• Smart Structures and Systems
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• 제12권5호
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• pp.501-521
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• 2013

This paper is concerned with static and dynamic shape control of a laminated Bernoulli-Euler beam hosting a uniformly distributed array of resistively interconnected piezoelectric patches. We present an analytical one-dimensional model for a laminated piezoelectric beam with material discontinuities within the framework of Bernoulli-Euler and extent the model by a network of resistors which are connected to several piezoelectric patch actuators. The voltage of only one piezoelectric patch is prescribed: we answer the question how to design the interconnected resistive electric network in order to annihilate lateral vibrations of a cantilever. As a practical example, a cantilever with eight patch actuators under the influence of a tip-force is studied. It is found that the deflection at eight arbitrary points along the beam axis may be controlled independently, if the local action of the piezoelectric patches is equal in magnitude, but opposite in sign, to the external load. This is achieved by the proper design of the resistive network and a suitable choice of the input voltage signal. The validity of our method is exact in the static case for a Bernoulli-Euler beam, but it also gives satisfactory results at higher frequencies and for transient excitations. As long as a certain non-dimensional parameter, involving the number of the piezoelectric patches, the sum of the resistances in the electric network and the excitation frequency, is small, the proposed shape control method is approximately fulfilled for dynamic load excitations. We evaluate the feasibility of the proposed shape control method with a more refined model, by comparing the results of our one-dimensional calculations based on the extended Bernoulli-Euler equations to three-dimensional electromechanically coupled finite element results in ANSYS 12.0. The results with the simple Bernoulli-Euler model agree well with the three-dimensional finite element results.

• 센서학회지
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• 제14권5호
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• pp.322-330
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• 2005

A new type of transducer, piezoelectric floating mass transducer (PFMT) which has advantages of piezoelectric and electromagnetic transducer has been proposed and implemented for the implantable middle ear hearing devices. By the uneven bonding of piezoelectric material to the inner bottom of transducer case, the PFMT can vibrate back-and-forth along the longitudinal axis of the transducer even though the piezoelectric material within the cylindrical case produces only the bilateral expansion and contraction according to the applied electrical signal. To improve efficiency of the PFMT, the multi-layered piezoelectric material has been adapted. The small number of components in the PFMT enables the simple manufacturing and the easy implanting into the middle ear. In order to examine the characteristics of vibration, mechanical modeling and finite element analyses of the proposed transducer have been performed. From the result of theoretical analyses and the measured data from the experiment, it is verified that the implemented PFMT can be used in implantable middle ear hearing devices.

• 정보저장시스템학회논문집
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• 제2권2호
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• pp.96-99
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• 2006

In this research, a wafer-level transfer method of cantilever away on a conventional CMOS circuit has been developed for high density probe-based data storage. The transferred cantilevers were silicon nitride ($Si_3N_4$) cantilevers integrated with poly silicon heaters and piezoelectric sensors, called thermo-piezoelectric $Si_3N_4$ cantilevers. In this process, we did not use a SOI wafer but a conventional p-type wafer for the fabrication of the thermo-piezoelectric $Si_3N_4$ cantilever arrays. Furthermore, we have developed a very simple transfer process, requiring only one step of cantilever transfer process for the integration of the CMOS wafer and cantilevers. Using this process, we have fabricated a single thermo-piezoelectric $Si_3N_4$ cantilever, and recorded 65nm data bits on a PMMA film and confirmed a charge signal at 5nm of cantilever deflection. And we have successfully applied this method to transfer 34 by 34 thermo-piezoelectric $Si_3N_4$ cantilever arrays on a CMOS wafer. We obtained reading signals from one of the cantilevers.

• 대한전기학회논문지:전기물성ㆍ응용부문C
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• 제49권5호
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• pp.289-293
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• 2000

This paper presents a study on the linear compensation of nonlinear hysteric actuators using the highly magnetostrictive film pattern as a strain sensor. Elements had a hybrid structure, in which thin soft glass substrate with the highly magnetostrictive amorphous FeCoSiB film was bonded on the PZT piezoelectric substrate. The magnetostrictive film as a strain sensor detects the deflection of an actuator, and a voltage signal from the strain sensor related to the deflection of an actuator is used for the linear control of an actuator.

