• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2004.07b
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• pp.1230-1233
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• 2004

Ozone is useful oxidizing gas for the fabrication of oxide thin films. Accordingly researching on oxidizing gas is required. In order to obtain high quality oxide thin films, higher ozone concentration is necessary. In this paper oxidation property was evaluated relation between oxide gas pressure and inverse temperature(CuO reaction). The obtained condition was formulated by the fabrication of Cu metal thin film by co-deposition using the ion Beam Sputtering method. Because the CuO phase peak appeared at the XRD evaluation of the CuO thin film using ozone gas, this study has succeeded in the fabrication of the CuO phase at $825^{\circ}C$.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2004.04a
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• pp.35-38
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• 2004

Ozone is useful oxidizing gas for the fabrication of oxide thin films. Accordingly researching on oxidizing gas is required. In order to obtain high quality oxide thin films, higher ozone concentration is necessary. In this paper oxidation property was evaluated relation between oxide gas pressure and inverse temperature(CuO reaction). The obtained condition was formulated by the fabrication of Cu metal thin film by co-deposition using the Ion Beam Sputtering method. Because the CuO phase peak appeared at the XRD evaluation of the CuO thin film using ozone gas, this study has succeeded in the fabrication of the CuO phase at $825^{\circ}C$.

• The Transactions of the Korean Institute of Power Electronics
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• v.6 no.5
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• pp.460-466
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• 2001

The oxidizing power of ozone is the greatest of all commercially available oxidizers and thus ozone is taking the place of chlorine for water treatment. For energy-effective treatment of water, ozone should be generated in high concentration. A silent glow discharge ozonizer is high effective in industrial aspect and thus is the most widely used. We found that the key parameters associated with the ozone generation rate are the driving voltage of the discharger, the discharge rate and the temperature of the ozone generation tube. For an easy control of these parameters, we build a monitoring system with graphical user interface. This system is based on Windows-98 PC, programmed with C++ and LabView.

• Proceedings of the Korean Vacuum Society Conference
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• 2013.08a
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• pp.320.1-320.1
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• 2013

We have investigated the effect of surface passivation for crystalline silicon solar cell using ozone-based atomic layer deposited (ALD) $Al_2O_3$. We examined passivation properties such as uniformity, carrier lifetime, thickness, negative fixed charge density at AlOx/Si interface, and reflectance. The influences of process temperature and heat treatment were investigated using microwave photoconductance decay (PCD). Ozone-based ALD $Al_2O_3$ film shows the best carrier lifetime at lower deposition temperature than $H_2O$-based ALD.

• Journal of Korean Society for Atmospheric Environment
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• v.23 no.3
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• pp.353-363
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• 2007

To differentiate temperature effect from the light intensity effect on the formation of secondary products during the photooxidation of toluene-$NO_x$-air mixtures, steady-state air temperature was changed from $20^{\circ}C\;to\;33^{\circ}C$ at the same light intensity of $0.39min^{-1}$ in an indoor smog chamber. Smog chamber consisted of 64 blacklights and a $5.8m^3$ reaction bag made of Teflon film. Air temperature was controlled by an air-conditioning system. The starting time for rapid conversion of NO to $NO_2$ was slightly delayed with decreasing air temperature. In contrast to light intensity effect, the ozone formation time and the ozone production rate were insensitive to air temperature. Although the formation time for secondary organic aerosols was not changed, the particle number concentration increased with temperature. However, the newly formed secondary organic aerosol mass at lower temperature was higher than that at higher temperature. Since light intensity significantly affected the starting time and quantity of ozone and aerosol formation, it is considered that the temperature could contribute partly the quantity of aerosol formation during the photooxidation of toluene-$NO_x$-air mixtures.

• Transactions on Electrical and Electronic Materials
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• v.12 no.1
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• pp.40-42
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• 2011

An organic field-effect transistor (OFET) was fabricated using a copper phthalocyanine (CuPc) as the active layer on the silicon substrate. The CuPc FET device was configured as a top-contact type. The substrate temperature was room temperature. The CuPc thickness was 40 nm, and the channel length and channel width were 100 ${\mu}m$ 3 mm, respectively. Typical current-voltage (I-V) characteristics of the CuPc FET were observed and subsequently compared to the UV/ozone treatment on substrate surface.

