adhesion and Interface
    • /
    • v.8 no.4
    • /
    • pp.23-31
    • /
    • 2007
  • An atmospheric plasma pre-treatment method was applied to EVA foam, Leather (Action), Rubber and Unwoven to improve its contact angle and adhesion using atmospheric plate type reactor. In order to investigate the optimum reaction condition of plasma treatment, type of reaction gas (nitrogen), rate of gas flow (30~100 mL/min), and reaction time (0~30 sec) were examined in a plate plasma reactor. The result of the surface modification with respect to the treatment procedure was characterized by using SEM. Due to a decrease of the contact angle of various materials, the greatest adhesion strength was achieved at optimum condition such as flow rate of 100 mL/min, reaction time of 10 second for an atmosphere nitrogen gas. Consequently, the atmospheric plasma treatment reduced the contact angle of the EVA foam, Leather (Action) and Rubber also resulted in the improvement of the adhesion.

  • PDF