• Title/Summary/Keyword: oxide layer formation

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Suppression of Macrosteps Formation on SiC Wafer Using an Oxide Layer (산화막을 이용한 SiC 기판의 macrostep 형성 억제)

  • Bahng, Wook;Kim, Nam-Kyun;Kim, Sang-Cheol;Song, Geun-Ho;Kim, Eun-Dong
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2001.07a
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    • pp.539-542
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    • 2001
  • In SiC semiconductor device processing, it needs high temperature anneal for activation of ion implanted dopants. The macrosteps, 7~8nm in height, are formed on the surface of SiC substrates during activation anneal. We have investigated the effect of thermally-grown SiO$_2$layer on the suppression of macrostep formation during high temperature anneal. The cap oxide layer was found to be efficient for suppression of macrostep formation even though the annealing temperature is as high as the melting point of SiO$_2$. The thin cap oxide layer (10nm) was evaporated during anneal then the macrosteps were formed on SiC substrate. On the other hand the thicker cap oxide layer (50nm) remains until the anneal process ends. In that case, the surface was smoother and the macrosteps were rarely formed. The thermally-grown oxide layer is found to be a good material for the suppression of macrostep formation because of its feasibility of growing and processing. Moreover, we can choose a proper oxide thickness considering the evaporate rate of SiO$_2$at the given temperature.

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Effect of the Formation of an Initial Oxide Layer on the Fabrication of the Porous Aluminium Oxide (초기 산화 피막의 형성이 다공성 알루미나 막 제작에 미치는 영향)

  • Park, Young-Ok;Kim, Chul-Sung;Kouh, Tae-Joon
    • Journal of the Korean Magnetics Society
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    • v.18 no.2
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    • pp.79-83
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    • 2008
  • We have investigated the effect of the formation of an initial oxide layer on the fabrication of the porous aluminium oxide. The porous aluminium oxide was fabricated by two-step anodization process with a electropolished aluminium foil. Before the first anodization step, the initial oxide layer with thickness of 10 nm was formed under the applied voltage of 1 V and later the anodization was continued under 40 V using oxalic acid solution. With the formation of the initial oxide layer, the anodization process was stable and the anodization current was constant throughout the process. In case of the absence of the initial oxide layer, the anodization was very unstable and the continuous increase in the anodization current was observed. This indicates the formation of the initial oxide layer on the aluminium surface prevents the burning of the surface due to the nonuniform distribution of the applied electric field, and allows the stable anodization process required for the porous aluminium oxide.

Experimental Simulation of Iron Oxide Formation on Low Alloy Steel Evaporator Tubes for Power Plant in the Presence of Iron Ions

  • Choi, Mi-Hwa;Rhee, Choong-Kyun
    • Bulletin of the Korean Chemical Society
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    • v.30 no.11
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    • pp.2577-2583
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    • 2009
  • Presented are the formation of iron oxide layers on evaporator tubes in an actual fossil power plant operated under all volatile treatment (AVT) condition and an experimental simulation of iron oxide formation in the presence of ferrous and ferric ions. After actual operations for 12781 and 36326 hr in the power plant, two iron oxide layers of magnetite on the evaporator tubes were found: a continuous inner layer and a porous outer layer. The experimental simulation (i.e., artificial corrosion in the presence of ferrous and ferric ions at 100 ppm level for 100 hr) reveals that ferrous ions turn the continuous inner oxide layer on tube metal to cracks and pores, while ferric ions facilitate the production of porous outer oxide layer consisting of large crystallites. Based on a comparison of the oxide layers produced in the experimental simulation with those observed on the actually used tubes, we propose possible routes for oxid layer formation schematically. In addition, the limits of the proposed corrosion routes are discussed in detail.

Friction Transition Diagram Considering the Effects of Oxide Layer Formed on Contact Parts of TiN Coated Ball and Steel Disk in Sliding (미끄럼운동시 TiN코팅볼과 스틸디스크의 미끄럼접촉면에 형성되는 산화막의 영향을 고려한 마찰천이선도 작성에 대한 연구)

