• Journal of the Korean Institute of Illuminating and Electrical Installation Engineers
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• v.20 no.7
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• pp.58-64
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• 2006

Recently deep interests have been paid on the effective generation of ozone, which has been widely used for water treatment, deodorization, color removal, and chemical processing of exhausted smoke. The silent discharge reaction has been proposed as the most effective one in the many ozone generation methods, because the silent discharge can be generated under the conditions of lower applied voltage and power consumption, compared other ones. In this paper, in order to improve the ozone generation and ozone generation efficiency, the conventional silent discharge chamber with $Al_2O_3$ dielectric layer and tubular ferroelectric bed discharge reactor packed with $Al_2O_3$ pellets were made, and the silent discharge of the reactors were studied experimentally. The ozone generation characteristics are also discussed based on the discharge characteristics, especially on the wall charge accumulation properties and power consumption. The results show that the electric charges of discharge tube with bead are around 2.5 times as large as those without bead. In the discharge chamber packed with dielectric beads, the ozone concentration and the energy yield characteristics were also improved, compared with those in the conventional silent discharge reactor.

• The Transactions of the Korean Institute of Electrical Engineers C
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• v.52 no.12
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• pp.579-585
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• 2003

Recently the utilization of the ozone dissolved de-ionized water(DI-O3 water) in semiconductor wet cleaning process to replace the conventional RCA methods has been studied. In this paper, we propose the water-electrode type ozone generator which has the ozone gas characteristics of the high concentration and high purity to produce the high concentration DI-O3 water for the silicon wafer surface cleaning process. The ozone generator has the dual dielectric tube structure of silent discharge type and the water is both used to electrode and cooling water. We investigate the performance of the proposed ozone generator which has the design goal of the concentration of 7[wt%] and ozone generation quantity of 6[g/hr] at flow rate of 1[$\ell$/min). The experiment results show that the water electrode type ozone generator has the characteristics of 8.48[wt%] of concentration, 8.08[g/hr] of generation quantity and 76.2[g/kWh] of yield and it's possible to use the proposed ozone generator for the DI-O3 water cleaning process of silicon wafer surface.

• Journal of the Korean Institute of Illuminating and Electrical Installation Engineers
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• v.28 no.5
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• pp.76-81
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• 2014

The ozone generation is commonly made with silent discharge method using quartz glass dielectric. In this paper, using $Al_2O_3$ dielectric to instead of the traditional quartz glass dielectric to improve the system efficiency is presented. The dielectric was manufactured as tube shape (Internal diameter${\times}$ Outside diameter: $11{\times}15mm$) using 99% $Al_2O_3$ ceramic. The characteristics of dielectric discharge and ozone generation were studied of experiments with variation of discharge power, discharge electrode space and rate of flow for supplied gas ($O_2$/Air). As the experimental results, in the same discharge space, the ozone concentration continuously increased with input power increasing, and ozone yield increased until saturation happened. Also, the expended power increased with discharge space extended due to discharge power increased. In additional, the ozone concentration of oxygen ozone was higher than air that was observed when using oxygen ozone in proposed experiments.

• Journal of the Korean Institute of Illuminating and Electrical Installation Engineers
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• v.19 no.8
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• pp.94-101
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• 2005

The silent discharge type ozonizer with three electrodes(central electrode, internal electrode, and external electrode) and one discharge gap(discharge gap between internal electrode and external electrode) has been designed and manufactured. It is a silent discharge type ozonizer for which the AC high frequency voltages applied to the central electrode within vacuum discharge tube and the internal electrode for which the external electrode is a ground Ozone is generated by silent discharge in discharge gap. At the moment, discharge characteristics and ozone generation characteristics were investigated in accordance with vacuum of discharge tube, frequency of AC power source, discharge power of ozonizer, and quantity of supplied oxygen gas. In consequence, ozone characteristics proportional to vacuum of discharge tube and frequency of AC power source. The maximum value of ozone can be obtained 7,700[ppm], 460[mg/h] and 70[g/kwh].

• Proceedings of the KIEE Conference
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• 1995.07c
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• pp.1375-1377
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• 1995

This paper describes characteristic of ozone Generation by positive streamer corona discharge. Experiments were carried out with needle-plane Electrodes in a pyrex glass tube, in order to in crease the ozone yield. The results of Experiments confirmed needle an gle $45^{\circ}$ Gap spacing 15mm is adaptive Electrode arrangement.

• Proceedings of the KIPE Conference
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• 2001.10a
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• pp.89-92
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• 2001

Silent gas discharge method has been widely applied for ozone production, ultraviolet light and UV laser generation. Since ozone and ultraviolet applications have tendency to spread widely in industry, the development of efficient and low-cost power supply for such systems is a task of great impotency. This paper introduces high-frequency inverter type mode power supply designed for ozone generation tube and ultraviolet generation excimer lamp and considerations on this inverter and pulse density modulation control strategy applied in it.

• Journal of Power Electronics
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• v.2 no.3
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• pp.206-211
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• 2002

Silent gas discharge method has been widely applied fur ozone production, ultraviolet light and UV laser generation. Since ozone and ultraviolet applications have tendency to spread widely in industry, the development of efficient and low - cost power supply for such systems is an important task at present. This paper introduces high-frequency inverter type mode power supply designed fur ozone generation tube and ultraviolet generation excimer lamp and considerations on the design of the inverter and pulse density modulation control strategy applied in it.

• Proceedings of the KIPE Conference
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• 2001.10a
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• pp.261-265
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• 2001

In this paper, a current-source type parallel indudor compensated load resonant high-frequency soft switching inverter using IGBTs for driving the newly-produced silent discharge type ozone generating tube and excimer lamp for UV generation which incorporate a single switched capacitor resonant snubber between the port in DC busline side is presented, together with its pulse modulated unique output power regulation characteristics.

• Journal of the Korean Institute of Illuminating and Electrical Installation Engineers
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• v.19 no.5
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• pp.60-67
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• 2005

The superposed discharge type ozonizer of high ozone concentration using vacuum discharge tube has been designed and manufactured. It consists of three electrodes(central electrode, internal electrode, and external electrode) and one discharge gap(discharge gap between internal electrode and external electrode), is a superposed silent discharge type ozonizer for which the AC high voltages applied to the central electrode within discharge tube and the internal electrode has a $180{[^\circ]}$ phase difference and for which the external electrode is a ground. Ozone is generated by overlapping silent discharge between central electrode and external electrode, and silent discharge between internal electrode and external electrode. At the moment, discharge characteristics and ozone generation characteristics were investigated in accordance with vacuum of discharge tube, discharge power of ozonizer, and quantity of supplied oxygen gas. In consequence, high ozone concentration can be obtained 8840[ppm].

• Proceedings of the KIEE Conference
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• 2002.07c
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• pp.1724-1726
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• 2002

A novel ozonizer has been developed using a high-frequency surface discharge and a high purity alumina ceramic as its dielectric component. A thin ceramic layer, cylindrical in form, is adhered by a film-like induction electrode. An ac exciting voltage of frequency to 0.6 kHz from 1.0 kHz and $6{\sim}9kV$ peak-to-peak is applied between the electrodes to produce a stable high-frequency silent discharge for generation of ozone. A substantial reduction of the exciting voltage is also enabled by using a thin alumina ceramic layer. As a result, the ozonizer can easily produce ozone concentration($128g/m^2$ for oxygen) and power efficiency(360g/kWh for oxygen) without using a special enrichment means.