• Journal of the Korean Society for Precision Engineering
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• v.21 no.7
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• pp.22-29
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• 2004

As a result of high integration of semiconductor device, the global planarization of multi-layer structures is necessary. So the chemical mechanical polishing(CMP) is widely applied to manufacturing the dielectric layer and metal line in the semiconductor device. CMP process is under influence of polisher, pad, slurry, and process itself, etc. In comparison with the general CMP which uses the slurry including abrasives, fixed abrasive pad takes advantage of planarity, resulting from decreasing pattern selectivity and defects such as dishing & erosion due to the reduction of abrasive concentration especially. This paper introduces the manufacturing technique of fixed abrasive pad using hydrophilic polymers with swelling characteristic in water and explains the self-conditioning phenomenon. And the tungsten CMP using fixed abrasive pad achieved the good conclusion in terms of the removal rate, non-uniformity, surface roughness, material selectivity, micro-scratch free contemporary with the pad life-time.

• Journal of the Korean institute of surface engineering
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• v.52 no.5
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• pp.239-245
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• 2019

To increase the throughput of tip-based nanolithography (TBN), one approach is to use a large array of such tips working in parallel. It is important to maintain co-planarity between the tip array and the writing surface. A slight misalignment can cause large discrepancies of contact force and feature sizes. We report a capacitive proximity sensor built-in with the TBN array for leveling an arrayed polymer pen array. The device allows alignment between an array of writing tips and the writing substrate without contact and contamination. The angular sensitivity of the sensor is $0.05^{\circ}$ for an array with maximum tip-to-tip separation of 100 mm.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.18 no.3
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• pp.49-58
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• 2019

Automatic transmissions are standard equipment in most automotive vehicles because they provide smooth speed shifting and a compact design with multiple speed ratios. Their structure consists mainly of planetary gear sets as power-transmitting devices and brakes and clutches as shifting devices. Several forward and one reverse speed ratios are achieved by actuating shifting devices to connect gears, input and output shafts, and the transmission case. In the development of a new transmission, kinematic configurations reflecting the transmission concept design are required, and the ability of the new concept design to be assembled without any interference among the connections must be demonstrated. In this study, an assemblability analysis of the kinematic configurations of a Ravigneaux-type automatic transmission was conducted with an assemblable example of an 8-speed Ravigneaux-type automatic transmission.

• Bulletin of the Korean Chemical Society
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• v.10 no.3
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• pp.227-230
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• 1989

The lowest excited state of styrylquinoxaline (StQx) has been studied by the SCF-MO-CI P-P-P and MM2 method. Results suggest that the lowest excited state is of a ${\pi},{\pi}^{\ast}(S_1$) nature with the n,${\pi}^{\ast}(S_2)$ state lying slightly above it. On the basis of these calculations the observed electronic spectra are discussed. The calculated absorption spectra are qualitatively similar to experimental ones with their characteristic visible bands. MM2 force field calculation suggested that the postulated conformers are different from each other in energy and planarity and are seperated by a barrier of about 4 Kcal/mole.

• Bulletin of the Korean Chemical Society
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• v.21 no.3
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• pp.300-304
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• 2000

The B3LYP method based on the density functional theory(DFT) is shown to be much better than the ab initio MP2 method for structural determination of diphosphadithiatetrazocine systems having transannular S--S bonding. The presence of bonding between the two sulfur atoms across the cyclic ring is theoretically confirmed in the case of the neutral diphosphadithiatetrazocine. The S--S dobding disappears in the ionized species. The planarity of the dicationic heterocyclic ring system turns out to be closely associated with the $\pi-electron$ delocalization over the entire ring as well as the N-S-N bonds, which become stiffened upon ionizaiton. In the case of dianionic species, the chair-boat and chair conformers are nearly degenerate and far more stable than the crown conformer.

• Ocean Systems Engineering
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• v.13 no.2
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• pp.97-121
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• 2023

Through-the-thickness stress distribution in a tubular member has a profound effect on the fatigue behavior of tubular joints commonly found in steel offshore structures. This stress distribution can be characterized by the degree of bending (DoB). Although multi-planar joints are an intrinsic feature of offshore tubular structures and the multi-planarity usually has a considerable effect on the DoB values at the brace-to-chord intersection, few investigations have been reported on the DoB in multi-planar joints due to the complexity of the problem and high cost involved. In the present research, data extracted from the stress analysis of 243 finite element (FE) models, verified based on available parametric equations, was used to study the effects of geometrical parameters on the DoB values in two-planar tubular DYT-joints. Parametric FE study was followed by a set of nonlinear regression analyses to develop six new DoB parametric equations for the fatigue analysis and design of axially loaded two-planar DYT-joints.

