• Journal of the Institute of Electronics Engineers of Korea SD
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• v.44 no.3 s.357
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• pp.1-5
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• 2007

SiOC films were made using the oxygen and bistrimethylsilylmethane mixed precursor. The chemical properties of SiOC films divided into three properties, organic, hybrid and inorganic depending on the flow rate ratio between oxygen and bistrimethylsilylmethane precursor. The films with organic properties decreased dielectric constant, because of pore incorporation in final materials. In this study, the porosity of SiOC films with organic properties was investigated using the Makwell-Garnett equation. The porosity of the films could be correlated with the blue shift in the infrared spectra scopy, and increased with the decreasing the dielectric constant of the film.

• Proceedings of the Korean Institute of Information and Commucation Sciences Conference
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• 2002.11a
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• pp.477-480
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• 2002

Si-O-C(-H) thin film with a tow dielectric constant were deposited on a P-type Si(100) substrate by an inductively coupled plasma chemical vapor deposition (ICPCVD). Bis-trimethylsilymethane (BTMSM, H$_{9}$C$_3$-Si-CH$_2$-Si-C$_3$H$_{9}$) and oxygen gas were used as Precursor. Hybrid type Si-O-C(-H) thin films with organic material have been generated many voids after annealing. Consequently, the Si-O-C(-H) films can be made a low dielectric material by the effect of void. The surface characterization of Si-O-C(-H) thin films were performed by SEM(scanning electron microscope). The characteristic analysis of Si-O-C(-H) thin films were performed by X-ray photoelectron spectroscopy (XPS).

• Journal of Adhesion and Interface
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• v.18 no.1
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• pp.13-24
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• 2017

In this study, nanoparticles which encapsulated hydrophobic antimicrobial compounds with 50wt% of payload and 70%of solid content were prepared. These nanoparticles could be dispersed at water as well as various medium. Water dispersible organic-inorganic (O-I) hybrid nanoparticles were first prepared using alkoxysilane-functionalized amphiphilic polymer precursors through a conventional sol-gel process. Hydrophobic antimicrobial compound, Eugenol encapsulated nanoparticles were prepared using these O-I hybrid nanoparticles through a new nanoprecipitation process. The effect of various preparation on the size of nanoparticles, amount of payload, antimicrobial activity, and release rate of encapsulated compounds was investigated. All eugenol-encapsulated O-I nanoparticles regardless of preparation condition showed the same minimal inhibitory concentration (MIC) (50mg/ml) and 99% of antimicrobial activity for every strain. Their antimicrobial activity could maintain longer than two weeks. Especially, eugenol-encapsulated O-I nanoparticles prepared using tetraethoxysilane (TEOS) exhibited the highest payload (50wt%) and the lowest release rate which was owing to higher inorganic content in the O-I nanoparticles. And these O-I nanoparticles dispersed in hexanediol (HD) showed the highest antimicrobial activity and solid content (70wt%) because HD acted as a solvent as well as a antimicrobial agent.

• Journal of the Korean Electrochemical Society
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• v.12 no.4
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• pp.335-341
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• 2009

Organic-inorganic hybrid sol-gel matrices were used as hosts for chloro (5, 10, 15, 20-tetraphenylporphyrinato) cobalt (III) (Co[TPP]Cl), a known ionophore for nitrite. The sol-gel precursor was prepared by the reaction of (3-isocyanopropyl) triethoxysilane with 1,4-butanediol. An appropriate amount of the anion-exchanger, tridodecylmethylammonium chloride (TDMAC) and the plasticizer, tributylphosphate (DBP) were used as membrane additives. On mixing with an acidic catalyst, the sol-state precursors slowly gelled, yielding a membrane in which the active components, Co[TPP]Cl and TDMAC, were encapsulated. The performances of the sol-gel membrane-based electrodes were compared to those of Co[TPP]Cl-based poly(vinyl chloride) (PVC) membrane electrodes. Membranes with a molar ratio of Co[TPP]Cl: TDMAC (1 : 0.1) showed reasonable response slopes toward nitrite. The response slopes were typically 53 mV/decade between $10^{-5.4}$ and $10^{-1.0}\;M$. Selectivities toward nitrite over hydrophilic and small anions such as chloride were somewhat inferior to those observed with PVC-based membranes, but selectivities over lipophilic anions were quite similar. Reduced asymmetry potentials due to protein adsorption were found to occur with the sol-gel matrix relative to PVC-based films when the sensors were employed as a detector in flow-through configuration.

• Journal of the Korean Vacuum Society
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• v.17 no.2
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• pp.117-121
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• 2008

The SiOC film of carbon centered system was prepared using bistrimethylsilylmethane and oxygen mixed precursor by the chemical vapor deposition. The chemical properties of the SiOC film were analyzed by the I-V measurement and FTIR spectra analysis. The main bond of $950{\sim}1200cm^{-1}$ was composed of the Si-C, Si-O-C and Si-O bonds. The leakage current of the SiOC film increased with the increasing of the carbon content, and the drift of the current was in proportion to the Si-O-C bond content. The deconvoluted data of FTIR spectra could be classified the three types such as organic, hybrid and inorganic types, and the contact angle showed the difference of three types.