• Proceedings of the Materials Research Society of Korea Conference
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• 2011.10a
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• pp.23-23
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• 2011

Chemical-Mechanical Planarization (CMP) 공정이란 화학적 반응 및 기계적인 힘이 복합적으로 작용하여 표면을 평탄화하는 공정이다. 이러한 CMP 공정은 반도체 산업에서 회로의 고집적화와 다층구조를 형성하기 위하여 도입되었으며 반도체 제조를 위한 필수공정으로 그 중요성이 강조되고 있다. 특히 최근에는 Inter-Level Dielectric (ILD)의 형성과 Shallow Trench Isolation (STI) 공정에서실리콘 산화막을 평탄화하기 위한 CMP 공정에 대해 연구가 활발히 이루어지고 있다. 그러나 CMP 공정 후 scratch, pitting corrosion, contamination 등의 Defect가 발생하는 문제점이 존재한다. 이 중에서도 scratch는 기계적, 열적 스트레스에 의해 생성된 패드의 잔해, 슬러리의 잔유물, 응집된 입자 등에 의해 표면에 형성된다. 반도체 공정에서는 다양한 종류의 실리콘 산화막이 사용되고 gks이러한 실리콘 산화막들은 종류에 따라 경도가 다르다. 따라서 실리콘 산화막의 경도에 따른 CMP 공정 및 이로 인한 Scratch 발생에 관한 연구가 필요하다고 할 수 있다. 본 연구에서는 scratch 형성의 거동을 알아보기 위하여 boronphoshposilicate glass (BPSG), plasma enhanced chemical vapor deposition (PECVD) tetraethylorthosilicate (TEOS), high density plasma (HDP) oxide의 3가지 실리콘 산화막의 기계적 성질 및 이에 따른 CMP 공정에 대한 평가를 실시하였다. CMP 공정 후 효율적인 scratch 평가를 위해 브러시를 이용하여 1차 세정을 실시하였으며 습식세정방법(SC-1, DHF)으로 마무리 하였다. Scratch 개수는 Particle counter (Surfscan6200, KLA Tencor, USA)로 측정하였고, 광학현미경을 이용하여 형태를 관찰하였다. Scratch 평가를 위한 CMP 공정은 실험에 사용된 3가지 종류의 실리콘 산화막들의 경도가 서로 다르기 때문에 동등한 실험조건 설정을 위해 동일한 연마량이 관찰되는 조건에서 실시하였다. 실험결과 scratch 종류는 그 형태에 따라 chatter/line/rolling type의 3가지로 분류되었다 BPSG가 다른 종류의 실리콘 산화막에 비해 많은 수에 scratch가 관찰되었으며 line type이 많은 비율을 차지한다는 것을 확인하였다. 또한 CMP 공정에서 압력이 증가함에 따라 chatter type scratch의 길이는 짧아지고 폭이 넓어지는 것을 확인하였다. 본 연구를 통해 실리콘 산화막의 경도에 따른 scratch 형성 원리를 파악하였다.

• Korean Journal of Materials Research
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• v.21 no.5
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• pp.288-294
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• 2011

Simultaneous Ni and C codeposition by electrolysis was investigated with the aim of obtaining better corrosion resistivity and surface conductivity of a metallic bipolar plate for application in fuel cells and redox flow batteries. The carbon content in the Ni-C composite plate fell in a range of 9.2~26.2 at.% as the amount of carbon in the Ni Watt bath and the roughness of the composite were increased. The Ni-C composite with more than 21.6 at.% C content did not show uniformly dispersed carbon. It also displayed micro-sized defects such as cracks and crevices, which result in pitting or crevice corrosion. The corrosion resistance of the Ni-C composite in sulfuric acid is similar with that of pure Ni. Electrochemical test results such as passivation were not satisfactory; however, the Ni-C composite still displayed less than $10^{-4}$ $A/cm^2$ passivation current density. Passivation by an anodizing technique could yield better corrosion resistance in the Ni-C composite, approaching that of pure Ni plating. Surface resistivity of pure Ni after passivation was increased by about 8% compared to pure Ni. On the other hand, the surface resistivity of the Ni-C composite with 13 at.% C content was increased by only 1%. It can be confirmed that the metal plate electrodeposited Ni-C composite can be applied as a bipolar plate for fuel cells and redox flow batteries.

