• Title/Summary/Keyword: orientation target

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Growth of Large Area BSTO Thin Films using Pulsed Laser Deposition (펄스레이저 증착법을 이용한 대면적 BSTO 박막의 성장)

  • Kang, Dae-Won;Kwak, Min-Hwan;Kang, Seong-Beom;Paek, Mun-Cheol;Choi, Sang-Kuk;Kim, Sung-Il;Ryu, Han-Cheol;Kim, Ji-Seon;Jeong, Se-Young;Chung, Dong-Chul;Kang, Kwang-Yong;Lee, Beong-Young
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2009.06a
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    • pp.249-249
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    • 2009
  • We have grown large area BSTO($(Ba_{1-x}Sr_x)TiO_3$) thin films (x=0.4) on 2 inch diameter MgO (001) single crystal substrates using a pulse laser deposition(PLD) system. Substrate temperature and oxygen pressure in the deposition chamber, and the laser optics for ablating a target have been controlled to obtain the uniform thickness and preferred orientation of the films. Results of x-ray diffraction and rocking curve analysis revealed that the BSTO films were grown on MgO substrates with a preferred orientation (002), and the full width half maximum of the rocking curve was measured to be 0.86 degree at optimum condition. Roughness of the films have been measured to be $3.42{\AA}$ rms by using atomic force microscopy. We have successfully deposited the large area BSTO thin films of $4000{\AA}$ thickness on 50 mm diameter MgO substrates.

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The properties of Al-doped ZnO films deposited with RF magnetron sputtering system in various H2/(Ar + H2) gas ratios (RF 마그네트론 스퍼터링 방법을 사용해 증착된 Al이 도핑 된 ZnO 박막의 H2/(Ar + H2) 가스 비율에 따른 특성)

  • Kim, Jwa-Yeon;Han, Jung-Su
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.22 no.3
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    • pp.122-126
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    • 2012
  • The properties of Al-doped ZnO (AZO) films were investigated as a function of $H_2/(Ar+H_2)$ gas ratio using an AZO (2 wt% $Al_2O_3$) ceramic target in a radio frequency (RF) magnetron sputtering system. The deposition process was done at $200^{\circ}C$ and in $2{\times}10^{-2}$ Torr working pressure and with various ratios of $H_2/(Ar+H_2)$ gas. During the AZO film deposition process, partial $H_2$ gas affected the AZO film characteristics. The electron resistivity (${\sim}9.21{\times}10^{-4}\;{\Omega}cm$) was lowest and mobility (${\sim}17.8\;cm^2/Vs$) was highest in AZO films when the $H_2/(Ar+H_2)$ gas ratio was 2.5 %. When the $H_2/(Ar+H_2)$ gas ratio was increased above 2.5 %, the electron resistivity increased and mobility decreased with increasing $H_2/(Ar+H_2)$ gas ratio in AZO films. The carrier concentration increased with increasing $H_2/(Ar+H_2)$ gas ratio from 0 % to 7.5 %. This phenomenon was explained by reaction of hydrogen and oxygen and additional formation of oxygen vacancy. The average optical transmission in the visible light wavelength region over 90 % and an orientation of the deposition was [002] orientation for AZO films grown with all $H_2/(Ar+H_2)$ gas ratios.

Evaluation of Van Khan Tooril's castle, an archaeological site in Mongolia, by Ground Penetrating Radar (GPR을 이용한 몽고 유적지 반 칸 투리일의 성 (Van Khan Tooril's castle)의 평가)

