• Title/Summary/Keyword: output thickness

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Fabrication of silicon piezoresistive pressure sensor for a biomedical in-vivo measurements (생체 in-vivo 측정용 실리콘 압저항형 압력센서의 제조와 그 특성)

  • Bae, Hae-Jin;Son, Seung-Hyun;Choi, Sie-Young
    • Journal of Sensor Science and Technology
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    • v.10 no.3
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    • pp.148-155
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    • 2001
  • A pressure sensor on the tip of a catheter which is utilized to measure the in-vivo pressure in a human body was fabricated and the characteristic of the pressure sensor as measured. To fit into a catheter with 1 mm caliber, samples of $150\;{\mu}m$(thickness) ${\times}$ (600, 700, 800, 900, 1000) ${\mu}m$(width) ${\times}2\;mm$(length) was fabricated. The thicker face with $450\;{\mu}m$ thickness of SDB wafer was made thin to $134\;{\mu}m$ thickness using KOH etchant and it made possible to fabricate sensor cell with the width shorter than 1 mm. Different to the whitstone bridge sensor, we formed one piezoresistor and one reference resistor in sensor. Therefore there are possibilities of reduction of the sensitivity, then by using the simulation tool ANSYS 5.5.1, the location and the type of the piezoresistor was optimized. Another piezoresistor type of sensor which contain one longitudinal and one transverse piezoresistor was fabricated at the same time, but the sensitivity was not improved very much. To get the output versus the pressure, a constant current source and a implementation amplifier was used. As a result, the maximum sensitivity of the sensor with one piezoresistor was $1.6\;{\mu}V/V/mmHg$.

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The Evaluation and Fabrication of Photoconductor Sensor for Quality Assurance of Radiation Therapy Devices (방사선치료기기 정도관리를 위한 광도전체 센서 제작 및 평가)

  • Kang, Sang Sik;Noh, Sung Jin;Jung, Bong Jae;Noh, Ci Chul;Park, Ji Koon
    • Journal of the Korean Society of Radiology
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    • v.10 no.8
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    • pp.565-569
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    • 2016
  • Recently, a use of linear accelerator with a multi-leaf collimator(MLC) for radiation therapy is increasing. The importance of quality assurance (QA) for the linear accelerator is emphasized as the side effects of the inaccurate delivery of the radiation beam has been increased according to the high dose irradiation technique. In this study, The $HgI_2$ and $PbI_2$ photoconductor layer samples of $400{\mu}m$ thickness were fabricated using sedimentation method among particle-in-binder technology. From the fabricated samples, the electrical properties(dark current, output current, response properties and linearity) were investigated. From the experimental results, $HgI_2$ has good charge signal generation and linearity. Finally, from the signal response results about various thickness of $HgI_2$ sensor, the signal creation efficiency of $400{\mu}m$ thickness of $HgI_2$ sensor has the highest value and the excellent reproducibility below ${\pm}2.5%$.

I-V Characteristics of a Methanol Sensor for Direct Methanol fUel Cell(DMFC) as a Function of Deposited Platinum(Pt) Thickness (직접 메탄올 연료전지용 메탄올 센서의 백금 두께의 변화에 따른 전류-전압 특성 변화)

  • Yang, Jin-Seok;Kim, Seong-Il;Kim, Chun-Keun;Park, Jung-Ho
    • Journal of the Microelectronics and Packaging Society
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    • v.14 no.1
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    • pp.49-53
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    • 2007
  • The direct methanol fuel cell (DMFC) is a promising power source for portable applications due to many advantages such as simple construction, compact design, high energy density, and relatively high energy-conversion efficiency. In this work, an electrochemical methanol sensor for monitoring the methanol concentration in direct methanol fuel cells was fabricated using a thin composite nafion membrane as the electrolyte. We have analyzed the I-V characteristic of the fabricated methanol sensor as a function of methanol concentration, catalyst electrode and platinum(Pt) thickness. The fabricated sensor was analyzed by I-V measurement with various methanol concentration. When we measured the sensor characteristics with 10nm Pt and at 1V, the current value was $1.30{\times}10^{-6}A,\;1.96{\times}10^{-6}A\;and\;2.80{\times}10^{-6} A$ for three methanol concentration of 1M, 2M and 3M, respectively. When the methanol concentration was fixed at 2M, the current value of the fabricated device with Pt layers of 5, 10 and 15 nm thickness was $3.06{\times}10^{-6}A,\;1.96{\times}10^{-6}A\;and\;1.00{\times}10^{-6}A$, respectively. These results lead us to the conclusion that when the methanol concentration increases, the output current increases and when the catalyst electrode become thinner, the current increase more. It showed that, the thinner the catalyst electrode, the more electrochemistry become activation.

