• Title/Summary/Keyword: photo-pattern

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Carbon 계 유기막질 Plasma Etching에 있어 COS (Carbonyl Sulfide) Gas 특성에 관한 연구

  • Kim, Jong-Gyu;Min, Gyeong-Seok;Kim, Chan-Gyu;Nam, Seok-U;Gang, Ho-Gyu;Yeom, Geun-Yeong
    • Proceedings of the Korean Vacuum Society Conference
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    • 2012.02a
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    • pp.460-460
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    • 2012
  • 반도체 Device가 Shrink 함에 따라 Pattern Size가 작아지게 되고, 이로 인해 Photo Resist 물질 자체만으로는 원하는 Patterning 물질들을 Plasma Etching 하기가 어려워지고 있다. 이로 인해 Photoresist를 대체할 Hard Mask 개념이 도입되었으며, 이 Hardmask Layer 중 Amorphous Carbon Layer 가 가장 널리 사용되고 지고 있다. 이 Amorphous Carbon 계열의 Hardmask를 Etching 하기 위해서 기본적으로 O2 Plasma가 사용되는데, 이 O2 Plasma 내의 Oxygen Species들이 가지는 등 방성 Diffusion 특성으로 인해, 원하고자 하는 미세 Pattern의 Vertical Profile을 얻는데 많은 어려움이 있어왔다. 이를 Control 하기 인해 O2 Plasma Parameter들의 변화 및 Source/Bias Power 등의 변수가 연구되어 왔으며, 이와 다른 접근으로, N2 및 CO, CO2, SO2 등의 여러 Additive Gas 들의 첨가를 통해 미세 Pattern의 Profile을 개선하고, Plasma Etching 특성을 개선하는 연구가 같이 진행되어져 왔다. 본 논문에서 VLSI Device의 Masking Layer로 사용되는, Carbon 계 유기 층의 Plasma 식각 특성에 대한 연구를 진행하였다. Plasma Etchant로 사용되는 O2 Plasma에 새로운 첨가제 가스인 카르보닐 황화물 (COS) Gas를 추가하였을 시 나타나는 Plasma 내의 변화를 Plasma Parameter 및 IR 및 XPS, OES 분석을 통하여 규명하고, 이로 인한 Etch Rate 및 Plasma Potential에 대해 비교 분석하였다. COS Gas를 정량적으로 추가할 시, Plasma의 변화 및 이로 인해 얻어지는 Pattern에서의 Etchant Species들의 변화를 통해 Profile의 변화를 Mechanism 적으로 규명할 수 있었으며, 이로 인해 기존의 O2 Plasma를 통해 얻어진 Vertical Profile 대비, COS Additive Gas를 추가하였을 경우, Pattern Profile 변화가 개선됨을 최종적으로 확인 할 수 있었다.

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Formative Characteristics of Eco T-shirt Design (에코티셔츠 디자인의 조형적 특성)

  • Lee, Kyoung-Hee;Lee, Ji-In;Kim, Sae-Bom
    • The Research Journal of the Costume Culture
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    • v.20 no.1
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    • pp.72-82
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    • 2012
  • The purpose of this research to look into formative characteristics of eco T-shirt design. Previous study researchers have mostly focused on overall eco fashion design, but on the other hand the research on eco product entity leaves much to be desired. We analyzed formative characteristics of eco T-shirt design that is easily accessible in real life and is easy to passing message. We selected 23 eco brands through internet and analyzed total 500 photos of eco T-shirt. Each photo was categorized by sex and the nations which belong to the eco fashion world associations. The content and statistical analysis was used for data analysis. The content of the research is as the following. First, it was found out that basic straight silhouette, achromatic color, human pattern, plant pattern, and eco-friendly organic material were used for the design of eco T-shirt. Second, it showed difference of silhouette, color, pattern according to nations. Third, it showed difference of silhouette, color, pattern according to sex. Fourth, symbolism of eco T-shirt was nature love, nature support, society ethicality, anti-sociality, and economics. This research aims for providing practical help and assistance to the development of eco T-shirt and its relevant industries.

Photo Mosaic Generation Algorithm Using the DCT Hash (DCT 해쉬를 이용한 모자이크 생성 알고리즘)

