• KIEE International Transactions on Electrophysics and Applications
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• 제4C권1호
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• pp.10-14
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• 2004

A large area electron beam generator has been developed for industrial applications, for example, waste water cleaning, flue gas treatment, and food pasteurization. The operational principle is based on the emission of secondary electrons from the cathode when ions in the plasma contact the cathode, which are accelerated toward the exit window by the gradient of the electric potential. Conventional electron beam generators require an electron beam scanning mechanism because a small area thermal electron emitter is used. The electron beam of the large area electron beam generator does not need to be scanned over target material because the beam area is considerable. We have fabricated a large area electron beam generator with peak energy of 200keV, and a beam diameter of 200mm. The electron beam current has been investigated as a function of accelerating voltage and distance from the extracting window while its radial distribution in front of the extracting window has been also measured.

• 전자공학회논문지A
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• 제31A권4호
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• pp.84-91
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• 1994

A compact electron cyclotron resonance(ECR) plasma system composed of a microwave generator and a magnet coil was fabricated. A Langmuir single probe was used to investigate the plasma characteristics of the system through I-V measurements. The performance of the compact ECR plasma system was tested for the case of silicon etching reaction with $CF_{4}/O_{2}$(30%) mixed gas. Electron density and etch rate increased to maximum values and then decreased with increasing argon gas pressure, but electron temperature changed in the opposite way. The electron density and the electron temperature of argon gas plasma were 0.85${\times}~5.5{\times}10^{10}cm^{-3}$ and 4.5~6.0 eV, respectively, in the pressure range from $3{\times}10^{4}$ to 0.05Torr. The etch rate reached a maximum value at the position of 2.5cm from the bottom of plasma cavity. Etch rate uniformity was $\pm$6% across 6cm wafer. Anisotropic index was 0.75 at 1.5${\times}10^{-4}$Torr.

• 한국자동차공학회논문집
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• 제10권2호
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• pp.40-47
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• 2002

Because UV wavelength lights can activate photocatalysts, plasma is used as a light source of a photocatalytic reactor. Even though plasma has good intensity for photo reaction, substrate of catalyst coating was limited by the geometry of plasma generator. Usually bead type substrate was used for a pack bed type reactor. Honeycomb monolith type substrate was used with UV lamps instead plasma, due to the light penetration the honeycomb monolith length was too short to show good activity In this study a photocatalytic reactor, which is using a honeycomb monolith substrate, was investigated with plasma as an activation light source. As a parametric study the effects of 1311owing factors on plasma generation and power consumption are examined; supply voltage, substrate length, environment condition, catalyst loading and ratio. Using the test results, the practicability test was done with simulated synthetic gases representing bad smells and automotive exhaust gases.

• 한국추진공학회:학술대회논문집
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• 한국추진공학회 2010년도 제35회 추계학술대회논문집
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• pp.537-540
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• 2010

5000도 이상의 고열류 유동을 발생시키는 개량형 고온플라즈마 토치는 신소재, 환경 및 에너지 사업 등, 첨단 기술의 실험을 위한 아크젯 풍동의 핵심장비이다. 개량형 고온플라즈마 토치는 내부 아크의 분기현상이 없는, 균일한 고순도의 유동을 발생할 수 있지만 까다로운 구조 및 작동조건 때문에 상용화가 어렵다. 본 연구에서는 개량형 고온플라즈마 토치를 이용한 플라즈마 발생 장치의 성능 평가 실험을 수행하였다. 400kW급 플라즈마 발생 장치의 성능평가 결과, 전류 280 ~ 320 A 및 전압 250 ~ 1350 V 범위에서의 설계 성능을 확인하였다.

• 대한전기학회:학술대회논문집
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• 대한전기학회 1999년도 하계학술대회 논문집 E
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• pp.2035-2037
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• 1999

This paper describes an ASM(All Solid-state Modulator) pulsed power generator for non-thermal plasma applications. The proposed generator can produce 20kV, 500A, 100ns pulses at repetition rates up to 10kHz, and it is composed of 30 series connections of power circuit card assembly which contains paralleled MOSFETs, MOSFET drivers, energy storage capacitors and specially designed 1:1 pulse transformer. Higher pulse voltages and currents can easily be obtained by increasing the numbers of series and parallel connections of power circuit card and MOSFETs, respectively. Component layouts are optimized to minimize the leakage inductance and the voltage spikes across switching devices. Especially it put emphasis on the over-current protection (including short circuit) for the reliable operation in real situations. Experimental results show that the proposed pulser is very efficient in air pollution control application and could be useful for other applications such as synthesis of nanosize powders and non-thermal food processing.

