• Proceedings of the Korean Vacuum Society Conference
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• 2016.02a
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• pp.146-146
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• 2016

Zinc Oxide (ZnO) was known as a promising material for surface acoustic wave devices, gas sensors, optical devices and solar cells due to piezoelectric material, large band gap of 3.37 eV and large exciton binding energy of 60 meV at room temperature. In particular, the alignment of ZnO nanostructures into ordered nanoarrays can bring about improved sensitivity of devices due to widen the surface area to catch a lot of gas particle. Oxygen plasma treatment is used to specify the nucleation site of round patterned ZnO nanorods growth. Therefore ZnO nanorods were grown on a quartz substrate with patterned polystyrene monolayer by hydrothermal method after oxygen plasma treatment. And then, we carried out nanostructures by adjusting the diameter of the arranged ZnO nanorods according to polystyrene spheres of various sizes. The obtained ZnO nanostructures was characterized by X-ray diffraction (XRD), Field emission scanning electron microscopy (FE-SEM).

• Proceedings of the Materials Research Society of Korea Conference
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• 2003.11a
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• pp.75-75
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• 2003

본 연구에서는 대기 중 극 미량으로 존재하는 환경 유해 가스 성분을 검출할 수 있는 미세 소자로의 응용을 위해 마이크로 칸티레버를 제작하고 가스 센서로의 활용 가능성을 검토하였다. 마이크로 칸티레버는 크게 구동층 캐패시터로서 대표적인 압전 재료인 Pb(Zr,Ti)O$_3$ (PZT)를 사용하고 SiNx 박막을 지지층으로 하는 형태로 제작되었다. 제작된 마이크로 칸티레버는 치수 및 형상에 따라 17~29 KHz 의 기본 공진 주파수 값을 나타내었다. Electron beam evaporator를 이용한 copper (Cu) 박막의 단계적인 증착을 통해 칸티 레버 표면에 질량을 증가시키고 그에 따른 마이크로 칸티레버의 공진주파수 변화를 관찰한 결과 질량 증가에 대해 34 Hz/ng의 선형적인 주파수 감소를 나타내었으며, 이로부터 694.4 $\textrm{cm}^2$/g 의 gravimetric sensitivity factor를 얼을 수 있었다. 마이크로칸티레버의 가스 감지능력 시험을 위해 가스 흡착층으로 일차 알콜류의 vapor를 흡착 하는 것으로 보고된 poly methyl metacrytate (PMMA)를 마이크로 칸티레버 표면에 코팅하였다. 마이크로칸티 레버의 기본 공진 주파수 및 PMMA 흡착층 형성과 가스의 흡착에 따른 주파수 변화는 마이크로 칸티 레버로부터 의 전기적 신호를 이용하는 복소 임피던스 분석에 의해 측정되었다. PMMA가 코팅된 마이크로 칸티레버는 ethanol 및 methanol vapor 의 농도가 증가함에 따라 선형적인 공진주파수 감소를 나타내었으며, methanol vapor 의 경우 0.06 Hz/ppm 의 가스 검출 감도를 얻을 수 있었다.

• Journal of Sensor Science and Technology
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• v.28 no.6
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• pp.390-394
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• 2019

This paper presents an inkjet-printed plastic force sensor using PEDOT:PSS. Using a piezoelectric-type inkjet printer, the force sensor was manufactured by printing PEDOT:PSS ink onto a polyimide (PI) substrate film. Applying a vertical force of 0 to 100 N to the force sensor on the PI substrate with a thickness of 64 mm, the resistance of the force sensor increased in proportion to the input force by the length deformation of the PI substrates and the sensor pattern. As a result, the fabricated sensor has a characteristic of 0.001% /N with a linearity of 99.38%. In addition, as the thickness of the PI substrate film increased, the sensitivity of the sensor increased linearly. The fabricated force sensor is expected to be applied to industrial sites and healthcare fields.

• Smart Structures and Systems
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• v.6 no.4
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• pp.349-362
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• 2010

Ultrasonic Guided Waves (UGWs) are a useful tool in structural health monitoring (SHM) applications that can benefit from built-in transduction, moderately large inspection ranges and high sensitivity to small flaws. This paper describes a SHM method based on UGWs, discrete wavelet transform (DWT), and principal component analysis (PCA) able to detect and quantify the onset and propagation of fatigue cracks in structural waveguides. The method combines the advantages of guided wave signals processed through the DWT with the outcomes of selecting defect-sensitive features to perform a multivariate diagnosis of damage. This diagnosis is based on the PCA. The framework presented in this paper is applied to the detection of fatigue cracks in a steel beam. The probing hardware consists of a PXI platform that controls the generation and measurement of the ultrasonic signals by means of piezoelectric transducers made of Lead Zirconate Titanate. Although the approach is demonstrated in a beam test, it is argued that the proposed method is general and applicable to any structure that can sustain the propagation of UGWs.

