• Particle and aerosol research
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• v.12 no.4
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• pp.145-150
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• 2016

During the chemical mechanical planarization (CMP) process, slurry that comprises abrasive particles can directly affect the CMP performance and quality. Mainly, the large particles in the slurry can generate the defects on the wafer. Thus, many kinds of filters have been used in the CMP process to remove unwanted over-sized particles. Among these filters, the point-of-use (POU) filter is used just before the slurry is supplied onto the CMP pad. In the CMP research field, analysis of the POU filter has been relatively exceptional, and previous studies have not focused on the standardized filtration efficiency (FE) or filter performance. Furthermore, conventional evaluation methods of filter performance are not appropriate for POU filters, as the POU filter is not a membrane type, but is instead a depth type roll filter. In order to accurately evaluate the POU filter, slurry FE according to particle size was measured in this study. Additionally, a CMP experiment was conducted with filtered slurry to demonstrate the effects of filtered slurry on CMP performance. Depending on the flow rate and the filter retention size, the FE according to particle size was different. When the small and large particles have different FEs, the total filtration efficiency (TFE) can still have a similar value. For this reason, there is a need to measure the FE with respect to the particle size to verify the effects of the POU filter on the CMP process.

• Particle and aerosol research
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• v.11 no.2
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• pp.29-36
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• 2015

The purpose of this research is to find out the collection property of nanoparticle in diffusion filter to know particle size dispersion of nanomaterial using inertial force and principle of Brownian diffusion motion. We used inertial filters which are two different type and diffusion filters made by various kinds of Wiremesh and the different pieces of filter to compare with particle size distribution using NaCl particles. Finally, We made a conclusion as follows : (1) the bigger available charging volume is and the larger specific surface area of inertial filter is, the better collection efficiency is. (2) The higher wire-mesh number of filter is, the more collection efficiency of small particle is increasing because the wire of the higher Wiremesh number filter is thinner and denser. (3) The more pieces of wire-mesh filter, the more collection efficiency is increasing because it makes the residence time longer.

• Journal of information and communication convergence engineering
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• v.9 no.6
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• pp.633-636
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• 2011

This paper describes a implementation of virtual interactive interview system. A hand motion recognition algorithm based on the particle filters is applied for this system. The particle filter is well operated for human hand motion recognition than any other recognition algorithm. Through the experiments, we show that the proposed scheme is stable and works well in virtual interview system's environments.

• Proceedings of the Korean Institute of Intelligent Systems Conference
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• 2005.04a
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• pp.93-104
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• 2005

• Environmental Engineering Research
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• v.25 no.3
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• pp.439-445
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• 2020

In the estimation of the aerosol single fiber efficiency using fibrous filters, there is a size range, where the particles penetrate most effectively through the fibrous collectors, and corresponding minimum single fiber efficiency. For small particles in which the diffusion mechanism is dominant, the Cunningham slip correction factor (C_c) affects the single fiber efficiency and the most penetrating particle size (MPPS). Therefore, for accurate estimation, C_c is essential to be considered. However, many previous studies have neglected this factor because of its complexity and the associated difficulty in deriving the appropriate parameterization particularly for the MPPS. In this study, the expression for the MPPS, and the corresponding expression for the minimum single fiber efficiency are analytically derived, and the effects of C_c are determined. In order to accommodate the slip factor for all particle-size ranges, C_c is simplified and modified. Overall, the obtained analytical expression for the MPPS is in a good agreement with the exact solution.