  • Khuut, Tseedulam;Sato, Motoyuki
    • Geophysics and Geophysical Exploration
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    • v.12 no.1
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    • pp.69-76
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    • 2009
  • We report an implementation of the Ground Penetrating Radar (GPR) survey at a site that corresponds to a ruined castle. The objective of the survey was to characterise buried archaeological structures such as walls and tiles in Van Khan Tooril's Ruin, Mongolia, by 2D and 3D GPR techniques. GPR datasets were acquired in an area 10mby 9 m, with 10 cm line spacing. Two datasets were collected, using GPR with 500MHz and 800MHz frequency antennas. In this paper, we report the use of instantaneous parameters to detect archaeological targets such as tile, brick, and masonry by polarimetric GPR. Radar polarimetry is an advanced technology for extraction of target scattering characteristics. It gives us much more information about the size, shape, orientation, and surface condition of radar targets. We focused our interpretation on the strongest reflections. The image is enhanced by the use of instantaneous parameters. Judging by the shape and the width of the reflections, it is clear that moderate to high intensity response in instantaneous amplitude corresponds to brick and tiles. The instantaneous phase map gave information about the location of the targets, which appeared as discontinuities in the signal. In order to increase our ability to interpret these archaeological targets, we compared the GPR datasets acquired in two orthogonal survey directions. A good correlation is observed for the alignments of reflections when we compare the two datasets. However, more reflections appear in the north-south survey direction than in the west-east direction. This is due to the electric field orientation, which is in the horizontal plane for north-south survey directions and the horizontally polarised component of the backscattered high energy is recorded.

A Study on the Development of Information Strategic Planning for Green & Smart IT in Government-supported Research Institutes : Focused K Research Institute (정부출연 연구기관의 그린&스마트IT 정보전략계획 수립에 관한 연구: K연구원을 중심으로)

  • Cho, Sung Nam;Kim, Jae Sung;Jung, Chul Ho
    • Asia-Pacific Journal of Business Venturing and Entrepreneurship
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    • v.8 no.1
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    • pp.37-50
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    • 2013
  • Typical areas of recent changes in IT field is the progress of the Green & Smart IT. The primary purpose of this study is to establish information strategic planning for Green & Smart IT of government-supported research institutes. To this purpose, we developed the information strategic planning for Green & Smart IT environment based on the comprehensive analysis about the status of the related policy trends and relevant organizations' business. In particular, the establishment of information strategic planning was to target K research institute, a representative institute in the field of information analysis and distribution in Korea. And we developed implementation projects and long-term road-map for its effective and efficient promotion. Through the evaluation of priority testing based on their importance and viability of business to targe derived implementation projects, 12 critical implementation projects were selected. Then the target system and concrete action plan for each critical implementation project were presented. Based on the results of this study, we provide government-supported research institutes with useful implications for establishing a correct orientation for the introduction and promotion of Green & Smart IT in the future.

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The Structural and Electrical Properties of Li doped ZnO Thin Films (Li이 도핑된 ZnO 박막의 구조적 및 전기적 특성)

  • You, Gyeon-Gue;Kwon, Dae-Hyuk;Jun, Choon-Bae;Kim, Jeong-Gyoo;Park, Ki-Cheol
    • Journal of Sensor Science and Technology
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    • v.9 no.2
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    • pp.146-152
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    • 2000
  • Lithium doped zinc oxide(ZnO:Li) films are prepared by rf magnetron sputtering on Corning 7059 glass substrate using specifically designed ZnO targets containing different amount of $Li_2CO_3$ powder as the Li doping source. The structural properties of the Li doped ZnO films are investigated by XRD, SEM and AFM. The electrical properties of the ZnO:Li films are measured for various deposition conditions, such as the substrate temperature, $O_2$/Ar gas ratio and rf power. The effects of the $Li_2CO_3$ content in target and the deposition conditions on the structural and electrical properties were studied. When ZnO:Li films were sputtered at the substrate temperature of $200^{\circ}C$, $O_2$/Ar gas ratio of 100% and rf power of 100W with a target containing less than 1wt% content of $Li_2CO_3$, showed good surface morphology, strong c-axis orientation and high resistivity of more than $10^8{\Omega}cm$.