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The Optimum Selection and Drawing Output Program Development of Shell & Tube Type Oil Cooler (원통다관 형 오일냉각기의 최적선정 및 도면 출력 프로그램 개발)

  • Lee, Y.B.;Ko, J.M.;Kim, T.S.
    • Proceedings of the KSME Conference
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    • 2007.05b
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    • pp.2609-2614
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    • 2007
  • Shell & Tube type Oil Cooler is widely used for hydraulic presses, die casting machines, generation equipments, machine tools and construction heavy machinery. Temperature of oil in the hydraulic system changes viscosity and thickness of oil film. They have a bad effect to performance and lubrication of hydraulic machinery, so it is important to know exactly the heat exchanging efficiency of oil cooler for controlling oil temperature. But most Korean manufacturers do not have test equipment for oil cooler, so they cannot carry out the efficiency test of oil cooler and it is impossible to verify its performance. This paper includes information of construction of necessary utilities for oil cooler test and design and manufacture of test equipment. One can select the optimum product by obtaining performance data through tests of various kinds of oil coolers. And also the paper developed a program which can be easily used for design of 2D and 3D drawings of oil cooler.

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On Extratropical Transition of Tropical Cyclone MINDULLE (태풍 민들레의 온대저기압화 과정에 대하여)

  • Kwon, H. Joe;Kim, Ji-Young
    • Atmosphere
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    • v.15 no.1
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    • pp.17-25
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    • 2005
  • A significant number of tropical cyclones move into the midlatitudes and go through transformation procedure into extratropical cyclones. This process is generally referred to as extratropical transition of the tropical cyclone. In this study, MIDULLE(0407) case is selected. A thorough analysis is made using the GDAPS analysis data and MTM (Moving-nest Typhoon Model) model output. It is found that during the extratropical transition an important dynamics in the environmetal flow field occurs in which colder, drier (warm, moist) air penetrates in the western (eastern) quadrant of MINDULLE's outer circulation, which in turn initiates an asymmetry in the distribution of wind and temperature of the tropical cyclone. Simulated MTM result also reveals similar properties as in GDAPS analysis data. MTM result shows the gradual transition to the asymmetric distribution of wind and thickness as the extratropical transition proceeds. It is also found that the warm core disappears during the extratropical transition stage. Also, vortex tube is shown tilting towards the west during the transition. And the precipitation expands poleward of the center and the maximum precipitation appears to the left of MINDULLE which is consistent to the observations.

Characteristic analysis of GaN-based Light Emitting Diode(LED) (GaN 기반 발광 다이오드(LED)의 특성 분석)

  • Lee, Jae-Hyun;Yeom, Kee-Soo
    • Proceedings of the Korean Institute of Information and Commucation Sciences Conference
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    • 2012.05a
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    • pp.686-689
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    • 2012
  • In this paper, the GaN-based LED characteristics are analyzed using ISE-TCAD. The LED consists of GaN barriers, active region of InGaN quantum well, AlGaN EBL(Electron Blocking Layer) and AlGaN HBL(Hole Blocking Layer) on GaN buffer layer. The output power characteristics of LED considering Auger recombination rate, thickness of quantum well and number of quantum wells are analyzed and some criteria for the design of LED are proposed.

