• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2006년도 하계학술대회 논문집 Vol.7
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• pp.571-572
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• 2006

Tungsten CMP needs interconnect of semiconductor device ULSI chip and metal plug formation, CMP technology is essential indispensable method for local planarization. This Slurry development also for tungsten CMP is important, slurry of metal wiring material that is used present is depending real condition abroad. It is target that this research makes slurry of efficiency that overmatch slurry that is such than existing because focus and use colloidal silica by abrasive particle to internal production technology development. Compared selectivity of slurry that is developed with competitor slurry using 8" tungsten wafer and 8" oxide wafer in this experiment. And removal rate measures about density change of $H_2O_2$ and Fe particle. Also, corrosion potential and current density measure about Fe ion and Fe particle. As a result, selectivity find 83:1, and expressed similar removal rate and corrosion potential and current density value comparing with competitor slurry.

• Advances in materials Research
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• 제6권3호
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• pp.233-243
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• 2017

This paper describes an investigation on the effect of using three different filler metals on fatigue behavior of mechanical structures welded. The welding is carried out on the steel A510AP used for the manufacture of gas cisterns and pipes. The welding process used is manual welding with coated electrodes and automatic arc welding. Compact tension CT50 specimen has been used. The three zones of welded joint; filler metal FM, heat affected zone HAZ and base metal BM have been investigated. The results show that the crack growth rate CGR is decreasing respectively in BM, FM and HAZ; however, this variation decreases when stress intensity factor SIF increases. For low values of SIF, the CGR is inferior in the over-matched filler metal of which the value of mismatch M is near unity, but for high values of M the CGR is superior, and the effect of the over-matching on CGR becomes negative. No deviation of the crack growth path has been noticed.

• 한국압력기기공학회 논문집
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• 제16권1호
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• pp.100-109
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• 2020

Pipelines subjected to ground movement would be easily exposed to large-scale deformation. Since such deformations may cause the pipeline failure, it is important to ensure the safety of pipelines in various operation conditions. However, crack in weld metal have been considered as one of the main causes that can deteriorate the structural integrity of the pipeline. For this reason, the structural integrity of the pipe containing the crack in the weld should be obtained. In order to assess cracked pipe, J-integral and crack-tip opening displacement(CTOD) have been applied widely as the elastic-plastic fracture mechanics parameters representing crack driving force. In this study, engineering solutions to calculate the J-integral and CTOD of pipes with a circumferential outer surface crack in the weld are proposed. For this purpose, 3-dimensional elastic-plastic finite element(FE) analyses have been performed considering the effect of overmatch and width of weld. The shape of the weld was simplified to I-groove, and axial displacement was employed as for loading condition. Based on FE results, the effects of crack size, material properties and width of weldment on J-integral and CTOD were investigated. Additionally, the J-integral and CTOD for I-groove were compared with those for V-groove to examine the effects of the weld shape, and a proportionality coefficient of J-integral and CTOD was calculated from the results of this paper.