• Proceedings of the KSME Conference
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• 2001.11a
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• pp.477-482
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• 2001

To realize higher track density of HDD, the servo bandwidth should be higher, however, is limited by the mechanical resonances of the arm, coil of the VCM and ball bearing pivot. The dual-stage actuator systems have been suggested as a possible solution. For the dual-stage actuator systems based on the suspension, the suspension resonance frequencies in the radial access direction are important factors to increase a servo bandwidth, however the improvement of these frequencies may affect the shock resistance performance and spring constant. The slider's flying stability can be deteriorated by the change of a vertical stiffness. In this work, we have investigated a suspension design scheme possessing a milliactuator for dual-stage actuator systems and also achieved higher mechanical characteristics. Design parameters are deduced by finite element analysis with sensitivity function. It is confirmed that the proposed suspension with the milliactuator has the capability of fine tracking motion, due to its hinge structure on the spring region, and achieves higher mechanical resonance frequencies in the radial access direction with a high-shock resistance and a low-spring constant.

• Proceedings of the Acoustical Society of Korea Conference
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• spring
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• pp.224-227
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• 1999

A high power deep-water sonar transducer of FFR (Free Flooded Ring) type has been designed using a coupled FE-BEM. The present sonar transducer is composed of rectangular piezoelectric ceramics and pie-shaped steels (or the advantage of simple fabrication. The dynamics of the sonar transducer is modelled in three dimensions and is analyzed with external electrical excitation conditions. Different results are available such as steady-state frequency response for TX and RX displacement modes, directivity patterns, back-scattering patterns, bandwidths, transmitting voltage responses and receiving sensitivity responses. The TV response shows a very high acoustic pressure of 150 dB/lV (ref $1{\mu}Pa$ at 1m) at 1900 Hz. This ultra high power response of the sonar transducer indicates a new possibility of the sonar transducer development.

• Journal of the Korean Society for Nondestructive Testing
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• v.13 no.4
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• pp.32-41
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• 1994

The stabilized Michelson interferometer was developed in order to measure micro dynamic displacement at the surface of solids due to elastic wave propagation. The stabilizer was designed to compensate light path disturbances using a reference mirror driven by piezoelectric actuator. Using stabilizer, the effect of external vibration was reduced and the quadrature condition was satisifed. As the results, the output of photodetector had maximum sensitivity and linearity. The minimum detectable displacement was 0.3nm at the band width of 10 MHz. The epicentral displacements due to the glass capillary breaks and the steel ball drop impact were measured using the developed interferometer and the results were compared with the calculated one.

• Structural Monitoring and Maintenance
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• v.4 no.3
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• pp.237-253
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• 2017

Among various structural health monitoring technologies, impedance-based damage detection has been recognized as a promising tool for diagnosing critical members of civil structures. Since the piezoelectric transducers used in the impedance-based technique should be bonded to the surface of the structure using bonding layers (e.g., epoxy layer), it is hard to maintain the as-built condition of the bonding layers and to reconfigure the devices if needed. This study presents an experimental investigation by using magnetically attached PZT-interface for the impedance-based damage detection in bolted girder connections. Firstly, the principle of the impedance-based damage detection via the PZT-interface device is outlined. Secondly, a PZT-interface attachment method in which permanent magnets are used to replace the conventional bonding layers is proposed. Finally, the use of the magnetic attraction for the PZT-interface is experimentally evaluated via detecting the bolt-loosening events in a bolted girder connection. Also, the sensitivity of impedance signatures obtained from the PZT-interface is analyzed with regard to the interface's material.

• Journal of Sensor Science and Technology
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• v.8 no.2
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• pp.108-114
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• 1999

Surface acoustic wave (SAW) device is very attractive for gas sensor applications because of their small size, low cost, high sensitivity, and good reliability. A dual delay line surface acoustic wave $NO_2$ gas sensors have been designed and fabricated on the $LiTaO_3$ piezoelectric single crystal substrate. The capacitance of the fabricated IDTs was 326.34pF at the frequency of 79.3MHz. The maximum reflection loss of the impedence-matched IDTs was -16.74dB at the frequency of 79.3MHz. The SAW oscillator was constructed and the stable oscillation was obtained by controlling the gain of rf amplifier properly. The oscillation frequency shift of the SAW oscillator to the $NO_2$ gas was 28Hz/ppm.

• Journal of Microbiology and Biotechnology
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• v.22 no.6
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• pp.849-855
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• 2012

Plant growth-promoting rhizobacteria (PGPR) pseudomonads have a large number of lipopolysaccharides on the cell surface, which induces immune responses. Cd-resistant PGPR prevalent at the Cd-affected sites under biophytostabilization was monitored. Transmissiom electron microscopy was used to the study the behavior of tolerance of PGPR to cadmium level and its effect on pseudomonad strains (Z9, S2, KNP2, CRPF, and NBRI). An immunosensor was developed by immobilizing antibody (anti-Z9 or anti-S2) against selected PGPR on a piezoelectric quartz crystal microbalance (QCM). Immunosensors were found to supplement the inherent specificity of antigen-antibody reactions with the high sensitivity of a physical transducer. On comparison of the efficiency of detection with ELISA, the spectrophotometric technique, the developed immunosensor was found to be more sensitive, fast, and reliable even after regeneration for several times. Thus, the immunosensor may be used for future detection of PGPR strains after automation of the screening process.