• JSTS:Journal of Semiconductor Technology and Science
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• v.15 no.1
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• pp.1-6
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• 2015

In this work, the combined meandering-pattern stress-sensors were presented in order to achieve the high sensitivity of stress sensors. Compared to the previous works, which have been using the single meandering-pattern stress-sensors, the sensitivity was approximately observed to increase by 30%~70%. Also, in this paper, more simple and convenient stress-measurement method was presented.