• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2001년도 춘계학술대회 논문집 센서 박막재료
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• pp.57-60
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• 2001

The characterization of organic Metal/Insulator/Metal(MIM) devices were investigated from LB films. The physicochemical properties of the LB films were by UV absorption spectrum and AFM. We give pressure stimulation into organic thin films and then manufacture a device under the accumulation condition that the state surface pressure is 2, 10, 30[mN/ml The stable images are probably due to a strong interaction between the monolayer film and glass substrate. We are unable to obtain molecule resolution in images of the films but did see a marked contrast between images of the bare substrate and those with the network structure film deposited onto it.

• 한국표면공학회지
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• 제29권6호
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• pp.803-808
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• 1996

Material and electrical characteristies of copper thin films prepared by metal organic chemical vapor deposition (MOCVD) have been investigated for interconnection applications in ultra large scale integration circuits (ULSI). The copper films have been deposited a TiN substrates using a metal organic precursor, hexafluoro acetylacetonate trimethyvinylsilane copper, VTMS(hfac)Cu (I). Deposition rate, grain size, surface morphology, and electrical resistvity of the copper films have been measuredfrom samples prepared at various experimental conditions, which include substrate temperature, chamber pressure, and carrier gas flow rate. Results of the experiment showed that the electrical property of the copper films is closely related to the crystallinity of the films. Lowest electrical resistivity, $2.4{\mu}{\Omega}.cm$ was obtained at the substrate temperature of $180^{\circ}C$, but the resistivity slightly increased with increasing substrate temperature due to the carbon content along the copper grain boundaries.

• 대한전기학회:학술대회논문집
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• 대한전기학회 1993년도 하계학술대회 논문집 B
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• pp.1189-1192
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• 1993

Organic thin films were fabricated an using interelectrode capacitively coupled type plasma polymerizaion apparatus, and their optical properties were investigated. A deposition rate of styrene thin films is linearly increased, but one or vinyl-pyridine thin films is nonlinearly increased with increasing of polymerization time, pressure and monomer flow rate. The transmittance of single layer thin films is constant, but that of multi-layer appeared irregular peak with increasing of the number of layers. And then the refractive index of organic thin films is various from 1.55 to 1.65 with wavelength, the extinction coefficient indicated $10^{-3}$.

• 한국기계가공학회지
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• 제17권3호
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• pp.51-58
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• 2018

In this paper, the organic material Poly(methyl methacrylate) PMMA is used with inorganic $Al_2O_3$ to fabricate organic-inorganic multilayer barrier thin films. The organic thin films are developed using a roll-to-roll electrohydrodynamic atomization system, whereas the inorganic are grown using a roll-to-roll low-temperature atmospheric pressure atomic layer deposition system. For the first time, these two technologies are used together to develop organic-inorganic multilayer barrier thin films in atmospheric condition. The films are grown under optimized parameters and classified into three classes based on the layer structures, when the total thickness of the barrier is maintained at ~ 160 nm. All classes of barriers show good morphological, optical and chemical properties. The $Al_2O_3$ films with a low average arithmetic roughness of 1.58 nm conceal the non-uniformity and irregularities in PMMA thin films with a roughness of 5.20 nm. All classes of barriers show a notably good optical transmission of ~ 85 %. The hybrid organic-inorganic barriers show water vapor and oxygen permeation in the range of ${\sim}3.2{\times}10^{-2}g/m^2/day$ and $0.015cc/m^2/day$ at $23^{\circ}C$ and 100% relative humidity. It has been confirmed that it can be mass-produced and used as a low-cost barrier thin film in various printing electronic devices.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2009년도 춘계학술대회 논문집
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• pp.57-57
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• 2009

In this work, we carried out the variation of surface characteristics of organic polymer films by O2 plasma. The plasma diagnostics were performed by DLP(Double Langmuir Probe) and OES(Optical Emission Spectroscopy) measurements. Moreover, variation of surface characteristics were measured by AFM(Atomic Force Microscope), XPS(X-ray Photoelectron Spectroscopy), and contact angle goniometer. It was found that the etch rate of organic films was controlled by O radicals flux and dc bias voltage. And O radical density and dc bias voltage increased with increasing bias power. So, it was changed surface energy as a function of surface roughness and O/C ratio in organic films.

