• Title/Summary/Keyword: patterning process

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A Roll-to-Roll Process for Manufacturing Flexible Active-Matrix Backplanes Using Self-Aligned Imprint Lithography and Plasma Processing

  • Taussig, Carl;Jeffrey, Frank
    • 한국정보디스플레이학회:학술대회논문집
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    • 2005.07a
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    • pp.808-810
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    • 2005
  • Inexpensive large area arrays of thin film transistors (TFTs) on flexible substrates will enable many new display products that cannot be cost effectively manufactured by conventional means. This paper presents a new approach for low cost manufacturing of electronic devices using roll-to-roll (R2R) processes exclusively. It was developed in partnership by Hewlett Packard Laboratories and Iowa Thin Film Technologies (ITFT), a solar cell manufacturer. The approach combines ITFT's unique processes for vacuum deposition and etching of semiconductors, dielectrics and metals on continuous plastic webs with a method HP has invented for the patterning and aligning the multiple layers of a TFT with sub-micron accuracy and feature size.

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Application of Excited-State Intramolecular Proton Transfer (ESIPT) Principle to Functional Polymeric Materials

  • Park, Sang-Hyuk;Kim, Se-Hoon;Seo, Jang-Won;Park, Soo-Young
    • Macromolecular Research
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    • v.16 no.5
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    • pp.385-395
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    • 2008
  • Synthesis and properties of novel excited-state intramolecular proton transfer (ESIPT) materials, recently developed in our group, are described. Highly efficient ESIPT reaction, achieved in polyquinolines, polybenzoxazoles, and oxadiazole and imidazole derivatives possessing an intramolecular tautomerizable hydrogen bond, has been investigated theoretically and experimentally. It is demonstrated that unique properties arising from the ESIPT process (large Stokes' shift, no self-absorption, and easy population inversion, etc.) make it possible to produce advanced polymer devices for lasing, optical storage, and electroluminescence.

Patterning and Sintering of Silver Nano Ink by the Ink-Jet Printing Technology (잉크젯에 의한 은나노 잉크의 패턴닝 및 소결)

  • Chun, Myoung-Pyo;Park, Myung-Sung;Myoung, Seong-Jae;Nam, Joong-Hee;Kim, Byung-Ik
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2008.06a
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    • pp.329-329
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    • 2008
  • Silver nanoparticles were synthesized by polyol process and its particle size observed with TEM is about 20nm. Silver nanoparticle ink with metal content of 30wt% was prepared using solvent of ethanol and has low viscosity of 5cps (10rpm). This ink was printed by as ink-jet printer on Al2O3 and Silicone substrate. The resistivity and morphology of the printed film was investigated as a function of sintering termperature.

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Fabrication of ITO-less Sustain Electrodes for High Resolution Plasma Display Panel by X-Ray Lithographic Process

  • Ryu, Seung-Min;Yang, Dong-Yol;So, Jae-Yong;Park, Lee-Soon;Cheong, Hee-Woon;Whang, Ki-Woong
    • 한국정보디스플레이학회:학술대회논문집
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    • 2009.10a
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    • pp.370-373
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    • 2009
  • X-ray lithography was employed to fabricate ITO-less high resolution sustain electrodes for plasma display panel (PDP). A polyimide film based X-ray mask and Xray sensitive Ag electrode paste were fabricated to check their effect on the patterning of Ag electrodes with less than 30 ${\mu}m$ in width. The X-ray lithographic method was found to be useful for the high resolution sustain electrode patterns due to the high penetration power and low scattering property of X-ray source.

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Positive Type Photoresist for Patterning of Interdielectric Layer of TFT Array

  • Lee, Hyo-Jung;Kim, Hyo-Jin;Kim, Soon-Hak;Park, Lee-Soon;Lee, Yun-Su;Song, Gab-Deuk
    • 한국정보디스플레이학회:학술대회논문집
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    • 2007.08a
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    • pp.564-566
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    • 2007
  • Synthesis of two photoactive compounds containing core imide moiety was carried out for an application to interdielectric layer in TFTLCD array. An aqueous alkaline developable polymer matrix was synthesized by free radical copolymerization. A positive photoresist formulation was developed utilizing synthesized UV monomers, photoactive compound, binder polymer, sulfactant and alkali developable polymer matrix. It was found that via-holes with good resolution, high transmittance and thermal resistance could be obtained by photolithographic process utilizing the new positive interdielectric material with high thermal stability.

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Laser-Direct Patterning for Plasma Display Panel (플라즈마 디스플레이 패널을 위한 레이저 직접 패터닝)

  • Ahn, Min-Young;Lee, Kyoung-Cheol;Lee, Hong-Kyu;Lee, Cheon
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 1999.05a
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    • pp.99-102
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    • 1999
  • A mixture which was made from organic gel, glass powder and ceramic powder was masklessly etched for fabrication of barrier rib of PDP(Plasma Display Panel) by focused Ar$^{+}$ laser( λ =514 nm) and Nd:YAG(λ =532, 266 nm) laser irradiation at the atmosphere. The depth of the etched grooves increases with increasing a laser fluence and decreasing a scan speed. Using second harmonic of Nd:YAG laser, the threshold laser fluence was 6.5 mJ/$\textrm{cm}^2$ for the sample of PDP barrier rib softened at 12$0^{\circ}C$. The thickness of 130 ${\mu}{\textrm}{m}$ of the sample on the glass was clearly removed without any damage on the glass substrate by fluence of 19.5 J/$\textrm{cm}^2$....

