• Proceedings of the Korean Vacuum Society Conference
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• 2013.08a
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• pp.220-220
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• 2013

Surface-normal transmission electro-absorption modulator (EAM) are attractive for high-definition (HD) three-dimensional (3D) imaging application due to its features such as small system volume and simple epitaxial structure [1,2]. However, EAM in order to be used for HD 3D imaging system requires uniform modulation performance over large area. To achieve highly uniform modulation performance of EAM at the operating wavelength of 850 nm, it is extremely important to remove the GaAs substrate over large area since GaAs material has high absorption coefficient below 870 nm which corresponds to band-edge energy of GaAs (1.424 eV). In this study, we propose and experimentally demonstrate a transmission EAM in which highly selective backside etching methods which include lapping, dry etching and wet etching is carried out to remove the GaAs substrate for achieving highly uniform modulation performance. First, lapping process on GaAs substrate was carried out for different lapping speeds (5 rpm, 7 rpm, 10 rpm) and the thickness was measured over different areas of surface. For a lapping speed of 5 rpm, a highly uniform surface over a large area ($2{\times}1\;mm^2$) was obtained. Second, optimization of inductive coupled plasma-reactive ion etching (ICP-RIE) was carried out to achieve anisotropy and high etch rate. The dry etching carried out using a gas mixture of SiCl4 and Ar, each having a flow rate of 10 sccm and 40 sccm, respectively with an RF power of 50 W, ICP power of 400 W and chamber pressure of 2 mTorr was the optimum etching condition. Last, the rest of GaAs substrate was successfully removed by highly selective backside wet etching with pH adjusted solution of citric acid and hydrogen peroxide. Citric acid/hydrogen peroxide etching solution having a volume ratio of 5:1 was the best etching condition which provides not only high selectivity of 235:1 between GaAs and AlAs but also good etching profile [3]. The fabricated transmission EAM array have an amplitude modulation of more than 50% at the bias voltage of -9 V and maintains high uniformity of >90% over large area ($2{\times}1\;mm^2$). These results show that the fabricated transmission EAM with substrate removed is an excellent candidate to be used as an optical shutter for HD 3D imaging application.

• Korean Journal of Optics and Photonics
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• v.19 no.4
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• pp.327-333
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• 2008

In general, a lens with large NA makes image quality better. There are many kinds of cheap concave mirrors with large aperture and NA. This paper presents a method that uses a large aperture projection imaging system to enhance the image used for 3D shape measurement. This method makes it possible to enhance reflection uniformity on the object surface and increases SNR (Signal to Noise Ratio). Using a large aperture lens, it is possible to obtain a brighter image, reducing the shading nature in the image boundary, and enhancing the reflection uniformity even on woven surfaces. Because of the exorbitant cost of a large aperture projection lens larger than 150 mm in diameter, a refractive lens was exchanged with a concave mirror resulting in the same optical effect. In experiment, changing NA $0.15{\sim}0.8$, image contrast was enhanced from 46 to 1.33. Incidentally, the effect of the concave mirror was tested successfully through the experiment.

• Proceedings of the Korean Vacuum Society Conference
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• 2013.08a
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• pp.81-81
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• 2013

반도체, LCD, MEMs 등 미세 전자소자의 제작과 깊은 관련이 있는 IT 산업은 자동차 산업과 함께 세계 경제를 이끌고 있는 핵심 산업이며, 그 발전 가능성이 크다고 할 수 있다. 이 중 반도체, LCD 공정 기술에 관해서 대한민국은 세계를 선도하여 시장을 이끌어 나가고 있는 실정이다. 이들의 공정기술은 주로 높은 수율(yield)을 기반으로 한 대량 생산 기술에 초점이 맞추어져 있기 때문에, 현재와 같은 첨예한 가격 경쟁력이 요구되는 시대에서 공정 기술 개발을 통해 수율을 최대한으로 이끌어 내는 것이 현재 반도체를 비롯한 미세소자 산업이 직면하고 있는 하나의 중대한 과제라 할 수 있다. 특히 반도체공정에 있어 발전을 거듭하여 현재 20 nm 수준의 선폭을 갖는 소자들의 양산이 계획 있는데 이와 같은 나노미터급 선폭을 갖는 소자 양산과 관련된 CD (critical dimension)의 감소는 공차의 감소를 유발시키고 있으며, 패널의 양산에 있어서 생산 효율 증가를 위한 기판 크기의 대형화가 이루어지고 있다. 또한, 소자의 집적도를 높이기 위하여 높은 종횡비(aspect ratio)를 요구하는 공정이 일반화됨에 따라 단일 웨이퍼 내에서의 공정의 균일도(With in wafer uniformity, WIWU) 및 공정이 진행되는 시간에 따른 균일도(Wafer to wafer uniformity)의 변화 양상에 대한 파악을 통한 공정 진단에 대한 요구가 급증하고 있는 현실이다. 반도체 및 LCD 공정에 있어서 공정 균일도의 감시 및 향상을 위하여 박막, 증착, 식각의 주요 공정에 널리 사용되고 있는 플라즈마의 균일도(uniformity)를 파악하고 실시간으로 감시하는 것이 반드시 필요하며, 플라즈마의 균일도를 파악한다는 것은 플라즈마의 기판 상의 공간적 분포(radial direction)를 확인하여 보는 것을 의미한다. 현재까지 플라즈마의 공간적 분포를 진단하는 대표적인 방법으로는 랭뮤어 탐침(Langmuir Probe), 레이저 유도 형광법(Laser Induced Fluorescence, LIF) 그리고 광섬유를 이용한 발광분광법(Optical Emission Spectroscopy, OES)등이 있으나 랭뮤어 탐침은 플라즈마 본연의 상태에서 섭동(pertubation) 현상에 의한 교란, 이온에너지 측정의 한계로 인하여 공정의 실시간 감시에 적합하지 않으며, 레이저 유도 형광법은 측정 물질의 제한성 때문에 플라즈마 내부에 존재하는 다양한 종의 거동을 살필 수 없다는 단점 및 장치의 설치와 정렬(alignment)이 상대적으로 어려워 산업 현장에서 사용하기에 한계가 있다. 본 연구에서는 최소 50 cm에서 최대 400 cm까지 플라즈마 내 측정 거리에서 최대 20 mm 공간 분해가 가능한 광 수광 시스템 및 플라즈마 공정에서의 라디칼의 상태 변화를 분광학적 비접촉 방법으로 계측할 수 있는 발광 분광 분석기를 접목하여 플라즈마 챔버 내의 라디칼 공간 분포를 계측할 수 있는 진단 센서를 고안하고 이를 실 공정에 적용하여 보았다. 플라즈마 증착 및 식각 공정에서 형성된 박막의 두께 및 식각률과 공간 분해발광 분석법을 통하여 계측된 결과와의 매우 높은 상관관계를 확인하였다.

