• Transactions of the Korean Society of Mechanical Engineers B
• /
• v.21 no.11
• /
• pp.1509-1517
• /
• 1997

Charged and uncharged particle motions and collection characteristics around a bipolar charged rectangular shape electret fiber are studied numerically. Particle inertia, fluid drag, Coulomb force and polarization force are considered to predict the particle motion around the electret fiber. The effects of particle sizes, flow velocities, number of charges and polarities are also systematically investigated. For small size particles, the single fiber collection efficiency is greatly dependent on the charge polarity and the number of charges on a particle. However, particles larger than 5.mu.m do not show charging effect on collection efficiencies in the flow velocity ranges from 1.5 cm/s to 150 cm/s when the maximum charges are within +5 to -10. The results show that a strong electric field gradient at the corner of the bipolar charged fiber plays a very important role on collecting particles regardless of its charge polarity because of the polarization force. It also shows that the most penetrating particle size for a single electret fiber decreases as the flow velocity increases and the number of charges of a particle decreases.

• Transactions of the Korean Society of Mechanical Engineers B
• /
• v.24 no.10
• /
• pp.1359-1367
• /
• 2000

In-situ particle monitors(ISPMs) are widely used for monitoring contaminant particles in vacuum-based semiconductor manufacturing equipment. In the present research, the performance of a Particle Measuring Systems(PMS) Vaculaz-2 ISPM at low pressures has been studied. We generated the uniform sized methylene blue particle beams using three identical aerodynamic lenses in the center of the vacuum line, and measured the detection efficiency of the ISPM. The effects of particle size, particle concentration, mass flow rate, system pressure, and arrangement of aerodynamic lenses on the detection efficiency of the ISPM were examined. Results show that the detection efficiency of the ISPM greatly depends on the mass flow rate, and the particle Stokes number. We also found that the optimum Stokes number ranges from 0.4 to 1.9 for the experimental conditions.

• Korean Journal of Materials Research
• /
• v.24 no.2
• /
• pp.98-104
• /
• 2014

Vacuum kinetic spray(VKS) is a relatively advanced process for fabricating thin/thick and dense ceramic coatings via submicron-sized particle impact at room temperature. However, unfortunately, the particle velocity, which is an important value for investigating the deposition mechanism, has not been clarified yet. Thus, in this research, VKS average particle velocities were derived by numerical analysis method(CFD: computational fluid dynamics) connected with an experimental approach(SCM: slit cell method). When the process gas or powder particles are accelerated by a compressive force generated by gas pressure in kinetic spraying, a tensile force generated by the vacuum in the VKS system accelerates the process gas. As a result, the gas is able to reach supersonic speed even though only 0.6MPa gas pressure is used in VKS. In addition, small size powders can be accelerated up to supersonic velocity by means of the drag-force of the low pressure process gas flow. Furthermore, in this process, the increase of gas flow makes the drag-force stronger and gas distribution more homogenized in the pipe, by which the total particle average velocity becomes higher and the difference between max. and min. particle velocity decreases. Consequently, the control of particle size and gas flow rate are important factors in making the velocity of particles high enough for successful deposition in the VKS system.

• Journal of Industrial Technology
• /
• v.21 no.B
• /
• pp.149-153
• /
• 2001

A study on the particle growth in $TEOS/O_2$ plasma was performed, and particle size and its distribution was measured by the electrical aerosol analyzer (EAA), light scattering particle size analyzer and the particle size was also determined by SEM. The effects of process variables such as total gas flow rate, reactor pressure, supplied power and initial reactant concentration on the particle growth were investigated. From the EAA results, the particle size distribution is divided into three groups of the cluster size and the small and large size particles. The particle size distribution measured by the light scattering particle size analyzer becomes bimodal, because the cluster size particles smaller than 20 nm in diameter cannot be detected by the light scattering particle size analyzer. The size of particles measured by the light scattering particle size analyzer is in good agreements with those by the SEM. Also we could understand that the particle formation is very sensitive to the changes of reactor pressure and reactant concentration. As the total gas flow rate increases, the particle size decreases because of the shorter residence time. As the reactor pressure, or the reactant concentration increases, the particle concentration increases and the particles grow more quickly by the faster coagulation between particles.

• Journal of Korean Society for Atmospheric Environment
• /
• v.19 no.5
• /
• pp.551-560
• /
• 2003

Particle deposition in human lungs was investigated theoretically by using asymmetric five-lobe lung model. The volumes of each of the five lobes were different, thereby forming an asymmetric lung structure. The tidal volume and flow rate of each lobe were scaled according to lobar volume. The total and regional deposition with various breathing patterns were calculated by means of tracking volume segments and accounting for particle loss during inhalation and exhalation. The deposition fractions were obtained for each airway generation and lung lobe, and dominant deposition mechanisms were investigated for different size particles. Results show that the tidal volume and flow rate have a characteristic influence on particle deposition. The total deposition fraction increases with an increase in tidal volume for all particle sizes. However, flow rate has dichotomous effects: a higher flow rate results in a sharp increase in deposition for large size particles, but decreases deposition for small size particles. Deposition distribution within the lung shifts proximally with higher flow rate whereas deposition peak shifts to the deeper lung region with larger tidal volume. Deposition fraction in each lobe was proportional to its volume. Among the three main deposition mechanisms, diffusion was dominant for particles < 0.5 ${\mu}{\textrm}{m}$ whereas sedimentation and impaction were most influential for larger size particles. Impaction was particularly dominant for particles> 8 ${\mu}{\textrm}{m}$. The results may prove to be useful for estimating deposition dose of inhaled pollutant particles at various breathing conditions.