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A Study of Substrate Surface Treatment and Metal Pattern Formation using Inkjet Printing Technology (잉크젯 프린팅 기술을 이용한 기판 표면처리와 금속 패턴 형성에 관한 연구)

  • Jo, Yong-Min;Park, Sung-Jun
    • Journal of ILASS-Korea
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    • v.17 no.1
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    • pp.20-26
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    • 2012
  • Inkjet printing is one of the direct writing technologies and is able to form a pattern onto substrate by dispensing droplets in desired position. Also, by inkjet technology manufacturing time and production costs can be reduced, and procedures can be more efficient. To form a metal pattern, it must be harmonized with conductive nano ink, printing process, sintering, and surface treatment. In this study, micro patterning of conductive line has been investigated using the piezoelectric printhead driven by a bipolar voltage signal is used to dispense $20-40{\mu}m$ diameter droplets and silver nano ink which consists of 50 nm silver particles. In addition, hydrophobic treatment of surface, overlap printing techniques, and sintering conditions with changing temperature and times to achieve higher conductivity.

Reactive Ion Etching Process of Low-K Methylsisesquioxance Insulator Film (저유전율 물질인 Metylsilsesquioxance의 반응 이온 식각 공정)

  • 정도현;이용수;이길헌;김광훈;이희우;최종선
    • Proceedings of the Korean Vacuum Society Conference
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    • 2000.02a
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    • pp.40-40
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    • 2000
  • 직접 회로의 소자크기가 더욱 미세화에 따라, 기존에 사용하는 금속 배선의 저항과 금속 배선과 층간 유전 물질에 의한 정전용량의 증가로 인한 시간 지연 (RC time delay) 문제가 크게 대두되고 있다. 이 문제를 해결하기 위해 비유전율이 낮은 물질을 층간 유전체로 사용하여 정전용량을 낮추는 것이 필요하다. 기존의 실리콘 산호막 대신에 MSSQ(methylsilsequioxance)를 이용할 때 필요한 건식 식각 공정을 연구하였다. MSSQ 물질을 patterning 하기 위해 습식 공정의 부산물인 폐액 등의 문제점이 발생하지 않을 뿐만 아니라, 소자의 손상이 적고 선택비가 높으며, 식각의 이방성을 향상시킬 수 있는 장점을 갖고 있는 반응 이온 식각기(reactive ion etchin)을 이용하였다. CF4/O2 plasma를 사용하였는데, 가스의 양의 flow rate와 조성비, RF pover(50, 100, 150 W)등의 변화에 따른 식각 특성을 알아보았다. atep, SEM, AFM등을 이용하여 측정·분석하였다.

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High Resolution Patterning Method by Using Water-mediated Nanotransfer Molding

  • Hwang, Jae-Kwon;Dang, Jeong-Mi;Sung, Myung-Mo
    • Proceedings of the Korean Vacuum Society Conference
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    • 2010.02a
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    • pp.83-83
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    • 2010
  • We report a new direct printing method, called liquid-mediated nanotransfer molding (LB-nTM), that uses a polar liquid-mediated transfer process. LB-nTM is based on the direct transfer of various materials from a stamp to a substrate via a liquid- bridge between the stamp and the substrate. This procedure can be adopted in automated printing machines that generate various material patterns with a wide range of feature sizes (as small as 60 nm) on diverse substrates. To demonstrate its usefulness, the LB-nTM method was applied to prepare ZnO-nanowire and TIPS-pentacene transistors.

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Three-Dimensional Nanofabrication with Nanotransfer Printing and Atomic Layer Deposition

  • Kim, Su-Hwan;Han, Gyu-Seok;Han, Gi-Bok;Seong, Myeong-Mo
    • Proceedings of the Korean Vacuum Society Conference
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    • 2010.02a
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    • pp.87-87
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    • 2010
  • We report a new patterning technique of inorganic materials by using thin-film transfer printing (TFTP) with atomic layer deposition. This method consists of the atomic layer deposition (ALD) of inorganic thin film and a nanotransfer printing (nTP) that is based on a water-mediated transfer process. In the TFTP method, the Al2O3 ALD growth occurs on FTS-coated PDMS stamp without specific chemical species, such as hydroxyl group. The CF3-terminated alkylsiloxane monolayer, which is coated on PDMS stamp, provides a weak adhesion between the deposited Al2O3 and stamp, and promotes the easy and complete release of Al2O3 film from the stamp. And also, the water layer serves as an adhesion layer to provide good conformal contact and form strong covalent bonding between the Al2O3 layer and Si substrate. Thus, the TFTP technique is potentially useful for making nanochannels of various inorganic materials.

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