• Korean Journal of Remote Sensing
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• v.37 no.5_1
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• pp.1013-1027
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• 2021

Images taken with KOMPSAT-3 have additional NIR and PAN bands, as well as RGB regions of the visible ray band, compared to imagestaken with a standard camera. Furthermore, electrical and optical properties must be considered because a wide radius area of approximately 17 km or more is photographed at an altitude of 685 km above the ground. In other words, the camera sensor of KOMPSAT-3 is distorted by each CCD pixel, characteristics of each band,sensitivity and time-dependent change, CCD geometry. In order to solve the distortion, correction of the sensors is essential. In this paper, we propose a method for detecting uniform regions in side-slider-based KOMPSAT-3 images using segment-based noise analysis. After detecting a uniform area with the corresponding algorithm, a correction table was created for each sensor to apply the non-uniformity correction algorithm, and satellite image correction was performed using the created correction table. As a result, the proposed method reduced the distortion of the satellite image,such as vertical noise, compared to the conventional method. The relative radiation accuracy index, which is an index based on mean square error (RA) and an index based on absolute error (RE), wasfound to have a comparative advantage of 0.3 percent and 0.15 percent, respectively, over the conventional method.

• Fashion & Textile Research Journal
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• v.15 no.6
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• pp.985-992
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• 2013

Polytrimethylene terephthalate(PTT) offers several advantageous properties such as good tensile strength, uniformity, stiffness, toughness, UV stability, resilience, stain resistance, outstanding elastic recovery, and dyeability. The effects of annealing temperature on physical properties and the structure of PTT filaments and yarn were investigated by measuring wide-angle X-ray diffraction (WAXD), density, optical birefringence, dynamic visco elasticity, and tensile testing. The intensity of maximum tan ${\delta}$ decreased and the temperature of maximum tan ${\delta}$ shifted to a higher temperature as the annealing temperature of filaments increased; however, it shifted to a lower temperature when the annealing temperature exceeded $130^{\circ}C$. In addition, crystallinity, density and D-spacing of (010) crystal face increased as the annealing temperature increased. Optical birefringence and specific stress were almost constant up to $100^{\circ}C$ and then decreased above $130^{\circ}C$. The shrinkage of PTT filament is 0 in boiling water when annealed above $130^{\circ}C$; consequently, the use of annealed fiber above $130^{\circ}C$ can remove thermal instability when dyeing PTT fiber. In the case of yarns, the thermal stability and physical properties of yarns showed the best effect when the ply number is less than 5, twist number is less than 400tpm, and the annealing time is 20minutes.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.17 no.3
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• pp.51-58
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• 2018

In this paper, the organic material Poly(methyl methacrylate) PMMA is used with inorganic $Al_2O_3$ to fabricate organic-inorganic multilayer barrier thin films. The organic thin films are developed using a roll-to-roll electrohydrodynamic atomization system, whereas the inorganic are grown using a roll-to-roll low-temperature atmospheric pressure atomic layer deposition system. For the first time, these two technologies are used together to develop organic-inorganic multilayer barrier thin films in atmospheric condition. The films are grown under optimized parameters and classified into three classes based on the layer structures, when the total thickness of the barrier is maintained at ~ 160 nm. All classes of barriers show good morphological, optical and chemical properties. The $Al_2O_3$ films with a low average arithmetic roughness of 1.58 nm conceal the non-uniformity and irregularities in PMMA thin films with a roughness of 5.20 nm. All classes of barriers show a notably good optical transmission of ~ 85 %. The hybrid organic-inorganic barriers show water vapor and oxygen permeation in the range of ${\sim}3.2{\times}10^{-2}g/m^2/day$ and $0.015cc/m^2/day$ at $23^{\circ}C$ and 100% relative humidity. It has been confirmed that it can be mass-produced and used as a low-cost barrier thin film in various printing electronic devices.

