• 한국세라믹학회지
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• 제31권9호
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• pp.1037-1043
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• 1994

The effects of annealing atmosphere and temperature on piezoelectricity (k33) and the mechanical strength of machined PZT was studied. Morphotropic Nb-doped PZT was sintered, machined to a rod and then annealed between 80$0^{\circ}C$ and 100$0^{\circ}C$ in air, PbZrO3, and CuO atmospheres respectively. In air or PbZrO3 atmosphere, the compressive strength of Nb-doped PZT increased by 12% with little change in k33 irrespective of annealing temperature. In CuO atmosphere, on the other hand, the compressive strength increased by 20% with little change in k33 at 80$0^{\circ}C$ but both turned to significant decrease above 90$0^{\circ}C$. The examination of the phase distribution and microstructure beneath the surface of CuO-treated PZT revealed that the changes in compressive strength and k33 are closely related to the reaction between PZT and vaporized CuO:liquid PbO precipitated in shallow surface region by the substitution of Cu to Pb sites enhances the decrease in microcracks and the surface roughness at 80$0^{\circ}C$ ; rapid evaporation of precipitated PbO expands a porous region of changed composition into the bulk above 90$0^{\circ}C$.

• 한국전기전자재료학회논문지
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• 제15권12호
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• pp.1060-1064
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• 2002

We have studied the effect of crystallization temperature, composition and film thickness, which are the fundamental processing parameters of lead zirconate titanate(PZT) thin film fabrication, in the respect of the piezoelectric properties by our pneumatic loading method(PLM). A great deal of research has been done in the field of characterization for piezoelectric thin films after the first report on the measurement for the piezoelectric coefficient of thin films in 1990. Even though the piezoelectric properties of thin films are very critical factors in the micro-electro mechanical system(MEMS) and thin film sensor devices, a few reports for the piezoelectric characterization are provided for the last decade unlikely the bulk piezoelectric devices. We have found that the piezoelectric properties of thin films are improved as the increase of crystallization temperature up to 750$\^{C}$ and this behavior can be also explained by the analysis of dielectric polarization hysteresis loop, X-ray diffraction and scanning electron microscopy. The effect of Zr/Ti composition has been also studied. This gives us the fact that the maximum piezoelectricity is found near Morphotropic Phase Boundary(MPB) as bulk PZT system does.

• 대한전기학회:학술대회논문집
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• 대한전기학회 1997년도 하계학술대회 논문집 C
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• pp.1549-1551
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• 1997

In this study, the $\beta$-Polyvinylidene fluoride($\beta$-PVDF) organic thin films were fabricated by physical vapor deposition method as one of the dry-processing methods and applying electric field during the vapor deposition. When the substrate temperature is $80^{\circ}C$, the PVDF organic thin films exhibit the characteristic absorption band of the $\beta$ forms $510cm^{-1}$, $602cm^{-1}$ and $1273cm^{-1}$, and the fraction of $\beta$ form crystals in the total crystalline content was 95%. The molecular structure of PVDF organic thin films were transformed from $\alpha$ to $\beta$ form with increasing of applied electric field and the control of substrate temperature.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2008년도 하계학술대회 논문집 Vol.9
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• pp.121-122
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• 2008

Lithium Niobate (LN:LiNbO3) is a compound of niobium, lithium and oxygen. The characteristics of LN are piezoelectricity, ferroelectricity and photoelectricity, and which is widely used in surface acoustic wave (SAW). To manufacture LN device, the LN surface should be a smooth surface and defect-free because of optical property, but the LN material is processed difficult by traditional processes such as grinding and mechanical polishing (MP) because of its brittleness. To decrease defects, chemical mechanical polishing (CMP) was applied to the LN wafer. In this study, the suitable parameters scuh as pressure and relative velocity, were investigated for the LN CMP process. To improve roughness, the LN CMP was performed using the parameters that were the highest removal rate among process parameters. And, evaluation of optical property was performed by the optical reflectance and non-linear characteristic.

• 한국전기전자재료학회논문지
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• 제26권8호
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• pp.620-623
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• 2013

The carbon nanotube / poly-vinylidene fluoride (CNT/PVDF) composite films for the nano-generator devices were fabricated by spray coating method using the CNT/PVDF solution, which was prepared by adding PVDF pellets into the CNT dispersed N-Methyl-2-pyrroli-done (NMP) solution. The flexible CNT/PVDF composite films were investigated by the scanning electron microscopy, which revealed that the CNTs were uniformly dispersed in the PVDF matrix and thickness of the films was approximately $20{\mu}m$. Fourier transform infra-red spectra were used to investigate crystal structure of the as-spray-coated CNT/PVDF films, and we found that they revealed extremely large portion of the ${\beta}$ phase PVDF. The capacitance of the CNT/PVDF films increased by adding CNTs into the PVDF matrix, and finally saturated. However, the resistance didn't show any saturation effect in the CNT concentration range of 0~4 wt%. Finally, the resulting nano-generator devices revealed reasonable current output after given mechanical stress.