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Characteristics in the Deposition of Mn-Zn Ferrite Thin Films by Ion Beam Sputtering Using a Single Ion Source (단일 이온원을 사용하는 이온빔 스퍼터링법에 의한 Mn-Zn 페라이트 박막의 증착 기구)

  • Jo, Hae-Seok;Ha, Sang-Gi;Lee, Dae-Hyeong;Hong, Seok-Gyeong;Yang, Gi-Deok;Kim, Hyeong-Jun;Kim, Gyeong-Yong;Yu, Byeong-Du
    • Korean Journal of Materials Research
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    • v.5 no.2
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    • pp.239-245
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    • 1995
  • Mn-Zn ferrite thin films were deposited on $SiO_2(1000 \AA)/Si(100)$ by ion beam sputtering using a single ion source. A mosaic target consisting of a single crystal(ll0) Mn-Zn ferrite with a Fe metal strip on it was used. As-deposited films without oxygen gas flow have a wiistite structure due to oxygen deficiencies, which originated from the extra metal atoms sputtered from the metal strips during deposition. The as-deposited films with oxygen gas flow, however, have a spinel structure with (111) preferred orientation. The crystallization of thin films was maximized at the ion beam extraction voltage of 2.lkV, at which the deposited films are bombarded appropriately by the energetic secondary ions reflected from the target. As the extraction voltage increased or decreased from the optimum value, the crystallinity of thin films becomes poor owing to a weak and severe bombardment of the secondary ions, respectively. Crystallization due to the bombardment of the secondary ions was also maximized at the beam incidence angle of $55^{\circ}$. The as-deposited ferrite thin films with a spinel structure showed ferrimagnetism and had an in-plane magnetization easy axis.

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Crystal Structure and Electrical Transport Characteristics of ${La_{1-x}}{Sr_x}{MnO_{3-{\delta}}}$(0.19$\leq$x$\leq$0.31) Thin Films (${La_{1-x}}{Sr_x}{MnO_{3-{\delta}}}$(0.19$\leq$x$\leq$0.31) 박막의 결정구조 및 전기전도 특성)

  • Heo, H.;Lim, S.J.;Cho, N-H.
    • Korean Journal of Materials Research
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    • v.10 no.6
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    • pp.437-444
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    • 2000
  • We investigated the effect of substrate temperature, chemical composition and post-deposition heat-treatment on the crystal structure and electrical transport of $La_{1-x}Sr_xMnO_{3-{\delta}}$(0.19${\leq}x{\leq}$0.31) thin films. As-prepared $La_{1-x}Sr_xMnO_{3-{\delta}}$ films grown at $500^{\circ}C$ by sputter techniques were found to have the pseudo-tetragonal system(a/c=0.97) and a highly preferential <001> orientation. The films were changed to be of the cubic system by post-deposition annealing at around $900^{\circ}C$. A main target of $La_{0.67}Sr_{0.33}MnO_3$ as well as auxliary targets of $La_{0.3}Sr_{0.7}MnO_3$ ceramics were co-sputtered to control the chemical composition of the film. The Sr content(x) of the film ranged from 0.19 to 0.31, depending on the number of the auxiliary target. When x increased from 0.19 to 0.31, the electrical resistivity of the film decreased and the transition temperature between metal and semiconductor shifted to higher temperature. With a magnetic field of 0.18 T, the magneto-resistance ratio (MR(%) = (${\rho}_o-{\rho}_H/{\rho}_H$) of the $La_{0.69}Sr_{0.31}MnO_3$ thin film was about 390%.

