• 제목/요약/키워드: optical material

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플라즈마 화학기상 증착방식으로 성장시킨 비정질 실리콘 카바이드 박막의 열처리 효과에 관한 특성분석 (Investigation of annealing effect for a-SiC:H thin films deposited by plasma enhanced chemical vapor deposition)

  • 박문기;김용탁;최원석;윤대호;홍병유
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2000년도 하계학술대회 논문집
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    • pp.747-750
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    • 2000
  • In this work, we investigated the dependence of optical and electrical properties of amorphous hydrogenated SiC (a-SiC:H) films on annealing temperature(T$\sub$a/). The a-SiC:H films were deposited by PECVD(plasma enhanced vapor deposition) on coming glass, p-type Si(100) wafer using SiH$_4$+CH$_4$+N$_2$gas mixture. The experimental results have shown that the optical energy band gap(E$\sub$g/) of the a-SiC thin films unchanged in the range of T$\sub$a/ from 400$^{\circ}C$ to 600$^{\circ}C$. The Raman spectrum of the thin films, annealed at high temperatures, has shown that graphitization of carbon clusters and micro-crystalline silicon occurs. The current-voltage characteristics have shown good electrical properties at the annealed films.

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Sol-Gel법으로 제작된 광메모리영역 PLZT박막의 전기적 특성 (A Study on the Electrical Characteristics of Optical Memory PLZT Thin Films)

  • 최형욱;장낙원;백동수;박정흠;박창엽
    • 한국전기전자재료학회논문지
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    • 제11권1호
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    • pp.57-61
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    • 1998
  • In this study, PLZT stock solutions were prepared by Sol-Gel processing after the compositions were selected in the memory region of PLZT bulk phase diagram. PLZT solutions were deposited on the ITO glass substrate by spin-coating method. The thin films were annealed by rapid thermal processing. The electric characteristics, hysteresis loop, C-V characteristics of thin films in the memory region were measured in order to investigate the electrical characteristics of PLZT thin films. In selected compositions the decrease in Zr/Ti ratio led to an increase in dielectric constant and the decrease in remanent polarization and coercieve field which brought about slim hysteresis loop.

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광패키징용 마이크로 솔더범프의 형성과 Contact Pad용 UBM간의 계면 반응 특성에 관한 연구 (A Study on Bumping of Micro-Solder for Optical Packaging and Reaction at Solder/UBM interface)

  • 박종환;이종현;김용석
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2001년도 추계학술대회 논문집
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    • pp.332-336
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    • 2001
  • In this study, the reaction at UBM(Under Bump Metallurgy) and solder interface was investigated. The UBM employed in conventional optical packages, Au/Pt/Ti layer, were found to dissolve into molten Au-Sn eutectic solder during reflow soldering. Therefore, the reaction with different diffusion barrier layer such as Fe, Co, Ni were investigated to replace the conventional R layer. The reaction behavior was investigated by reflowing the solder on the pad of the metals defined by Cr layer for 1, 2, 3, 4, and 5 minutes at 330$^{\circ}C$. Among the metals, Co was found to be most suitable for the diffusion barrier layer as the wettability with the solder was reasonable and the reaction rate of intermetallic formation at the interface is relatively slow.

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플라즈마 중합법에 의한 유기 박막의 광학 특성에 관한 연구(I) (A Study on the Optical Properties of the Organic Thin Films by Plasma Polymerization)

  • 최충석;정윤;이덕출;박구범;박상현;박복기
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 1992년도 춘계학술대회 논문집
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    • pp.26-29
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    • 1992
  • In this study, We made use of interelectrode capacitively coupled type plasma polymerization apparatus in order to make th organic optical thin films. We adopted in Benzen. Styrene, which have optical function in the organic world. It is manufactured polymerization thin films and examined optics properties by it respectively. We have known that the refractive index decreased as discharging power increased. At the middle wave length as 550[nm], the refractive index of Styrene is smaller than one of Benzen. Then, it is known that measured results are valid because the extinction coefficient(K) is about 10$\^$-4/ for variation of refractive index.

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RF 마그네트론 반응성 스퍼터링법으로 증착된 WO$_3$박막의 광특성 (The Optical Properties of WO$_3$Thin Films Deposited by RF Magnetron Reactive Sputtering)

  • 이동규;최영규;정귀상
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 1997년도 추계학술대회 논문집
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    • pp.339-342
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    • 1997
  • The optical properties of WO$_3$thin films deposited by RF magnetron reactive sputtering were studied. The substrate was an ITO(indium-tin-oxide) glass(100$\Omega$/ ). The optical properties are examined by different deposition conditions. RF power, substrate temperature, $O_2$concentraction. Ar flow rate, working pressure and thickness are 40~60W, 25~30$0^{\circ}C$, 10%, 54~72sccm, 5~20m7orr and 1200~2400$\AA$, respectively. All these films were colorless, light yellow and found to be amorphous in structure by X-ray diffraction analysis. When RF power, substrate temperature, $O_2$concentraction, Ar flow rate, working pressure and thickness are 40W, $25^{\circ}C$, 10%, 72sccm, 20mTorr and 2400$\AA$, respectively the values of transmittance of the WO$_3$thin films in visible region are about 80%.