• Composites Research
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• 제33권2호
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• pp.81-89
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• 2020

본 리뷰 논문에서는 최근에 연구된 평균장 균질화법을 이용한 다양한 물성치 예측 연구의 동향에 대해 소개한다. 유효 강성 예측에 사용되는 기존의 균질화법을 소개하고 이를 확장하여 유효 열/전기 전도성 및 유전 상수를 예측하는 방법을 소개한다. 압전 및 열전과 같이 2개의 물리현상이 중첩된 다중 물리 현상의 구성방정식은 훅 법칙과 같이 단순한 선형 형태로 변환하여 복합재의 유효 물성치를 예측하는 연구를 소개하고 마지막으로 복합 재료의 유효 물성치를 예측하기 위한 일반화된 식을 제시하고 유한 요소 해석과 비교한 검증/연구를 소개한다.

• Elastomers and Composites
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• 제50권4호
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• pp.292-296
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• 2015

Biomimetic artificial basilar membrane being a core part of artificial cochlear requires performance evaluation through aging test. To evaluate the aging properties of PVDF piezoelectric membrane used for artificial basilar membrane, its mechanical properties such as tensile strength and elastic modulus and piezoelectric property such as piezoelectric constant were measured. The aging test conditions and acceleration constants were calculated based on Arrhenius model. The changes in tensile strengths and elastic moduli measured were less than 10~20% after aging test equivalent for 10 years. The piezoelectric constants were decreased drastically to 80% of its initial value in the early stage of the aging test and expected to decrease slowly down to 65% over 10 years. The experimental results show the reliability of totally implantable novel artificial cochlear and will contribute its commercialization.

• Smart Structures and Systems
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• 제20권6호
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• pp.657-668
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• 2017

In this research, an active vibration suppression of a smart beam having piezoelectric sensor and actuators is investigated by designing separate controllers comprising a linear quadratic regulator and a neural network. Firstly, design of a smart beam which consists of a cantilever aluminum beam with surface bonded piezoelectric patches and a designed mechanism having a micro servomotor with a mass attached arm for obtaining variations in the frequency response function are presented. Secondly, the frequency response functions of the smart beam are investigated experimentally by using different piezoelectric patch combinations and the analytical models of the smart beam around its first resonance frequency region for various servomotor arm angle configurations are obtained. Then, a linear quadratic regulator controller is designed and used to simulate the suppression of free and forced vibrations which are performed both in time and frequency domain. In parallel to simulations, experiments are conducted to observe the closed loop behavior of the smart beam and the results are compared as well. Finally, active vibration suppression of the smart beam is investigated by using a linear controller with a neural network based adaptive element which is designed for the purpose of overcoming the undesired consequences due to variations in the real system.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2003년도 춘계학술대회 논문집 센서 박막재료 반도체 세라믹
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• pp.253-256
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• 2003

This study presents the combined effect of electric field application and mechanical compressive stress loading on deformation in a multilayer ceramic actuator, designed with stacking alternatively $0.2(PbMn_{1/3}Nb_{2/3}O_3)-0.8(PbZr_{0.475}Ti_{0.525}O_3)$ ceramics and Ag-Pd electrode. The deformation behaviors were thought to be attributed to relative $180^{\circ}$domain quantities which is determined by pre-loaded stress and electric field. The non-linearity of piezoelectricity and strain are dependent upon the young's modulus resulting from the domain reorientation.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2013년도 제45회 하계 정기학술대회 초록집
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• pp.256-256
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• 2013

Carbon nanotubes (CNT) / polyvinylidene fluoride (PVDF) piezoelectric composite films for nanogenerator devices were fabricated by spray coating method. When the CNT/PVDF mixture solution passes through the spray nozzle with small diameter by the compressed nitrogen gas, electric charges are generated in the liquid by a triboelectric effect. Then randomly distributed ${\beta}$ phase PVDF film could be re-oriented by the electric field resulting from the accumulated electrical charges, and might be resulted in extremely one-directionally aligned ${\beta}$ phase PVDF film without additional electric field for poling. X-ray diffraction patterns were used to investigate crystal structure of the CNT/PVDF composite films. It was confirmed that they revealed extremely large portion of the ${\beta}$ phase PVDF crystalline in the film. Therefore we could obtain the poled CNT/PVDF piezoelectric composite films by the spray coating method without additional poling process. Charge accumulation and resulting electric field generation mechanism by spray coating method were shown in Fig. 1. The capacitance of the CNT/PVDF films increased by adding CNTs into the PVDF matrix, and finally saturated. However, the I-V curves didn't show any saturation effect in the CNT concentration range of 0~4 wt%. Therefore we can control the performance of the devices fabricated from the CNT/PVDF composite film by adjusting the current level resulted from the CNT concentration with the uniform capacitance value.