• Title/Summary/Keyword: plasma oxidation

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Fabrication of MgO/NiCr bilayer coating via Plasma Electrolytic Oxidation and Radion Frequency Sputtering: Anti Corrosion Properties (플라즈마 전해 산화 및 고주파 스퍼터링을 통한 고내식성 MgO / NiCr 이중층 코팅 제조)

  • Gwon, Jeong-Hyeon;Na, Chan-Ung;Choe, Bo-Eun;Yun, Seong-Do
    • Proceedings of the Korean Institute of Surface Engineering Conference
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    • 2018.06a
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    • pp.63-63
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    • 2018
  • 본 연구는 플라즈마 전해 산화 (PEO) 및 RF (Radio Frequency) 스퍼터링을 이용한 2 단계 접근법에 의해 처리 된 MgO / Ni-Cr의 고내식성 이중층 코팅을 제조하기 위해 수행되었다. 이를 위해 $100mA/cm^2$ 교류 조건에서 180 s PEO를 한 후 150W 에서 900s RF 스퍼터링을 수행 하였다. 코팅의 형태는 주사전자현미경(SEM)을 사용하여 관찰되었으며 코팅의 상조성은 X-선 회절(XRD) 및 X-선 광전자 분광법(XPS)을 사용하여 분석하였다. SEM 이미지는 스퍼터링 된 Ni-Cr이 크랙의 대부분과 미세한 미세 공극을 덮어 코팅 결함이 감소함을 보여 주었다. 따라서, 코팅 된 샘플의 거칠기 값은 스퍼터링 공정 후에 감소되었다. 단면 이미지로부터, 스퍼터링된 코팅층은 낮은 두께 때문에 거의 검출되지 않았다. EDS, XRD 및 XPS를 사용한 조성 분석은 금속 상태의 형태로 Ni 및 Cr 존재를 나타내었고 XPS에서 NiCr2O4 부동태 피막이 검출되었다. MgO / Ni-Cr 이중층 코팅의 내부식성은 MgO / Ni-Cr 이중층을 가진 샘플의 금속 원소와 비교하여 우수한 부식 특성을 나타내는 전위 역학적 분극 시험 및 전기 화학적 임피던스 분광법으로 평가 하였다.

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Effects of Process Parameters on Corrosion Properties of PEO Coatings Formed on Al Alloy (공정변수에 따라 Al 합금 상에 형성된 PEO 코팅층의 내식성 평가)

  • Lee, Jeong-Hyeong;Kim, Seong-Jong
    • Proceedings of the Korean Institute of Surface Engineering Conference
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    • 2018.06a
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    • pp.139-139
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    • 2018
  • 최근 자동차 산업을 중심으로 한 수송용 기기의 경량화 추세에 따라 대표적인 경량금속 소재인 알루미늄 합금에 대한 수요가 증가하고 있으며 이에 따라 알루미늄 합금 표면에 다양한 특성을 부여할 수 있는 표면개질 기술에 대한 필요성이 부각되고 있다. 알루미늄 합금의 대표적인 표면처리기술인 아노다이징과 유사한 원리로 표면에 세라믹 코팅층을 형성할 수 있는 기술인 플라즈마 전해 산화(Plasma electrolytic oxidation, PEO)가 주목을 받고 있다. PEO 코팅법은 전해액 내에 소재를 침지시키고 400 ~ 600V에 이르는 고전압을 인가시켜 마이크로 방전을 유도하여 표면에 치밀한 세라믹 층을 형성시키는 기술이다. 본 연구에서는 PEO법으로 표면 개질된 Al 합금 표면의 표면 조직 특성과 전기화학 특성을 평가하고, 코팅층 특성에 미치는 공정 변수의 영향을 분석하고자 하였다. PEO 처리를 위해 사용된 소재는 상용 Al 합금 판재(Al 5083-O)로서 $2cm{\times}2cm$로 절단하여, 에머리페이퍼로 1000번까지 연마하여 사용하였다. 시험을 위한 PEO 처리 시스템은 전해액 수조, 일정 온도 유지를 위한 열교환기와 칠러, 전원 발생을 위한 전원공급기(power supply)로 구성되었다. 전해액은 약 알칼리 수용액을 이용하였으며, 전원 공급기를 통해 시험편에 펄스 전류를 인가하였다. PEO 처리 후 시편에 대하여 SEM, EDS, XRD 등을 이용한 표면 특성 평가를 실시하였다. 또한 코팅층의 전기화학적 부식 특성 평가를 위해 해수용액에서 동전위분극실험을 실시하였다. 시험 결과, Al 합금의 PEO 처리 시 내식성은 개선되는 것으로 확인되었으며, 공정변수는 표면의 미세조직 및 전기화학적 특성에 큰 영향을 미치는 것으로 나타났다.