• Journal of the Semiconductor & Display Technology
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• v.22 no.2
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• pp.112-119
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• 2023

In urban environments, signals of Global Positioning System (GPS) can be blocked and reflected by tall buildings, large vehicles, and complex components of road network. Therefore, the performance of the positioning system using the GPS module in urban areas can be degraded due to the loss of GPS signals necessary for the position estimation. To deal with this issue, various localization schemes using inertial measurement unit (IMU) sensors, such as gyroscope and accelerometer, and Bayesian filters, such as Kalman filter (KF) and particle filter (PF), have been designed to enhance the performance of the GPS-based positioning system. Among Bayesian filters, the PF has been widely used for the target tracking and vehicle navigation, since it can provide superior performance in estimating the state of a dynamic system under nonlinear/non-Gaussian circumstance. This paper presents a positioning system that uses the double-stacked particle filter (DSPF) as well as the accelerometer, gyroscope, and GPS receiver on the smartphone to provide higher pedestrian positioning accuracy in urban environments. The DSPF employs a nonparametric technique (Parzen-window) to create the multimodal target distribution that approximates the posterior distribution. Experimental results show that the DSPF-based positioning system can provide the significant improvement of the pedestrian position estimation in urban environments.

• Journal of Environmental Science International
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• v.33 no.2
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• pp.113-119
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• 2024

In this study, the most suitable sampling methods for the bimodal mass distribution characteristics and individual particle analysis of atmospheric aerosols were investigated. Samples collected in Quartz, Teflon, and Nuclepore filters were analyzed for individual particles using scanning electron microscopy with an energy-dispersive X-ray spectrometer (SEM/EDS). Then, the pore diameter of the filter and the collection flow rate were determined using the theoretical collection efficiency calculation formula for two-stage separation sample collection of coarse and fine particles. The Nuclepore filter was found to be the most suitable filter for identifying the physical and chemical characteristics of atmospheric aerosols since it was able to separate the sample and count the different sized particles better than either Quartz or Teflon. Nuclepore filters with 8.0 ㎛ and 0.4 ㎛ pores were connected in series and exposed to a flow rate of 16.7 L/min for two-stage separation sampling. The results show that it is possible to separate and collect both coarse and fine particles. We expect that the proposed methodology will be used for future individual particle analysis of atmospheric aerosols and related research.

• Korean Chemical Engineering Research
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• v.44 no.3
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• pp.294-299
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• 2006

Computational simulation was performed to analyze flow velocities and particle trajectories onto the surface of bag-shaped filters with a different permeability. When the permeability of a filter is lower than that of a low-efficient fabric bag-filter widely used, the distributions of flow velocities and particle trajectories on the filter surface were not different with decreasing the filter permeability. The distributions of streamlines and radial directional gas velocities were uniform on the filter surface except for the neighbors of the bottom edge and outlet of the filter. The particle trajectories onto filter surface were more densely distributed around the bottom edge of the filter, so that the particle number on the filter surface was maximized near the bottom edge and decreased in the direction of the filter outlet.

• Journal of Korean Society of Water and Wastewater
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• v.19 no.2
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• pp.144-148
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• 2005

The industrial development of large scale deep bed filters has been a very important step in the process of drinking water production and more recently in the tertiary treatment of wastewater. The target of deep bed filtration is the retention is the retention of small particles generally smaller than 30 microns at relatively small concentration, generally less than 30 mg/l from natural water (surface water or aquifers) or secondary treated wastewater. The relation between the retention efficiency and the characteristics of the particles has been extensively studied experimentally and through different models of retention. During the last years the development of new technologies (fiber filter, membrane modules) lead to more intensive processes compared to conventional sand filtration. Fiber filters can combine intensification with a decrease in specific energy needed however they cannot be operated under gravity like sand filters. Membrane filters (UF or MF) are much more intensive and efficient than sand filters. The specific energy needed is not so high (about $0.1Kwh/M^3$) but is higher than sand or fiber filter. A Life Cycle Analysis (LCA) has to be made for a complete comparison between these technologies taking in account that the efficiency of particle retention obtained by membrane filters is unique.

• Particle and aerosol research
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• v.12 no.3
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• pp.103-107
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• 2016

We conducted experiments on mask filters. We measured filtering efficiencies of several new mask filters which were manufactured by disassembling and reassembling of one type of mask filter. New filter (A+C: combination of the first layer and the third layer of the tested mask filter) showed the highest efficiency (97.7%) with the respiratory resistance of 98 pa.