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전착법으로 제조한 CdS 막의 전기 및 광학적 특성 (Electrical and Optical Properties of CdS Films prepared by Electrodeposition)

  • 권오균;임호빈
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 1990년도 추계학술대회 논문집
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    • pp.39-44
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    • 1990
  • Polycrystalline CdS films were grown on glass substrate with conducting indium tin oxide(ITO) by electrodeposition. The average size of the plate-shape grains o the CdS films was from 0.3um to 0.05um, and the adhesion to ITO was excellent. The optical band gap of the electrodeposited CdS films was in the range from 2.51eV to 2.68 eV. The optical transmittance was 80% and the electrical resistivity varied from 10$^3$ to 10$\^$5/$\Omega$-cm depending on the deposition condition.

다이아몬드 터닝가공을 이용한 광정보저장용 픽업렌즈 제작 (Pick-up Lens Manufacturing for Optical application using Diamond Turning Process)

  • 김정호;김상석
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2004년도 제6회 학술대회 논문집 일렉트렛트 및 응용기술연구회
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    • pp.47-51
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    • 2004
  • The aspherical lens are used as objective lens of optical pickup. The sample product is made before manufacturing the injection mould of lens to examine the design factor. The optimum cutting conditions of the main spindle speed, the depth of cut, the feed rate are found when we cut PMMA and PC lens sample with ultra-precision SPDT. The demanded surface roughness 10 nm Ra, aspherical form error 0.5 ${\mu}m$ P-V for aspherical lens of optical data storage device are satisfied for PMMA, but not satisfied for PC.

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열처리 조건에 따른 ZnO:Al 박막의 전기적 광학적 특성 (Electrical and Optical properties of ZnO:Al films with Heat treatment)

  • 이동진;이재형;선호정;이종인;정동수;송준태
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2007년도 하계학술대회 논문집 Vol.8
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    • pp.133-134
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    • 2007
  • We have studied the structural and electrical, optical properties of Al doped ZnO(AW) thin films which were fabricated by If reactive magnetron sputtering method with various heat treatment conditions. The heat temperatures of specimen fabrication were comning 7059 glass is $200{\sim}500^{\circ}C$ and Polyimide films are $200{\sim}350^{\circ}C$ respectively. The variations of the electrical and optical properties with heat treatment temperature and ambient were studied.

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대전입자형 디스플레이의 전기 및 광학특성 분석 (Electrical and Optical Analysis of Charged Particle type Display)

  • 김백현;김성운;황인성;김처주;김영조
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2007년도 하계학술대회 논문집 Vol.8
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    • pp.66-67
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    • 2007
  • We have developed reflective information display using opposite-charged two particles. An appropriate amount of both the yellow and the black powers are putted between the ITO patterned glass substrate separated with cell gap. The rib maintains the cell gap and prevents the interference between the pixels. When a negative voltage is applied to the upper ITO electrode, the positively charged black powder moves to the upper electrode viewing a black appearance. In case of positive voltage is applied to this electrode white particle is observed. So we analyzed the electrical and optical properties of our charged particle type display panel.

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레이저 광 노출에 따른 Ag/칼코게나이드 박막의 광학적인 특성 (Optical Properties of Ag/Chalcogenides Thin Films Exposed to Laser)

  • 김종기;박정일;정흥배;이현용
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 1999년도 추계학술대회 논문집
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    • pp.561-565
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    • 1999
  • We measured the optical properties in Ag/chalcogenide films with the exposure of 325nm-Held laser In addition we have investigated the Ag doping mechanism as considering the changes of Ag-concentration distribution and optical energy gap ( $E_{op}$ ) with Photon-dose. The "windows" characteristics of Ag thin film occur around the wavelength of 325 nm and the Ag is evaluated to be transparent, without an absorption, in the region. While the $E_{op}$ of S $b_2$ $S_3$ thin film was changed largely by an exposure of HeNe laser(632.8 nm) an exposure of HeCd laser resulted in relatively small variation of $E_{op}$ . Therefore it is thought that photon absorption at the metal layer plays an important role in Ag photodoping.on at the metal layer plays an important role in Ag photodoping.

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