• Journal of the Korean Institute of Gas
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• v.5 no.1
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• pp.1-6
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• 2001

The main objective of this study is to determine if the sources of AE in corroded specimens of aluminum could be identified iron the characteristics of the waveform signals recorded during fatigue loading. Coupons of notched 2024-T3 aluminum with or without corrosion (at the notch) were subjected to fatigue loading and the AE signals were recorded using non-resonant, flat, wide-band transducers. The time history and power spectrum of each individual wave signal recorded during fatigue crack growth were examined and classified according to their special characteristics. Five distinct types of signals were observed regardless of specimen condition. The waveform and power spectra were shown to be dependent on specimen condition. During the initial phase of crack growth, the signals obtained in the as-received specimens are most probably due to transgranular cleavage caused by extrusion and intrusion under fatigue loading. In the corroded specimen the signal are probably generated by intergranular cleavage due to embrittlement of grain boundary neat the pitting tip. The need for additional research to further validate these findings is indicated.

• Transactions of the Korean Society of Pressure Vessels and Piping
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• v.5 no.2
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• pp.1-6
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• 2009

Nuclear power plants (NPP) using Alloy 600 (Ni 75wt%, Cr 15wt%, Fe 10wt%) as a heat exchanger tube of the steam generator (SG) have experienced various corrosion problems by ageing such as pitting, intergranular attack (IGA) and stress corrosion cracking (SCC). In spite of much effort to reduce the material degradations, SCC is still one of important problems to overcome. Especially lead is known to be one of the most deleterious species in the secondary system that cause SCC of the alloy. Even Alloy 690 (Ni 60wt%, Cr 30wt%, Fe 10wt%) as an alternative of Alloy 600 because of outstanding superiority to SCC is also susceptible to leaded environment. An oxide on SG tubing materials such as Alloy 600 and Alloy 690 is formed and modified expanding to complex sludge throughout hideout return (HOR) of various impurities including Pb. Oxide formation and breakdown is requisite for SCC initiation and propagation. Therefore it is expected that an oxide property such as a passivity of an oxide formed on steam generator tubing materials is deeply related to PbSCC and an inhibitor to hinder oxide modification by lead efficiently can be found. In the present work, the SCC susceptibility obtained by using a slow strain rate test (SSRT) in aqueous solutions with and without lead was discussed in view of the oxide property. The oxides formed on Alloy 600 and Alloy 690 in aqueous solutions with and without lead were examined by using a transmission electron microscopy (TEM), an energy dispersive x-ray spectroscopy (EDXS), an x-ray photoelectron spectroscopy (XPS) and an electrochemical impedance spectroscopy (EIS).

• Journal of the Korean Wood Science and Technology
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• v.44 no.3
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• pp.295-301
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• 2016

In this study, relationship between seed origin and growth rate of Alnus glutinosa from different seed collection (Yugoslovia, ltaly, United Kingdom, Bulgaria) was investigated with focused on anatomical properties as wood fiber length, vessel element length and diameter. Alnus glutinosa showed diffuse-porous wood with scalariform perforation in alternate pitting. Ray height was 9~11 in tangential section and ray number were 16~26 in cross section. There were no differences on latewood focused on wood fiber length, length and diameter of vessel element, but difference on earlywood. Other than Yugoslavian seed, there was better growth rate with shorter wood fiber and vessel element length on latewood. However, seed from Yugoslovain showed better growth rate with longer wood fiber and vessel element length than other 3 seed orgins.

• The Korea Journal of Herbology
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• v.31 no.3
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• pp.59-69
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• 2016

Objectives： Presently Mume Fructus (MF) undergoes fumigation, which produces benzo[a]pyrene. As a primary analysis with the aims to minimize the production of benzo[a]pyrene and to suggest standards for processing the MF, the steaming method was chosen among the various processing methods, and reviewed through a series of experiments.Methods： Methods：Pitted and un-pitted MF were steamed and processed into samples. After testing level of benzo[a]pyrene, the samples were analyzed for amount of polyphenol and flavonoids. Scavenging activities of the samples for the DPPH and ABTS radicals were tested. In order to measure anti-inflammatory effects of the samples, cell survival rate was investigated using CCK-8 Assay. Also, water extracts of dried and steamed MF were administered to the RAW 264.7 cells to compare expressions of NO, PGE₂, IL-1β, and TNF-α. In addition, anti-diarrhea effects of the herbal medicine were tested on animal models with diarrhea induced by MgSO₄ and Castor oil.Results： Regardless of pitting, processed MF contained no benzo[a]pyrene. Anti-oxidation effect increased in relation to the frequency of steaming process. However, extracts of dried and steamed MF suppressed different kinds of inflammation factors, and extract of dried MF showed superior anti-diarrhea effect than extract of steamed MF.Conclusions： It is suggested that steaming method of MF is recommended for processing the herbal medicine without the production of benzo[a]pyrene. But regarding that dried and steamed MF showed differences in their anti-oxidative, anti-inflammatory, and anti-diarrhea effects, it is recommended to perform further researches on different efficacies of MF according to their processing methods.

