• Journal of Magnetics
• /
• v.19 no.1
• /
• pp.10-14
• /
• 2014

In this study, we fabricate an integrated microfluidic chip with a planar Hall effect (PHE) sensor for single magnetic bead detection. The PHE sensor was constructed with a junction size of $10{\mu}m{\times}10{\mu}m$ using a trilayer structure of Ta(3 nm)/NiFe(10 nm)/Cu(1.2 nm)/IrMn(10 nm)/Ta(3 nm). The sensitivity of the PHE sensor was 19.86 ${\mu}V/Oe$. A diameter of 8.18 ${\mu}m$ magnetic beads was used, of which the saturation magnetization was ~2.1 emu/g. The magnetic susceptibility ${\chi}$ of these magnetic beads was calculated to be ~0.14. The diluted magnetic beads solution was introduced to the microfluidic channel attributing a single bead flow and simultaneously the PHE sensor voltage was measured to be 0.35 ${\mu}V$. The integrated microchip was able to detect a magnetic moment of $1.98{\times}10^{-10}$ emu.

• Journal of Magnetics
• /
• v.12 no.1
• /
• pp.40-44
• /
• 2007

The Planar Hall effect in a spin valve structure has been applied as a biosensor being capable of detecting $Dynabeads^{(R)}$ M-280. The sensor performance was tested under the application of a DC magnetic field where the output signals were obtained from a nanovoltmeter. The sensor with the pattern size of $50{\times}100{\mu}m^2$ has produced high sensitivity; especially, the real-time profiles by using that sensor revealed significant performance at external applied magnetic field of around 7.0 Oe with the resolution of 0.04 beads per $\mu m^2$. Finally, a successful array including 24 patterns with the single sensor size of $3{\times}3{\mu}m^2$ has shown the uniform and stable signals for single magnetic bead detection. The comparison of this sensor signal with the others has proved feasibility for biosensor application. This, connecting with the advantages of more stable and high signal to noise of PHR sensor's behaviors, can be used to detect the biomolecules and provide a vehicle for detection and study of other molecular interaction.

• Journal of the Korean Society for Nondestructive Testing
• /
• v.28 no.5
• /
• pp.421-426
• /
• 2008

The magnetic bio-sensor used the PHR (planar hall resistance) effect generated by the free layer in spin-valve giant magnetoresistance structure of Ta/NiFe/CoFe/Cu/NiFe/IrMn/Ta. The PHR element with micrometer size was fabricated through the photolithograph and dry etching process. The PHR signal with magnetic field was measured under the conditions of with and without single magnetic bead. A single magnetic bead of diameter $2.8\;{\mu}m$ was successfully detected using the PHR sensor. Therefore, the high resolution PHR sensor can be applied to bio-sensor application utilizing the output voltage variation of the PHR signals in the presence and absence of a single magnetic bead.

• Proceedings of the Korean Magnestics Society Conference
• /
• 2013.12a
• /
• pp.35-36
• /
• 2013

• Proceedings of the Korean Magnestics Society Conference
• /
• 2008.12a
• /
• pp.147.1-147.1
• /
• 2008

• Journal of Magnetics
• /
• v.17 no.4
• /
• pp.302-307
• /
• 2012

We have designed, fabricated and tested an integrated microfluidic chip with a Planar Hall Effect (PHE) sensor. The sensor was constructed by sequentially sputtering Ta/NiFe/Cu/NiFe/IrMn/Ta onto glass. The microfluidic channel was fabricated with poly(dimethylsiloxane) (PDMS) using soft lithography. Magnetic nanoparticles suspended in hexadecane were used as ferrofluid, of which the saturation magnetisation was 3.4 emu/cc. Droplets of ferrofluid were generated in a T-junction of a microfluidic channel after hydrophilic modification of the PDMS. The size and interval of the droplets were regulated by pressure on the ferrofluid channel inlet. The PHE sensor detected the flowing droplets of ferrofluid, as expected from simulation results. The shape of the signal was dependent on both the distance of the magnetic droplet from the sensor and the droplet length. The sensor was able to detect a magnetic moment of $2{\times}10^{-10}$ emu at a distance of 10 ${\mu}m$. This study provides an enhanced understanding of the magnetic parameters of ferrofluid in a microfluidic channel using a PHE sensor and will be used for a sample inlet module inside of integrated magnetic lab-on-a-chip systems for the analysis of biomolecules.