  • Lee, Ju-Yong;Jeong, Seungdo;Lee, Ji-Hoon
    • Journal of the Korea Academia-Industrial cooperation Society
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    • v.17 no.10
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    • pp.61-67
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    • 2016
  • With the current high distribution rate of smart devices and the recent development of computing technology, user interest in multimedia, such as photos, videos, and so on, has rapidly increased, which is a departure from the simple pattern of information retrieval. Because of these increasing interests, image processing techniques, which generate and process images for diverse applications, are being developed. In entertainment recently, there are some techniques that present a celebrity's image as a mosaic comprising many small images. In addition, studies into the mosaic technique are actively conducted. However, conventional mosaic techniques result in a long processing time as the number of database images increases, because they compare the images in the databases sequentially. Therefore, to increase search efficiency, this paper proposes an algorithm to generate a mosaic image using a discrete cosine transform (DCT) hash. The proposed photo mosaic-generation algorithm is composed of database creation and mosaic image generation. In database creation, it first segments images into blocks with a predefined size. And then, it computes and stores a DCT hash set for each segmented block. In mosaic generation, it efficiently searches for the most similar blocks in the database via DCT hash for every block of the input image, and then it generates the final mosaic. With diverse experimental results, the proposed photo mosaic-creation algorithm can effectively generate a mosaic, regardless of the various types of images and sizes.

A Study on the Polymer Lithography using Stereolithography (광조형법을 이용한 고분자 리소그래피에 관한 연구)

  • Jung Young Dae;Lee Hyun Seop;Son Jae Hyuk;Cho In Ho;Jeong Hae Do
    • Journal of the Korean Society for Precision Engineering
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    • v.22 no.1
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    • pp.199-206
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    • 2005
  • Mask manufacturing is a high COC and COO process in developing of semiconductor devices because of mask production tool with high resolution. Direct writing has been thought to be the one of the patterning method to cope with development or small-lot production of the device. This study consists two categories. One is the additional process of the direct and maskless patterning generation using SLA for easy and convenient application and the other is a removal process using wet-etching process. In this study, cured status of epoxy pattern is most important parameter because of the beer-lambert law according to the diffusion of UV light. In order to improve the contact force between patterns and substrate, prime process was performed and to remove the semi-cured resin which makes a bad effects to the pattern, spin cleaning process using TPM was also performed. At a removal process, contact force between photo-curable resin as an etching mask and Si wafer is important parameter.

A standardization model based on image recognition for performance evaluation of an oral scanner

  • Seo, Sang-Wan;Lee, Wan-Sun;Byun, Jae-Young;Lee, Kyu-Bok
    • The Journal of Advanced Prosthodontics
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    • v.9 no.6
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    • pp.409-415
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    • 2017
  • PURPOSE. Accurate information is essential in dentistry. The image information of missing teeth is used in optically based medical equipment in prosthodontic treatment. To evaluate oral scanners, the standardized model was examined from cases of image recognition errors of linear discriminant analysis (LDA), and a model that combines the variables with reference to ISO 12836:2015 was designed. MATERIALS AND METHODS. The basic model was fabricated by applying 4 factors to the tooth profile (chamfer, groove, curve, and square) and the bottom surface. Photo-type and video-type scanners were used to analyze 3D images after image capture. The scans were performed several times according to the prescribed sequence to distinguish the model from the one that did not form, and the results confirmed it to be the best. RESULTS. In the case of the initial basic model, a 3D shape could not be obtained by scanning even if several shots were taken. Subsequently, the recognition rate of the image was improved with every variable factor, and the difference depends on the tooth profile and the pattern of the floor surface. CONCLUSION. Based on the recognition error of the LDA, the recognition rate decreases when the model has a similar pattern. Therefore, to obtain the accurate 3D data, the difference of each class needs to be provided when developing a standardized model.

A Study on the Analysis of Landscape Preference in the Rural Settlement by Land Use Transition (토지이용변화를 이용한 농촌경관 선호성 분석에 관한 연구)

  • 서주환;최현상
    • Journal of the Korean Institute of Landscape Architecture
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    • v.27 no.2
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    • pp.69-79
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    • 1999
  • This study identifies the features of landscape elements on the fifteen districts with the idea of land use area and visual quantity of pictures by analyzing the air photo. Therefore, the sensibility of observer is comprehended through simulating the landscape evaluation and the landscape preference with using slide film. The study is divided into three periods to understand the transition of rural landscape as the social and cultural environments have been changed. The first period is the New Community Movement which affected the rapid change of social and cultural environments. The second and third periods are the prior and post time at the rearrangement of administration district in the Tae-Jeon Broad City. The result of this study is explained below part; 1. The transition of rural landscape has been occurred as the land use pattern has been altered. The change of pattern has affected an increase of the natural space and the structure change of agricultural productive space. 2. In the regression analysis, the regression model of landscape preference and land use ratio show; Landscape preference = 3.632 - 11.618 (Residential Area) - 4.227 (Equipped Farm). The explanation variables defined as Residential Area and Equipped Farm, and the relationship of those factors shows negative. Therefore, the increase of other building will make the rural landscape lower and worse.

