• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2003.07a
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• pp.382-385
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• 2003

Chemical mechanical polishing(CMP) is an essential process in the production of copper-based chips. On this work, the stability of Hydrogen Peroxide($H_2O_2$) as oxidizer of Cu CMP slurry has been investigated. $H_2O_2$ is known as the most common oxidizer in Cu CMP slurry. Copper slowly dissolves in $H_2O_2$ solutions and the interaction of $H_2O_2$ with copper surface had been studied in the literature. Because hydrogen peroxide is a weak acid in aqueous solutions, a passivation-type slurry chemistry could be achieved only with pH buffered solution.[1] Moreover, $H_2O_2$ is so unstable that its stabilization is needed using as oxidizer. As adding KOH as pH buffering agent, stability of $H_2O_2$ decreased. However, stability went up with putting in small amount of BTA as film forming agent. There was no difference of $H_2O_2$ stability between KOH and TMAH at same pH. On the other hand, $H_2O_2$ dispersion of TMAH is lower than that of KOH. Furthermore, adding $H_2O_2$ in slurry in advance of bead milling lead to better stability than adding after bead milling. Generally, various solutions of phosphoric acids result in a higher stability. Using Alumina C as abrasive was good at stabilizing for $H_2O_2$; moreover, better stability was gotten by adding $H_3PO_4$.

• Journal of the Korean Society for Aeronautical & Space Sciences
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• v.40 no.3
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• pp.222-229
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• 2012

The cooling of a injector effects on the vapor pressure of cryogenic oxidizer spray, and it decides the phase transition point at the ignition process, when the combustion chamber pressure increases drastically. The phase transition of oxidizer spray affects the ignition characteristics, and several ignition tests with the LOx/$GCH_4$ uni-element coaxial swirl injector was performed in the different initial temperatures of oxidizer injector, in order to investigate the effect of injector cooling on the ignition transient characteristics. At the transition point of oxidizer phase, where the combustion chamber pressure increased over the LOx vapor pressure, the temporary quenching phenomenon of the flame occurred. The lower temperature of chilled down injector and tubing tends to move up the phase transition earlier.

• Journal of the Korean Society of Propulsion Engineers
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• v.21 no.4
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• pp.89-95
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• 2017

The improvement of a flow coefficient for the recirculation chill-down flow in a main oxidizer shut-off valve has been presented. The flow coefficient, which is mainly affected by the recirculation outlet port size and the configuration inside the valve, has been predicted with measured flow coefficient values. The comparison of experimentally measured flow coefficient with the predicted value shows the effect of valve inside configuration on the flow coefficient. Consequently, the flow coefficient is twice the previous value and about 75% of the pressure loss assigned to the main oxidizer shut-off valve can be used for additional pressure losses for other components in the recirculation chill-down system of a launch vehicle.

• Journal of the Korean Society of Propulsion Engineers
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• v.20 no.6
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• pp.76-82
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• 2016

Recently, environmental sustainability of the transitional explosives and propellants is an issue of growing importance in energetic materials. For examples, ammonium perchlorate(AP) as an solid propellants oxidizer could create a poisonous gas and atmospheric pollutions, such as HCl. Among the several oxidizers, hydrazinium nitroformate(HNF) is an effective candidate substance for eco-friendly oxidizer, which has high density, pressure index, and less smog generating property during combustion for the thrust control system. This study was controlled the size distribution and shapes through various conditions. Length and diameter ratio(L/D) of crystals has below 1 : 3, and the particle size was two types of $200{\mu}m$ and $50{\mu}m$.

• Journal of the Korean Society of Propulsion Engineers
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• v.7 no.2
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• pp.1-6
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• 2003

Triplet(FOF or OFO) injectors are commonly applied to liquid rockets which use LOX and hydrocarbon propellants. The FOF type injector has been known to have an advantage for the although to show lower combustion performance as compared by the OFO type. However, a large disparity between oxidizer and fuel orifice diameters of the FOF type injector may reduce both the combustion efficiency and stability so that as FOOF split triplet injector which splits a single oxidizer orifice into double orifices was designed. In the present study, spray characteristics of the FOOF injector were investigated and compared with those of the FOF injector undo. cold flow conditions. Mass distributions of oxidizer and fuel for both injectors were measured by using a PLLIF (Planar Liquid Laser Induced Fluorescence)technique, and each drop size was also measured by using an instantaneous photographic method. From the experimental results, we found out that FOOF shows more stable mixing efficiencies than the FOF. As for the drop size of both oxidizer and fuel, there was not a large difference between two injector types.

