• Tribology and Lubricants
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• 제33권4호
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• pp.134-140
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• 2017

With the increase in adoption of tilting pad journal bearings (TPJBs), various failure mechanisms related to TPJBs have been reported, of which pad wear is a frequently reported one. Pad wear causes change in geometry of the bearing, which can sometimes result in the failure of the entire system. The objective of this research is to investigate the influence of pad wear on the pad temperature, which is one of the widely used condition monitoring methods for TPJBs. For the theoretical investigation, thermohydrodynamic (THD) analysis was conducted by solving the generalized Reynolds equation and the 3D energy equation. The results of the analysis show that the temperature of the loaded pad increases while that of the unloaded pad decreases, when there is wear on the loaded pads. In addition, the minimum film thickness decreases with an increase in the wear depth. A validation test was conducted with a test rig, which mimics the axial turbine when a test rotor is supported by two TPJBs. The test bearing consists of five pads with a diameter of 60 mm, and a resistance temperature detector (RTD) is installed in the pad for temperature monitoring. The test was performed by replacing the two loaded pads with the worn pad. The test result for the TPJB with wear depth of $30{\mu}m$ show that the temperatures of the loaded pads are $8^{\circ}C$ higher and that of the unloaded pad is $2.5^{\circ}C$ lower than that of the normal TPJB. In addition, the predicted pad temperature shows good agreement with the measured pad temperatures.

• 한국전기전자재료학회논문지
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• 제19권4호
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• pp.309-313
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• 2006

Pad surface characteristics such as roughness, groove and wear rate of pad have a effect on the within wafer non-uniformity(WIWNU) in chemical mechanical polishing(CMP). Although WIWNU increases as the uniformity of roughness(Rpk: Reduced peak height) becomes worse in an early stage of polishing time, WIWNU decreases as non-uniformity of the Rpk value. Also, WIWNU decreases with the reduction of the pad stiffness, though original mechanical properties of pad are unchanged by the grooving process. In addition, conditioning process causes the inequality of pad wear during in CMP. The profile of pad wear generated by the conditioning process has a significant effect on the WIWNU. These experiments results could help to understand the effect of pad surface characteristics in CMP.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2002년도 추계학술대회 논문집 Vol.15
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• pp.178-181
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• 2002

We studied the characteristics of polishing pad, which can apply W CMP process for global planarization of multilevel interconnection structure. Also we investigated the effects of different sets of polishing pad. The purpose of this experiment is the cost reduction by the increase of pad life time and decrease of cycle time and slurry usage with new pad. Especially we studied the effect of polishing pad for CMP process by this experiment of polishing pad that is consumables material during CMP process. We expecting the increase of process throughput and improvement of device manufacturing yield because we can choose optimum polishing pad through this result.

• Journal of Advanced Marine Engineering and Technology
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• 제31권4호
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• pp.350-355
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• 2007

Pad-eye is connected to crane with sling. When block is lift, pad-eye have a various applied force. Applied force on pad-eye is related to sling angle. Sling angle is decided by various parameters, including pad-eye location, sling length and crane location. Welded joint on pad-eye requires strength design because sling angle changes force on pad-eye. Strength design for welded joint of pad-eye will calculate with general mechanical design and FE analysis. FE analysis would become a useful tool in the analysis of welded joint. A commercial software(ANSYS 10.0) was used in the structural strength analysis for welded joint of pad-eye.

• 한국소음진동공학회논문집
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• 제14권4호
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• pp.344-351
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• 2004

Tilling pad journal bearings have been widely used to support the rotors of the high rotating machinery such as steam and gas turbines owing to their inherent dynamic stability characteristics. However, serious bearing problems such as fatigue damage in the upper unloaded pad, the break of locking pins and the wear of pinholes etc. by pad fluttering are frequently taken place in the actual steam turbines. The purpose of this paper is to investigate the mechanism of pad fluttering and to suggest the useful design guideline(application of preload, m) for the purpose of preventing bearing problems by pad fluttering in a tilting pad journal bearing. It is estimated that upper pad is easy to flutter because the film shape of the upper pad is diverged by moment acting on pivot point. This paper suggests that effective preload range(m $\geq$ 0.5) in order to be statically loaded pad under all operating conditions. Also, design modified bearing is suggested for the adjustment in actual steam turbines. And bearing and rotor dynamic analysis are performed to identify bearing characteristics and to verify the reliability of rotor-bearing system.