• 대한전기학회:학술대회논문집
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• 대한전기학회 1999년도 하계학술대회 논문집 E
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• pp.2170-2172
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• 1999

A low energy large aperture(LELA) pulsed electron beam generator of a cold cathode type has been developed for environmental applications, for example, waste water cleaning, flue gas cleaning, and pasteurization etc. The operational principle is based on the emission of secondary electrons from cold cathode when ions in the plasma hit the cathode, which are accelerated toward exit window by the gradient of an electric potential. We have fabricated the LELA electron beam generator with the peak energy of 200keV and beam diameter of 200mm and obtained the large aperture electron beam in air. The electron beam current density has been investigated as a function of glow discharge current, accelerating voltage and radial distribution in front of the exit window foil. The plasma density and electron temperature have been measured in order to confirm the relation with the electron beam current density. We are going to upgrade the LELA electron beam generator in the electron energy, electron beam current and stability of operation for various applications.

• 한국추진공학회지
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• 제20권6호
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• pp.101-112
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• 2016

초음속 비행체의 항력 감소 기초 실험을 위한 플라즈마 분사장치의 특성에 대해 분석하였다. 플라즈마 종류는 고압에서 발생이 가능한 열 플라즈마가 적합하다. 열 플라즈마를 발생하기 위해 플라즈마 토치를 사용한다. 플라즈마 토치는 고압 고속 분사가 가능하기 때문에 플라즈마 분사 제트에 적합한 플라즈마 발생장치이다. 본 연구에서는 확보한 플라즈마 토치에 대해 분석 및 정리하였고 기초 연구를 수행하였다. 그 결과 플라즈마 제트 발생의 주요 변수로는 플라즈마 토치의 전극 간격과 공급 기체의 압력으로 고려되었다.

• 한국지능시스템학회:학술대회논문집
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• 한국퍼지및지능시스템학회 2003년도 ISIS 2003
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• pp.599-602
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• 2003

A new technique is presented to construct predictive models of plasma etch processes. This was accomplished by combining a backpropagation neural network (BPNN) and a random generator (RC). The RG played a critical role to control neuron gradients in the hidden layer, The predictive model constructed in this way is referred to as a randomized BPNN (RG-BPNN). The proposed scheme was evaluated with a set of experimental plasma etch process data. The etch process was characterized by a 2$^3$ full factorial experiment. The etch responses modeled are 4, including aluminum (Al) etch rate, profile angle, Al selectivity, and do bias. Additional test data were prepared to evaluate model appropriateness. The performance of RC-BPNN was evaluated as a function of the number of hidden neurons and the range of gradient. for given range and hidden neurons, 100 sets of random neuron gradients were generated and among them one best set was selected for evaluation. Compared to the conventional BPNN, the proposed RC-BPNN demonstrated about 50％ improvements in all comparisons. This illustrates that the RG-BPNN of multi-valued gradients is an effective way to considerably improve the predictive ability of current BPNN of single-valued gradient.

• 한국대기환경학회지
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• 제19권1호
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• pp.77-84
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• 2003

HS, Ammonia, CH$_4$, VOCs, Microorganism, Bacteria etc produced from swineries or henhouses are known to prevent the growth of livestock. Moreover, they give an unpleasant feeling to the workers. In this study, a methodology to remove odors and toxic gases by oxidation of ozone was thus accomplished. However, most ozone generators which use the atmospheric surrounding air have problems of contamination of electrode for discharge. Therefore in this work, a wire-cylinder type plasma reactor with DC voltage has been used both in a laboratory scale test and in the real swinery to solve the existing problems. About 6 cm of electrode gap could decrease the attachment of dusts, humid aerosols and other polymers, which are contained in the air. This compact designed device could produce ozone to oxidize and remove the air pollutants. But the amount of ozone was not large enough to be harmful to human Health. Also, the concentration of ozone was able to be varied by the input voltage. which makes it available for the proposed system to be installed in various kinds of pig houses. With this device, at maximum 43 mg/㎥ (20 ppm) of ozone could be produced at 40 ㎸ input voltage (consumed energy was 0.1 Wh/㎥). A program was also made in this work to calculate the optimum parameters for design of a plasma reactor in wide range of conditions.

• 한국연소학회지
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• 제12권3호
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• pp.1-7
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• 2007

A combined hydrogen generator of plasma and catalytic reformer was developed, and was applied to stabilize unstable flame of 200,000 Kcal/hr LPG combustor. The role of the plasma reformer was to generate hydrogen in a short period and to heat-up the catalytic reformer during the start-up time. After the start-up period, the catalytic reformer generates hydrogen through steam reforming with oxygen (SRO) reactions. The maximum capacity of the hydrogen generator was enough 100 lpm to stabilize the flame of the present combustor. In order to reduce NOx and CO emissions simultaneously, 1) FGR (Flue Gas Recirculation) technique has been adopted and 2) the hydrogen was added into the fuel supplied to the combustor. Test results showed that the addition of 25% hydrogen and 30% FGR rate lead to simultaneous decrease of CO and NOx emissions. The technique developed in the present study showed good potential to replace $NH_3$ SCR technique, especially in the small-scale combustor applications.