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Superconducting Strip Ion Detectors for Time-of-flight Mass Spectrometer

  • Zen, N.;Suzuki, K.;Shiki, S.;Ukibe, M.;Koike, M.;Casaburi, A.;Ejrnaes, M.;Cristiano, R.;Ohkubo, M.
    • Progress in Superconductivity
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    • v.14 no.2
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    • pp.92-95
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    • 2012
  • Superconducting detectors are promising as ion detectors for time-of-flight mass spectrometers (TOF MS). They can achieve mass-independent detection efficiency even for macromolecular bombardments, because output signals are produced through the deposited kinetic energy at ion impact instead of secondary electron emission that is the ion detection mechanism of conventional microchannel plate (MCP) detectors or secondary electron multipliers (SEM). Among the superconducting detectors, the superconducting strip ion detectors (SSIDs), which consist of several hundreds of superconducting lines with a width of a few hundreds nm and a thickness of a few tens of nm, have a fast response time of less than 1 ns. Inherently, the response time of SSIDs is determined by kinetic inductance, so that it was difficult to realize a fast SSID with a large detection area. However, we succeeded in realizing the detector size up to $5{\times}5mm^2$ without response time degradation by using a parallel configuration.

Numerical Investigation on Propagation Characteristics of Novel Grating-Assisted MMI Coupler (새로운 격자 구조형 다중모드 간섭 결합기의 전파특성에 관한 수치 해석적 고찰)

  • Ho, Kwang-Chun
    • Journal of the Institute of Electronics Engineers of Korea SD
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    • v.45 no.11
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    • pp.29-34
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    • 2008
  • The propagation characteristics of novel grating-assisted multimode interference (GA-MMI) coupler are explicitly and theoretically investigated by using longitudinal modal transmission-line theory (L-MTLT). The coupling efficiency of GA-MMI coupler is evaluated along the variation of grating thickness and duty cycle, and the spectrum is analyzed numerically. The numerical results reveal that the coupling length and the efficiency of $2{\times}2$ GA-MMI coupler along the variation of grating structure have low tolerance and the bandwidth varies dramatically along the output states.

Vibration analysis of characteristics and valveless Type Piezoelectric micro-pump (VALVELSS 압전펌프 진동 해석 및 특성)

  • Lim, Jong-Nam;Oh, Jin-Heon;Lim, Kee-Joe;Kim, Hyun-Hoo
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2009.06a
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    • pp.185-185
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    • 2009
  • Micropump is very useful component in micro/nano fluidics and bioMEMS applications. Using the flexural vibration mode of PZT bar, a piezopump is successfully made. The PZT bar is polarized with thickness direction. The proposed structure for the piezo-pump consists of an input and an output port, piezoelectric ceramic actuator, actuator support, diaphragm. The traveling flexural wave along the bar is obtained by dividing two standing waves which are temporally and spatially phase shifted by 90 degrees from each other. Fluid is drawn into a forming chamber, eventually the forming chamber closes trapping the fluid therein. The finite elements analysis on the proposed pump model is carried out to verify its operation principle and design by the commercial FEM software. Components of piezopump were made, assembled, and tested to validate the concepts of the proposed pump and confirm the simulation results. The performance of the proposed piezopump the highest pressure level of 83.4kHz.

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The Fabrication of Chromium Nitride Thin-Film Type Pressure Sensors for High Pressure Application and Its Characteristics (고압용 코롬질화박막형 압력센서의 제작과 그 특성)

  • 정귀상;최성규;서정환;류지구
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.14 no.6
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    • pp.470-474
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    • 2001
  • This paper describes the fabrication and characteristics of CrN thin-film type pressure sensors, in which the sensing elements were deposited on SuS. 630 diaphragm by DC reactive magnetron sputtering in an argon-nitride atmosphere(Ar-(10%)N$_2$). The optimized condition of CrN thin-film sensing elements was thickness range of 3500$\AA$ and annealing condition(300$\^{C}$, 3 hr) in Ar-10%N$_2$ deposition atmosphere. Under optimum conditions, the CrN thin-films for strain gauges is obtained a high resistivity, ρ=1147.65 $\mu$Ωcm, a low temperature coefficient of resistance, TCR=186ppm/$\^{C}$ and a high temporal stability with a good longitudinal, 11.17. The output sensitivity of fabricated CrN thin-film type pressure sensors is 2.36 mV/V, 4∼20nA and the maximum non-linearity is 0.4%FS and hysteresis is less than 0.2%FS.

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