• 한국광학회지
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• 제12권6호
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• pp.472-478
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• 2001

가변입사각 분광타원법(Variable Angle Spectroscopic Ellipsometry)을 사용하여 유기발광소자(OLED)의 발광층인 유기박막 의 광학상수와 두께를 결정하였다. 광투과영역에서 모델링분석으로 박막의 평균두께와 굴절률 분산식을 결정하고, 광흡수영역으로 확장하여 유기막의 다층구조, 각 층의 두께와 밀도 그리고 각 파장에서의 복소굴절률을 결정하였다. 분광광도계를 사용하여 구한 투과율 스펙트럼을 가변입사각 분광타원법을 사용하여 결정한 다층구조 및 복소굴절률로 계산한 투과율 스펙트럼과 비교하여 분석의 정확성을 확인하였다.

• 한국초전도저온공학회:학술대회논문집
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• 한국초전도저온공학회 2003년도 추계학술대회 논문집
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• pp.90-92
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• 2003

Effects of organic additives on YBCO coated conductor prepared by MOD-TFA method were investigated. YBCO thin films were deposited on (100)-oriented single crystalline LaAlO$_3$substrates by conventional MOD-TFA process. The microstructures of YBCO thin films show labyrinth-like patterns. The origin of this microstructure was delineated by compositional inhomogeneity during the pyrolysis process of MOD process and it was shown that organic additives changes the microstructure and texture development of grown YBCO films

• 한국초전도ㆍ저온공학회논문지
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• 제4권1호
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• pp.13-16
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• 2002

$SrZrO_3 $resistive oxide barriers on Ag sheathed Bi2223 tapes were prepared by the sol-gel and dip coating method to reduce AC coupling loss. The performance of the dip-coated $SrZrO_3 $ thin films was evaluated in terms of bond strength by varying the Sr/Zr mol ratio and the amount of organic vehicle (ethyl cellulose and a-terpineol) additives. The bond strength of the coatings increased as the Sr/Zr ratio decreased and the amount of organic vehicle rose, respectively. It was found that the effect of organic vehicle addition was more pronounced, suggesting that the adherence of the $SrZrO_3 $ films on Bi2223 tapes was governed primarily by the amount of organic vehicle additive.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 1996년도 추계학술대회 논문집
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• pp.405-408
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• 1996

The rheological changes in sensitive materials was investigated by using QCA. Langmuir-Blodgett method was used to transfer sensitive material to the quartz crystals because of its facility to control the thickness. To develop gas sensor using quartz crystal, the rheological change of sensitive LB films were observed using the resonant resistance concept. And the rheological changes as to adsorption of organic vapours were used to analyze the response mechanism between organic vapours and sensitive LB films. We considered with resonant frequency of quartz crystal to obtain one-channel gas sensor and analytical tools of organic vapours response. In our results, we analyzed the organic vapours response by the rheological changes and mass loading as to adsorption of organic vapours.

• 대한전기학회논문지:전기물성ㆍ응용부문C
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• 제48권7호
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• pp.508-513
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• 1999

The response properties of quartz crystal coated with stearic acid LB films to organic gases were investigated by measuring the shift of resonant frequency. Stearic acid was used as a sensing material and deposited on the surface of quartz crystal using the Langmuir-Blodgett(LB) method. The effect of temperature on the quartz crystal coated with stearic acid LB films was also investigated by Scanning Maxwell-stress Microscopy(SMM). As a result, the sensitivity of the quartz crystal coated with LB films to organic gases is dependent on temperature, thickness of LB film and molecular weight of organic gas.