• Korean Journal of Remote Sensing
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• v.35 no.6_1
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• pp.973-985
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• 2019

In this paper, we propose a method to separate the ground and building areas and generate building models automatically through planarity analysis using UAV (Unmanned Aerial Vehicle) based point cloud. In this study, proposed method includes five steps. In the first step, the planes of the point cloud were extracted by analyzing the planarity of the input point cloud. In the second step, the extracted planes were analyzed to find a plane corresponding to the ground surface. Then, the points corresponding to the plane were removed from the point cloud. In the third step, we generate ortho-projected image from the point cloud ground surface removed. In the fourth step, the outline of each object was extracted from the ortho-projected image. Then, the non-building area was removed using the area, area / length ratio. Finally, the building's outer points were constructed using the building's ground height and the building's height. Then, 3D building models were created. In order to verify the proposed method, we used point clouds made using the UAV images. Through experiments, we confirmed that the 3D models of the building were generated automatically.

• Korean Journal of Remote Sensing
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• v.36 no.6_1
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• pp.1349-1365
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• 2020

In recent years, in the fields of smart cities and digital twins, research on model generation is increasing due to the advantage of acquiring actual 3D coordinates by using point clouds. In addition, there is an increasing demand for a solid model that can easily modify the shape and texture of the building. In this paper, we propose a method to create a clustered solid building model based on point cloud data. The proposed method consists of five steps. Accordingly, in this paper, we propose a method to create a clustered solid building model based on point cloud data. The proposed method consists of five steps. In the first step, the ground points were removed through the planarity analysis of the point cloud. In the second step, building area was extracted from the ground removed point cloud. In the third step, detailed structural area of the buildings was extracted. In the fourth step, the shape of 3D building models with 3D coordinate information added to the extracted area was created. In the last step, a 3D building solid model was created by giving texture to the building model shape. In order to verify the proposed method, we experimented using point clouds extracted from unmanned aerial vehicle images using commercial software. As a result, 3D building shapes with a position error of about 1m compared to the point cloud was created for all buildings with a certain height or higher. In addition, it was confirmed that 3D models on which texturing was performed having a resolution of less than twice the resolution of the original image was generated.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.14 no.7
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• pp.3528-3537
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• 2013

Evaluation indices of the panelizing optimization for Architectural freeform surfaces are proposed for quantitative evaluation through the case studies on panelizing optimization and evaluation index for Architectural freeform surfaces. Proposed evaluation items are adherence to original design intent, production ease, and continuity. The evaluation index for adherence to original design intent is surfaces fitness, the evaluation indices for production ease are planarity, planar panel ratio, and the evaluation indices for continuity are tangent continuity, and divergence. Algorithms are also suggested to compute the proposed evaluation indices.

• Journal of Institute of Control, Robotics and Systems
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• v.17 no.1
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• pp.22-30
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• 2011

Plane detection is very important information for mission-critical of robot in 3D environment. A representative method of plane detection is Hough-transformation. Hough-transformation is robust to noise and makes the accurate plane detection possible. But it demands excessive memory and takes too much processing time. Iterative randomized Hough-transformation has been proposed to overcome these shortcomings. This method doesn't vote all data. It votes only one value of the randomly selected data into the Hough parameter space. This value calculated the value of the parameter of the shape that we want to extract. In Hough parameters space, it is possible to detect accurate plane through detection of repetitive maximum value. A common problem in these methods is that it requires too much computational cost and large number of memory space to find the distribution of mixed multiple planes in parameter space. In this paper, we detect multiple planes only via data sampling using Self Organizing Map method. It does not use conventional methods that include transforming to Hough parameter space, voting and repetitive plane extraction. And it improves the reliability of plane detection through division area searching and planarity evaluation. The proposed method is more accurate and faster than the conventional methods which is demonstrated the experiments in various conditions.