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Supporting The Tunnel Using Digital Photographic Mapping And Engineering Rock Classification (디지털 사진매핑에 의한 공학적 암반분류와 터널의 보강)

  • Kim, Chee-Hwan
    • Tunnel and Underground Space
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    • v.21 no.6
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    • pp.439-449
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    • 2011
  • The characteristics of rock fractures for engineering rock classification are investigated by analyzing three dimensional point cloud generated from adjusted digital images of a tunnel face during construction and the tunnel is reinforced based on the supporting pattern suggested by the RMR and the Q system using parameters extracted from those images. As results, it is possible saving time required from face mapping to tunnel reinforcing work, enhancing safety during face mapping work in tunnels and reliability of both the mapping information and selecting supporting pattern by storing the files of digital images and related information which can be checked again, if necessary sometime in the future.

Development of Weft Straightener Using Fabric Pattern Detection Algorithm and Performance Evaluation (원단 패턴 검출 알고리즘을 적용한 원단교정기 개발 및 성능평가)

  • Lee, Jae-Yong;Chung, Yun-Soo;Kim, Dae-Sub;Bae, Gyu-Hyun;Bae, Jae-Sung;Lee, Dae-Hee
    • Korean Journal of Computational Design and Engineering
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    • v.22 no.1
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    • pp.70-79
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    • 2017
  • Weft straightener is an important process to control the final quality of the fabrics. It is needed to calibrate the distorted weft after dyeing process. During various fabric treatment processes, the fabric is almost done with heat treatment through a tenter machine. At this time, weft distortion is occurred with uneven tension distribution. Traditionally, photo sensor is commonly used to detect the weft distortion but it is not applicable for special fabric types such as twill, mesh, combi, etc. In this paper, a new method for detecting the weft distortion using camera is introduced. A new weft straightener simulator is also developed to test the ability of the proposed method. It is shown that the method can be applied for various fabric types.

Species Composition and Primary Production of the Benthic Algal Assemblage along a Channel in Salt Marsh, Kyonggi Bay, Korea (조간대 감습지 수로지역의 저생조류의 종조성 및 일차생산)

  • Cho, Kyung Je;Joon Ho Kim
    • The Korean Journal of Ecology
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    • v.11 no.1
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    • pp.1-15
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    • 1988
  • Studies on species compostion, promary production of benthic algal assemblage were carried out along a channel of the salt marsh near Inch'on, Kyonggi Bay, Korea. Possible biological, physical and KDICical factors controlling the aglal assemblage were also examined. The oveall diatoms were encountered one hundred and thirty-seven taxa, of which the dominant species were Paralia sulcata and Cymatosira belgica. These two species accounted for 32.6% relative abundance throughout the study period. Diatom taxa had no clear seasonal pattern in abundance analysis. But at the algal blooming period in spring, euglenoids occurred with a high abundance. The chlorophyll a content of benthic algae showed definite seasonal pattern. The algal biomass of the appeared to influence the spatial fluctuation in the algal biomass of the channel was regulated primarily by water content of sediment. Grazing by zoobenthos apperaed to influence the spatial fluctuation in the algal biomass of the sediment surface. The algal photosynthesis was measured in the laboratory with oxygen method. Photo-synthetic rate was independent of the temperature under the lower irradiance. The gross production from March to November was estimated to be 190g C/m2 at the channel slope. Photosynthetic efficiency was 0.37% on the basis of the photosyntherically active radiation for the study period.

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Gene Expression Analysis of Zeaxanthin Epoxidase from the Marine Microalga Dunaliella tertiolecta in Response to Light/Dark Cycle and Salinity

  • Kim, Minjae;Kang, Yongsoo;Jin, EonSeon
    • Journal of Microbiology and Biotechnology
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    • v.29 no.9
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    • pp.1453-1459
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    • 2019
  • Zeaxanthin is an important pigment in the photo-protection mechanism of microalgae. However, zeaxanthin epoxidase, an enzyme involved in the accumulation and conversion of zeaxanthin, has not been extensively studied in microalgae. In this work, we report the expression pattern of zeaxanthin epoxidase in Dunaliella tertiolecta (DtZEP) at different light and diverse salinity conditions. To confirm the responsiveness to light conditions, the ZEP expression pattern was investigated in photoperiodic (16 h of light and 8 h of dark) and continuous (24 h of light and 0 h of dark) light conditions. mRNA expression levels in photoperiodic conditions fluctuated along with the light/dark cycle, whereas those in continuous light remained unchanged. In varying salinity conditions, the highest mRNA and protein levels were detected in cells cultured in 1.5 M NaCl, and ZEP expression levels in cells shifted from 0.6 M NaCl to 1.5 M NaCl increased gradually. These results show that mRNA expression of DtZEP responds rapidly to the light/dark cycle or increased salinity, whereas changes in protein synthesis do not occur within a short period. Taken together, we show that DtZEP gene expression responds rapidly to light irradiation and hyperosmotic stress. In addition, ZEP expression patterns in light or salinity conditions are similar to those of higher plants, even though the habitat of D. tertiolecta is different.