• Journal of the Korean Society of Propulsion Engineers
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• v.12 no.4
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• pp.33-41
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• 2008

The prelaunch thermal transients in the cryogenic oxidizer tank of liquid propulsion rocket subjected to uniform heat flux from outside are numerically analyzed through thermodynamic equations and heat and mass transfer relations. The prelaunch stage is assumed to be composed of five idealized sub-stages including pressurization process by helium gas injection. The Peng-Robinson equation of state is utilized in the lumped analysis of ullage gas. The liquid region is divided into a number of horizontal layers of uniform properties to account for the thermal stratification. The computational result for the typical case shows that the temperature rise of liquid oxidizer is less than 1K and the adsorbed helium into the liquid is approximately 10g.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2003.11a
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• pp.136-139
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• 2003

Copper has attractive properties as a multi-level interconnection material due to lower resistivity and higher electromigration resistance as compared with Alumina and its alloy with Copper(0.5%). Among a variety of agents in Copper CMP slurry, $H_2O_2$ has commonly been used as the oxidizer However. $H_2O_2$ is so unstable that it requires stabilization to use as oxidizer Hence, stabilization of $H_2O_2$ is a vital process to get better yield in practical CMP process. In this article the stability of Hydrogen Peroxide as oxidizer of Copper CMP slurry has been investigated. When alumina abrasive was used, $\gamma$-particle Alumina C had a better stability than $\alpha$-particle abrasive. As adding KOH as pH buffering agent, $H_2O_2$ stability in slurry decreased. Urea hydrogen peroxide was used as oxidizer, an enhanced stability was gotten. When $H_3PO_4$ as $H_2O_2$ stabilizer was added, the decrease of $H_2O_2$ concentration in slurry became slower. Even though adding $H_2O_2$ in slurry after bead milling lead to better stability than in advance of bead milling, it had a lower dispersibility.

• Journal of the Korean Society of Propulsion Engineers
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• v.25 no.2
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• pp.110-118
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• 2021

In a liquid rocket engine system, the flow of oxidizer into the combustion chamber is controlled by the main oxidizer shut-off valve. When the valve is closed, the oxidizer flows via the recirculation line, not into the combustion chamber. In this situation, the measured pressure could be much higher than a design value because of the water hammer phenomenon. In this paper, the experiments on the water hammer in the recirculation line with different initial conditions were conducted in order to study the pressure wave produced in each case. According to the experimental results, characteristics of the pressure wave in the recirculation line depend on the initial condition. To be specific, the pressure surge is maximized in case that the shock is condensation-oriented in the end of the recirculation line.

• Journal of the Korean Society for Aeronautical & Space Sciences
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• v.45 no.11
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• pp.989-997
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• 2017

We study opening transient responses of a self-sustainable poppet valve, which is usually used for the main oxidizer shut-off valve of liquid rocket engines. In order to perform numerical analysis, a pneumatic supply system was simulated as an orifice with a diameter of 3.2 mm and the equations of motion of valve moving part were derived. For the validation of the study, a comparison of numerical predictions and experimental results has been done. As one of the practical applications of this study, the employment of an orifice in a high pneumatic pressure has been presented to control the valve opening time.

• 한국연소학회:학술대회논문집
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• 2002.06a
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• pp.185-191
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• 2002

The influence of N2 addition on soot formation, flame temperature and NOx emissions is investigated experimentally with methane fuel co-flow diffusion flames. The motivation of the present investigation is the differences in NOx reduction reported between fuel-side and oxidizer-side introduction of N2. To determine the influence of dilution alone, fuel was diluted with nitrogen while keeping the adiabatic flame temperature fixed by changing the temperature of the reactants. And to see the thermal effect only, air was supplied at different temperature without N2 addition. N2 addition into fuel side suppressed the soot formation than the case of oxidizer-side, while flame temperature enhanced the soot formation almost linearly. These results reveals the relative influences of the thermal, concentration effects of N2 additives on soot formation In accordance with experimental study, numerical simulation using CHEMKIN code was carried out to compare the temperature results with those acquired by CARS measurement, and we could find that there is good agreement between those results. Emission test revealed that NOx emissions were affected by not only flame temperature but also N2 addition.