• Proceedings of the Korean Vacuum Society Conference
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• 2013.02a
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• pp.225-225
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• 2013

Nanostructured noble metals have been attractive for their unusual optical properties and are widely utilized for various purposes. The optical properties mainly originating from collective electron oscillation can assist direct energy conversion via surface plasmon resonances. Here, we investigated the effect of surface plasmons of silver nanowires on the generation of hot electrons. It is reported that the surface plasmons of silver nanowires exhibit longitudinal and transverse modes, depending on the aspect ratio of the nanowires. In order to measure the hot electron flow through the metallic nanowires, chemically modified Au/TiO2 Schottky diodes were employed as the electric contact. The silver nanowires were deposited on a Au metal layer via the spray method to control uniformity and the amount of silver nanowire deposited. We measured the hot electron flow generated by photon absorption on the silver nanowires deposited on the Au/TiO2 Schottky diodes. The incident photon-to-current efficiency was measured a function of the photon energy, revealing two polarization modes of siliver nanowires: transverse and longitudinal modes. UV-Vis spectra exhibited two polarization modes, which are also consistent with the photocurrent measurements. Good correlation between the IPCE and UV-vis measurements suggests that hot electron measurement on nanowires on nanodiodes is a useful way to reveal the intrinsic properties of surface plasmons of nanowires.

• Journal of the Korean Institute of Telematics and Electronics D
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• v.36D no.7
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• pp.56-65
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• 1999

In this paper, a pixelated binary phase grating to generate $5{\times}5$ spots in designed using simple Genetic Algorithm(sGA) composed of selection, crossover, and mutation operators, and it can be applied for the optical interconnection. So as to adapt that GA is a robust and efficient schema, a chromosome is coded as a binary integer of length $32{\times}32$, the ranking method for decreasing the stochastic sampling error is performed, and a single-point crossover having $16{\times}16$ block size is used. A designed grating when the probabillty of mutation is 0.001, the probability of crossover is 0.75 and the population size is 300 has a 74.7[%] high diffraction efficiency and a $1.73{\times}10^{-1}$ uniformity quantitatively.

• Proceedings of the Materials Research Society of Korea Conference
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• 2012.05a
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• pp.88.1-88.1
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• 2012

Silicon nanowires (SiNWs), due to their unusual quantum-confinement effects that lead to superior electrical and optical properties compared to those of the bulk silicon, have been widely researched as a potential building block in a variety of novel electronic devices. The conventional means for the synthesis of SiNWs has been the vapor-liquid-solid method using chemical vapor deposition; however, this method is time consuming, environmentally unfriendly, and do not support vertical growth. As an alternate, the electroless etching method has been proposed, which uses metal catalysts contained in aqueous hydrofluoric acids (HF) for vertically etching the bulk silicon substrate. This new method can support large-area growth in a short time, and vertically aligned SiNWs with high aspect ratio can be readily synthesized with excellent reproducibility. Nonetheless, there still are rooms for improvement such as the poor surface characteristics that lead to degradation in electrical performance, and non-uniformity of the diameter and shapes of the synthesized SiNWs. Here, we report a facile method of SiNWs synthesis having uniform sizes, diameters, and shapes, which may be other than just cylindrical shapes using a modified nanosphere lithography technique. The diameters of the polystyrene nanospheres can be adjustable through varying the time of O2 plasma treatment, which serve as a mask template for metal deposition on a silicon substrate. After the removal of the nanospheres, SiNWs having the exact same shape as the mask are synthesized using wet etching technique in a solution of HF, hydrogen peroxide, and deionized water. Different electrical and optical characteristics were obtained according to the shapes and sizes of the SiNWs, which implies that they can serve specific purposes according to their types.

• Korean Journal of Optics and Photonics
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• v.16 no.3
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• pp.196-200
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• 2005

A 40 channel arrayed-waveguide grating (AWG) filter operating in C-band and L-band wavelength regions has been fabricated using PLC (Planar Lightwave Circuit) processes with 0.75 refractive index difference. Its design was optimized for matching the center wavelength with the ITU-recommended wavelength. The characteristics of the fabricated C-band AWG are as follows; average insertion loss < 2.5 dB, polarization-dependent loss < 0.3 dB, non-adjacent crosstalk >35dB, and the loss uniformity of 0.8 dB. In the L-band AWG, wavelength accuracy is below 0.02nm.