• Proceedings of the Korean Vacuum Society Conference
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• 2014.02a
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• pp.462-462
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• 2014

The effect of rear passivation for passivated emitter and rear cell (PERC) using ozone and H2O oxidant of atomic layer deposited (ALD) Al2O3 was studied by post-annealing in N2 and forming gas ambients. Rear surface of PERC solar cell was passivated by Al2O3 grown by ALD with ozone and H2O oxidant. Al2O3 grown by ALD with ozone oxidant has been known to have many advantages, such as lower interface defects, low leakage current density. Its passivation quality is better than Al2O3 with H2O. Al2O3 layer with 10 nm and 20 nm thickness was grown at $150^{\circ}C$ with ozone oxidant and at $250^{\circ}C$ with H2O oxidant. And then each samples were post-annealled at $450^{\circ}C$ in N2 ambients and at $850^{\circ}C$ in forming gas ambients. The passivation quality was investigated by measuring the minority carrier lifetime respectively. We examined atomic layer deposited Al2O3 such as growth rate, film density, thickness, negative fixed charge density at AlOx/Si interface, and reflectance. The influences of process temperature and heat treatment were investigated using Sinton (WCT-120) by Quasi-Steady State Photoconductance (QSSPC) mode. Ozone-based ALD Al2O3 film shows the best carrier lifetime at lower deposition temperature than H2O-based ALD.

• Journal of Korean Society for Atmospheric Environment
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• v.2 no.1
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• pp.73-79
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• 1986

This study is carried out to determine the concentration of the ozone and the factors affecting the variation of ozone concentration in the ambient air in Seoul. The one-hour average concentration of ozone $(O_3)$, sulfur dioxide $(SO_2)$, nitrogen oxides (NO and $NO_2$), suspended particulate (TSP), carbon monoxide (CO) and non-methane hydrocarbon (NMHC) at 5 sites in Seoul measured from September to October in 1983 and 1984 were analysed statistically along with meteorological data for the same period. The results were as follows; 1. The average concentrations of ozone at 5 sites during the period ranged from 3.3 to 9.1 ppb, they were below 20 ppb of the ambient air quality standard of Korea. 2. The maximum hourly concentration of ozone occurred between 2 and 3 p.m. in a day and concentration at night were very low but higher concentrations were observed at around 4 a.m. 3. The concentration ratio between NO and $NO_2$ in Seoul was relatively lower than that for the cities of foreign countries reported so far. 4. The ozone concentration has negative correlationships with the concentration of other primary pollutants$(SO_2, NO, NO_2, CO and NMHC)$ in simple regression analyses. 5. The ozone concentration was positively correlated to wind speed, temperature and insolation intensity but negatively correlated to relative humidity. 6. Stepwise multiple regression analysis of the ozone concentration to the pollutants and meteorological factors indicate that insolation intensity and $[NO_2]/[NO]$ were the primary influencing factors. 7. The three factors of insolation intensity, $[NO_2]/[NO] and NO_2$ concentration had a significant combined effect on the ozone concentration $(r^2 = 0.47-0.57)$.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2003.07b
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• pp.795-798
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• 2003

Toxic organics are of great environmental concern primarily because they are toxic to mammals and birds, and are relatively soluble in water to contaminate surface water and groundwater. In this study, the decomposition of phenol, a widely used organic, in aqueous solutions by Boron doped diamond(BDD) electrode was examined. Thin, Boron-doped conducting diamond films are expected to be excellent electrodes for industrial electrolysis. Boron-doped diamond (BDD) were used as anode for generating ozone gas by electrolysis of acid solution. In this work. we have studied ozone generating system using BDD electrode. In order to determine the ozone generation properties of diamond electrode, experimental conditions, electrolyte concentration, temperature, flow rate and reaction time were varied diversely. As a result, we could confirm that ozone gas was generated successfully and the performance of diamond electrode was stable for electrolyte while $PbO_2$ electrode was disintegrated. Actually we are found that ozone amount increased by lowering the temperature of electrolyte. Decomposition of phenol concentration in the reaction solution by photolytic ozonation( $UV/O_3$) was analyzed by HPLC epuipped with a UV detector.

• Journal of the Korean Data and Information Science Society
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• v.20 no.6
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• pp.1085-1092
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• 2009

The ozone data is one of the important environmental data for measurement of the atmospheric condition of the country. In this article, the Autoregressive Error (ARE) model and Neural Networks (NN) model have been considered for analyzing the ozone data at the northern part of the Gyeonggi-Do, Paju monitoring site in Korea. In the both ARE model and NN model, seven meteorological variables and four pollution variables are used as the explanatory variables for the ozone data set. The seven meteorological variables are daily maximum temperature, wind speed, relative humidity, rainfall, dew point temperature, steam pressure, and amount of cloud. The four air pollution explanatory variables are Sulfur dioxide ($SO_2$), Nitrogen dioxide ($NO_2$), Cobalt (CO), and Promethium 10 (PM10). The result showed that the NN model is generally better suited for describing the ozone concentration than the ARE model. However, the ARE model will be expected also good when we add the explanatory variables in the model.