• Korean Journal of Agricultural Science
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• v.25 no.1
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• pp.19-25
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• 1998

This study was conducted to develop an appropriate postharvest technique to extend the shelf-life of an early cultivar, 'Tsugaru' apples. The general quality of stored fruit was more affected by maturity at harvest than postharvest treatments. When firmness and internal quality were considered, fruits harvested at the medium stage of color development showed better results. Between postharvest treatments examined in this study, a simple polyethylene film(PE) wrapping (30um) was excellent on inhibition of weight loss but this treatment revealed no clear effect on other quality factors including firmness and acidity. Ethylene scrubber(ES) in polyethylene wrapping showed a positive effect on keeping fruit quality in general. Especially acid content was higher in fruit stored with PE + ES, thus, fruit seemed to be better in freshness. A physiological disorder was observed regardless postharvest treatments. The symptom was associated with incidence of pitting on surface and breakdown of the effected tissue. And much more symptoms were developed near the calyx end. Thus, future studies concerning 'Tsugaru' storage should include an examination of the optimum storage temperature.

• Journal of IKEEE
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• v.23 no.4
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• pp.1122-1127
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• 2019

In this study, the bio-impedance of the human body is able to obtain a lot of information by monitoring the pathological and physiological conditions of clinical and biological tissues. The four electrode method system for biometrics measured the potential difference between two electrodes and the other two electrodes were used as electrodes for current flow. The newly developed dry gold electrode measured impedance from 1 Hz to 50 kHz and produced reproducible results. To verify the impedance measurement of the dry electrode, the pitting was performed using an equivalent circuit model of the bioelectrode skin, and the effectiveness was demonstrated through modeling. Fixed electrode types have a constant position of the electrodes attached during the measurement, so that a stable measurement can be obtained, thereby minimizing the error.

• Transactions of the Korean Society of Mechanical Engineers
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• v.8 no.6
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• pp.569-575
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• 1984

The characteristics of the stress corrosion cracking of SUS 304 stainless steel weldments were studied with the speciments of the constant displacement type under the environment of 42% MgC $l_{2}$ boiled solution (143.+.-.2.deg.C). The susceptibility of initiation and propagation of the stress corrosion crack was quantitatively inspected in the weld metal, heat affected zone and heat affected zone with including the reinforcement shape, respectively. Also, those susceptibility were discussed in connection with the change of mechanical and microstructural characteristics caused by heating cycle of welding. Main results obtained are as follows: (1)Stress corrosion cracking is easiest to initiate and propagate in the heat affected zone of weldment. (2)The susceptibility of stress corrosion cracking of the weldment is largely improved by eliminating the reinforcement part of the weld bead. (3)The dominant factor of the cracking susceptibility of the heat affected zone appeared to be the phenomenon of softening and sensitizing caused by welding heat cycle. (4)Under the low loading conditions, the behavior of stress corrosion cracking of the SUS 304 steel weldment is largely influenced by the pitting phenomenon in the front region of the main crack.

• The Plant Pathology Journal
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• v.15 no.6
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• pp.335-339
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• 1999

Citrus tristeza virus(CTV), an aphid-borne closterovirus, is one of the most destructive pathogens of citrus. It has caused rapid decline in growth, stem pitting and death in citrus trees. A reverse transcriptase polymerase chain reaction (RT-PCR) assay was developed for detection of CTV and investigation of the CTV infection status of citrus and its related cultivars in Cheju island. For RT-PCR based CTV detection, primers were designed to amplify 670bp of coat protein gene. A screening test for CTV in citrus cultivars was conducted from March to July in 1999. Seventy individual citrus trees representing 9 species of 3 genera were tested. The infection rates of CTV for leaves from the years or older trees of late maturing citrus varieties such as Yuzu (C. junos Sieb. ex Tanaka), Navel orange (C.sinensis Osbeck), Kiyomitanger (C. unshiu x C. sinensis), and Shiranuhi ((C. unshiu x C. sinensis) x C. reticulata) were 100%, 80%, 60%, and 60% respectively. The CTV infection rates in Early satsuma mandarins such as 'Miyagawa Early' Satsuma mandarins (C. unshiu Marc. var. Miyagawa) and 'Okitsu Early' Satsuma mandarins (C. unshiu Marc. var. Okitsu) were 100%, and 60%, respectively. CTV was not detected in Cheju native Dangyooja (C. unshiu Marc. var. Osbeck), Trifoliate orange (Poncirus trifoliata) and Kumquat (Fortunella margarita Swingle). In conclusion, RT-PCR assay can be successfully applied to the detection of CTV in citrus trees.