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Height Determination Using Vanishing Points of a Single Camera for Monitoring of Construction Site (건설현장 모니터링을 위한 단안 카메라 기반의 소실점을 이용한 높이 결정)

  • Choi, In-Ha;So, Hyeong-Yoon;Kim, Eui-Myoung
    • Journal of Cadastre & Land InformatiX
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    • v.51 no.2
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    • pp.73-82
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    • 2021
  • According to the government's announcement of the safety management enhancement policy for small and medium-sized private construction sites, the subject of mandatory CCTV installation has been expanded from large construction sites to small and medium-sized construction sites. However, since the existing CCTV at construction sites has been used for simple control for safety management, so research is needed for monitoring of construction sites. Therefore, in this study, three vanishing points were calculated based on a single image taken with a monocular camera, and then a camera matrix containing interior orientation parameters information was determined. And the accuracy was verified by calculating the height of the target object from the height of the reference object. Through height determination experiments using vanishing points based on a monocular camera, it was possible to determine the height of target objects only with a single image without separately surveying of ground control points. As a result of the accuracy evaluation, the root mean square error was ±0.161m. Therefore, it is determined that the progress of construction work at the construction sites can be monitored through the single image taken using the single camera.

Change of crystallization and properties of YBCO thin film by phase transition of $CeO_2$ ($CeO_2$의 상전이에 따른 YBCO 박막의 결정성 및 특성의 변화)

  • Kim, Sung-Min;Lee, Sang-Yeol
    • Proceedings of the KIEE Conference
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    • 1999.07d
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    • pp.1590-1592
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    • 1999
  • We have fabricated good quality superconducting $YBa_2Cu_3O_{7-{\delta}}$ thin films on Hastelloy(Ni-Cr-Mo alloys) with $CeO_2$ buffer layers by in-situ pulsed laser deposition in a multi-target processing chamber. Using one of electrical properties of YBCO superconducting which the resistance approaches to zero dramatically on transition temperature, we have researched to make power transmission line, we have deposited YBCO thin film on flexible metallic substrate. However, it is difficult to make films on flexible metallic substrates due to both interdiffusion problem between metallic substrate and superconducting layer and non-crystallization of YBCO on amorphous substrate. From early research, two ways-using textured metallic substrate and buffer layer-were proposed to overcome theses difficulties. We have chosen $CeO_2$ as a buffer layer which has cubic structure of $5.41{\AA}$ lattice parameter and only 0.2% of lattice mismatch with $3.82{\AA}$ of a-axis lattice parameter of YBCO on (110) direction of $CeO_2$. In order to enhance the crystallization of YBCO films on metallic substrates we deposited $CeO_2$ buffer layers at varying temperature $700^{\circ}C$ to $800^{\circ}C$ and $O_2$ pressure. By X-ray diffraction, we found that each domination of (200) and (111) orientations were strongly relied upon the deposition temperature in $CeO_2$ layer and the change of the domination of orientation affects the crystallization of YBCO upper layer.

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Fabrication of PLT target and thin film formation by rf-magnetron sputtering method ($PLT(Pb_{1-x}La_{x})Ti_{1-x/4}O_{3}$ 타켓의 제조 및 rf-magnetron sputtering법으로 박막 형성)

  • Jung, J.M.;Cho, S.H.;Park, S.G.;Choi, S.Y.;Kim, K.W.
    • Journal of Sensor Science and Technology
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    • v.6 no.1
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    • pp.56-62
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    • 1997
  • Using a rf-magnetron sputtering method, highly c-axis oriented La modified $PbTiO_{3}$ (PLT) ferroelectric thin films with compositions of $(Pb_{1-x}La_{x})Ti_{1-x/4}O_{3}$, where x=0.05, x=0 and x=0.15, have been obtained on (100)MgO single crystal substrate under conditions of low gas pressure. The degree of c-axis orientation of PLT films decreases with increasing gas pressure and with increasing La contant. These films were characterized by X-ray diffraction and SEM. PLT thin films of x=0.05, 0.1 and 0.15 show a low dielectric constant of 218, 246 and 361 at 1 kHz and remanent polarization(Pr) of $9{\mu}C/cm^{2}$, $8{\mu}C/cm^{2}$ and $7{\mu}C/cm^{2}$.

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