• 한국전산구조공학회:학술대회논문집
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• 한국전산구조공학회 2005년도 춘계 학술발표회 논문집
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• pp.335-342
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• 2005

Using higher order Mindlin plates and piezoelectric materials, eigenvalue problems are considered. Since piezoelectric crystal resonators produce a proper amount of electric signal for a thickness-shear frequency, the objective is to decouple the thickness-shear mode from the others. Design variables are the bulk material densities corresponding to the mass of masking plates for electrodes. The design sensitivity expressions for the thickness-shear frequency and mode shape vector are derived using direct differentiation method(DDM). Using the developed design sensitivity analysis (DSA) method, we formulate a topology optimization problem whose objective function is to maximize the thickness-shear component of strain energy density at the thickness-shear mode. Constraints are the allowable volume and area of masking plate. Numerical examples show that the optimal design yields an improved mode shape and thickness-shear energy.

• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2008년도 추계학술대회논문집
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• pp.195-200
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• 2008

This paper presents motion control of the Inchworm composed of the piezoelectric actuators and mechanical elements. Piezoelectric actuator shows nonlinear response characteristics including hysteresis due to the ferroelectric characteristics. This paper proposes feedback control scheme to improve the ability of tracking response to complex input signal and suppress the phenomenon of hysteresis using the sliding mode control technique with the integrator. The sliding mode control system has the limit to minimize both the settle time and overshoot. For making up this limit, this paper also suggests input shaping technique suitable to the inchworm control system.

• 세라미스트
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• 제23권1호
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• pp.38-53
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• 2020

Magnetoelectric (ME) composites composed of magnetostrictive and piezoelectric materials derive interfacial coupling of magnetoelectric conversion between magnetic and electric properties, thus enabling to detect ultra-low magnetic field. To improve the performance of ME composite sensors, various research teams have explored adopting highly efficient magnetostrictive and piezoelectric phases, tailoring of device geometry/structure, and developing signal process technique. As a result, latest ME composites have achieved not only outstanding ME conversion coefficient but also sensing of ultra-low magnetic field below 1pT. This article reviews the recent research trend of ME composites for sensing of ultra-low magnetic field.

• 한국공간구조학회논문집
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• 제6권3호
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• pp.35-41
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• 2006

구조물의 모니터링과 손상 및 진동예측에 많은 센서들이 사용되고 있으며, 압전소자 및 변형게이지는 재료 및 구조물의 손상에 사용되고 있다. 그러나 진동에 대한 실험은 미진한 실정이다. 압전소자는 구조물의 변형되었을 때 로드셀의 경우에서처럼 작용되는 외력을 전기적인 신호로 바꾸어주는 센서이다. 이를 이용하여, 철근 콘크리트 판에서 진동예측을 압전소자의 전압변화로 사용하였다. 본 연구는 판에서 압전소자를 사용하여 진동을 예측하기 위한 기초적 연구이다.

• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2014년도 추계학술대회 논문집
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• pp.72-74
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• 2014

Multilayer ceramic capacitor (MLCC) makes acoustic noise of electronic devices. Conversed piezoelectric effect of dielectric substance consists of $BaTiO_3$ causes vibration of MLCC so it must be analyzed to reduce the noise. Thus, finite element model for piezoelectric analysis of MLCC was constructed in this paper. Piezoelectric characteristics of MLCC was considered for the accurate simulation result. Displacement response for sinusoidal voltage signal was measured and simulation result was verified with test result.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2005년도 제36회 하계학술대회 논문집 C
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• pp.2395-2397
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• 2005

A low voltage operated piezoelectric RF MEMS in-line switch has been realized by using silicon bulk micromachining technologies for advanced mobile/wireless applications. The developed RF MEMS in-line switches were comprised of four piezoelectric cantilever actuators with an Au contact metal electrode and a suspended Au signal transmission line above the silicon substrate. The measured operation dc bias voltages were ranged from 2.5 to 4 volts by varying the thickness and the length of the piezoelectric cantilever actuators, which are well agreed with the simulation results. The measured isolation and insertion loss of the switch with series configuration were -43dB and -0.21dB (including parasitic effects of the silicon substrate) at a frequency of 2GHz and an actuation voltage of 3 volts.