• The KSFM Journal of Fluid Machinery
• /
• v.14 no.5
• /
• pp.18-23
• /
• 2011

A CFD analysis method is developed and applied for investigating the gas flow and the byproduct particle trajectory in Roots type vacuum pump. The internal fluid flow and thermal fields between the rotors and the housing of vacuum pump are analyzed by using the dynamic mesh, the numerical methods for unsteady 2-D Navier-Stokes equation and the standard k-$\varepsilon$ turbulence model of the Fluent code. Coupled with the flow simulation results, the particle trajectory of the byproduct flowing into the pump with gas stream is analyzed by using discrete phase modeling technique. The CFD analysis results show the pressure, the velocity and the temperature distributions in pump change abruptly due to the rotation of rotors, and back flows are produced due to the strong reverse pressure gradients at rotor/rotor and rotor/housing clearances. The predicted byproduct particle trajectory results also show the particles impinge on the clearance surfaces between the housing and the rotor of pump and then may form the deposit layer causing the failure of pump.

• 한국가시화정보학회:학술대회논문집
• /
• 2006.12a
• /
• pp.7-10
• /
• 2006

An experimental study has been conducted to quantitatively characterize the motion of neutrally buoyant particles in 2-dimensional Poiseuille flow through the micron-sized circular capillaries in the range of Re (Reynolds number) $\approx0.1\sim100$. $A{\mu}-PTV$ (Particle Tracking Velocimetry) system is adopted, which consists of a double-headed Nd:YAG laser, an epi-fluorescence microscope and a cooled CCD camera. Since high shear rate can be induced due to the scale effect even at low Re, it is shown that in micro scale neutrally buoyant particles in Poiseuille flow drift away from the wall and away from the center of the capillary. Consequently, particles accumulate at the equilibrium position of $0.52\sim0.64R$ with R being the radius of the capillary, which is analogous to that of tube flow in macro scale. There is a plateau in equilibrium position at small Re, while equilibrium position starts increasing at $Re\approx30$. The outermost edge of particle cluster is closer to the center of the capillary than that in previous studies due to low Re effect. The present study quantitatively presents characteristics of particle motion in circular capillaries. Furthermore, it is expected to give optimum factors for designing microfluidic systems that are to be used fur plasma separation from the blood.

• Proceedings of the KSME Conference
• /
• 2007.05b
• /
• pp.3197-3202
• /
• 2007

An analysis program for pedestrian flow has been developed to investigate the flow patterns of passenger in railway stations. Analysis algorithms for pedestrian flow based on DEM(Discrete Element Method) are newly developed. There are lots of similarity between particle-laden two phase flow and passenger flow. The velocity component of 1st phase corresponds to the unit vector of calculation cell, each particle to passenger, volume fraction to population density and the particle velocity to the walking velocity, etc. And, the walking velocity of passenger is also represented by the function of population density. Key algorithms are developed to determine the position of passenger, population density and numbering to each passenger. By using the developed program, we compared the simulation results of the effects of the location and size of exit and elapsed time.

• Journal of the Korean Society for Railway
• /
• v.9 no.3 s.34
• /
• pp.271-276
• /
• 2006

Insight into behaviour of pedestrians as welt as tools to assess passenger flow condition is important in such instances as planning and geometric design of railway station under regular and safety-critical circumstances. Algorithm for passenger flow analysis based on DEM (Discrete Element Method) is newly developed. There are lots of similarity between particle-laden two phase flow and passenger flow. The velocity component of 1st phase corresponds to the unit vector of calculation cell, each particle to passenger, volume fraction to population density and the particle velocity to the walking velocity, etc. And, the walking velocity of passenger is also represented by the function of population density. Key algorithms are developed to determine the position of passenger, population density and numbering to each passenger. To verify the effectiveness of new algorithm, passenger flow analysis for the basic models of railway station is conducted.

• Proceedings of the SAREK Conference
• /
• 2008.11a
• /
• pp.546-550
• /
• 2008

In this study, 3-dimensional Computational Fluid Dynamics (CFD) analysis was induced to simulate air flow and particle motion in the axial flow cyclone separator. The commercialized CFD code FLUENT was used to visualize pressure drop and particle collection efficiency inside the cyclone. We simulated 4 cyclone models with different shape of vane, such as turning angle or shape of cross section. For the air flow simulation, we calculated the flow field using standard ${\kappa}-{\varepsilon}$ turbulence viscous model. Each model was simulated with different inlet or outlet boundary conditions. Our major concern for the flow filed simulation was pressure drop across the cyclone. For the particle trajectory simulation, we adopted Euler-Lagrangian approach to track particle motion from inlet to outlet of the cyclone. Particle collection efficiencies of various conditions are calculated by number based collection efficiency. The result showed that the rotation angle of the vane plays major roll to the pressure drop. But the smaller rotation angle of vane causes particle collection efficiency difference with different inlet position.