  • Cho, Chung-Woo;Park, Dong-Shin;Lee, Young-Ze
    • Transactions of the Korean Society of Mechanical Engineers A
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    • v.27 no.3
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    • pp.335-342
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    • 2003
  • In this study, the effects of oxide layer formed on the contact parts of TiN coated ball and steel disk in sliding are investigated. Also wear mechanism to from the oxide layer and the characteristics of the oxide layer formation are investigated. AISI 52100 steel ball is used for the substrate of coated ball specimens. Two types of coated ball specimens were prepared by depositing TiN coating with 1 and 4 ${\mu}{\textrm}{m}$ in coating thickness. AISI 1045 steel is used for the disk type counter-body. To investigate the effect of oxide layer on the contact parts of the two materials, the tests were performed both in air for forming oxide layer on the contact parts and in nitrogen environment to avoid oxidation. And to study the effects of surface roughness of counter-body, TiN coating thickness and contact load of sliding test on the characteristics of oxide layer formation on counter-body, various tests were carried out. From the results, the friction characteristics between the two materials was predominated by iron oxide layer that formed on wear track on counter-body and this layer caused the high friction. And the formation rate of the oxide layer on wear track increased as the real contact area between the two materials increased as the contact load increased, the TiN coating thickness decreased and the surface of counter-body smoothened.

Friction transition diagram considering the effects of oxide layer formed on contact parts of TiN coated ball and steel disk in sliding (TiN코팅된 볼과 스틸디스크의 미끄럼운동 시 접촉면에 형성되는 산화막의 영향을 고려한 마찰천이선도 작성에 대한 연구)

  • 조정우;박동신;임정순;이영제
    • Proceedings of the Korean Society of Tribologists and Lubrication Engineers Conference
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    • 2001.11a
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    • pp.109-116
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    • 2001
  • In this study, the effects of oxide layer formed on the contact parts of TiN coated ball and steel disk in sliding are investigated. Also wear mechanism to form the oxide layer and the characteristics of the oxide layer formation are investigated. AIS152100 steel ball is used for the substrate of coated ball specimens. Two types of coated ball specimens were prepared by depositing TiN coating with 1 and 4um in coating thickness. AISI1045 steel is used for the disk type counter-body. To investigate the effect of oxide layer on the contact parts of the two materials, the tests were performed both in ambient for forming oxide layer on the contact parts and in nitride environment to avoid oxidation. And to study the effects of surface roughness of counter-body, TiN coating thickness and contact load of sliding test on the characteristics of oxide layer formation on counter-body, various tests were carried out. From the results, the friction characteristics between the two materials was predominated by iron oxide layer that formed on wear track on counter-body and this layer caused the high friction. And the formation rate of the oxide layer on wear track increased as the real contact area between the two materials increased as the contact load increased, the TiN coating thickness decreased and the surface of counter-body smoothened.

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Effect of Cr/Ti/Al Elements on High Temperature Oxidation Behavior of a Ni-Based Superalloy with Thermal Exposure (고온 노출 니켈기 초내열합금 터빈 블레이드의 Cr/Ti/Al 성분이 고온 산화에 미치는 영향)

  • Byung Hak Choe;Sung Hee Han;Dae Hyun Kim;Jong Kee Ahn;Jae Hyun Lee;Kwang Soo Choi
    • Korean Journal of Materials Research
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    • v.33 no.2
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    • pp.77-86
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    • 2023
  • High-temperature oxidation of a Ni-based superalloy was analyzed with samples taken from gas turbine blades, where the samples were heat-treated and thermally exposed. The effect of Cr/Ti/Al elements in the alloy on high temperature oxidation was investigated using an optical microscope, SEM/EDS, and TEM. A high-Cr/high-Ti oxide layer was formed on the blade surface under the heat-treated state considered to be the initial stage of high-temperature oxidation. In addition, a PFZ (γ' precipitate free zone) accompanied by Cr carbide of Cr23C6 and high Cr-Co phase as a kind of TCP precipitation was formed under the surface layer. Pits of several ㎛ depth containing high-Al content oxide was observed at the boundary between the oxide layer and PFZ. However, high temperature oxidation formed on the thermally exposed blade surface consisted of the following steps: ① Ti-oxide formation in the center of the oxide layer, ② Cr-oxide formation surrounding the inner oxide layer, and ③ Al-oxide formation in the pits directly under the Cr oxide layer. It is estimated that the Cr content of Ni-based superalloys improves the oxidation resistance of the alloy by forming dense oxide layer, but produced the σ or µ phase of TCP precipitation with the high-Cr component resulting in material brittleness.