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Changing PEO coating formation on Mg alloys by particle additions to the treatment electrolyte

  • Blawert, Carsten;Srinivasan, Bala;Liang, Jun;Huang, Yuanding;Hoche, Daniel;Scharnagl, Nico;Heitmann, Volker;Burmester, Ulrich
    • Proceedings of the Korean Institute of Surface Engineering Conference
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    • 2012.11a
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    • pp.7-11
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    • 2012
  • Plasma electrolytic oxidation of magnesium alloys is a well known technique to produce corrosion and wear resistant coatings. The addition of particles to the electrolyte provides a possibility to produce coatings with an increasing range of composition by in-situ incorporation of those particles into the coating. An extensive literature review has revealed that the mode of incorporation depends mainly on the melting point of the used particles and the energy provided by the discharges of the PEO process. The spectrum ranges from inert to partly reactive incorporation, but a complete reactive incorporation and a formation of a new single phase coating was not observed so far. Thus a new approach in PEO processing is introduced using specific particles as a kind of sintering additive, changing not only the composition but lowering the melting temperature and increase the liquid phase fraction during the discharges, resulting in a new amorphous coating.

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Characteristics of Fe-Ni Nanopowders Prepared by Electrical Explosion of Wire in Water and Ethanol

  • Bac, L.H.;Kim, B.K.;Kim, J.S.;Kim, J.C.
    • Journal of Magnetics
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    • v.16 no.4
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    • pp.435-439
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    • 2011
  • In this work, we prepared Fe-Ni alloy nanopowders by wire electrical explosion in deionized water and ethanol. Particles size and morphology of the as-synthesized nanoparticles prepared in water and ethanol were observed by transmission electron microscopy. In both cases, the as-synthesized nanoparticles were in nearly spherical shape and their size distribution was broad. The particles prepared in the water were in core-shell structure due to the oxidation of Fe element. X-ray diffraction was used to analyze the phase of the nanopowders. It showed that the nanopowders prepared in water had ${\gamma}$-Fe-Ni solid solution and FeO phase. The samples obtained in ethanol were in two phases of Fe-Ni solid solution, ${\gamma}$-Fe-Ni and ${\alpha}$-Fe-Ni. Bulk samples were made from the as-synthesized nanopowders by spark plasma sintering at $1000^{\circ}C$ for 10 min. Structure of the bulk sample was observed by scanning electron microscope. Magnetic properties of the as-synthesized nanopowders and the bulk samples were investigated by vibrating sample magnetometer. The hysteresis loop of the assynthesized nanopowders and the sintered bulk samples revealed a ferromagnetic characteristic.

플라즈마 전해산화 공정 중 전해액 내의 인산염 변화에 따른 알루미늄 합금 산화피막의 형성

  • Yun, Sang-Hui;Kim, Seong-Cheol;Seong, Gi-Hun;Gang, Du-Hong;Min, Gwan-Sik;Cha, Deok-Jun;Kim, Jin-Tae;Yun, Ju-Yeong
    • Proceedings of the Korean Vacuum Society Conference
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    • 2013.02a
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    • pp.298-298
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    • 2013
  • 플라즈마 전해산화기술은 알루미늄 소재에 대해 기존의 양극 산화막, 전해 경질크롬 도금 및 플라즈마 세라믹 용사기술 등에 의해 구현할 수 없는 고기능성을 부여하여 월등히 우수한 경도, 내부식, 내마모, 전기절연, 열저항, 피로강도 등을 얻을 수 있는 획기적인 기술이다. 또한 최근 환경에 대한 관심이 점차 높아지면서 친환경적 공정과정과 경금속 소재의 제품에 내구성을 향상시킬 필요성이 높아지고 있다. 이러한 요구에 부합하는 플라즈마 전해 산화기술은 알칼리 수용액 중에서 Al, Ti, Mg 등의 표면에 산화 피막을 형성시키는 기술로써 기존의 양극산화(Anodizing)을 대체 할 수 있다. 본 연구에서는 Al6061을 이용하여 플라즈마 전해산화 공정에 사용되는 전해액의 종류 및 농도, 시간의 변화에 따른 산화 피막의 변화를 내전압 측정 및 FE-SEM, EDS, XRD를 통해 분석하였다. 전해액에 sodium hexameta phosphate과 potassium phosphate를 이용하여 phosphate 종류의 변화에 따른 피막 특성의 변화를 연구하였다. 그로인해 phosphate의 종류 및 농도, 시간 변화를 이용하여 플라즈마 전해산화공정의 산화 피막 물성 제어를 할 수 있다.

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Purification and Characterization of Anti-Coagulant Activity Fraction from Persimmon Stem (감꼭지로부터 혈액응고저해물질의 정제와 특성)

  • 사유선;김경아;최혜선
    • Journal of the Korean Society of Food Science and Nutrition
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    • v.32 no.8
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    • pp.1323-1327
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    • 2003
  • Persimmon has been considered to have therapeutic values for various diseases in Korea. Dried persimmon has been applied to wounded parts for anti-inflammatory and analgesic activities. Anti-coagulant fraction from Persimmon stem was purified through gel filtration, phenyl Sepharose, DEAE-Sephadex and additional gel filtration column chromatographies. Its molecular weight was estimated to be 130,000 ∼ 180,000. By element analysis, its main components were C, H, and O. The anti -coagulant was heat- stable and completely inhibited after periodate oxidation, indicating that it was a complex carbohydrate.