• 한국전기전자재료학회논문지
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• 제18권6호
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• pp.521-526
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• 2005

Within wafer non-uniformity(WIWNU) improves as the stiffness of pad decrease. We designed the pad groove to study of pad stiffness on WIWNU in Chemical mechanical polishing(CMP) and measured the pad stiffness according to groove width. The groove influences effective pad stiffness although original mechanical properties of pad are unchanged by grooving. Also, it affects the flow of slurry that has an effect on the lubrication regime and polishing results. An Increase of the apparent contact area of pad by groove width results in decrease of effective pad stiffness. WIWNU and profile of removal tate improved as effective pad stiffness decreased. Because grooving the pad reduce its effective stiffness and it makes slurry distribution to be uniform. Futhermore, it ensures that pad conforms to wafer-scale flatness variability. By grooving the top pad, it is possible to reduce its stiffness and hence reduce WIWNU and edge effect.

• Tribology and Lubricants
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• 제18권5호
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• pp.357-363
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• 2002

The vibration characteristics of the pad fluttering in a fluid film tilting pad journal bearing (4-pad LBP) have been investigated experimentally under the different values of oil supply flow rate, bearing load and shaft speed. The vibration characteristics of the pad fluttering are estimated by measuring the time signal of circumferential distribution of the film thickness and the cascade plot of the response of the relative displacement between the bearing and the shaft. It is shown that the vibration frequency of the pad fluttering has a sub-synchronous frequency and almost does not change by the increase of shaft speed. However the vibration amplitude is increased by the increase of shaft speed. From those experimental results, pad fluttering can be thought of as a self-excited vibration. The incipient pad fluttering velocity is increased by the increase of oil supply flow rate and by the decrease of bearing load. It is observed that the vibration amplitude of the pad fluttering can be decrease by the control of supply oil flow rate effectively. And also It is known that the outbreak of pad fluttering does not concern with the shaft vibration.

• 태양에너지
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• 제16권2호
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• pp.39-47
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• 1996

본 연구에서는 실제 열 파이프용 수평 축열조에서 등간격인 heating pad 수와 위치 및 공급열량을 변화시키면서 축열조내의 순수 Plume 유동특성을 파악하였다. 동일한 heating pad수를 가지고 집중 배치 형태와 분산 배치 형태를 취하였을 때 집중 배치 형태로 취하는 것이 $5{\sim}6%$ 정도의 더 높은 효율을 얻었다. 따라서 열 파이프용 수평 축열조에서 heating pad를 장착할 때 동일한 heating pad의 수에서는 집중(concentration)배치형태로 설계하는 것이 효과적임을 알 수 있다.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2005년도 하계학술대회 논문집 Vol.6
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• pp.38-39
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• 2005

We have investigated the effect of the pad surface characteristics such as roughness, groove density and wear of pad on within wafer non-uniformity(WIWNU) in chemical mechanical polishing(CMP). We found that WIWNU increases as pad surface roughness($R_{pk}$; Reduced peak height) increases in an early stage of polishing. But after polishing time goes to a certain extent, WIWNU decreases as uniformity of pad surface roughness. Also, groove of pad has effect on relative pad stiffness although original mechanical properties of pad are unchanged by grooving. WIWNU decreases as relative pad stiffness decreases. In addition, conditioning process causes non-uniform wear of pad during in CMP. The profile of pad wear has a significant effect on WIWNU.

• 한국윤활학회:학술대회논문집
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• 한국윤활학회 2000년도 제32회 추계학술대회 정기총회
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• pp.228-234
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• 2000

The vibration characteristics of the pad fluttering in a fluid film tilting pad journal bearing(4-pad LBP) have been investigated experimentally under the different values of oil supply flow rate, bearing load and shaft speed. The vibration characteristics of the pad fluttering are estimated by measuring the time signal of circumferential distribution of the film thickness and the cascade plot of the response of the relative displacement between the bearing and the shaft. It is shown that the vibration frequency of the pad fluttering has a sub-synchronous frequency and 31mos1 does not change by the increase of shaft speed. However the vibration amplitude is increased by the increase of shaft speed. From those experimental results, pad fluttering can be thought of as a self-excited vibration. The incipient pad fluttering velocity is increased by the increase of oil supply rate and by the decrease of bearing load. It is observed that the vibration amplitude of the pad fluttering can be decreased by the control of supply oil flow rate effectively. And also It is known that the outbreak of pad fluttering does not concern with the shaft vibration.