Transparent Conducting Zinc-Tin-Oxide Layer for Application to Blue Light Emitting-diode

  • Kim, Do-Hyeon;Kim, Gi-Yong
    • Proceedings of the Korean Vacuum Society Conference
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    • 2014.02a
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    • pp.346.2-346.2
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    • 2014
  • To use the GaN based light-emitting diodes (LEDs) as solid state lighting sources, the improvement of light extraction and internal quantum efficiency is essential factors for high brightness LEDs. In this study, we suggested the new materials system of a zinc tin oxide (ZTO) layer formed on blue LED epi-structures to improve the light extraction. ZTO is a representative n-type oxide material consisted of ZnO and SnO system. Moreover, ZTO is one of the promising oxide semiconductor material. Even though ZTO has higher chemical stability than IGZO owing to its SnO2 content this has high mobility and high reliability. After formation of ZTO layer on p-GaN layer by using the spin coating method, structural and optical properties are investigated. The x-ray diffraction (XRD) measurement results show the successful formation of ZTO. The photoluminescence (PL) and absorption spectrum shows that it has 3.6-4.1eV band gap. Finally, the light extraction properties of ZTO/LED chip using electroluminescence (EL) measurement were investigated. The experimental and theoretical analyses were simultaneously conducted.

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TEM Study on the HgCdTe/Anodic oxide/ZnS Interfaces (투과전자현미경에 의한 HgCdTe/양극산화막/ZnS 계면 특성에 관한 연구)

  • 정진원;김재묵;왕진석
    • Journal of the Korean Institute of Telematics and Electronics A
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    • v.32A no.9
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    • pp.121-127
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    • 1995
  • We have analyzed the double insulating layer consisting of anodic oxide and ZnS through TEM experiments. The use of double insulating layer for HgCdTe surface passivation is one of the promising passivation method which has been recently studied deeply and the double insulating layer is formed by the evaporation of ZnS on the top of anodic oxide layer grown in H$_{2}$O$_{2}$ electrolyte. The structure of anodic oxide layer on HgCdTe is amorphous but the structure of oxide layer after the evaporation of ZnS has been changed to micro-crystalline. The interface layer of 150.angs. thickness has been found between ZnS and anodic oxide layer and is estimated to be ZnO layer. The results of analysis on the chemical components of ZnS, the interface layer and anodic oxide layer have showed that Zn has diffused into the anodic oxide layer deeply while Hg has been significantly decreased from HgCdTe bulk to the top of oxide layer. The formation of ZnO interface layer and the change of structure of anodic oxide layer after the evaporation of ZnS are estimated to be defects or to induce the defects which might possibly affect the increase of the positive fixed charges shown in C-V measurements of HgCdTe MIS.

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Oxide Layer Analysis of Uncoated Boron Steel Sheet for Hot Stamping According to the Atmosphere Oxygen Content (비도금 핫스탬핑용 보론강판의 분위기 산소량에 따른 산화층 분석)

  • J. H. Lee;T. H. Choi;J. H. Song;G. H. Bae
    • Transactions of Materials Processing
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    • v.32 no.3
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    • pp.160-165
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    • 2023
  • As the supply of eco-friendly vehicles increases, the application rate of hot stamping components is rising to reduce vehicle weight and improve safety. Although Al-Si coated steel sheets are commonly used in hot stamping processes, their manufacturing costs are elevated due to process patents and royalties. Various hot stamping studies have been conducted to reduce these production costs. In this study, we derived a process control method for suppressing the oxide layer of hot stamping parts using uncoated boron steel sheets. Firstly, hat-shaped parts were hot stamped under atmospheric conditions to analyze the tendency of oxide layer formation by location. Then, the Gleeble system was used to observe oxide layer formation based on oxygen content under various atmospheric conditions. Finally, the oxide layer thickness was quantitatively measured using SEM images.

Formation of Amorphous Oxide Layer on the Crystalline Al-Ni-Y Alloy

  • Kim, Kang Cheol;Kim, Won Tae;Kim, Do Hyang
    • Applied Microscopy
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    • v.43 no.4
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    • pp.173-176
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    • 2013
  • The oxidation behavior of the crystallized $Al_{87}Ni_3Y_{10}$ alloy has been investigated with an aim to compare with that of the amorphous $Al_{87}Ni_3Y_{10}$ alloy. The oxidation at 873 K occurs as follows: (1) growth of an amorphous aluminum-yttrium oxide layer (~10 nm) after heating up to 873 K; and (2) formation of $YAlO_3$ crystalline oxide (~220 nm) after annealing for 30 hours at 873 K. Such an overall oxidation step indicates that the oxidation behavior in the crystallized $Al_{87}Ni_3Y_{10}$ alloy occurs in the same way as in the amorphous $Al_{87}Ni_3Y_{10}$ alloy. The simultaneous presence of aluminum and yttrium in the oxide layer significantly enhances the thermal stability of the amorphous structure in the oxide phase. Since the structure of aluminum-yttrium oxide is dense due to the large difference in ionic radius between aluminum and yttrium ions, the diffusion of oxygen ion through the amorphous oxide layer is limited thus stabilizing the amorphous structure of the oxide phase.