Application of Computational Fluid Dynamic Simulation to SiC CVD Reactor for Mass Production (대량 생산용 SiC CVD 리엑터에의 전산유체역학 시뮬레이션의 적용)

  • Seo, Jin-Won;Choi, Kyoon
    • Journal of the Korean Ceramic Society
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    • v.50 no.6
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    • pp.533-538
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    • 2013
  • Silicon carbide (SiC) materials are typical ceramic materials with a wide range of uses due to their high hardness and strength and oxidation resistance. In particular, due to the corrosion resistance of the material against acids and bases including the chemical resistance against ionic gases such as plasma, the application of SiC has been expanded to extreme environments. In the SiC deposition process, where chemical vapor deposition (CVD) technology is used, the reactions between the raw gases containing Si and C sources occur from gas phase to solid phases; thus, the merit of the CVD technology is that it can provide high purity SiC in relatively low temperatures in comparison with other fabrication methods. However, the product yield rarely reaches 50% due to the difficulty in performing uniform and dense deposition. In this study, using a computational fluid dynamics (CFD) simulation, the gas velocity inside the reactor and the concentration change in the gas phase during the SiC CVD manufacturing process are calculated with respect to the gas velocity and rotational speed of the stage where the deposition articles are located.

Direct Bonding Characteristics of 2" 3C-SiC Wafers for Harsh Environment MEMS Applications (극한 환경 MEMS용 2" 3C-SiC기판의 직접접합 특성)

  • 정귀상
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.16 no.8
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    • pp.700-704
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    • 2003
  • This paper describes on characteristics of 2" 3C-SiC wafer bonding using PECVD (plasma enhanced chemical vapor deposition) oxide and HF (hydrofluoride acid) for SiCOI (SiC-on-Insulator) structures and MEMS (micro-electro-mechanical system) applications. In this work, insulator layers were formed on a heteroepitaxial 3C-SiC film grown on a Si (001) wafer by thermal wet oxidation and PECVD process, successively. The pre-bonding of two polished PECVD oxide layers made the surface activation in HF and bonded under applied pressure. The bonding characteristics were evaluated by the effect of HF concentration used in the surface treatment on the roughness of the oxide and pre-bonding strength. Hydrophilic character of the oxidized 3C-SiC film surface was investigated by ATR-FTIR (attenuated total reflection Fourier transformed infrared spectroscopy). The root-mean-square suface roughness of the oxidized SiC layers was measured by AFM (atomic force microscope). The strength of the bond was measured by tensile strength meter. The bonded interface was also analyzed by IR camera and SEM (scanning electron microscope), and there are no bubbles or cavities in the bonding interface. The bonding strength initially increases with increasing HF concentration and reaches the maximum value at 2.0 % and then decreases. These results indicate that the 3C-SiC wafer direct bonding technique will offers significant advantages in the harsh MEMS applications.ions.

Characteristics of the Microwave Induced Flames on the Stability and Pollutant Emissions (마이크로파가 인가된 화염에서의 화염안정성 및 오염물질 배출특성)

  • Jeon, Young Hoon;Lee, Eui Ju
    • Journal of the Korean Society of Safety
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    • v.29 no.4
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    • pp.23-27
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    • 2014
  • The use of electromagnetic energy and non-equilibrium plasma for enhancing ignition and combustion stability is receiving increased attention recently. The conventional technologies have adapted the electrical devices to make the electromagnetic field, which resulted in various safety issues such as high-maintenance, additional high-cost system, electric shock and explosion. Therefore, an electrodeless microwave technology has an advantage for economic and reliability compared with conventional one because of no oxidation. However, the application of microwave has been still limited because of lack of interaction mechanism between flame and microwave. In this study, an experiment was performed with jet diffusion flames induced by microwaves to clarify the effect of microwave on the combustion stability and pollutant emissions. The results show that microwave induced flames enhanced the flame stability and blowout limit because of abundance of radical pool. However, NOx emission was increased monotonically with microwave intensity except 0.2 kW, and soot emission was reduced at the post flame region.

Development of C/SiC Composite Parts for Rocket Propulsion (로켓 추진기관용 C/SiC 내열부품 개발)

  • Kim, Yunchul;Seo, Sangkyu
    • Journal of the Korean Society of Propulsion Engineers
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    • v.23 no.2
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    • pp.68-77
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    • 2019
  • C/SiC composites were developed by a liquid silicon infiltration(LSI) method for use as heat-resistant parts of solid and liquid rocket propulsion engines. The heat resistance characteristics according to the composition ratio (carbon / silicon / silicon carbide) were evaluated by specimen test through arc plasma, supersonic torch test. An ablation equation for oxidation reactions was presented. Through the combustion test it was verified that various parts such as nozzle insert, exit cone and combustion chamber heat resistant parts for rocket propulsion can be manufactured and proved high ablation performance and thermal structure performance.